弱电离大气等离子体电子能量分布函数的理论研究

使用球谐展开的方法求解玻尔兹曼方程,得到了弱电离大气等离子体(79％氮气和21％的氧气)的电子能量分布函数(EEDF).发现当约化电场较小时(E/N＜100 Td),EEDF在2-3 eV急剧下降,在此情况下,高能尾部比麦氏分布要小;当约化电场增加,E/N＞ 400 Td,分布函数趋近于麦氏分布;当约化电场进一步增加,E/N＞ 2000 Td,EEDF的高能尾部(超过200 eV)相对于麦氏分布增加,在高频场作用下,EEDF更倾向于麦氏分布.当ω》vm时,有效电子温度只依赖于E/ω,而与碰撞频率无关;当ω《vm时,有效电子温度只依赖于E/N,与微波频率无关.与一些单原子分子等离子体中电子-电子碰撞在电离度大于10-6时就会影响EEDF不同,空气等离子体中,只有当电离度大于0.1％时,电子-电子碰撞才会对EEDF有明显影响.     

约化场强对氮-氧混合气放电等离子体演化特性的影响

采用零维等离子体动力学模型,计算了不同约化场强条件下N₂/O₂放电等离子体的演化特性.结果表明,平均电子能量与约化场强有着近似的线性关系,在约化场强为100 Td时,平均电子能量约为2.6 eV、最大电子能量达35 eV;约化场强是影响电子能量函数分布的主要因素.气体放电过程结束后,振动激发态氮分子的粒子数浓度不再变化,电子激发态的氮分子、原子和氧原子的粒子数浓度达到一峰值后开始降低;放电结束后的氧原子通过复合反应生成臭氧.约化场强升高,由于低能电子减少的影响,振动激发态氮分子的粒子数浓度降低,当约化场强由50 Td增加75 Td,100 Td时,粒子数浓度由3.83×10¹¹ cm^-3降至1.98×10¹¹ cm^-3和1.77×10¹¹ cm^-3,其他粒子浓度则相应增大. 关键词： 等离子体 约化场强 粒子演化 数值模拟     

氮等离子体枪中电子输运行为的蒙特卡罗模拟

采用蒙特卡罗模拟,对氮等离子体枪的两个环形电极间的氮气辉光放电过程中电子的输运过程进行研究.计算在不同平均电场与粒子数密度的比值(E/N)下,电子与氮分子发生不同碰撞的概率、出射电子的平均能量、方向角分布和电子的能量分布.结果表明,电子能量近似服从玻尔兹曼分布.随着E/N的升高,电子平均能量升高,发生激发、离化、电离和离化电离碰撞的概率增大;非均匀分布的电场使分子获得更高的离化率,同时显著增强出射电子的能量.模拟结果为等离子体应用设计提供了参考依据.     

电子与氢及其同位素分子碰撞的非解离性电离截面研究

在边界等离子体中, 氢及其同位素分子与高能电子碰撞可发生电离反应. 对于尚无可利用的氢及其同位素分子的电子碰撞非解离性电离反应截面, 基于莫尔斯函数、弗兰克-康登原理, 采用半经典的Gryzinski方法进行了计算. 得到反应截面随电子能量的变化情况以及振动能级对反应截面的影响. 计算结果表明分子的振动激发对电离反应有着显著影响.     

EACVD中的Hα谱线与最佳生长条件

采用蒙特卡罗方法,模拟了CH4/H2混合气体为源气体的EACVD中的氢原子发射过程。考虑了电子与H2的弹性碰撞及振动激发、分解、电子激发、相应于Hα,Hβ,Hγ谱线的激发、电离及分解电离等非弹性碰撞过程;与CH4的碰撞考虑了弹性动量传输及振动激发、分解、电子激发、电离及分解电离等非弹性碰撞过程。研究了不同实验条件下产生的H,CH3的数目与Hδ谱线强度的关系,给出了一种通过Hα谱线来推断生长金刚石薄膜的最佳实验条件的方法。     

氢原子谱线测定EACVD中电子平均温度

采用蒙特卡罗方法,对以CH₄/H₂混合气体为原料气体的EACVD中氢原子的发射过程进行了模拟。在模拟中考虑了电子与H₂的弹性碰撞及振动激发、分解、电子激发、相应于H_α, H_β, H_γ谱线的激发、电离及分解电离等非弹性碰撞过程;与CH₄的碰撞考虑了弹性动量传输及振动激发、分解、电子激发、电离及分解电离等非弹性碰撞过程。研究了不同CH₄浓度下基片表面上电子平均温度与氢原子谱线相对强度的关系,给出了一种对EACVD中电子平均温度进行实时监测的方法。对于有效控制工艺条件,生长出高质量的金刚石薄膜具有重要意义。     

基于AKEBONO哨声波参数的内辐射带高能电子扩散模拟

为能准确地模拟内辐射带中哨声波对高能电子扩散损失的影响,基于内辐射带AKEBONO哨声波参数统计模型,及随纬度分布的背景冷等离子体密度模型,对引起电子扩散损失的大气分子,空间等离子体嘶声、闪电激发的哨声、人工激发的甚低频三类哨声波,利用准线性扩散理论,计算1.4≤ L≤2.0区域的不同能量电子,受到库仑碰撞和波粒回旋共振相互作用的弹跳周期平均赤道投掷角扩散系数,分析不同作用机制、不同类哨声波、不同能量、不同磁壳参数等对辐射带高能电子扩散损失的影响.结果表明：在赤道面损失锥角附近,高能电子主要受到库仑碰撞作用而扩散;在赤道投掷角接近90°附近区域,等离子体嘶声和闪电激发的哨声是引起扩散的主要因素;内辐射带电子主要受到甚低频电磁波波粒回旋共振扩散影响;扩散系数对高能电子能量及其所处磁壳参数比较敏感,通常,高能电子的能量或所处磁壳参数越大,扩散系数越大.     

沿面闪络流体模型电离参数粒子模拟确定方法

介绍了粒子模拟确定高功率微波介质沿面闪络击穿流体模型相关电离参数的方法.对粒子模拟方法 (包括带电粒子动力学方程、次级电子发射以及蒙特卡罗碰撞模型)和流体整体模型方法 (包括连续性方程和能量守恒方程)做了简介.基于自编的1D3V粒子模拟-蒙特卡罗碰撞程序给出了在高(低)气压、不同气体种类以及不同微波场强和微波频率下流体模型电离参数的粒子模拟结果,包括电离频率、击穿时间、平均电子能量、电子能量分布函数类型.研究结果表明:平均电子能量与电子能量分布函数类型关系不大;中低气压下,电子能量接近Maxwell分布,电子能量分布函数类型对电离参数几乎没有影响;中高气压下,电子能量分布函数类型对电离参数有重要影响,其依赖系数X趋于高阶形式.不同气体的电子能量分布函数类型不同,需要利用粒子模拟对电子能量分布函数类型进行标定.同时,电子能量分布函数依赖系数与微波场强和频率也有关系,其随微波场强增加而增大,随微波频率增加而减小.在给定考察范围(微波场强在7 MV/m以下,微波频率在40 GHz以内),中低气压下,平均电子能量随微波场强增加而迅速增大,电离频率随微波场强增加先增大后降低,平均电子能量随微波频率增加而降低,电离频率随微波频率增加先增加后降低;高气压下,平均电子能量随微波场强增加而缓慢增大,电离频率随微波场强增加而增大,微波频率对平均电子能量和电离频率影响不大.     

氢原子谱线与高质量金刚石薄膜

采用蒙特卡罗方法,对以CH₄/H₂混合气体为源气体的电子助进热丝化学气相沉积(EACVD)中的氢原子发射过程进行了模拟。在模拟中考虑了电子与H₂的弹性碰撞及振动激发、分解、电子激发(包括H_α, H_β, H_γ谱线的激发)、电离及分解电离等非弹性碰撞过程;与CH₄的碰撞考虑了弹性动量传输及振动激发、分解、电子激发、分解激发(包括H_α, H_β, H_γ谱线的激发)、电离及分解电离等非弹性碰撞过程。研究了不同实验条件下产生的H, CH₃的数目与氢原子谱线相对强度的关系,给出了一种利用氢原子谱线来获得最佳成膜实验条件的方法。对于有效控制工艺条件,生长出高质量的金刚石薄膜具有重要意义。     

大气压氩气/空气针-环式介质阻挡放电发射光谱诊断

为了更加深入地了解氩气/空气等离子体射流内的电子输运过程及化学反应过程,通过针-环式介质阻挡等离子体发生器在放电频率10 kHz,一个大气压条件下对氩气/空气混合气进行电离并产生了稳定的等离子体射流。通过发射光谱法对不同峰值电压下氩气/空气等离子体射流的活性粒子种类、电子激发温度及振动温度进行了诊断。结果表明,射流中的主要活性粒子为N₂的第二正带系、Ar Ⅰ原子以及少量的氧原子,其中N₂的第二正带系的相对光谱强度最强、最清晰,在本试验的发射光谱中没有发现N+₂的第一负带系谱线,这说明在氩气/空气等离子体射流中几乎没有电子能量高于18.76 eV的自由电子。利用Ar Ⅰ原子激发能差较大的5条谱线做最小二乘线性拟合对等离子体射流的电子激发温度进行了计算,得到大气压氩气/空气等离子体射流的电子激发温度在7 000~11 000 K之间。随峰值电压的增大,电子激发温度表现出先增大后减小的变化趋势,这说明电子激发温度并不总是随峰值电压的增长单调变化的。通过N₂的第二正带系对等离子体振动温度进行了诊断,发现大气压氩气/空气等离子体射流振动温度在3 000~4 500 K之间,其随峰值电压的增大而减小,这意味着虽然峰值电压的提高可有效提高自由电子的动能,但当电子动能较大时自由电子与氮分子之间的相互作用时间将会缩短,进而二者之间的碰撞能量转移截面将会减小,从而导致等离子体振动温度的降低。     

Die Berücksichtigung der Ionisation durch Elektronenstoß in der Elektronenkinetik des schwachionisierten anisothermen Plasmas III. Das instationäre Verhalten bei großer impulsförmiger Feldstörung

The Influence of Ionization by Electron Collisions on the Electron Kinetics of the Low Ionized Anisothermal Plasmas The time behaviour of the electron component was calculated during the additional application of a single pulse to the electric field in the plasma. The investigations were performed for the weakly ionized Ne-plasma as a typical example taking into account supplementarily the direct ionization due to electron collisions and an electron loss term with a constant life time besides elastic and exciting collisions. Using the instationary Boltzmann equation we determined the time behaviour of the essential macroscopic quantities. Besides the caluclation of the marked temporal development of such quantities as the electron concentration, the electron collision frequencies for excitation and ionization and the different energy transfer rates especially the relaxation of the electron component was analysed after switch on and switch off the additional rectangular pulse.     

Response of the Electron Kinetics on Spatial Disturbances of the Electric Field in Nonisothermal Plasmas

An efficient method for solving the inhomogeneous electron Boltzmann equation for a weakly ionized collision dominated plasma is represented. As a first application this method is used to investigate in a helium plasma the response of the electron velocity distribution function and of the relevant macroscopic quantities to the impact of spatially limited disturbances in the electric field. In addition to the field action elastic and (conservative) inelastic collisions of electrons with gas atoms are taken into account in the kinetic treatment. In this way the spatial relaxation behaviour of the electrons and their establishment into homogeneous plasma states could be studied on a strict kinetic basis. Unexpectedly large relaxation lengths in electron acceleration direction have been found at medium electric fields.     

Electron Energy Loss Under Scattering by Complex Organic Compound Vapors

Abstract

Low-energy electron scattering by anthracene and 1, 4-di 2-(5-phenyloxazolyl) -benzene (POPOP) vapors at low pressures is studied. The primary electron beam energy E_O was varied between 10 and 60 eV. The scattering angle was θ = 90°. It has been found that in the electron-energy-loss spectra, bands with maxima of 3·7 and 5·41 eV for anthracene, 4.02 and 7 eV for POPOP correspond to the S_O → S₁ and S_o → S₂ transitions. Low intensity electron-energy loss due to T₂ -states excitation has been observed in the region of 2·15 eV for anthracene and 2·54 eV for POPOP. From comparison with optical absorption spectra and analysis of spectra structure changes at different E_O the nature of other bands has been determined. From the obtained results it was concluded that the probability of T₁ -state excitation is low. It is shown that the main mechanism of populating the T₁ -state by electric methods of vapor pumping is the process of intersystem crossing.

The development of free complex molecule spectroscopy under electric excitation is hindered by the lack of systematic reliable information about elementary interactions of electrons and other particles with such molecules. When excited in electric discharge or by an electron beam, the complex molecule may be in both a neutral and an ionized state. The investigation of such nonequilibrium gas system presents great difficulties due to a large number of possible elementary processes responsible for excitation, ionization, recombination, dissociation of complex molecules. To develop a kinetic model of such a system, one must know a number of cross sections or rate constants of elastic and inelastic electron collisions with the complex molecule. Unfortunately, such data are practically unavailable.

The aim of the present paper is to obtain information about probabilities of complex molecule singlet and triplet states excitation in a gas phase as a result of collision with low-energy electrons (less than 50 eV).

Most accurate data on effective cross sections of molecule (atom) collisions with electrons are provided by using an electronic spectrometer in which an electron beam with small energy spread (of the order of tens of in electron-energy-loss spectra, S₂-state excitation cross sections have a considerably greater value.     

同轴空心阴极氦等离子体的电子激发温度研究

利用同轴空心阴极放电装置,产生氦低温等离子体。通过对等离子体的发射光谱进行测量和计算,研究放电功率以及氦气压强对等离子体的电子激发温度的影响。结果表明:氦低温等离子体的发射光谱主要由连续谱和原子谱线构成,放电功率和压强对谱线的强度具有明显影响。压强的变化不仅影响电子从电场中获得的能量,还会影响电子与原子的碰撞频率,从而导致电子激发温度随着氦气压强的增大,出现先上升后下降的变化趋势。     

Kinetic parameters,collision rates,energy exchanges and transport coefficients of non-thermal electrons in premixed flames at sub-breakdown electric field strengths

The effects of an electric field on the collision rates, energy exchanges and transport properties of electrons in premixed flames are investigated via solutions to the Boltzmann kinetic equation. The case of high electric field strength, which results in high-energy, non-thermal electrons, is analysed in detail at sub-breakdown conditions. The rates of inelastic collisions and the energy exchange between electrons and neutrals in the reaction zone of the flame are characterised quantitatively. The analysis includes attachment, ionisation, impact dissociation, and vibrational and electronic excitation processes. Our results suggest that Townsend breakdown occurs for E/N = 140 Td. Vibrational excitation is the dominant process up to breakdown, despite important rates of electronic excitation of CO, CO₂ and N₂ as well as impact dissociation of O₂ being apparent from 50 Td onwards. Ohmic heating in the reaction zone is found to be negligible (less than 2% of peak heat release rate) up to breakdown field strengths for realistic electron densities equal to 10¹⁰ cm^?3. The observed trends are largely independent of equivalence ratio. In the non-thermal regime, electron transport coefficients are insensitive to mixture composition and approximately constant across the flame, but are highly dependent on the electric field strength. In the thermal limit, kinetic parameters and transport coefficients vary substantially across the flame due to the spatially inhomogeneous concentration of water vapour. A practical approach for identifying the plasma regime (thermal versus non-thermal) in studies of electric field effects on flames is proposed.     

Mikrophysikalische Bestimmung elektronenkinetischer Kenngrößen im binären Molekül-Mischplasma von Stickstoff und Wasserstoff. II. Elektronenstoßfrequenzen für die Anregung und Ionisierung langlebiger elektronischer Molekülzustände und die Energieverlustraten der Elektronenkomponente des Mischplasmas

In this second part of the in [l] started paper the results of microphysical determined collision frequencies of the electrons for the excitation and ionization of metastable molecules, excited in electronic states, and of the energy loss rates of the electrons due to elastic collisions, vibrational excitation, electronic excitation, dissociation and ionization of the molecules in a N₂ - H₂ -plasma are represented and discussed. These investigations are related to a low ionized, homogeneous and stationary plasma in a mixture and are performed for the range 6- 100 V/(cm Torr) of the reduced electric field strength and for any composition of the N₂ - H₂-mixture.     

Relaxation of Plasma Electrons towards Stationary States as Related to Different Initial Energy Distributions and for a Wide Range of the Final Electric Field Strength

Starting from former investigations concerning the collision dominated relaxation of the electron component in weakly ionized inert gas plasma we generalize the results obtained. Also in the present paper we use the same adaquate kinetic equation for the electron energy distribution function. On one side the influence of non-stationary, analytically given initial energy distributions on the relaxation behaviour and on the resulting adjustment time of stationary states was investigated. On the other side the calculation, especially of the adjustment time, was extended to a whole variety of final stationary states ranging from those determined only by energy loss due to elastic collisions to those determined only by exciting collisions. The adjustment time obtained varies by about four orders of magnitude within this wide range of final stationary states.     

Free electron gas spectrum parameters of noble gases in dc electric field

Free electron gas is present in every gas, whether it is of atomic or molecular structure. Since the Maxwell spectrum type is the consequence of only thermal motion of constitutive gas particles; therefore, the presence of electric field leads to change the spectrum of charged particles due to their directed motion. However, it has been shown that in the case of occurrence only of elastic interactions between electrons and neutral gas particles (a condition that has been met in the case of weakly ionized noble gases of a relatively huge volume) the deviation of the gas spectrum of free electrons in the electric field from the Maxwell type is negligible. In such a case, the gas spectrum of free electrons is either of Maxwell type (if the frequency collision value is energy-independent) or of Druyvesteyn type (if the mean free electron path value is energy-independent). The Maxwell and Druyvesteyn distribution types are very similar. The only noticeable difference is that the tail of the Maxwell distribution decreases with the energy exponent to the first degree of energy, and the tail of Druyvesteyn distribution with the energy exponent to the second degree of energy. The aim of this paper is to determine whether the gas spectrum of free electrons in weakly ionized noble gases at small values of the product pd (pressure and inter-electrode distance) follows either the Maxwell's or Druyvesteyn's type, as well as to determine the dependence of spectrum parameters on the product pd. It has been established that better results are obtained on the assumption that the mean value of collision frequency is energy-independent.     

The Nonstationary Behaviour of the Electron Current Density in the Weakly Inonized Plasma at High Field Frequencies

Based upon former studies concerning the nonstationary electron kinetics in collision dominated, weakly ionized plasmas the phase delay between the ac electric field component and the resultant ac electron current density has been analysed, theoretically and experimentally, under the specific conditions of a microwave field superimposed to a dc discharge plasma column. The complex plasma conductivity and thus the phase delay has been calculated by solving an appropriate electron kinetic equation. The same quantities have been experimentally determined by using the microwave cavity which operates with different resonator modes. A comprehensive comparison between calculated and measured quantities for different neon discharge plasmas leads to a complete confirmation of the theoretical expectations.