共查询到18条相似文献,搜索用时 203 毫秒
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实验研究了激光脉冲宽度和脉冲个数对镍基高温合金材料去除阈值的影响,分别在290 fs,1 ps和7 ps脉宽的激光下,使用1,10,50,100,300,500和1000个不同能量的激光脉冲辐照高温合金样品表面。实验结果表明,烧蚀坑尺寸会随脉冲数的增加而增加,而脉冲宽度的增加会加大脉冲个数对烧蚀坑直径的影响。通过烧蚀坑直径的平方值与激光脉冲能量之间存在的对数关系,得到了不同脉冲宽度下镍基高温合金的多脉冲材料阈值。3种不同脉宽下的高温合金多脉冲去除阈值都存在显著的累积效应。根据去除阈值计算得到290 fs,1 ps和7 ps脉宽下的累积效应系数分别为0.88,0.86和0.78。 相似文献
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采用基于平衡光学互相关的超快激光绝对距离测量方法对大气中一段15m的空间距离进行了测量。仿真了不同脉冲宽度、不同光强损耗对平衡互相关信号的影响,理论分析表明脉宽展宽对平衡互相关信号影响较大。采用中心波长为1037nm、重复频率为260MHz的超快激光器光源,搭建了测距系统。实验验证了在脉宽分别为1.44ps、132fs时,对平衡互相关信号的影响,实验结果符合理论分析。研究了不同脉冲宽度对测量分辨力的影响,结果显示,采样时间为5ms,脉宽为1.44ps,测量分辨力不低于50μm;而当脉宽为132fs时,测量分辨力优于5μm。 相似文献
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硫化锌(ZnS)晶体是重要的宽光谱红外窗口材料,高深径比纳米孔的超快激光制造技术为中红外波导傅立叶变换光谱仪等光子器件的实现提供了重要的技术途径。本文采用中心波长为1030 nm、重复频率为100 kHz、脉冲宽度为223 fs~20 ps可调的Yb:KGW激光光源,用石英锥镜产生高斯-贝塞尔光束,并用4f系统构建了40倍缩束的超快激光直写系统。在能量为36~63μJ,脉宽为12.5~20 ps的情况下,在ZnS晶体上成功刻写了直径为80~320 nm的纳米孔结构。通过聚焦离子束(FIB)剥蚀和扫描电子显微镜(SEM)成像确定了纳米孔隙表面形貌、直径及深度信息。研究了激光脉冲能量、脉冲宽度对纳米孔隙的影响。结果表明,在20 ps脉冲宽度、48μJ脉冲能量的激光参数下,纳米孔隙的深度约为270μm。 相似文献
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以简单的火花间隙作为放电开关,建立了一种用于ps脉冲激光放大的大口径放电泵浦KrF准分子激光器。该激光器的有效增益口径截面为4cm×3cm,在自由运转情况下最大激光输出能量为1.3J,脉宽20ns。用作ps放大器时,利用光学偏振放大方式获得了激光能量140mJ,脉冲宽度10ps的激光输出。利用XeCl激光泵浦的染料激光作为探针测量了不同放电条件下和不同气分比条件下激光的增益和吸收系数。 相似文献
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以单脉冲能量更高的孤子激光器为种子源,通过主振荡放大技术,获得了2 μm波段的高功率、皮秒脉冲激光器.该种子源是一个被动锁模的光纤激光器,通过优化、管理激光器谐振腔内的色散,获得了脉冲宽度为50 ps、重复频率为55.6 MHz、谱宽约为21 nm的高能量孤子脉冲输出.利用单模光纤在2μm波段的负啁啾色散特性,在进行功率放大之前将作为种子源的激光脉冲宽度展宽至600 ps.最后,经过两级放大之后,获得平均功率约23 W、脉宽为660 ps的激光输出.利用光栅对,对放大后的激光脉冲进行压缩,经测试压缩后的脉冲宽度约为0.9 ps. 相似文献
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采用1 kHz,800 nm,50 fs—24 ps的钛宝石激光脉冲对单晶硅样品在空气和水溶液环境中的烧蚀加工特性进行了研究.实验观察到了超短脉冲激光在空气氛围中烧蚀形成的双层环状结构,分析揭示了加工区域中心和边缘的烧蚀物理机制分别为热熔化和库仑爆炸,并测量了双层环状结构半径随入射激光能量、脉冲数及持续时间等的变化关系,结果表明获取较大深-宽比的加工效果需选择小能量脉冲激光的多次作用.在水溶液环境中,实验发现飞秒激光在样品表面诱导产生了亚微米量级的多孔状结构,而皮秒激光则更容易实现对硅表面的非热性去除.这是由于激光诱导的光机械应力和空泡效应随脉冲宽度变大而增强所致,在实验上确立了区分这两种不同加工状态的临界脉冲宽度.
关键词:
飞秒激光
硅片
激光加工 相似文献
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Y.G. Yingling P.F. Conforti B.J. Garrison 《Applied Physics A: Materials Science & Processing》2004,79(4-6):757-759
Previous molecular dynamics (MD) simulations of ultraviolet (UV) laser ablation demonstrate the distinct dependence of material ejection on laser fluence and laser pulse duration. In this paper, we examine the pulse width dependence when the laser pulse widths are appropriate for the thermal confinement regime. We perform MD simulations of laser ablation with a laser pulse duration of 1 ns and compare with a pulse width of 150 ps as in previous simulations. The simulations confirm that the pulse width in thermal confinement regime does not dramatically influence the molecular ejection mechanism. The simulations reveal differentiations, however, in plume composition and the ablation threshold value. PACS 02.70.Ns; 61.80.Az; 79.20.Ap 相似文献
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Pulsed ultraviolet laser ablation of two polyurethane films has been studied in terms of ablation rate behaviour and time-of-flight mass spectroscopy of the positively charged photofragments. Three excimer laser wavelengths (193, 248 and 308 nm; 17–30 ns pulse duration) and short-pulse laser system (pulse duration 500 fs or 5 ps, at 248 nm) were employed. The results of the influence of energy fluence on the ablation rate are tested against other photoablation models and a table of fitted physical constants is presented. The upper limit of the mean activation energy for desorption is found to be considerably lower than the energy required to break single covalent bonds. The mass analysis of the positively charged species produced during the photoablation process provides valuable insight into the photofragmentation mechanism. 相似文献
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Ablation of submicron structures on copper and silicon by short ultraviolet laser pulses (0.5–50 ps, 248 nm) is presented. Features like periodic line structures with a line-spacing below 400 nm, and holes with characteristic sizes well below 1 µm are produced on the sample surface by single laser shot exposure. The structures are projection printed by a Schwarzschild-objective (N.A.=0.4) in air environment. The morphology of ablation sites made with different pulse durations (0.5 ps, 5 ps, 50 ps) is discussed in terms of thermal diffusion effects. 相似文献
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为了产生100~500 ps,200~500 kV,1~10 kA数量级的皮秒放电脉冲,建立了一个皮秒脉冲发生器理论模型,并提出利用增益系数极值法,确定其最大兼容工作点,相对于纳秒脉冲成形线,皮秒脉冲成形线实现了90%,70%,85%的归一化电压增益、能量增益和放电功率增益。为了最大限度地降低皮秒脉冲成形线的载压时间,提高系统的绝缘安全因子,利用华罗庚0.618优算法,设计了电压传输系数。在纳秒脉冲成形线与皮秒脉冲成形线阻抗比值等于1.63条件下,在4倍和6倍皮秒脉冲成形线时间之内,归一化电压增益、能量增益和放电功率增益就可以分别达到94%,72%,89%与99%,53%,97%。 相似文献
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We present a feasibility study into laser treating dental materials by using femtosecond pulses generated by a titanium:sapphire laser system which consisted of an oscillator and a regenerative amplifier. The pulse duration was varied between 200 fs and 2 ps. The observed energy thresholds for the ablation process of dentine and enamel were clearly smaller than those observed when longer pulse durations were used. The consequence of this observation is a lower thermal load within the vicinity of the radiated area. Thus no thermal damage or mechanical damage, such as cracks, were produced during the laser treatment. Commercially available femtosecond laser systems can produce ablation rates in healthy and in-vitro demineralized dental material 2 mm3 per min and 6-16 mm3 per min, respectively. These values are an order of magnitude larger than those produced by picosecond laser systems at the same time pulse energy and pulse repetition rate. The brightness of the plasma spark generated by the laser treatment depended on the dimineralization of the teeth. This may allow online control of the laser treatment. 相似文献
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Balsam M. Mirdan Luca Antonelli Dimitri Batani Rashida Jafer Katarzyna Jakubowska Saad al Tarazi 《辐射效应与固体损伤》2013,168(7):610-619
The interaction of 40 ps pulse duration laser emitting at 532 nm wavelength with human dental tissue (enamel, dentin, and dentin–enamel junction) has been investigated. The crater profile and the surface morphology have been studied by using a confocal auto-fluorescence microscope (working in reflection mode) and a scanning electron microscope. Crater profile and crater morphology were studied after applying consecutive laser pulses and it was found that the ablation depth increases with the number of consecutive pulses, leaving the crater diameter unchanged. We found that the thermal damage is reduced by using short duration laser pulses, which implies an increased retention of restorative material. We observe carbonization of the irradiated samples, which does not imply changes in the chemical composition. Finally, the use of 40 ps pulse duration laser may become a state of art in conservative dentistry. 相似文献