与标准集成电路工艺兼容的硅基光学器件研究

着重介绍了与标准集成电路工艺兼容的硅基光学器件的最新研究进展,包括硅基光发射器、硅基光波导和调制器件、硅基光电探测器和接收机以及硅基光电子集成回路的工作原理、制作工艺和集成技术.与标准集成电路工艺兼容的硅基光电子集成回路能有效地解决电互连芯片内部串扰、带宽和能耗等问题,并能够充分利用现有成熟的集成电路工艺,实现大规模生产,具有广阔的实用前景.     

光通信用厚膜SOI材料的制备与研究

利用SIMOX技术和硅外延工艺制备了厚膜SOI材料。采用Secco液腐蚀、椭圆偏振仪(SE)、扩展电阻(SRP)等技术对材料的性能进行了表征,分析了外延硅层中缺陷产生的主要原因。外延层电阻率纵向分布均匀,其缺陷主要来源于衬底缺陷延伸和表面的不平整。用制备的厚膜SOI材料制作了脊型光波导并完成了光损耗测试实验,得到了传输损耗为0．4dB／cm的波导结构。     

一种基于SOI材料的直波导可调谐光衰减器

设计并制造了一种基于SOI材料的直波导可调谐光衰减器,其调制区采用了独特的双脊型PIN结构,增强了注入电流场与光场的重叠,提高电注入效率。该VOA可实现20dB的光功率衰减量,所需要的最大功率为650mW,器件的片内插入损耗约为3．6dB。     

面向硅基光互连应用的无源光子集成器件研究进展

光互连是突破传统微电子IC性能瓶颈的重要技术手段,对推进"后摩尔时代"微电子技术的发展和高性能计算技术的实现具有关键性意义。本文在归纳总结不同层次光互连结构特点的基础上,对片上光互连(on-chip or intra-chip optical interconnects)所涉及的若干种无源光子集成器件的设计制备及性能特点进行了分析介绍,这些器件包括SOI亚波长光子线波导、SOI光子晶体波导、MMI分束/合束器、微环/微盘谐振腔滤波器、光子晶体微腔耦合滤波器、光子晶体反射镜等,是硅基片上光互连的基本构成单元。本文对这些关键性光子集成器件的国内最新研究进展进行了报道。     

硅基光电集成材料及器件的研究进展

以硅基光电集成回路为主线，综述了不同的硅基光波导材料的制备技术和硅基光波导的制作工艺及其对光传输损耗的影响。分析了硅基光波导与锗硅光探测器集成用两种不同的耦合方式，阐明了波导与探测器集成的机理及设计理论基础。归纳出硅基键合激光器的四种技术方案，指出其共同优点是克服材料异质外延引起的晶格失配和热膨胀非共容，对实现OEIC行之有效。     

集成光波导器件的计算机辅助设计软件的开发（1996年7月11日收到,12月…

报导了最新开发的集成光波导器件的计算机辅助设计软件－－ＩＯＣＡＤ２，它是一个采用复折射率矢量束传输分析方法的三维模拟分析软件。本文介绍了它的功能、特点、使用方法以及适用条件，并且以ＳＬＤ直条形波导吸收区为例进行了模拟，得到了很好的模拟结果。     

硅基底平面波导光通讯集成器件的模拟、设计及工艺

随着平面波导制作工艺的日益成熟 ,制造精度的不断提高 ,成本的持续下降 ,平面波导光集成器件尤其是 Si基底上 Si O2 平面波导集成器件在光通信系统中的应用更加重要和广泛 .Y分支分束器、MMI耦合器、阵列波导光栅 (AWG)和蚀刻衍射光栅 (EDG)等平面波导集成器件正扮演着越来越重要的作用 ,BPM等数值计算方法在这些器件的设计和模拟中也起了重要作用 .本文就此作了一些探讨 .     

玻璃光波导研究进展

介绍了目前国际上主要玻璃光波导的研究热点。阐述了制备光波导的晶体材料、玻璃材料和高分子聚合物材料的优缺点。着重阐述了玻璃材料的研究进展,并简要介绍了采用硫卤玻璃制备非线性光波导的诱人前景。     

一种用于通信C波段的光轨节点无源集成芯片

光轨是一种新型光通信网络结构,具有交换粒度小、带宽利用率高等优点。本文提出一种应用于通信C波段的新型光轨节点无源集成芯片,支撑1 545 nm、1 550 nm和1 555 nm三个C波段波长的通信。该新型光轨节点无源集成芯片是一种基于SOI纳米波导材料的片上微器件系统,核心器件由基于微环谐振器的解复用器和基于马赫-泽德尔干涉仪的环加强型热光光开关构成。通过理论计算和软件仿真,分别分析了解复用器和光开关的光学和通信性能,结果显示微环解复用器3个波长信道的串扰分别为22.5 dB、16.9 dB和16.3 dB;光开关的消光比分别为16.6 dB、19.7 dB和21.5 dB;插入损耗分别为0.86 dB、0.85 dB和0.68 dB,功耗约为51 mW。     

聚合物光波导端面磁流变抛光工艺(英文)

光波导端面的表面质量会严重影响光波导器件的光耦合封装性能,耦合封装前必须对波导器件端面进行抛光处理.目前聚合物光波导端面主要依靠传统研磨盘进行抛光处理,该工艺工序复杂、抛光效率低已成为制约聚合物波导器件应用的瓶颈.基于聚合物光波导材料优良的加工特性,通过对比实验提出了聚合物光波导的磁流变端面抛光工艺.采用5μm、0.5μm和1μm粒径的氧化铈抛光粉分别配制研磨盘抛光液及磁流变抛光液对3 mm×3 mm聚合物光波导端面进行抛光实验,发现磁流变加工对聚合物光波导端面进行一次2 m in光栅扫描抛光就具有比传统研磨盘约3 h精、粗抛光较好的端面质量.经过白光干涉仪测量,磁流变抛光后光波导端面表面粗糙度的均方根值达到了2.6 nm,传统端面抛光端面粗糙度均方根值为128.7 nm.通过自动对准耦合平台测试,结果显示通过磁流变端面抛光的光波导的插入损耗由抛光前的32.7 dB降低到了17.8 dB.磁流变抛光方法可以对聚合物光波导端面进行快速、高性能的抛光,在光波导应用领域具有非常广阔的应用前景.     

SOI技术的新进展

通过对最近两次SOI国际会议的分析,综述了SOI技术取得的新进展。三种SOI技术SIMOX,Smart-cut和BESOI已走向商业化,在高温与辐射环境下工作的SOI电路也走向了市场。近来人们更加重视SOI技术,是因为SOI在实现低压、低功耗电路上的突出优越性。     

Analysis and design of a rib-like-based slot waveguide for nonlinear silicon nanophotonics

Design of efficient nonlinear optical waveguides is an essential requirement for development of silicon nanophotonics. These waveguides should have a unique capability to play the main role in realization of both passive and active optical devices. A high-performance dielectric rib-like-based slot waveguide is proposed for nonlinear silicon nanophotonics. Its slot region can be filled with Si-nc:SiO₂ which exhibits a high third-order nonlinear effect. Study of numerical results shows that this new slot waveguide has a nonlinear parameter of the same order of magnitude as an equally sized silicon nanophotonics strip-based slot waveguide. The new waveguide can be fabricated easily by etching a slot in the core region of the silicon-on-insulator (SOI)-based rib-like waveguide.     

Polymer‐Based Optical Waveguides: Materials,Processing, and Devices

Polymer optical waveguide devices will play a key role in several rapidly developing areas of broadband communications, such as optical networking, metropolitan/access communications, and computing systems due to their easier processibility and integration over inorganic counterparts. The combined advantages also makes them an ideal integration platform where foreign material systems such as YIG (yttrium iron garnet) and lithium niobate, and semiconductor devices such as lasers, detectors, amplifiers, and logic circuits can be inserted into an etched groove in a planar lightwave circuit to enable full amplifier modules or optical add/drop multiplexers on a single substrate. Moreover, the combination of flexibility and toughness in optical polymers makes it suitable for vertical integration to realize 3D and even all‐polymer integrated optics. In this review, a survey of suitable optical polymer systems, their processing techniques, and the integrated optical waveguide components and circuits derived from these materials is summarized. The first part is focused on discussing the characteristics of several important classes of optical polymers, such as their refractive index, optical loss, processibility/mechanical properties, and environmental performance. Then, the emphasis is placed on the discussion of several novel passive and active (electro‐optic and thermo‐optic) polymer systems and versatile processing techniques commonly used for fabricating component devices, such as photoresist‐based patterning, direct lithographic patterning, and soft lithography. At the end, a series of compelling polymer optical waveguide devices including optical interconnects, directional couplers, array waveguide grating (AWG) multi/demultiplexers, switches, tunable filters, variable optical attenuators (VOAs), and amplifiers are reviewed. Several integrated planar lightwave circuits, such as tunable optical add/drop multiplexers (OADMs), photonic crystal superprism waveguides, digital optical switches (DOSs) integrated with VOAs, traveling‐wave heterojunction phototransistors, and three‐dimensionally (3D) integrated optical devices are also highlighted.     

Slot optical waveguide usage in forming passive optical devices

We have reviewed the work on SOI slot optical waveguides followed by our work. In a slot waveguide structure, light can be confined in a low index slot guarded by high index slabs. Slot structures are being used in forming complex structures; such as ring resonator circuits. The increased round trip in ring resonator circuits signifies the importance of dispersion calculations. We did analytical and numerical investigations of slot structures' dispersion characteristics. Our dispersion tuned slot structures can help in reducing the dispersion effects on optical signal, which will in turn improve the efficiency of light-on-chip circuits. Since the advent of slot optical waveguides, SOI based slot optical waveguides have been under consideration. It has been found that glass based slot optical waveguide structures with relatively low refractive index contrast ratio can also play an important role in forming complex nano-size optical devices. We made use of power confined inside low index slot regions for a double slot structure. Opto-mechanical sensors have been proposed based upon: (a) variation in power confined inside low index slot region due to the movement of central high index slab under the action of external force (temperature, pressure, humidity, etc). vide Chinese Patent No. ZL 200710176770.1, 2007 (b) variation in power confined inside low refractive index slot regions due to movement of both slots under the action of external force (temperature, pressure, humidity, etc).     

低损耗离子交换玻璃基光波导制备与分析

考虑到离子交换和离子扩散工艺的特殊要求, 设计并熔制了适合于离子交换工艺的硅酸盐玻璃材料SiO₂-B₂O₃-Al₂O₃-R’O-R₂O（R’=Ca, Mg; R=Na, K）. 采用Ag⁺/Na⁺熔盐离子交换和电场辅助离子扩散工艺在这种玻璃材料基片上获得了掩埋式条形光波导. 光学显微镜和电子探针分析表明高折射率的Ag⁺扩散区位于玻璃基片表面以下约10μm处, 形成光波导的芯部. 光波导芯部尺寸约为8μm×8μm, 与单模光纤芯径尺寸相当, 保证了较低的光纤耦合损耗. 对光波导的测量结果得出：在波长为1.5μm处条形光波导的传输损耗约为0.1dB/cm, 与单模光纤的耦合损耗约为0.2~0.3dB. 条形光波导的传输损耗与材料本身的损耗接近, 表现出掩埋式光波导的低损耗特征. 分析表明, 经过进一步优化, 这种光波导制备技术可用于低损耗光波导器件的制作.     

Modelling,design and optimization of compact taper and gratings for mode coupling to SOI waveguides at C-band

In this work, the design and optimization of compact taper is presented to enable coupling of infrared light in the C-band with the nano-photonic silicon-on-insulator (SOI) integrated optical waveguide. The proposed compact taper results in ～96% transmission efficiency for the taper length of ～5?µm and ～99.5% transmission efficiency for the taper length of 10?µm. The use of the proposed compact taper significantly reduces the foot print of optical coupler (grating and proposed compact taper) to (10?×?5)?µm² with ～96% transmittance and (10?×?10)?µm² with ～99.5% transmittance. The end-to-end coupling loss is less than 0.01?dB in the C-band. The compact taper along with grating presented in this work can be used as an efficient optical coupler for mode coupling from fibre to SOI single-mode optical waveguide in high density optical integrated circuits operating at 1550?nm.