共查询到14条相似文献,搜索用时 46 毫秒
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利用ECR-微波等离子溅射沉积技术加不同偏压在45#钢基体上制备了ZrN薄膜。利用X射线衍射仪(XRD)、透射电子显微镜(TEM)对薄膜的微观组织结构进行了分析。结果表明,无偏压时薄膜为非晶膜,随着偏压的升高,薄膜呈ZrN晶体结构。利用扫描电镜(SEM)、原子力显微镜(AFM)测试了薄膜表面形貌。薄膜表面平整,但仍存在局部缺陷;粗糙度(RMS)在0.311—0.811nm之间变化,轮廓算术平均值(Ra)在0.239-0.629nm之间变化。同时利用电化学极化实验在0.5mol/LNaCl溶液中测试了基体及薄膜的耐蚀性能,基体自腐蚀电位Ecorr为-512.3mV,样品Ecprr在-400.3--482.6mV之间变化,45#钢基体自腐蚀电流Icorr为9.036μA,样品Icorr。在0.142—0.694μA之间变化。并讨论了偏压对薄膜的微观组织和耐蚀性能产生影响的原因。 相似文献
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Plasma immersion ion implantation(PⅢ) overcomes the direct exposure limit of traditional beamline ion implantation, and is suitable for the treatment of complex work-piece with large size. PⅢ technology is often used for surface modification of metal, plastics and ceramics. Based on the requirement of surface modification of large size insulating material, a composite full-directional PⅢ device based on RF plasma source and metal plasma source is developed in this paper. This device can not only realize gas ion implantation, but also can realize metal ion implantation, and can also realize gas ion mixing with metal ions injection. This device has two metal plasma sources and each metal source contains three cathodes. Under the condition of keeping the vacuum unchanged, the cathode can be switched freely. The volume of the vacuum chamber is about 0.94 m~3, and maximum vacuum degree is about 5?×?10~(-4) Pa. The density of RF plasma in homogeneous region is about 10~9 cm~(-3), and plasma density in the ion implantation region is about 10~(10) cm~(-3). This device can be used for large-size sample material PⅢ treatment, the maximum size of the sample diameter up to 400 mm. The experimental results show that the plasma discharge in the device is stable and can run for a long time. It is suitable for surface treatment of insulating materials. 相似文献
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等离子体浸没离子注入与工件外表面的注入不同 ,存在空间和时间上的尺度。研究结果表明 ,由于内腔 ,如内筒的有限尺寸 ,使注入电压的利用率降低 ,同时使内部等离子体快速耗尽 ,对于特定的内筒 ,利用提高注入电压从而提高注入能量只能在一定的电压范围内实现。在典型的外表面注入工艺条件下 ,内表面离子的耗尽速度是惊人的。如在对于直径 2 0cm的圆筒在 30kV、2× 10 15ions/cm3的条件下 ,等离子体耗尽时间仅为 0 .5 5 μs ,这个时间甚至小于多数脉冲电源的上升沿时间。结果表明 ,内部等离子体源的硬件结构可能是一种有效的解决方法。 相似文献
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Alexey Kondyurin Marcela Bilek 《Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms》2011,269(12):1361-1369
A thin (120 nm) polymethylmethacrylate coating was treated by plasma immersion ion implantation with Ar using pulsed bias at 20 kV. Ellipsometry and FTIR spectroscopy and gel-fraction formation were used to detect the structure transformations as a function of ion fluence. The kinetics of etching, variations in refractive index and extinction coefficient in 400-1000 nm of wavelength, concentration changes in carbonyl, ether, methyl and methylene groups all as a function of ion fluence were analyzed. A critical ion fluence of 1015 ions/cm2 was observed to be a border between competing depolymerization and carbonization processes. Chemical reactions responsible for reorganization of the PMMA chemical structure under ion beam treatment are proposed. 相似文献
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综述了MEVVA离子源在金属硅化物,磁性薄膜,准晶材料和表面复合材料的制备以及电催化,抗腐蚀,抗高温氧化,抗疲劳和磷酸盐玻璃抗风化等研究领域的应用。 相似文献
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等离子体浸没离子注入绝缘材料的研究 总被引:2,自引:0,他引:2
等离子体浸没离子注入是一种新形式的离子注入技术,是利用负偏压工件周围形成的等离子体鞘层进行离子加速、进而获得离子注入.等离子体注入的前提条件是工件导电,因此对于绝缘材料的等离子体注入可能存在问题.本文从理论和实际处理的角度论证了绝缘材料等离子体注入的可能性、可操作性,并给出了一些实际例证. 相似文献
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M. Ueda A.R. Silva Jr.Carina B. Mello G. Silva H. ReutherV.S. Oliveira 《Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms》2011,269(24):3246-3250
In this work, we investigated the effects of the contaminants present in the vacuum chamber of the PI3 system, in particular, the residual oxygen, which results in the formation of the oxide compounds on the surface and hence is responsible for the high implantation energies required to achieve reasonably thick treated layers. We used a mass spectrometer (RGA) with a quadruple filter to verify the composition of the residual vacuum and pressure of the elements present in the chamber. Initially we found a high proportion of residual oxygen in a vacuum with a pressure of 1 × 10−3 Pa. Minimizing the residual oxygen percentage in about 80%, by efficient cleaning of the chamber walls and by improving the gas feeding process, we mitigated the formation of oxides during the PI3 process. Therefore we achieved a highly efficient PI3 processing obtaining implanted layers reaching about 50 nm, even in cases such as an aluminum alloy, where is very difficult to nitrogen implant at low energies. We performed nitrogen PI3 treatment of SS304 and Al7075 using pulses of only 3 kV and 15 × 10−6 s at 1 kHz with an operating pressure of 1 Pa. 相似文献
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Giovanni Di Girolamo Marcello Massaro Emanuela Piscopiello Leander Tapfer 《Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms》2010,268(19):2878-2882
Metal ion implantation in inert polymers may produce ultra-thin conducting films below the polymer surface. These subsurface films are promising structures for strain gauge applications. To this purpose, polycarbonate substrates were irradiated at room temperature with low-energy metal ions (Cu+ and Ni+) and with fluences in the range between 1 × 1016 and 1 × 1017 ions/cm2, in order to promote the precipitation of dispersed metal nanoparticles or the formation of a continuous thin film. The nanoparticle morphology and the microstructural properties of polymer nanocomposites were investigated by glancing-incidence X-ray diffraction and transmission electron microscopy (TEM) measurements. At lower fluences (<5 × 1016 ions/cm2) a spontaneous precipitation of spherical-shaped metal nanoparticles occurred below the polymer top-surface (∼50 nm), whereas at higher fluences the aggregation of metal nanoparticles produced the formation of a continuous polycrystalline nanofilm. Furthermore, a characteristic surface plasmon resonance peak was observed for nanocomposites produced at lower ion fluences, due to the presence of Cu nanoparticles. A reduced electrical resistance of the near-surface metal-polymer nanocomposite was measured. The variation of electrical conductivity as a function of the applied surface load was measured: we found a linear relationship and a very small hysteresis. 相似文献