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本文采用VHF-PECVD技术制备了系列硅薄膜,通过椭圆偏振技术及拉曼测试手段研究了衬底表面预处理时间对微晶硅薄膜的微结构及其生长的影响.实验结果表明:随衬底预处理时间(0~10 min)的延长,薄膜的晶化率从14%提高到44%;薄膜表面的硅团簇尺寸减小,在衬底预处理10 min时,薄膜表面的粗糙度较小.在衬底未预处理与预处理10 min时,在相同的沉积参数下,沉积两系列不同生长阶段硅薄膜的生长指数接近.原因是H等离子体预处理使衬底表面的原子氢增多,有利于成膜先驱物在衬底表面的迁移,影响薄膜的初期成核,使薄膜易于晶化. 相似文献
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本文综述了纳米硅薄膜制备新技术的进展。着重介绍了高氢稀释硅烷蚀刻法,微波氢基团增强化学气相沉积,逐层法和高频数值等离子体化学气相沉积技术制备纳米硅薄膜的沉积过程和生长机制.本文指出氢基团为各项新技术发展的关键并将在今后纳米硅薄膜制备技术发展中起重要作用。 相似文献
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采用PECVD技术,在玻璃衬底上低温沉积了优质本征纳米硅薄膜,并利用Raman光谱对其微结构作了表征。研究结果表明,硅烷浓度、衬底温度Ts对表征纳米硅薄膜微结构的晶化率和平均晶粒尺寸参数影响很大。SiH4浓度越低,越有利于晶化,对应的晶化率拐点温度越低。平均晶粒尺寸、晶化率随衬底温度的升高具有相似的变化规律,谱中出现的拐点温度一致,暗示它们之间存在紧密的联系。从薄膜生长角度对该实验结果作了合理解释。 相似文献
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通过改变氢气对硅烷的稀释比R, 采用等离子体增强化学气相沉积(PECVD)方法制备出具有非晶/微晶相变过渡区的氢化硅薄膜, 并研究了所得硅膜在不同沉积阶段的微观结构和形貌、晶化效果和电学性能。研究结果表明, 当R=10时, 样品呈典型的非晶特性; 随着氢稀释比的增大, 薄膜表现出两相结构, 且衬底表面处的非晶过渡层逐渐减薄, 也即非晶向微晶的转变提前。但XRD结果显示, 硅膜的晶化率和平均晶粒尺寸随着R的增加呈先增后减的趋势, 在R=28.6时达到最大值。另外, 暗电导率和载流子浓度表现出了与晶化率一样的变化趋势, 显示出硅膜的电学性能与微观结构的高度正相关性。 相似文献
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采用等离子体化学气相沉积(PECVD)技术在不同N_2O流量条件下制备了镶嵌有纳米晶硅(nc-Si)的富硅氧化硅(SiOx)薄膜,利用透射电镜(TEM),X射线衍射分析(XRD),傅里叶变换红外(FTIR)和透射光谱技术研究了薄膜中的氢含量和氧含量变化及其对薄膜晶化度、薄膜键合结构和光吸收特性的影响。结果表明,薄膜由nc-Si粒子和非晶SiOx组成,为混合相结构。nc-Si的生长与氧化反应的竞争决定了薄膜微观结构、键合特性以及光吸收特性。随着N_2O流量的增加,薄膜的晶粒尺寸逐渐减小。晶界区过渡晶硅的比例减少,晶粒界面随之消失,带隙呈持续增加趋势。该实验结果为ncSi/SiOx薄膜在新型太阳电池中的应用提供了基础数据。 相似文献
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Standards are the basis for production enterprises to organize production ex-factory inspection trade 《中国标准化(英文版)》2008,25(1):24-25
Standards are the basis for production enterprises to organize production, ex-factory inspection, trade (delivery) and technical exchanges, product certification, quality arbitration and supervision.…… 相似文献
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Zusammenfassung Bei der Gestaltung von Ernteprozessen — beispielsweise des Prozesses Mähdrusch, Körnertransport und -abnahme — als transportverbundene Fließarbeitsverfahren mit mindestens zwei verschiedenen Arbeitsmitteln gibt es einen großen Optimierungsspielraum. Solche Prozesse sind mehrstufige Bedienungsprozesse mit gemischter Anordnung der Bedienungseinrichtungen. Außerdem besitzen sie stark ausgeprägte räumliche Aspekte. Es wird vor allem gezeigt, welche Merkmale solcher Prozesse in Simulationsmodellen abgebildet sein müssen, welche Zielgrößen in Abhängigkeit von welchen Einflußgrößen unter Berücksichtigung welcher Prozeßbedingungen ermittelt werden sollten und wie der Bewertungsprozeß zur Ermittlung der gewünschten Informationen gestaltet werden muß. 相似文献
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《中国标准化(英文版)》2014,(4)
正Responding to ISO’s appeal for survey for the to-be-developed ISO Strategy Plan for 2016-2020,SAC hosted a special workshop over the needs and comments of various fi elds on June 8 in Beijing.The workshop was attended by ISO President-elect and Ansteel General Manager Zhang Xiaogang,SAC Vice-Administrator Yu Xinli,and 30 experts from 相似文献
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《中国标准化(英文版)》2014,(5)
正The review group of Asia Pacific Laboratory Accreditation Cooperation(APLAC)carried out a 4-day peer review of the proficiency testing provider(PTP)for China National Accreditation Service for Conformity Assessment(CNAS)from July 28 to 31,2014.CNAS passed the PTP review with excellent performance.Two senior peer reviewers of APLAC made a comprehensive,rigorous and detailed review of CNAS’s PTP accreditation activities,and made the on-spot inspection of the review groups in Shanghai and Shenzhen respectively. 相似文献
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《中国标准化(英文版)》2014,(4)
正China and Greece Sign the Standardization Cooperation Agreement Witnessed by Chinese Premier Li Keqiang and Greek Prime Minister Antonis Samaras,AQSIQ Minister Zhi Shuping and ELOT Chairman and Executive Director Angelos Tolkas signed the SAC-ELOT Standardization Cooperation Agreement.The Agreement is one of the critical cooperation documents signed during Li Keqiang’s visit in Greece,encouraging China and Greece to 相似文献
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刘智洋 《中国标准化(英文版)》2014,(4):M0002-M0002
正The Chinese Premier Li Keqiang's recent trip to the UK has reinforced the China-UK comprehensive strategic partnership;just as the British Prime Minister David Cameron put it,"the relationship is gaining in strength,depth and understanding"after a bucket of business deals being inked worth more than 30 billion US dollars.From the first agreement signing in 2004 to the new agreement of mutual standards recognition and adoption in 相似文献
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《中国标准化(英文版)》2014,(4):3-3
正A national directory of standards complexes for strategic emerging sectors was recently developed and released jointly by 12governmental departments,namely,SAC,NDRC,MOST,MIIT,MEP,MOA,AQSIQ,State Forest Administration,State Administration of Science and Technology for National Defense,State Oceanic Administration and National Railway Administration. 相似文献
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《中国标准化(英文版)》2014,(4)
正Four new national standards on air pollutant emission control offi cially issued by the Ministry of Environment Protection(MEP)together with AQSIQ and SAC has been brought into force from July 1,2014.The Emission standard for air pollutants of coal-burning,oil-burning and gasfi red boilers,which is the strictest emission standard historically,will tackle the stubborn pollution problem of boilers and waste incineration in most of China’s regions. 相似文献
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《新型炭材料》2014,(6):460
New Carbon Materials is a bimonthly journal published with the permission of the Ministry of Science and Technology and of the State News and Publication Agency.The journal is sponsored by the Institute of Coal Chemistry,Chinese Academy of Sciences,and is published by Science Press.Aims and Scope 相似文献
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《中国标准化(英文版)》2014,(5):3-3
正Recently,National Copyright Administration of China(NCAC)has rewarded 215 organizations and 179 individuals for their outstanding efforts on investigating standards copyright infringement and piracy in 2013.Hua Jianhua,the Deputy-Director of National Standards Copyright Protection Workgroup Office won a third prize of the national individual award.In 2012,SAC set up the national standards copyright protection working group,and developed policies to crack down standards infringement and piracy behaviors and to strengthen standards copyright protection. 相似文献