用弹性反冲法分析薄膜中氢含量

弹性反冲探测分析法(ERDA)是分析微量氢元素的一种新颖方法。本文介绍用该法分析薄膜中氢含量的方法、原理和初步测量结果,对VYNS膜的测量结果和PIXE法间接分析结果在±10％误差范围内相符。此方法适用于分析厚度为1～10μm的薄样品,灵敏度约为5×10~(15)at./cm~2。     

用弹性反冲分析法测定吸附剂中氢的含量

本文介绍用弹性反冲分析技术分析了对二甲苯吸附剂中的氢含量。首先测定已知氢含量的Mylar膜的原子比,实验结果与预期值一致。实验中用Kapton膜作为标样,测定了各种工艺条件的吸附剂中的氢含量,为实际使用提供了依据。 本方法在E_0=2MeV下,可探测深度范围为0.5μm左右,深度分辨率约为700A,灵敏度为0.1％原子数。     

采用弹性反冲分析法同时测量薄膜中氢和氘的深度分布

给出由重叠反冲能谱计算氢和氘的浓度及深度分布的解谱技术，用４．５ＭｅＶ和４．２ＭｅＶ的α粒子作入射粒子得到两个反冲能谱。在考虑和不考虑能量展宽效应的情况下分析了钛膜中氢和氘的深度分布；发现考虑能量展宽效应的影响得到的氢和氘的深度分布是令人满意的。     

弹性反冲探测技术在材料分析中的应用

利用HI-13串列加速器提供的高品质的127I束,采用弹性反冲探测技术对材料表面成分和杂质的深度分布进行了分析.用△E-E望远镜探测器同时分析靶材料中从氢至中重的所有元素,其深度分辨为20～30 nm.用Q3D磁谱仪及其焦面探测器的高分辨动量分析,得到了纳米量级的深度分辨,此方法具有对纳米厚度的多层薄膜材料进行测试的能力.     

用C离子的弹性反冲法测固体中氢分布

文章介绍了用1.7MV小串列加速器提供的4—7MeV多电荷C离子,采用弹性反冲法(ERD)分析了α-Si:H中氢元素的深度分布。计算表明,近表面处的深度分辨率为15-30nm,可探测深度100—700nm。探讨了入射能量和散射几何条件的优化问题。比较了几种分析方法的测量结果。     

钛膜中氘氚浓度的弹性反冲法测量

研究采用弹性反冲探测(ERD)方法测量钛膜中氘、氚的浓度。实验所用Ti膜用磁控溅射法制备，膜厚小于100nm，以石英玻璃（SiO₂）为底衬，Ti膜加镀了1层Ni保护膜，以防Ti膜氧化和增强Ti膜吸氢。以6.0MeVO粒子作为入射粒子，在30°方向上探测反冲粒子，在此实验条件下，O粒子对D、T的碰撞截面为卢瑟福截面。对两个样品用ERD方法测量钛膜中的D、T含量，获得了D、T的面密度。测量结果表明，采用如上方法测量Ti膜中D、T浓度的误差小于7％。     

反冲质子磁分析技术的研究进展

反冲质子磁分析技术作为探测聚变中子能谱的新技术,具有能量分辨率和信噪比高的优点,适合混合干扰和宽量程中子注量率条件下的测量,已经成为聚变装置中子诊断的重要手段.介绍了国际上几个大科学装置研制的反冲质子磁分析谱仪和实验结果,磁质子反冲谱仪(MPR),磁分析系统使用两块分离的电磁铁,能量分辨率达2.5％;磁反冲谱仪(MRS...     

反冲质子谱的计算模拟及氢深度分布的研究

本文介绍了一种弹性反冲探测分析冲质子谱模拟的计算方法。用这种方法对４０ｋｅＶ质子注入硅中和非晶硅薄膜中氢浓度的深度分布进行了研究，并取得了良好的结果。     

反冲靶中子探测系统DT灵敏度的实验研究

设计了实验标定用PIN-反冲质子靶室探测系统,利用加速器中子源对探测系统的DT中子灵敏度进行了实验研究,并与理论计算结果进行了比较,一致性较好.实验结果检验和验证了理论计算程序,可以为同种类型探测系统的参数设计提供实验依据.     

中国实验快堆燃料破损探测系统建模、计算与分析

在借鉴国外研究成果的同时,结合中国实验快堆(CEFR)燃料破损探测系统的设计特点,建立了CEFR燃料破损探测系统的计算模型,并根据所建计算模型,利用LabWindows/CVI开发了CEFR燃料破损探测系统计算分析程序。用该程序进行了缓发中子探测系统可探测最小破损面积的计算,并对裂变产物的释放产生比进行了计算验证。     

CALCULATION AND OPTIMIZATION OF EXPERIMENTAL PARAMETERS IN ELASTIC RECOIL DETECTION (ERD)

Elastic recoil detection (ERD) proposed for the analysis of light elements in a heavier matrix is an appropriate method for its specialities. Optimization of experimental parameters in ERD such as scattering geometry and incident beam energy is very important when using a small accelerator with energy lower than 10 MeV. In this paper a computer program ERDAl is developed for the purpose, and is proved to be useful for practical handling of ERD experiments.     

Unique capabilities of heavy ion elastic recoil detection with gas ionization detectors

Specific aspects of heavy ion elastic recoil detection (ERD) with gas ionization detectors have been studied using representative measurements. A particular strength of the technique is the detection and direct quantification of elements with atomic numbers in the range Z=2–8, which are often not accessible with other ion beam techniques. Within the wider spectrum of analytical techniques in materials science, heavy ion ERD has unique capabilities, when the particular problem requires in addition the analysis of heavy elements or hydrogen detection. Whenever only heavy element analysis or only hydrogen profiling is of interest, alternative techniques tend to be superior.     

ELASTIC RECOIL DETECTION ANALYSIS OF LIGHT ELEMENTS IN THIN FILMS USING 35 MeV~(35) Cl~(6+) BEAM

In this paper, an elastic recoil detection analysis method is described using 35 MeV ~(35)Cl as incident ions. This method can determine and profile simultaneously H, D, He, C and O or in the other case, H, C, N and O. The depth resolution for the elements heavier than He is better than 20 nm. It has been applied to study the Co/Si and TiN thin films, and the depth profiles of He implanted in monocrystal silicon.     

Threshold stoichiometry for beam induced nitrogen depletion of SiN

Measurements of the stoichiometry of silicon nitride films as a function of the number of incident ions using heavy ion elastic recoil detection (ERD) show that beam-induced nitrogen depletion depends on the projectile species, the beam energy, and the initial stoichiometry. A threshold stoichiometry exists in the range 1.3>N/Si1, below which the films are stable against nitrogen depletion. Above this threshold, depletion is essentially linear with incident fluence. The depletion rate correlates non-linearly with the electronic energy loss of the projectile ion in the film. Sufficiently long exposure of nitrogen-rich films renders the mechanism, which prevents depletion of nitrogen-poor films, ineffective. Compromising depth-resolution, nitrogen depletion from SiN films during ERD analysis can be reduced significantly by using projectile beams with low atomic numbers.     

Characterisation of ferromagnetic magnetic storage media surfaces by complementary particle induced X-ray analysis and time of flight-energy dispersive elastic recoil detection analysis

Thin (10 nm–1 μm) films of ferromagnetic material constitute an important class of materials that are difficult to analyse by conventional ion beam analytical (IBA) techniques because they are based on the ferromagnetic elements (Co, Fe, Mn, Ni, and Cr). The similar or overlapping isotope masses makes it difficult to separate the elemental signals using time of flight and energy dispersive elastic recoil detection (ToF-E ERD). In this exploratory study we have investigated the use of Particle Induced X-ray Emission (PIXE) measurements to refine the mass dispersive depth profile information from ToF-E ERD. The surfaces of two commercial magnetic media were investigated. One sample was a double density diskette with a coating of ferrite particles in an organic binder. The other sample was a complex C/Co/Cr/Ni–P/Al multilayer structure taken from a standard hard disc. The Lund nuclear microprobe with a 2.55 MeV proton beam was used for PIXE analysis. ToF-ERD measurements were carried out using a 55 MeV ¹²⁷I¹⁰⁺ ion beam incident at 67.5° to the surface normal. The time of flight and kinetic energy of recoils ejected at 45° to the ion beam direction was measured in a detector telescope. The findings demonstrate that by detailed analysis of the PIXE spectra it is possible to remove the ambiguities in mass assignment of the ToF-ERD data associated with the ferromagnetic elements.     

Oxygen deficiency and excess of rutile titania (1 1 0) surfaces analyzed by ion scattering coupled with elastic recoil detection

Oxygen deficiency and excess of rutile titania (TiO₂) surfaces are important factors for catalytic activities of metal nano-particles on the TiO₂ supports. Medium energy ion scattering (MEIS; 80 keV He⁺) coupled with elastic recoil detection analysis (ERD; 150 keV Ne⁺) can determine the numbers of bridging O (O_br) vacancies (V_O) and excess O atoms adsorbed on the 5-fold Ti rows of TiO₂(1 1 0) surfaces. The amounts of V_O and adsorbed O were derived by H₂O and ¹⁸O₂ exposure followed by ERD and MEIS analyses, respectively. The present analysis revealed that only about a half of V_O are filled and a comparable amount of O atoms are adsorbed on the reduced TiO₂(1 1 0) surface after exposure to O₂ (1000 L; 1 L = 1 × 10⁻⁶ Torr s) at room temperature (RT). We also detected the adsorbed O for the hydroxylated TiO₂(1 1 0) after ¹⁸O₂ exposure at RT. Finally, it is shown that the O adsorbed on the Ti rows reacts with CO probably to form CO₂ at RT. Based on the results obtained here, we clarify the reason why only a half of V_O are filled by exposing reduced surface to O₂ at RT and what is the primary source of subsurface excess electronic charge, which acts as a leading part of the surface electrochemistry and gives the defect state in the band gap seen in the valence band spectra for reduced and hydroxylated TiO₂(1 1 0) surfaces.     

Characterization of optical coatings by Rutherford backscattering spectrometry and elastic recoil detection analysis

The thicknesses of optical coatings vary between a few hundred Å and a few μm. Ion-beam techniques are ideally suited for probing this thickness range and in this work we discuss the use of Rutherford backscattering spectrometry (RBS) and elastic recoil detection analysis (ERDA) for characterizing optical coatings such as ZnS, YF₃,Y₂O₃, C and Ge on silicon and germanium substrates. A general evaluation of the favourable features as well as the limitations of RBS and ERDA ion beam analysis for characterizing optical coatings is given.     

Measurement of recoil nuclei losses for proton-induced reactions in Al, Si, Mg and Fe at 200 and 500 MeV

The recoil losses of product nuclei in proton-induced reactions at 200 and 500 MeV in Al, Si, Mg and Fe targets were measured using carbon catcher foils or stacks of Mylar foils. In all cases, the recoil losses were less than 1% for the target thicknesses used and so in the ongoing systematic study to measure cross sections for proton- and neutron-induced reactions, these losses are not important. For Fe targets irradiated at 200 MeV, the recoil losses in the forward direction for several product nuclei measured in both a carbon catcher foil and a Mylar stack were in good agreement. From the recoil losses, the mean forward recoil ranges for several product nuclei were calculated.