双PSD实现长直导轨四自由度测量的新方法

介绍基于双PSD实现大长度宽范围直线导轨俯仰角、偏摆角以及空间二维直线度等四个自由度在线测量的新型方法,对其测量原理进行了分析和验证,并建立求取长直导轨俯仰角、偏摆角的数学模型和基于激光空间偏角修正基础上的二维直线度的数学模型;讨论影响测量过程的各种因素,提出消除其影响所应采取的措施。     

大尺寸长轴二维直线度测量方法研究

针对大尺寸长轴的特点,采用二维测头相互补偿的机理,提出了一种基于时域三点法的二维直线度测量方法。使用二维测头对长轴水平和竖直两维方向上的轴线进行直线度测量,既消除了导轨平移误差和竖直偏摆误差,又补偿了测头由于溜板水平偏转而脱离长轴母线时引起的误差。仿真和实验证实了二维直线度测量方法的有效性。     

新型纳米级二维共平面工作台的参数测试

研究开发了一种新型纳米级二维共平面工作台,介绍了其机械结构及工作原理,进行了测量系统测量准确性、重复性以及运动导轨直线度（偏摆）实验,结果表明,工作台具有较高的测量稳定性,直线度高、重复性好．可满足高精度测量的需要。     

二维自准直仪

本文介绍一种应用于导轨运动直线度或偏摆角测量的新型光电自准直仪:它采用了PSD(Position Sensor Detector)位置敏感器对光反射像的一维或二维位置进行准确测量,并把这一位置信号经过一适     

3D激光球杆仪伸缩导轨运动误差调整与测量

伸缩装置作为3D激光球杆仪的主要部件,其运动精度影响3D激光球杆仪俯仰角和偏摆角的测量值,为克服精密伸缩装置加工困难且成本较高的缺点,获得满足3D激光球杆仪测量精度的伸缩装置,提出以导轨为组件的伸缩导轨运动误差的调整和测量方法。该方法以直线度误差作为伸缩导轨运动精度的测量指标,采用自制准直仪进行伸缩导轨运动误差测量与调整。首先,通过标定实验和稳定性实验验证准直仪的测量可靠性。然后,以准直仪为测量基准进行导轨直线度误差测量,以导轨直线度调整方法为依据进行导轨直线度调整。最后,组装伸缩导轨,逐一运动各层导轨完成伸缩导轨运动误差测量;采用最小二乘法拟合得到上、下导轨与光轴在XR和YR平面的平行度误差,并计算上导轨和下导轨在XR和YR平面的平行度误差;调整上导轨角度,使上、下导轨平行,完成伸缩导轨运动误差调整。实验结果表明:上导轨X向和Y向直线度误差分别由44μm和439μm降到20μm和14μm,下导轨X向和Y向直线度误差分别由45μm和158μm降到25μm和37μm,伸缩导轨X向和Y向直线度误差分别由105μm和281μm降到47μm和48μm,达到提高精度的目的。     

五角棱镜扫描系统中调整误差及制造角差的影响分析-

五角棱镜扫描系统可以实现高精度测量光学表面面形,为了全面分析五角棱镜扫描系统中的调整误差及制造角差对指向误差和测角仪测量误差的影响。根据旋转变换矩阵和光线矢量追迹理论,运用MATLAB编写通用的五角棱镜扫描系统的光线矢量追迹函数及相关分析程序。同时通过二维二次多项式拟合推导出,在一定角度范围内,用于计算指向误差和测角仪测量值的二阶近似公式。分析结果表明：在扫描测量过程中,测角仪的俯仰角和五角棱镜的制造角差对沿扫描方向指向误差和测角仪垂直方向测量值的影响是常量,五角棱镜扫描过程中的偏摆角和滚动角与其成二次函数关系;五角棱镜的偏摆角和滚动角、测角仪的偏摆角与垂直扫描方向指向误差和测角仪水平方向测量值均成线性关系。当导轨误差滚动10"、偏摆10",系统的各项调整误差为±3"时,沿扫描方向最大测角误差为0.0010666"。     

使用短基准的超精密长导轨直线度误差测量方法

在超精密加工与检测技术中,高精度长导轨直线度误差的测量与补偿技术一直是一个研究重点。在系统研究现有各种导轨直线度误差测量方法的基础上,提出一种使用短基准的导轨直线度误差测量方法,将长导轨直线度误差的测量问题分解为具有一定重叠区域的数段较短导轨直线度误差的测量问题。直接利用超精密直线度物理基准测量各段导轨直线度误差,通过将各段导轨直线度误差拼接起来,重构出长导轨的直线度误差。利用空间坐标变换关系建立基于最小二乘法的直线度误差测量算法,以及相对机械运动误差对测量结果影响的数学模型,分析研究重叠区域二次采样点的匹配误差,以及测量误差、采样频率等因素对重叠区域长度选择的影响规律。对长550 mm的气浮导轨进行实际测量试验,仿真与测量试验表明上述方法简单实用,可操作性强。     

三维姿态角高精度测量装置

基于二维自准直仪和坐标系旋转变换矩阵,提出一种高精度、高稳定性三维姿态角(偏摆角、俯仰角和滚转角)测量方法,并设计了一种三维测角装置。介绍了该装置的工作原理和结构组成。建立了三维测角模型,根据自准直测角原理和坐标旋转矩阵推导了理论算法。基于测量要求设计了光学系统,采用现场可编程门阵列(FPGA)单芯片实现了实时双CMOS图像传感器的驱动成像、像点识别与细分定位、三维转角计算及与USB的快速通信。提出了三维测角装置的标定方法,保证了实际设备参数与理论设计数据的统一。最后对提出的滚转角测量算法进行了实验验证,并分析了影响测角精度的因素及其影响程度。标定和试验结果表明:在±20′的视场范围内,三维测角装置的偏摆角、俯仰角和滚转角的测量精度分别达到了2.2″,2.5″和8.7″。该结果验证了设计的装置结构简单、稳定可靠、精度高,且易工程实现三维姿态角的测量。     

大跨距、小步距法测量导轨系统的导轨直线度研究

在导轨系统中,导轨的直线度误差通常可利用自准直仪或电子水平仪,采用节距法来达到误差检定的目的。而节距法只对导轨副行程相对较大的导轨系统奏效,对于文中提到的两类小行程导轨系统而言,传统的节距法则无法实现测量。针对两类跨距大而行程范围相对较小的导轨系统,笔者基于导轨系统中导轨直线度、直线度运动误差、角运动误差三者之间的相互关系,提出以大跨距、小步距法测量该类导轨系统的导轨直线度;结合双频激光干涉仪和电子水平仪测量运动部件所得到的直线度运动误差,以及对应位置下的角运动误差,处理得到了导轨系统的导轨直线度。     

基于步距规的坐标测量机的误差补偿方法

数值误差补偿是提高三坐标测量机测量精度的经济而有效的手段。利用步距规在测量空间的不同位置与几何误差的数学关系,提出一种基于步距规的三坐标测量机的误差分析方法,得出三坐标测量机的定位误差、角摆误差、垂直度误差和直线度误差,并在三坐标测量机上进行了误差补偿实验,验证了该方法的有效性。该方法对机床导轨的几何误差分析也同样适用。     

三点接续式大尺寸工件直线度动态测量方法研究

讨论大尺寸导轨直线度的动态测量方法。首先介绍了三点接续式测量方案的基本原理及数据处理方法。文章结合电梯T型导轨的侧导向面和上导向面的特点,分别选择涡流传感器和平行激光—线阵CCD传感器,作为直线度动态测量的实现方案。最后,对三点接续式方法的测量误差进行了分析。     

A high-precision five-degree-of-freedom measurement system based on laser collimator and interferometry techniques

A novel sensitivity improving method for simultaneously measuring five-degree-of-freedom errors of a moving linear stage is proposed based on collimator and interferometry techniques. The measuring principle and parameters of the system are analyzed theoretically. The experimental results proved that the resolution of the linear displacement of the proposed method has twice that of the current linear interferometer, and the resolutions of the two-dimensional straightness error measurement can be improved by a factor of 8 compared with the movement of the retroreflector itself by using multireflection and lens magnification. The resolutions of the pitch and yaw angular error measurement have been improved by a factor of 10 compared with the rotation of the plane mirror itself by using expander lenses. The whole measuring system is characterized of simple structure, small volume, and high precision. The moving component of the measurement system is wireless, which eliminates the errors and inconvenience introduced by the wire connection. Calibration and comparison tests of this system compared with Renishaw laser interferometer system have been carried out. Experimental results show good consistency for measuring a linear guide way.     

长床身导轨快速调平措施

针对现场中长床身导轨调平不便之处,介绍了以一条通过首测量点的水平线作为检测,调整及评定基的调平方法。并说明了导轨直线度检测及调整量准确控制等具体措施。     

Measurement of multi-degree-of-freedom error motions of a precision linear air-bearing stage

This paper describes the measurement of straightness error motions (vertical straightness and horizontal straightness) and rotational error motions (pitch, yaw and roll) of a commercial precision linear air-bearing stage actuated by a linear motor. Each of the error motions was measured by two different methods for assurance of reliability. The stage was placed in the XY-plane and moved along the X-direction. The pitch error and yaw error, which were measured by an autocollimator and the angle measurement kit of a laser interferometer, were about 8.7 and 1.6 arc-s, respectively, over a travel of 150 mm with a moving speed of 10 mm/s. The roll error was measured by the autocollimator through scanning a flat mirror along the X-direction. The second method for roll error measurement was to scan two capacitance-type displacement probes along the flat surface placed in the XZ-plane. The two probes with their sensing axes in the Y-direction were aligned with a certain spacing along the Z-axis. The roll error can be obtained by dividing the difference of the outputs of the two probes by the spacing between the two probes. The roll error was measured to be approximately 11.8 arc-s over the 150 mm travel. The horizontal straightness error and the vertical straightness error (Y- and Z-straightness errors) were measured by using the straightness measurement kit of the laser interferometer. The second method for straightness measurement was to scan the flat surface with a capacitance-type displacement probe. The horizontal and vertical straightness errors of the stage over the 150 mm travel were measured to be approximately 207 and 660 nm, respectively.     

线性位移台直线度高精密外差干涉测量装置

直线度测量中往往存在有限的测量范围、精度低和阿贝误差等问题。本文提出了一种高精密直线度外差干涉测量装置,该装置由Koester棱镜、角锥棱镜、1/4波片、楔面棱镜和楔面反射镜构成。楔面棱镜为直线度传感元件,角隅棱镜和楔面反射镜是测量信号的回光元件。双频激光信号进入直线度干涉仪后组成几何空间对称四光路测量信号。四路测量光走过几乎完全相同的路径有效地提高了干涉仪的稳定性,并且使空程误差最小化。使用楔角为1°的楔角棱镜和2π/512细分的相位计,直线度测量分辨力为17.71nm。该方法不需要与行程同长的大反射参考镜,但同样能实现高分辨率,理论和实验证明空间对称测量结构避免了由俯仰,偏转和滚转角引起的阿贝误差的串扰,而且光学元件少,结构简单,方便易用,结果可以直接溯源到米的定义。     

一种滚转角和直线度同步干涉测量方法的研究

提出一种用于精密线性位移台滚转角和运动直线度同步测量的激光外差干涉系统。该干涉系统由一个Koster棱镜、角隅棱镜、分光镜、1/2波片、直角棱镜、1/4波片以及楔面棱镜和楔面反射镜组成。楔面棱镜作为测量运动直线度和滚转角的传感器固定在线性导轨上,当双频激光器的光射入干涉系统中后,形成空间对称的六光束测量信号。空间结构对称、系统共光路的特点使光学分辨率比普通的迈克尔逊干涉仪高一倍,光程死区达到最小。系统稳定性好,抗环境干扰能力强。光路对称使得增加或减小的光程变化相同,其他自由度引起的光程变化相互抵消,仅有运动直线度和滚转角的变化可以进入光程差,有效地排除其他自由度及阿贝误差的串扰,实现高精密测量。试验证明相互平行且不同频率的两束光在同一反射系统中发生运动直线度偏移和滚转角变化时,通过两束光携带的不同相位信息能直接得到运动直线度和滚转角的变化值。它不需要一条与行程同样长度的大反射镜作参考便能够实现高分辨率测量,简单实用,可直接溯源米定义。     

A new 2D error separation technique for performance tests of CNC machine tools

The error separation technique is widely adopted for many machine tool performance tests. The most common applications include roughness measurement, straightness measurement and spindle measurement. In this paper, two error-separation technologies, the straightness reversal technique and the semi-reversal technique, are developed. The straightness reversal technique can be adopted for the straightness measurement of a linear axis. The semi-reversal technique can be adopted for setting error separation in a contouring test and in the spindle error measurement. In this paper, mathematical models have been developed. In order to verify the possibility of the semi-reversal technique, related experimental work has been carried out.     

基于激光干涉仪的直线度误差测量

机床导轨直线度误差的测量方法有很多种,其中最常用的是水平仪法、自准直仪法和平尺法。主要介绍的是用激光干涉仪测量直线度误差的方法、原理及误差分析,并提出为减少测量误差在测量过程中应注意的几个问题。     

Development of high-precision micro-coordinate measuring machine: Multi-probe measurement system for measuring yaw and straightness motion error of XY linear stage

Today, with the development of microsystem technologies, demands for three-dimensional (3D) metrologies for microsystem components have increased. High-accuracy micro-coordinate measuring machines (micro-CMMs) have been developed to satisfy these demands. A high-precision micro-CMM (M-CMM) is currently under development at the National Metrology Institute of Japan in the National Institute of Advanced Industrial Science and Technology (AIST), in collaboration with the University of Tokyo. The moving volume of the M-CMM is 160 mm × 160 mm × 100 mm (XYZ), and our aim is to achieve 50-nm measurement uncertainty with a measuring volume of 30 mm × 30 mm × 10 mm (XYZ). The M-CMM configuration comprises three main parts: a cross XY-axis, a separate Z-axis, and a changeable probe unit. We have designed a multi-probe measurement system to evaluate the motion accuracy of each stage of the M-CMM. In the measurement system, one autocollimator measures the yaw error of the moving stage, while two laser interferometers simultaneously probe the surface of a reference bar mirror that is fixed on top of an XY linear stage. The straightness motion error and the reference bar mirror profile are reconstructed by the application of simultaneous linear equations and least-squares methods. In this paper, we have discussed the simulation results of the uncertainty value of the multi-probe measurement method using different intervals and standard deviations of the laser interferometers. We also conducted pre-experiments of the multi-probe measurement method for evaluating the motion errors of the XY linear stage based on a stepper motor system. The results from the pre-experiment verify that the multi-probe measurement method performs the yaw and straightness motion error measurement extremely well. Comparisons with the simulation results demonstrate that the multi-probe measurement method can also measure the reference bar mirror profile with a small standard deviation of 10 nm.