激发频率对VHF-PECVD制备微晶硅材料性能的影响

采用甚高频等离子增强化学气相沉积(VHF-PECVD)的方法制备了硅烷浓度分别为6％和7％， 随激发频率变化(40—70MHz)的氢化微晶硅(μc-Si∶H)薄膜材料.研究了材料的电学特性、 结构特性、沉积速率与激发频率之间的关系.结果发现材料的光敏性随频率的增加先降低后 提高，晶化率和沉积速率的变化趋势与之相反；在晶化率最高点，材料在(220)的晶向衍射 峰最高.并从光发射谱的角度研究了材料结构和沉积速率随频率变化的原因. 关键词： 甚高频等离子增强化学气相沉积 本征微晶硅 激发频率     

硅薄膜沉积过程中等离子发光基团的一维空间分布研究

使用光发射谱(OES)对甚高频等离子增强化学气相沉积(VHF-PECVD)技术沉积硅薄膜时的等离子体发光基团的空间分布进行了在线监测和研究. 研究表明：等离子体的不同发光基团都存在着一个中间强度较大的区域和两边电极附近的暗区;增大硅烷浓度和提高辉光功率都会增大SiH^*峰强度;硼烷的加入,使得SiH^*和Hα^*峰强度增大,但硼烷流量变化的影响很小;硼烷流量增大,材料的晶化率下降,而I_{［Hα^*］关键词： 甚高频等离子增强化学气相沉积 等离子体 发光基团 空间分布}     

二次离子质谱深度剖面分析氢化微晶硅薄膜中的氧污染

运用二次离子质谱研究了甚高频等离子体增强化学气相沉积制备的不同硅烷浓度和功率条件下薄膜中的氧污染情况.结果发现：薄膜中的氧含量随硅烷浓度和功率的变化而改变.制备的微晶硅薄膜，晶化程度越高薄膜中的氧含量相对越多.另外，不同本底真空中的氧污染实验结果表明：微晶硅材料中的氧含量与本底真空有很大的关系，因此要制备高质量的微晶硅材料，高的本底真空是必要条件. 关键词： 甚高频等离子体增强化学气相沉积 二次离子质谱 氧污染     

微晶硅薄膜高速沉积及电学性质的研究

采用甚高频等离子体增强化学气相沉积（VHF-PECVD）技术在高功率密度和高压强条件下,通过改变硅烷浓度和气体总流量对薄膜沉积参数进行了两因素优化,最终在硅烷浓度为45%,气体总流量为100 sccm条件下,获得沉积速率142 nm/s,电导激活能047 eV的优质硅薄膜;同时,通过单因素优化制备出沉积速率为21 nm/s的微晶硅薄膜.利用晶粒间界势垒模型和费米能级统计偏移模型对薄膜的电学特性和传导行为分别进行了研究分析,同时初步分析了“后氧化”对薄膜电学性能的影响. 关键词： μc-Si:H 甚高频等离子体增强化学气相沉积 高速沉积 电学特性     

甚高频高速沉积微晶硅薄膜的研究

采用甚高频化学气相沉积(VHF-PECVD)技术制备了系列微晶硅(μc-Si:H)薄膜样品,重点研究了硅烷浓度、功率密度、沉积气压和气体总流量对薄膜沉积速率和结晶状态的影响,绘制了沉积气压和功率密度双因素相图. 以0.75nm/s的高速沉积了器件质量级的微晶硅薄膜,并以该沉积速率制备出了效率为5.5%的单结微晶硅薄膜电池. 关键词： 微晶硅薄膜 高速沉积 甚高频化学气相沉积     

低速p/i界面缓冲层对高速沉积微晶硅太阳电池性能的影响

在采用高压高功率的甚高频等离子体增强化学气相沉积(VHF-PECVD)技术高速沉积微晶硅(μc-Si：H)太阳电池过程中,产生的高能离子对薄膜表面的轰击作用会降低薄膜质量和破坏p型掺杂层(p层)与本征层(i层)之间的界面特性.针对该问题提出在电池中引入低速沉积的p/i界面层的方法,即在p层上先低速沉积一薄层本征μc-Si：H薄膜,然后再高速沉积本征μc-Si：H薄膜.实验结果表明,引入低速方法沉积的界面层有效地提高了p/i界面特性和i层微结构的纵向均匀性,而随界面层厚度的增加,i层中的缺陷态先降低后增加, 关键词： μc-Si：H太阳电池 甚高频等离子体增强化学气相沉积 p/i界面层     

硼对沉积本征微晶硅薄膜特性的影响

采用甚高频等离子体增强化学气相沉积(VHF-PECVD)技术制备了不同腔室环境下的微晶硅薄膜.对单室沉积掺杂层p材料后遗留在腔室中的硼对本征微晶i材料电学特性和结构特性的影响进行了详细研究.测试结果表明：单室沉积p层后的硼降低了微晶i层材料的暗电导,增加了材料的光敏性;由于硼对i层污染程度的不同,使得材料的激活能发生了变化;腔室中残余的硼也导致微晶硅薄膜的结晶状况恶化,同时弱化了材料的(220)择优取向.而在较高功率和较强氢稀释下制备的晶化率较高,(220)晶向明显择优的材料受硼污染影响相对减小. 关键词： 单室 甚高频等离子体增强化学气相沉积 微晶硅 硼     

硅薄膜材料的光电导谱分析

利用甚高频等离子体增强化学气相沉积法（VHF-PECVD）,通过改变氢稀释比制备出一系列硅薄膜样品。由弱光条件下光电导谱分析了材料的吸收系数及缺陷态密度,结果表明随着氢稀释比的增加,材料的长波响应增大,缺陷态密度（NS）逐渐减小,当大于16.7时,NS开始增加,这是杂质与晶粒间界相互作用的结果。     

气体滞留时间对高速沉积的微晶硅薄膜性能的影响分析

实现高速沉积对于薄膜微晶硅太阳电池产业化降低成本是一个重要手段.采用超高频等离子体增强化学气相沉积(VHF-PECVD)技术，实现了微晶硅硅薄膜的高速沉积，并通过改变气体总流量改变气体滞留时间，考察了气体滞留时间在化学气相沉积(CVD)过程中对薄膜的生长速率以及光电特性和结构特性的影响.采用沉积速率达到12?/s的高速微晶硅工艺制备微晶硅电池，电池效率达到了5.3％. 关键词： 气体滞留时间 高速沉积 微晶硅 超高频等离子体增强化学气相沉积     

VHF等离子体光发射谱(OES)的在线监测

采用光发射谱(OES)测量技术，对不同制备条件下的甚高频(VHF)等离子体辉光进行了在线监 测.实验表明，VHF等离子体中特征发光峰(Si，SiH,H_α,H^*_β 等)的强度较常规的射 频(RF)等离子体明显增强，并且在制备μc-Si：H的工艺条件下(H稀释度R(H₂/S iH₄)=23 )，随激发频率的增加而增大，这些发光峰的变化趋势与材料沉积速率的变化规律较相似.Si H峰等的强度随气压的变化则因硅烷H稀释度及功率的不同而异：高H稀释(R=23)时，SiH峰强 度在低辉光功率下随反应气压的增大单调下降，在高辉光功率下随气压的变化呈现类高斯规 律；低H稀释(R=5．7)时， SiH峰随气压的变化基本上是单调下降的，下降速率也与功率有 关，这些结果表明，VHF-PECVD制备μc-Si：H和a-Si：H的反应动力学过程存在较大差异.此 外，随着激发功率的增大，Si，SiH峰都先迅速增大然后趋于饱和，并且随着H稀释率的增大 ，将更快呈现饱和现象.通过对OES结果的分析与讨论可知，VHF-PECVD技术沉积硅基薄膜可 以有效提高沉积速率，而且，硅基薄膜的沉积速率的进一步提高需要综合考虑H稀释度、气 压和功率等的匹配与优化. 关键词： 甚高频等离子体化学气相沉积 氢化硅薄膜 光发射谱     

Structure of RF Parallel-Plate Discharges

The intensity distribution along the discharge axis in a parallel-plate RF-glow discharge was measured in the pressure range of 80 mtorr to 1 torr in nitrogen, argon, and mixtures including attaching gases. Time-averaged spectroscopic measurements showed that the large intensity variations are caused by variations in electron density, at least in the space between electrodes and intensity maxima. In this space, the electron temperature was found to be constant; it decreases towards the center of the discharge. With decreasing pressure, in gases with lower collision frequency and at lower RF frequencies, the intensity peaks move away from the electrodes. Adding an attaching gas made the intensity distribution more uniform. A dc bias voltage on one electrode does not alter the distribution until very high voltages are applied. Time-resolved measurements indicate intensity peaks initially moving away from the electrode negative at a particular half-cycle of the RF frequency with intensities corresponding to the averaged distributions. The peaks are attenuated beyond the maximum, and their velocity increases towards the center and can become negative in time. A simple model including time- and spatially varying oscillations shows the same behavior.     

Geometrical optimization of a surface DBD powered by a nanosecond pulsed high voltage

In this study, surface Dielectric Barrier Discharge (DBD) actuators powered by nanosecond pulsed high voltage are investigated. The goal is to experimentally characterize the surface DBD actuators in terms of electrical and geometrical parameters.The actuators are made of two conducting electrodes separated by a thin dielectric (Kapton films) and arranged asymmetrically. The active electrode is connected to a pulsed high voltage power supply (voltage up to ±10 kV, rise and fall times of 50 ns and pulse width of 250 ns) and the second electrode is grounded.The experimental results show that the energy per pulse (normalized by the length of the active electrode) is smaller when one increases the inter-electrode spacing between 1 and 3 mm, the thickness of the dielectric barrier between 120 and 360 μm or the length of the electrodes between 10 and 50 cm, for both applied voltage polarities.Optical characterization of the plasma layer for different electrode gaps has been investigated by using an ICCD camera. Results indicate that the plasma produced by positive and negative rising voltage propagates in a streamer-like regime with numerous and well-distributed channels, for any electrode gap distance. However, the positive and negative falling voltage produces similar discharges only for large electrode gaps. In this case, the plasma layer starts from a corona spot in contact with the active electrode and expands in the direction of the grounded electrode in a plume shape.     

Printed Dielectrophoretic Electrode-Based Continuous Flow Microfluidic Systems for Particles 3D-Trapping

Inkjet-printing is used to fabricate dielectrophoretic electrodes able to trap polystyrene (PS) microparticles as well as model planktonic cells. The possibility of rapid prototyping offered by inkjet-printing allows the rational design of microchannels with tailored electric field distributions experienced by the suspended particles, which in turn provides a handle to drive them towards target regions. Specifically, this goal is achieved using two facing substrates constituting the bottom and the top walls of the channel, with a pair of interdigitated electrodes previously patterned by inkjet-printing on each side. Influence of electrode polarization (magnitude and frequency of the input signal) is investigated both theoretically, by modeling the electric field distribution inside the channel, and experimentally using confocal fluorescence microscopy. The printed device is able to sort circulating PS particles as a function of their size, with diameters ranging from 0.5 to 5 µm, as well as to separate planktonic species according to their composition (Alexandrium minutum versus Prorocentrum micans). This work paves the way for the development of large-area, microstructured dielectrophoretic electrodes able to separate the constituents of samples at flow rates up to 150 µL mn⁻¹.     

Methods to control parameters of a diffraction grating on the surface of lithium niobate electro-optical crystal

Optical transmission and directivity pattern of a tunable diffraction grating that is based on the X-cut lithium niobate electro-optical crystal are studied. It is demonstrated that the intensities in 0 and ±1 diffraction orders decrease by 40% relative to the original level when a voltage of 792 V is applied to electrodes on the crystal. Diffraction orders at angels of ±λ/(2d) and ±3λ/(2d) are demonstrated. The changes of directivity pattern are caused by scattering phase diffraction grating that emerges in the crystal in the presence of the electric field of electrodes and vanishes in the absence of voltage. A hysteresis dependence of the intensity of the zero diffraction order on the voltage is related to the formation of needle-shaped domains with a length of up to 100 μm and a width of up to 10 μm that are oriented perpendicularly to the electrodes. In the vicinity of the domains, the electric field causes rotation of the crystal indicatrix and depolarization and scattering of the transmitted radiation. Under normal conditions, the lifetime of the domains is several weeks when the voltage is switched off and the electrodes are not short-circuited.     

Characterization of electrode material for electrostatic spray charging: Theoretical and engineering practices

A new electrode material such as Nickel (200/201 forged bar) is used for spray charging. Comparative study has been made using different materials electrode viz. Nickel, Copper, Stainless Steel, Brass, and Aluminum; electrodes were ring shape with same inner diameter 15.0 mm and outer diameter of 22.0 mm of thickness 3.5 mm. The experiments were conducted in air atmosphere at ambient conditions (T = 20 ± 2 °C, RH = 46 ± 3%), with an air feed rate of 24.6 l/min, liquid feed rate 90.0 ml/min and applied voltage ranging from 0 to +3.0 kV. The results of applied induction electrification process were characterized by a charge-to-mass factor as a function of electrode material.     

石墨烯与金属的欧姆接触理论研究

石墨烯材料应用于多种电子器件时不可避免地要与金属电极接触,它们之间的接触电阻直接影响了器件的性能.为了揭示影响金属电极与石墨烯间接触电阻的因素,提出有效地抑制这些影响的措施,本文建立了一种求解接触电阻的物理模型,将载流子的输运分为金属与正下方石墨烯之间、正下方石墨烯与邻近石墨烯之间的两个过程,分别研究各个过程的输运概率;结合金属电极与石墨烯接触对载流子分布的影响分析接触电阻,据此分别探讨了金属电极材料、栅极电压、掺杂浓度、金属与石墨烯原子距离等对接触电阻的影响.为验证理论分析结果的正确性,制作了金与石墨烯接触的实验样品,实验测得的接触电阻与理论分析结果符合.理论分析结果表明,可通过选择与石墨烯功函数接近的金属材料,降低二氧化硅层厚度,增加载流子平均自由程,改进金属材料的表面形态使其更光滑,减小金属与石墨烯耦合长度等方法降低石墨烯与金属电极的接触电阻.     

交流等离子体显示器的红外辐射光谱

为优化交流等离子体显示器(AC PDP)的单元结构和驱动电压,采用光谱测量系统和交流等离子体显示器宏单元对电极结构参量、带有浮动电极的新型单元结构及维持电压脉冲参量对Ne-Xe混合气体放电辐射的红外光谱的影响进行了实验研究。结果表明,随着维持电极宽度增加,单元放电辐射的828 nm红外光谱的强度提高,而其辐射效率基本保持不变;随着维持电极间隙增大或在维持电极间加有适当宽度的浮动电极,红外辐射光谱的强度及其辐射效率均提高;提高维持电压脉冲频率或幅度,可增加红外辐射强度,但辐射效率降低。     

Experimental observation of negative differential characteristic of corona discharge in ultraviolet spectrum

Corona discharge is a self-sustained discharge which appears at electrodes with a small radius curvature in gas insulation. An almost invisible glow occurs just above the inception voltage. Corona phenomenon is mainly used in electro-technological processes to obtain space charge for electrostatic precipitation, separation of different particles, electrostatic liquid or solid coating, neutralization of space charge, etc. All of these processes rely on a strong nonhomogeneous electric field generated by a point – plate electrode system. When the critical value of the applied voltage is reached, the ionization processes near the point electrode start and give rise to the current between two electrodes. If the pointed electrode is positive, it is possible to observe an anomaly of the current – voltage (I-U) characteristic for the point-plate space. It means that while the voltage is raising the current density decreases in a narrow voltage area (2–3 kV). The anomaly was technically named as negative differential conductivity (dI/dU < 0). Unstable current can have a negative influence on electro-technological processes. The anomaly was detected for different shapes and materials of the electrode as well as for various temperatures and distances between electrodes. An oxidation layer, which appears on the metal electrode, also influences the ionization processes near the pointed electrode and causes a decrease of a current. In this paper measuring of the discharge activity in a point – plate electrode system is presented. Ionization of gas atoms and molecules in a high electric field and the following recombination of electrons and positive ions in the corona region can give rise to high-energy photons which produce new electrons in the field of discharge. Corona discharges are detected by DayCor Corona camera which can register UV emission generated by corona in a day light. The experiment was conducted with various shapes of the pointed electrode and distances between the high voltage and the grounded electrode under applied direct voltage with positive and negative polarity.     

同轴电极结构下真空放电等离子体生成及传播特性

采用放电电流为100~300 A、持续时间为13 s的单脉冲电源,设计了两种同轴电极结构作为放电阳极,分别为筒状电极、喷嘴状电极。利用MAXWELL 3D电场仿真软件对两种电极结构下的电场分布进行了仿真分析,并采用探针法对放电生成的等离子体的参数进行了测量,分析讨论了同轴电极结构对真空放电等离子体生成特性的影响。选取喷嘴状电极结构作为阳极,分别测量了采用铅、铝、铜三种材质的阴极时生成的等离子体的扩散速度及能量。实验与仿真结果表明:当阳极为喷嘴状电极时阴极尖端的电场强度较大,测得放电电流较大,击穿电压较低,等离子体密度也较大;采用铝材质阴极时生成的等离子体扩散速度最快,采用铅材质阴极时生成的等离子体的离子动能最大。     

TEA CO2激光器几种放电电极的比较

 从均匀场电极理论出发，计算并讨论了近似Rogowski电极、Chang电极(含紧凑式Chang电极)和Ernst电极的形状、理论电场分布和实际电场分布。对实验室所用的几种电极进行了脉冲放电实验，从而获得了TEA CO₂激光器的放电参数与输出特性，并对这些结果进行了比较和分析。计算表明，在基本参数相同的情况下，Ernst电极具有最紧凑的外形和最佳的均匀电场分布。实验表明，采用近似Rogowski电极的TEA CO₂激光器具有最大放电辉光范围和44 kV的最小放电击穿电压；采用Ernst电极的TEA CO₂激光器具有25 J的最高单脉冲能量和最大17.2%的斜率效率。最后提出了TEA CO₂激光器主电极的选择建议。