用117μm合成波长实现绝对距离干涉测量

根据以前双纵模绝对距离测量中合成波长过大导致误差较大的缺点,设计了一种新型多波长绝对距离干涉测量系统。采用633 nm双纵模He-Ne激光器中的一个纵模和629 nm波长的He-Ne激光组成117μm合成波长,使用双外差干涉技术对距离改变进行精密测量。静态稳定度和动态测量实验表明,由于采用了较小的合成波长,系统的测量不确定度可以达到3.8×10-6L+57 nm,在500 mm的距离上不确定度小于2μm。最后从合成波长不确定性的角度,对干涉系统中的误差作了分析。该系统如能与双纵模拍波测量作衔接则可实现对被测距离由粗至精的测量。     

Matlab编程法在测量氦氖激光波长实验数据处理中的应用探索

使用新型的WSM-T-Ⅱ型台式迈克尔逊干涉仪可以测量氦氖激光波长,传统的数据处理方法是逐差法,计算量大,既繁琐又容易出错。用Matlab软件的编程法处理实验测得的数据,程序运行后可以直接得到氦氖激光波长及相应的误差分析,无需进行运算,准确而快捷,是大学物理实验教学中实验数据处理的一种新方法。     

一种新型多波长绝对距离干涉测量系统的研究

介绍了一种新型多波长绝对距离干涉测量系统。系统采用633nm的双纵模He-Ne激光器和629nm的He-Ne激光器,组成三级合成波长链对较大距离进行精密测量,并作了误差分析。系统采用高稳定度的声光晶体对各波长分别进行偏频,再用外差探测法测量出光束通过参考光路和测量光路后的位相差。简要介绍了629nm的He-Ne激光器的设计方案。     

半导体激光器在大学物理实验中的应用

比较了半导体激光器（LD）与He-Ne激光器的特点及区别,将半导体激光器应用于阿贝成像原理和空间滤波实验、迈克尔逊干涉仪的调整和使用实验中。通过对实验数据分析指出：半导体激光器可以替代He-Ne激光器在大学物理实验中使用。     

逐差法和Origin7.0软件在测量氦氖激光的波长实验数据处理中的比较

用逐差法和Origin7.0软件分别对用迈克尔逊干涉仪测量氦氖激光的波长的实验数据进行处理,结果表明,利用Origin7.0软件处理实验数据,快捷而且准确,避免了人为因素所造成的误差,是大学物理实验数据处理上方法上的一种创新。     

迈氏干涉仪测光波长的系统误差

迈氏干涉仪测光波长的系统误差王澜涛，郑乔（石家庄铁道学院，０５００４３）在迈克尔逊干涉仪上，利用点光源的非定域干涉圆条纹测激光波长，测值往往偏大．这一偏大的系统误差主要是由反射镜Ｍ１与Ｍ２的像不平行［１］以及Ｍ１与精密丝杠的轴线不垂直这两方面共同产生...     

基于干涉条纹图像对比法测量微位移

研究了基于迈克尔逊干涉条纹对比法测量微位移的实验。用He-Ne激光器、反射镜和分束镜组成的干涉光路,其中一个反射镜固定在被测物体上,通过被测物体的移动带动反射镜移动使干涉光路发生变化,从而导致干涉条纹的改变。在形成干涉条纹的位置利用线阵CCD采集干涉条纹图像,用序列图像对比的方法对图像进行处理和计算,得出被测物体的微位移。实验表明利用序列图像对比的方法测量微位移,方法切实可行、测量准确度高、测量的精度能够达到微米量级。     

便携式633nm激光波长评价系统研究

利用光学拍频法可实现稳频He-Ne激光波长稳定度的测量以及波长不确定度的评定。报道了一种可应用于测量现场的便携式633nm激光波长评价系统,介绍了拍频测量技术原理、激光波长评价系统的基本构成以及与非便携式的传统拍频系统测量激光波长的比对结果。波长评价系统对传统光学拍频光路部分进行了改进并集成为一个便携测量系统,系统采用了全新设计的集成式光学拍频模块、小型化高精度频率计以及频谱监测仪器实现了高信噪比拍频信号的产生、计数与监测,并自主开发了拍频测量数据采集、处理与分析软件。实验结果表明该系统能够在测量现场实现激光波长的稳定度以及不确定度评价,提升了现场测量的便捷性以及测量效率。     

对迈克尔逊干涉仪测量波长实验中几个常见问题的分析

本文分析了迈克尔逊干涉仪测量波长实验中经常遇到的几个问题，并对其产生的原因进行了探讨。     

关于迈克尔逊实验中几个问题的讨论

本文给出了迈克尔逊实验中干涉条纹的间距公式 ,讨论了干涉条纹间距的变化规律以及激光波长的不确定度评定的方法。     

Dispersion error of a beam splitter cube in white-light spectral interferometry

We revealed that the phase function of a thin-film structure measured by a white-light spectral interferometric technique depends on the path length difference adjusted in a Michelson interferometer. This phenomenon is due to a dispersion error of a beam splitter cube, the effective thickness of which varies with the adjusted path length difference. A technique for eliminating the effect in measurement of the phase function is described. In a first step, the Michelson interferometer with same metallic mirrors is used to measure the effective thickness of the beam splitter cube as a function of the path length difference. In a second step, one of the mirrors of the interferometer is replaced by a thin-film structure and its phase function is measured for the same path length differences as those adjusted in the first step. In both steps, the phase is retrieved from the recorded spectral interferograms by using a windowed Fourier transform applied in the wavelength domain.     

Absolute distance measurement by using modified dual-wavelength heterodyne Michelson interferometer

This study proposes a modified dual-wavelength heterodyne Michelson interferometer for measuring the absolute distance that can avoid the influence of wavelength drifts. This modified interferometer consists of two conventional Michelson interferometers. A standard plate is introduced in one arm of one Michelson interferometer. The phase differences of p- and s- polarization test lights in the two interferometers can be measured accurately by dual-wavelength heterodyne interferometry. Hence, the absolute distance can be determined by substituting the phase differences into special derived equations. Meanwhile, the test lights suffer from the same wavelength drift effect. Therefore, the negative effect caused by the drift can be offset, and the measurement stability can be significantly increased. The feasibility of this method was demonstrated with a measurement resolution of about 1.36 μm. Additionally, this method has a simple structure, easy operation and rapid measurement.     

Surface profilometry by wavelength scanning Fizeau interferometer

We have applied wavelength scanning interferometry to Fizeau interferometer for surface profilometry. This interferometer is free from ambiguity of the sign in the measurement result. It is more compact in setup than the Michelson interferometer used previously. Experimental results from a step and a dip on a mirror surface are shown. In the focal depth of imaging system, we could measure a mirror surface with less than standard deviations of 20 μm including quantization error in frequency analysis. We also could measure the surface shape of a coin. Origins of the noises appearing in the results are also discussed.     

干涉仪测光波长移动所引入的相位误差

在理论分析的基础上,对国际上目前广泛采用的干涉法测量光纤布拉格光栅（ＦＢＧ）传感系统中的光波长移动所存在的相位测量原理误差进行了实验研究,提出了双相位锁相放大器加动态补偿的测量方案。结果表明,直接用锁相放大器测量布拉格波长移动所对应的相位变化时,如果布拉格波长与其相关的锯齿波光程差幅值不相等,将产生准周期性的测量原理误差。假设扫描锯齿波幅值初始偏差为２０ｎｍ,那么测量原理误差将大到全量程的５％。如     

A displacement measurement system, utilizing a Wollaston interferometer

A dual interferometric displacement measurement system is presented where a Wollaston prism interferometer is employed in conjunction with a normal Michelson interferometer. The system operates without the use of external polarizers, apart from those associated with the Wollaston prism interferometer itself. It is shown that an optical path difference induced in the Michelson interferometer can be detected using the Wollaston prism in a normal interferometer arrangement. Further, the interference pattern produced by the Wollaston prism interferometer changes in a measurable, linear fashion as the optical path difference from the Michelson interferometer alters. A simple theoretical analysis of the system is presented and used to derive a computer model of the optical arrangement. Results from an experimental implementation of the system, using a Wollaston prism with a beam separation of 0.5 degrees and a superluminescent diode, of wavelength 825 nm, as a light source, are included and compared to the results from the computer model.     

基于分步式压印光刻的激光干涉仪纳米级测量及误差研究

针对在未做隔离保护处理的环境中,基于Michelson干涉原理的激光干涉仪测量系统存在严重的干扰误差,不适合分步式压印光刻纳米级对准测量的要求.采用Edlen公式的分析及计算,不仅在理论上揭示出环境温度、湿度、气压等变化对激光干涉仪测量准确度的影响,而且证明影响测量准确度的最大干扰源是空气流动的结果.通过气流隔离措施和系统测量反馈校正控制器,能够实时补偿激光干涉仪两路信号的相差.最终,测量漂移误差在10 min内由13 nm降低到5 nm以内,满足压印光刻在100 mm行程中达到20 nm定位准确度要求.     

Direct measurement of dispersion of the group refractive indices of quartz crystal by white-light spectral interferometry

We present a white-light spectral interferometric technique employing a low-resolution spectrometer for a direct measurement of the dispersion of the ordinary and extraordinary group refractive indices of a quartz crystal over the wavelength range approximately from 480 to 860 nm. The technique utilizes a dispersive Michelson interferometer with the quartz crystal of known thickness to record a series of spectral interferograms and to measure the equalization wavelength as a function of the displacement of the interferometer mirror from the reference position, which corresponds to a balanced non-dispersive Michelson interferometer. We confirm that the measured group dispersion agrees well with that described by the dispersion equation proposed by Ghosh. We also show that the measured mirror displacement depends, in accordance with the theory, linearly on the theoretical group refractive index and that the slope of the corresponding straight line gives precisely the thickness of the quartz crystal.     

基于白光干涉的光学球面半径测量研究

光学球面曲率半径是决定光学球面光学特性的重要参量,通过测量光学球面的曲率半径，可以审核光学元件设计制造质量。在基于白光干涉理论基础上，将莫尔光栅位移测量系统及CCD数字图像采集处理系统集成到迈克尔逊干涉仪上，利用CCD数字图像处理技术，构建了光学球面曲率半径自动测量系统。该测量系统对于大曲率半径的光学球面测量精度较高；对于半径R＝71.2037mm的光学球面,其测量标准误差σR＝0.4723mm。实验结果表明：设计的光学球面自动测量系统可以对大曲率半径光学球面实现高精度测量。     

基于宽光谱干涉系统的拼接主镜共相位检测技术

 针对拼接式大口径望远镜主镜,提出一种基于迈克尔逊干涉原理基础上的宽带光谱（白光）干涉检测方法,对拼接子镜间相位误差进行实时检测,进而对失调子镜进行相应校正,以实现拼接子镜的共面排布。子镜间相位误差通过干涉图形间的不匹配性进行提取。应用双中心波长组合白光源来提高白光中心条纹的可见度,通过理论仿真,对不同中心波长组合的白光中心条纹可见度进行比较,结果表明：该双中心波长组合白光源系统的应用,可以提高白光干涉中心条纹的信号分辨能力,借以提高检测精度,使得该白光干涉检测系统对拼接子镜间的相位失调误差进行高精度提取。