极化诱导实现AlGaN薄膜材料中的超高电子浓度(1020cm-3)掺杂

材料的载流子浓度和迁移率是影响器件性能的关键因素, 变温Hall测试结果证明杂质掺杂AlGaN中的载流子浓度和迁移率随温度 降低而减小.然而极化诱导掺杂的载流子浓度和迁移率不受温度变化的影响.以准绝缘 的GaN体材料作为衬底, 在组分分层渐变的AlGaN中实现的极化诱导掺杂浓度 仅仅在10¹⁷ cm^-3数量级甚至更低. 本研究采用载流子浓度为10¹⁶ cm^-3量级的非有意n型掺杂GaN模板为衬底, 用极化诱导掺杂技术在分子束外延生长的AlGaN薄膜材料中实现了高 达10²⁰ cm^-3 量级的超高电子浓度. 准绝缘的体材GaN半导体作衬底时, 只有表面自由电子作为极化掺杂源, 而非有意掺杂的GaN模板衬底除了提供表面自由电子外,还能为极化电场 提供更多的自由电子"源", 从而实现超高载流子浓度的n型掺杂.     

488 nm连续激光晶化本征非晶硅薄膜的喇曼光谱研究

利用等离子增强化学气相沉积系统制备了本征非晶硅薄膜,并选用488 nm波长的连续激光进行晶化.采用喇曼测试技术对本征非晶硅薄膜在不同激光功率密度和扫描时间下的晶化状态进行了表征,并用514 nm波长与488 nm波长对样品的晶化效果进行了比较.测试结果显示:激光照射时间60 s, 激光功率密度在1.57×10⁵ W/cm²时,能实现非晶硅向多晶硅的转变,在功率密度达到2.7 56×10⁵ W/cm²时,有非晶开始向单晶转变,随着激光功率密度的继续增加,晶化结果仍为单晶;在功率密度为2.362×10⁵ W/cm²下,60 s照射时间晶化效果较好;在功率密度为2.756×10⁵ W/cm²和照射时间为60 s的条件下,用488 nm波长比514 nm波长的激光晶化本征非晶硅薄膜效果较好,并均为单晶态.     

基于氧化锌纳米薄片的高性能增强型场效应管和紫外光传感器

借助气相输运凝结法成功制备出数纳米厚的氧化锌纳米薄片并充分研究其结构与光学性质. 利用此薄片构建出场效应管和紫外光传感器. 由于其独特的结构,此场效应管被证实为n沟道增强型并具有好的电学特性,其场效应迁移率可达到256 cm²/(V·s),开关比约为10⁸. 而且其紫外光传感器的光响应也可显著提高到3×10⁸.     

In2O3 透明薄膜晶体管的制备及其电学性能的研究

采用磁控溅射方法在玻璃衬底上生长了In₂O₃晶体薄膜.该薄膜具有(111)晶面择优取向,晶粒尺寸达到33 nm.利用光刻工艺制作了以In₂O₃晶体薄膜为沟道层的底栅式薄膜晶体管.In₂O₃薄膜晶体管具有良好的栅压调制特性,场效应迁移率达到6.3 cm²/(V·s),开关电流比为3×10³,阈值电压为-0.9 V.结果表明,In相似文献   

基于氧化铟锡的无结低电压薄膜晶体管

在室温下制备了基于氧化铟锡(ITO)的底栅结构无结薄膜晶体管. 源漏电极和沟道层都是同样的ITO薄膜材料,没有形成传统的源极结和漏极结, 因而极大的简化了制备流程,降低了工艺成本.使用具有大电容的双电荷层SiO₂作为栅介质, 发现当ITO沟道层的厚度降到约20 nm时, 器件的栅极电压可以很好的调控源漏电流. 这些无结薄膜晶体管具有良好的器件性能: 低工作电压(1.5 V), 小亚阈值摆幅(0.13 V/dec)、 高迁移率(21.56 cm²/V·s)和大开关电流比(1.3× 10⁶). 这些器件即使直接在大气环境中放置4个月, 器件性能也没有明显恶化:亚阈值摆幅保持为0.13 V/dec,迁移率略微下降至18.99 cm²/V·s,开关电流比依然大于10⁶.这种工作电压低、工艺简单、 性能稳定的无结低电压薄膜晶体管非常有希望应用于低能耗便携式电子产品以及新型传感器领域.     

利用空间电荷限制电流方法确定三(8-羟基喹啉)铝的电子迁移率特性初步研究

材料的迁移率是其关键电学特性之一.有机材料迁移率的研究对于有机电致发光器件、 有机太阳电池、有机薄膜场效应晶体管性能的提高有重要的意义. 应用简单易行的空间电荷限制电流方法,对基于三(8-羟基喹啉)铝(Alq₃) 的四种单载流子器件电流密度-电压曲线特性进行研究, 根据空间电荷限制电流模型,拟合出Alq₃材料在四种器件中的零场电子迁移率和电场依赖因子,并且给出Alq₃电子迁移率随外加偏压的变化趋势. 实验结果表明,顶电极铝蒸镀到缓冲层氟化锂(1 nm)和Alq₃ (100 nm)的表面后, 可以明显改善Alq₃的零场迁移率和电场依赖因子. 认为产生这种现象的原因是氟化锂可以使铝和Alq₃发生络合反应, 形成Li⁺¹Alq^-1粒子,形成良好的欧姆接触,使得电子的注入效率大大提高.     

用于质子和伽马射线探测的金刚石薄膜探测器的辐照性能

 研制出CVD金刚石薄膜探测器,在国家串列加速器和⁶⁰Co稳态辐射源上分别完成了该探测器对9 MeV质子束流和1.25 MeV γ射线的辐照性能研究。结果表明:该探测器在9 MeV质子照射累积强度达到10¹³ cm^-2时,探测器信号电荷收集效率减小量低于3.5%,辐照前后探测器暗电流没有明显变化。计算得到9 MeV质子对该探测器的损伤系数为1.3×10^-16 μm^-1·cm²。由于γ射线与金刚石作用产生的电子起到了填补缺陷的作用,探测器信号电荷收集效率随γ射线照射剂量的增加略有增加,在γ射线累积照射量达到10.32 C/kg时,其增幅小于0.7%。说明金刚石薄膜探测器具有较高耐辐照强度,适用于高强度辐射测量领域。     

电子通量对ZnO/K2SiO3热控涂层光学性能的影响

 研究了电子通量对ZnO/K₂SiO₃热控涂层光学性能的影响。分别采用通量为5×10¹¹/cm²·s，8×10¹¹/cm²·s，1×10¹²/cm²·s 和5×10¹²/cm²·s的电子对试样进行辐照。电子辐照下涂层的光学性能发生了退化，并且发现了退化涂层在空气中的“漂白”现象。分析了ZnO/K₂SiO₃热控涂层光学性能的退化机制，同时讨论了电子通量对太阳光谱吸收系数的影响。实验结果发现，在5×10¹¹～1×10¹²/cm²·s的电子通量范围内，电子通量对ZnO/K₂SiO³热控涂层光学性能的影响相同。因此在这个电子通量范围内，采用加速地面试验来模拟空间的电子辐照效应是有效的。     

用激光分子束外延在Si衬底上外延生长高质量的TiN薄膜

采用激光分子束外延技术，利用两步法，在Si单晶衬底上成功地外延生长出TiN薄膜材料.原子力显微镜分析结果显示， TiN薄膜材料表面光滑，在10 μm×10 μm范围内，均方根粗糙度为0842nm.霍耳效应测量结果显示，TiN薄膜在室温条件下的电阻率为36×10^-5Ω·cm，迁移率达到5830 cm²/V·S，表明TiN薄膜材料是一种优良的电极材料.X射线θ—2θ扫描结果和很高的迁移率均表明，高质量的TiN薄膜材料被外延在Si衬底     

钛离子辐照对MgB2超导薄膜的载流能力和磁通钉扎能力的影响

利用混合物理化学气相沉积法(hybrid physical-chemical vapor deposition, HPCVD)可以制备出高性能的MgB₂超导薄膜, 再对薄膜进行钛(Ti)离子辐照处理.经过辐照处理后的样品被掺入了Ti元素, 与未处理的干净MgB₂样品相比,其超导转变温度没有出现大幅度的下降, 而在外加磁场下的临界电流密度得到了明显的提高,同时样品的上临界磁场也得到了提高. 在温度5 K, 外加垂直磁场为4 T的情况下, Ti离子辐照剂量为1× 10¹³/cm²的样品的临界电流密度达到了1.72× 10⁵ A/cm², 比干净的MgB₂要高出许多,而其超导转变温度仍能维持在39.9 K的较高水平.     

Growth and field emission properties of nanotip arrays of amorphous carbon with embedded hexagonal diamond nanoparticles

Nanotip arrays of amorphous carbon with embedded hexagonal diamond nanoparticles were prepared at room temperature for use as excellent field emitters by a unique combination of anodic aluminum oxide (AAO) template and filtered cathodic arc plasma (FCAP) technology. In order to avoid nanopore array formation on the AAO surface, an effective multi-step treatment employing anodization and pore-widening processes alternately was adopted. The nanotips were about 100 nm in width at the bottom and 150 nm in height with density up to 10¹⁰ cm⁻². Transmission electron microscopy investigation indicates that many nanoparticles with diameters of about 10 nm were embedded in the amorphous carbon matrix, which was proved to be hexagonal diamond phase by Raman spectrum and selected-area electron diffraction. There is no previous literature report on the field emission properties of hexagonal diamond and its preparation at room temperature under high-vacuum condition. The nanotip arrays with hexagonal diamond phase exhibit a low turn-on field of 0.5 V/μm and a threshold field of 3.5 V/μm at 10 mA/cm². It is believed that the existence of hexagonal diamond phase has improved the field emission properties.     

Monto Carlo simulation of the behaviour of electrons during electron—assisted chemical vapour deposition of diamond

The behaviour of electrons during electron-assisted chemical vapour deposition of diamond is investigated using Monte Carlo simulation. The electron energy distribution and velocity distribution are obtained over a wide range of reduced field E/N (the ratio of the electric field to gas molecule density) from 100 to 2000 in units of 1Td=10^-17Vcm². Their effects on the diamond growth are also discussed. The main results obtained are as follows. (1) The velocity profile is asymmetric for the component parallel to the field. The velocity distribution has a peak shift in the field direction. Most electrons possess non-zero velocity parallel to the substrate. (2) The number of atomic H is a function of E/N. (3) High-quality diamond can be obtained under the condition of E/N from 50 to 800Td due to sufficient atomic H and electron bombardment.     

40Ar+诱导无定形碳到金刚石纳米晶相变的研究

通过60 keV的⁴⁰Ar⁺辐照无定形碳靶合成了大量尺寸不同的金刚石纳米颗粒.高分辨透射电子显微镜配合能量色散X射线谱和电子衍射以及Raman谱分析的结果表明，这些嵌于具有扰动石墨结构薄膜中的纳米金刚石颗粒，其成核率很高(约为10¹³/cm²)，而且可以生长到较大的尺寸，有的甚至可以达到微米量级.对其相转变过程也进行了初步探讨. 关键词： 离子束 金刚石纳米晶 相变 透射电子显微镜     

Schlieren diagnostics of pulsed electron beam ablation of polymethyl-methacrylate

The investigation of the interaction of pulsed electron beams with PMMA (polymethylmethacrylate) targets is reported. The electron beam of some 10^–8 s in duration is produced in a pulsed low-pressure gas discharge. The beam power density of up to 10⁸ W/cm² leads to a surface plasma formation similar to that of the pulsed laser ablation process. The propagation of the ablated material and the shock wave inside the PMMA target are observed by means of Schlieren diagnostics. An electron density gradient of over 3×10¹⁹ cm^–4 has been observed in the expanding plasma up to 1.5 s after the plasma formation. During the early stage of expansion, the expansion velocity of the plasma plume as determined by the steep electron density gradient is around 10⁵ cm/s. The pressure behind the shock front inside the PMMA target as determined from the shock velocity exceeds 0.3 Gpa.     

Effects of phonon confinement on high-electric field electron transport in an InGaAs/InAlAs quantum well with an inserted InAs barrier

The alternating change of electron mobility values in the modulation doped InAlAs/InGaAs/InAlAs quantum well (QW) dependently on a thickness of the InAs layer inserted in the center of the QW is theoretically predicted and experimentally observed. The electron mobility enhancement by a factor of 1.5–2 takes place when the 4 nm-thick InAs layer is inserted into the 17 nm-width QW. The experimental maximal value of the electron drift velocity at the threshold electric field for intervalley electron scattering achieves (1.8?2)×10⁷ cm/s and does not nearly depend on the thickness of the InAs insert. The high value of maximal drift velocity is conserved at the additional doping of the InAs insert up to electron density of 4×10¹² cm^?2 in the QW.     

Carbonyl sulphide under strong laser field: Time-dependent density functional theory

The first 52 fs of a time evolution of the electron density in OCS after an interaction with an intense sub 10 fs laser pulse are studied using the time-dependent density functional theory. The nuclear motion in this linear trimer is simulated by the classical molecular dynamics method. Laser fields of intensity 10¹³ W/cm² and 10¹⁵ W/cm² are used. Details of the laser induced changes of the structure, as well as the ionization rate are sensitive to the applied field intensity and its polarization. It is found that under suitable conditions the OCS molecule bends soon after an interaction with a laser pulse. A deviation from the linear geometry of up to 23.6° and charged ions of up to +3 are observed. The time evolution of electric dipole moments and the time-dependent electron localization function (ELF) are also studied.     

Growth and field emission properties of globe-like diamond microcrystalline-aggregate

The globe-like diamond microcrystalline-aggregates were fabricated by microwave plasma chemical vapor deposition (MPCVD) method. The ceramic with a Ti mental layer was used as substrate. The fabricated diamond was evaluated by Raman scattering spectroscopy, X-ray diffraction spectrum (XRD), and scanning electron microscope (SEM). The field emission properties were tested by using a diode structure in a vacuum. A phosphor-coated indium tin oxide (ITO) anode was used for observing and characterizing the field emission. It was found that the globe-like diamond microcrystalline-aggregates exhibited good electron emission properties. The turn-on field was only 0.55 V/μm, and emission current density as high as 11 mA/cm² was obtained under an applied field of 2.9 V/μm for the first operation. The growth mechanism and field emission properties of the globe-like diamond microcrystalline-aggregates are discussed relating to microstructure and electrical conductivity.     

Study of streamer development in high-pressure electric discharge: Applications to excimer lasers

This work represents a study of the streamer formation in plasma for XeCl excimer laser at high pressure. It is based on a longitudinal mono-dimensional model of the cathodic zone. In this model, we show the possibility of the streamer development in the cathodic sheath and its propagation during the phase of plasma formation. The model gives the space and time evolution of the electron density and the discharge electric field in the presence of the streamer. The obtained results clearly indicate that, for conditions close to experiments for 50–100 ns laser pulse durations and electron power deposition in the MW/cm³ range in a 300 cm³ chamber, the streamer instability, related to the sheath evolution, patently appears. The drift velocity reaches a typical value of about 10⁸ cm/s.     

Low beam current density Auger spectroscopy and surface analysis

Auger and secondary electron spectroscopy become a more and more routine technique in surface characterization. Even with primary electron beam current density as low as 10^?2 or 10^?3 A cm^?2 beam damage were reported in both Auger and LEED experiments. So we developed and compared counting method, brightness modulation and Harris' modulation techniques in terms of signal to noise ratio. The two first methods offer the advantage of a primary beam current density decreasing about 10⁴ times. So various mechanisms of beam damage were identified as thermal, chemical and electrical. The advantage of the method is shown with hydrocarbons adsorption layer; the beam cracking of the organic chain produces a chemical shift of the C_KLL maximum Auger line about 5 eV. This progressive shift is observed with current densities of 10^?5 A cm^?2 order of magnitude. The reproducibility of this low current density Auger spectroscopy allowed the study of the background and the true secondary electron yield modifications when adsorbed layers are built up.     

Spatial-temporal measurements of magnetic fields in laser-produced plasmas

The results of an investigation of the electromagnetic wave polarization, probing high-temperature laser plasma, as well as spatial-temporal structure of the magnetic fields, electron density, current density, and electron drift velocity are presented. To create the plasma, plane massive Al targets were irradiated with the second harmonic of a phoenix Nd laser at intensities up to 5·10¹⁴ W/cm². It was shown that the magnetooptical Faraday effect is the main mechanism responsible for the changing polarization of the probing wave. Magnetic fields up to 0.4 MG with electron densities ∼10²⁰ cm⁻³ were measured. Analysis of the magnetic field spatial distribution showed that the current density achieved the value ∼90 MA/cm² on the laser axis. The radial structure of the magnetic field testified to the availability of the reversed current in the laser plasma. The spatial and temporal resolutions in these experiments were equaled to ∼5 μsec and ∼50 psec, respectively. Translated from Preprint No. 35 of the Lebedev Physics Institute, Moscow, 1993.