MOCVD Growth of InN on Si(111) with Various Buffer Layers

We report the growth of InN by metalorganic chemical vapor deposition on Si(111) substrates. It was found that the sharpest InN(002) x-ray diffraction peak could be achieved from the sample prepared on a complex buffer layer that consists of a low-temperature AlN, a graded Al _x Ga_1−x N (x = 1 → 0), and a high-temperature GaN. The resultant mobility of 275 cm²/V s thus obtained was 75% larger than that of the InN prepared on a single LT-AlN buffer layer only.     

Nearly Perfect Electrical Activation Efficiencies from Silicon-Implanted Al<Subscript><Emphasis Type="Italic">x</Emphasis></Subscript>Ga<Subscript>1−<Emphasis Type="Italic">x</Emphasis></Subscript>N with High Aluminum Mole Fraction

Electrical activation studies of Al _x Ga_1−x N (x = 0.45 and 0.51) implanted with Si for n-type conductivity have been made as a function of ion dose and anneal temperature. Silicon ions were implanted at 200 keV with doses ranging from 1 × 10¹⁴ cm⁻² to 1 × 10¹⁵ cm⁻² at room temperature. The samples were subsequently annealed from 1150°C to 1350°C for 20 min in a nitrogen environment. Nearly 100% electrical activation efficiency was successfully obtained for the Si-implanted Al_0.45Ga_0.55N samples after annealing at 1350°C for doses of 1 × 10¹⁴ cm⁻² and 5 × 10¹⁴ cm⁻² and at 1200°C for a dose of 1 × 10¹⁵ cm⁻², and for the Al_0.51Ga_0.49N implanted with silicon doses of 1 × 10¹⁴ cm⁻² and 5 × 10¹⁴ cm⁻² after annealing at 1300°C. The highest room-temperature mobility obtained was 61 cm²/V s and 55 cm²/V s for the low-dose implanted Al_0.45Ga_0.55N and Al_0.51Ga_0.49N, respectively, after annealing at 1350°C for 20 min. These results show unprecedented activation efficiencies for Al _x Ga_1−x N with high Al mole fractions and provide suitable annealing conditions for Al _x Ga_1−x N-based device applications.     

Transport and Thermoelectric Properties of the Ca1?xSrxRu1?yMnyO3 System

The magnetic, transport, and thermoelectric properties of Ca_1−x Sr _x Ru_1−y Mn _y O₃ have been investigated. Ferromagnetism with relatively high T _C (>200 K) was introduced by Mn doping. In particular, ferromagnetism appeared in the Ca_0.5Sr_0.5Ru_1−y Mn _y O₃ system at y > 0.2. The maximum T _C (=270 K) was recorded for a specimen of Ca_0.5Sr_0.5Ru_0.4Mn_0.6O₃. The ferromagnetism seems to be due to the mixed-valence states of Mn³⁺, Mn⁴⁺, Ru⁴⁺, and Ru⁵⁺ ions. The metallic character of Ru-rich specimens was suppressed by Mn substitution, and the system was transformed into a semiconductor at relatively low Mn content near y = 0.1. Specimens with higher Mn content (y > 0.8) had large thermoelectric power (50 μV K⁻¹ to 130 μV K⁻¹ at 280 K) accompanied by relatively low resistivity (0.03 Ω cm to 1 Ω cm). The Ca_0.5Sr_0.5Ru_1−y Mn _y O₃ system seems to have good potential as a thermoelectric material for use above 300 K.     

Optical properties of quantum-confined heterostructures based on GaPxNyAs1 ? x ? y alloys

The results of calculations of the band gap in GaP _x N _y As_{1 − x − y} alloys and the estimated parameter of hybridization of the conduction band in GaP and the localized level of nitrogen are reported. The optical properties of quantum-confined heterostructures based on GaP _x N _y As_{1 − x − y} alloys synthesized on the GaP (100) substrate surface are studied by photoluminescence measurements in the temperature range of 15–300 K. The heterostructures consist of GaP_0.814N_0.006As_0.18 quantum wells separated by GaP barrier layers. The well width and the barrier thickness are 5 nm. Heterostructures with different numbers of periods are considered. On optical excitation of the structures, an intense photoluminescence line is observed in the spectral range 620–650 nm. The photoluminescence spectra of the GaP_0.814N_0.006As_0.18/GaP quantum wells are profoundly broadened because of the inhomogeneity of the quaternary alloy in composition. It is established that the increase in the number of quantum well layers from 10 to 25 does not results in degradation of the photoluminescence properties of the heterostructures. The results of the study support the view that it is possible to produce efficient optoelectronic devices on the basis of GaP _x N _y As_{1 − x − y} alloys.     

High-Quality (211)B CdTe on (211)Si Substrates Using Metalorganic Vapor-Phase Epitaxy

High-quality (211)B CdTe buffer layers are required during Hg_1−x Cd _x Te heteroepitaxy on Si substrates. In this study, direct metalorganic vapor-phase epitaxy (MOVPE) of (211)B CdTe on Si, as well as CdTe on Si using intermediate Ge and ZnTe layers, has been achieved. Tertiary butyl arsine was used as a precursor to enable As surfactant action during CdTe MOVPE on Si. The grown CdTe/Si films display a best x-ray diffraction rocking-curve full-width at half-maximum of 64 arc-s and a best Everson etch pit density of 3 × 10⁵ cm⁻². These values are the best reported for MOVPE-grown (211)B CdTe/Si and match state-of-the-art material grown using molecular-beam epitaxy.     

X-Ray Diffraction and Photoluminescence Studies of InN Grown by Plasma-Assisted Molecular Beam Epitaxy with Low Free-Carrier Concentration

We report studies of InN grown by plasma-assisted molecular beam epitaxy. GaN templates were first grown on sapphire substrates followed by InN overgrown at 457°C to 487°C. Atomic force microscopy shows the best layers to exhibit step-flow growth mode of the InN, with a root-mean-square roughness of 0.7 nm for the 2 μm × 2 μm scan and 1.4 nm for the 5 μm × 5 μm scan.␣Measurements of the terrace edges indicate a step height of 0.28 nm. Hall measurements at room temperature give mobilities ranging from 1024 cm²/V s to 1904 cm²/V s and the electron concentrations are in the range of 5.9 × 10¹⁷ cm⁻³ to 4.2 × 10¹⁸ cm⁻³. Symmetric and asymmetric reflection x-ray diffraction measurements were performed to obtain lattice constants a␣and c. The corresponding hydrostatic and biaxial stresses are found to range from −0.08 GPa to −0.29 GPa, and −0.05 GPa to −0.32 GPa, respectively. Low-temperature photoluminescence peak energies range from 0.67 eV to 0.70 eV, depending on residual biaxial stress, hydrostatic pressure, and electron concentrations. The electron concentration dependence of the estimated Fermi level is analyzed using Kane’s two-band model and conduction-band renormalization effects.     

Magneto-optical Studies of Spin Phenomena in CdMnTe Doped with Co and Cr

We investigate the magneto-optical and magnetic properties of two quaternary diluted magnetic semiconductor alloys, Cd_1−x−y Mn _x Cr _y Te and Cd_1−x−y Mn _x Co _y Te, with fixed Mn concentration x ∼ 0.37 and, respectively, with concentrations of Cr in the range 0 < y < 0.07 and Co in the range␣0 < y < 0.009. The introduction of Cr and Co leads to very different behaviors, including the occurrence of ferromagnetic order in the case of Cd_1−x−y Mn _x Cr _y Te. We discuss the possible origins leading to the observed behaviors.     

Thermoelectric Properties of (Na<Subscript>1−<Emphasis Type="Italic">y</Emphasis></Subscript>M<Subscript><Emphasis Type="Italic">y</Emphasis></Subscript>)<Subscript>1.4</Subscript>Co<Subscript>2</Subscript>O<Subscript>4</Subscript> (M = Sr,Li)

Oxide thermoelectric materials (Na_1−y M _y )_1.4Co₂O₄ (M = Sr, Li; y = 0 to 0.4) were prepared by a sol–gel method. The influence of doping on the thermoelectric properties was investigated, and the phase composition was characterized by x-ray diffraction. Experimental results showed that the main crystalline phase of the undoped and Sr/Li-doped samples was γ-Na_1.4Co₂O₄. The thermoelectric properties of Na_1.4Co₂O₄ can be improved slightly by doping with Sr. Doping with Li improves the thermoelectric properties of Na_1.4Co₂O₄. For a doping fraction of y = 0.1, the electrical conductivity of (Na_1−y Li _y )_1.4Co₂O₄ at 288 K achieves its maximum value of 301.19 (Ω mm)⁻¹. The Seebeck coefficient and power factor of (Na_1−y Li _y )_1.4Co₂O₄ at 288 K achieve their maximum values of 172.28 μV K⁻¹ and 7.44 mW m⁻¹ K⁻² at a doping fraction of y = 0.4.     

Lpe growth of Hgl−xCdxTe using conventional slider boat and effects of annealing on properties of the epilayers

The epitaxial layers of Hg_1−xCd_xTe (0.17≦×≦0.3) were grown by liquid phase epitaxy on CdTe (111)A substrates using a conventional slider boat in the open tube H₂ flow system. The as-grown layers have hole concentrations in the 10¹⁷− 10¹⁸ cm⁻³ range and Hall mobilities in the 100−500 cm²/Vs range for the x=0.2 layers. The surfaces of the layers are mirror-like and EMPA data of the layers show sharp compositional transition at the interface between the epitaxial layer and the substrate. The effects of annealing in Hg over-pressure on the properties of the as-grown layers were also investigated in the temperature range of 250−400 °C. By annealing at the temperature of 400 °C, a compositional change near the interface is observed. Contrary to this, without apparent compositional change, well-behaved n-type layers are obtained by annealing in the 250−300 °C temperature range. Sequential growth of double heterostructure, Hg_l−xCd_xTe/Hg_l−yCd_yTe on a CdTe (111)A substrate was also demonstrated.     

X-ray diffraction analysis and scanning micro-Raman spectroscopy of structural irregularities and strains deep inside the multilayered InGaN/GaN heterostructure

High-resolution X-ray diffraction analysis and scanning confocal Raman spectroscopy are used to study the spatial distribution of strains in the In _x Ga_{1 − x} N/GaN layers and structural quality of these layers in a multilayered light-emitting diode structure produced by metal-organic chemical vapor deposition onto (0001)-oriented sapphire substrates. It is shown that elastic strains almost completely relax at the heterointerface between the thick GaN buffer layer and In _x Ga_{1 − x} N/GaN buffer superlattice. It is established that the GaN layers in the superlattice are in a stretched state, whereas the alloy layers are in a compressed state. In magnitude, the stretching strains in the GaN layers are lower than the compressive strains in the InGaN layers. It is shown that, as compared to the buffer layers, the layers of the superlattice contain a smaller number of dislocations and the distribution of dislocations is more randomly disordered. In micro-Raman studies on scanning through the thickness of the multilayered structure, direct evidence is obtained for the asymmetric gradient distributions of strains and crystal imperfections of the epitaxial nitride layers along the direction of growth. It is shown that the emission intensity of the In _x Ga_{1 − x} N quantum well is considerably (more than 30 times) higher than the emission intensity of the GaN barrier layers, suggesting the high efficiency of trapping of charge carriers by the quantum well.     

Molecular beam epitaxy and characterization of Al x Ga1-x As y Sb1-y (0.0 ≤x ≤ 1.0) lattice matched to InAs substrates

We report the molecular beam epitaxial growth of Al _x Ga_1-x As _y Sb_1-y (0.0 ≤ x ≤ 1.0) on undoped, liquid-encapsulated Czochralski, (100) oriented InAs substrates. The degree of lattice mismatch was determined by x-ray diffraction. The lattice matched materials (y ≈ 0.08 + 0.08x) were characterized by low temperature photoluminescence, electro-reflectance, and capacitance-voltage measurements. The experimental bandgap energies agree with earlier experimental results for Al _x Ga_1-x Sb, and also with a self-consistent first principles pseudopotential model. The capacitance-voltage measurements indicate background acceptor concentrations for the unintentionally-doped epitaxial layers of about 2 × 10¹⁵ cm^-3 atx = 1.0 to 5 × 10¹⁶ cm^-3 atx ≈ 0.0.     

Asymmetric Dislocation Densities in Forward-Graded ZnS<Subscript><Emphasis Type="Italic">y</Emphasis></Subscript>Se<Subscript>1−<Emphasis Type="Italic">y</Emphasis></Subscript>/GaAs (001) Heterostructures

We report an experimental and modeling study of ZnS _y Se_1−y /GaAs (001) structures, all of which comprised a uniform top layer of ZnS_0.014Se_0.986 grown on a compositionally graded buffer layer or directly on the GaAs substrate. High-resolution x-ray diffraction was used to estimate dislocation densities on type A slip systems, with misfit dislocation (MD) line segments oriented along the [1[`1]0] [1\bar{1}0] direction, and type B slip systems, with MD line segments oriented along a [110] direction. A control sample having no graded buffer exhibits equal dislocation densities on the two types of slip systems (D _A ≈ D _B ≈ 1.5 × 10⁸ cm⁻²), but a forward-graded (FG) structure (grading coefficient of 27 cm⁻¹) exhibits 20% more dislocations on the type B slip systems (D _A ≈ 1.6 × 10⁸ cm⁻² and D _B ≈ 1.9 × 10⁸ cm⁻²) and a steep forward-graded structure (grading coefficient of 54 cm⁻¹) exhibits 50% more type B dislocations (D _A ≈ 2 × 10⁸ cm⁻² and D _B ≈ 3 × 10⁸ cm⁻²). The insertion of an overshoot interface reduced the dislocation densities in the uniform top layer by promoting annihilation and coalescence reactions, but type B dislocations were removed more effectively. Based on equilibrium calculations the overshoot graded layer in the steep graded overshoot structure is expected to exhibit large compressive and tensile strains, with a reversal in the sign of the strain near its middle, which may promote annihilation and coalescence reactions between threading dislocations.     

Characterization of Zn1?xMgxO Films Prepared by the Sol–Gel Process and Their Application for Thin-Film Transistors

Transparent semiconductor thin films of Zn_1−x Mg _x O (0 ≤ x ≤ 0.36) were prepared using a sol–gel process; the crystallinity levels, microstructures, and optical properties affected by Mg content were studied. The experimental results showed that addition of Mg species in ZnO films markedly decreased the surface roughness and improved transparency in the visible range. A Zn_1−x Mg _x O film with an x-value of 0.2 exhibited the best average transmittance, namely 93.7%, and a root-mean-square (RMS) roughness of 1.63 nm. Therefore, thin-film transistors (TFTs) with a Zn_0.8Mg_0.2O active channel layer were fabricated and found to have n-type enhancement mode. The Zn_0.8Mg_0.2O TFT had a field-effect mobility of 0.1 cm²/V s, threshold voltage of 6.0 V, and drain current on/off ratio of more than 10⁷.     

Solution Growth and Thermoelectric Properties of Single-Phase MnSi<Subscript>1.75−<Emphasis Type="Italic">x</Emphasis></Subscript>

We have investigated the crystal growth of single-phase MnSi_1.75−x by a temperature gradient solution growth (TGSG) method using Ga and Sn as solvents and MnSi_1.7 alloy as the solute, and measured the thermoelectric properties of the resulting crystals. Single-phase Mn₁₁Si₁₉ and Mn₄Si₇ crystals were grown successfully using Ga and Sn as solvents, respectively. The typical size of a grown ingot of Mn₁₁Si₁₉ was 2 mm to 4 mm in thickness and 12 mm in diameter, whereas Mn₄Si₇ had polyhedral shape with dimensions in the range of several millimeters. The single-phase Mn₁₁Si₁₉ has good electrical conduction (ρ = 0.89 × 10⁻³ Ω cm to 1.09 × 10⁻³ Ω cm) compared with melt-grown multiphase higher-manganese silicide (HMS) crystals. The Seebeck coefficient, power factor, and thermal conductivity were 77 μV K⁻¹ to 85 μV K⁻¹, 6.7 μW cm⁻¹ K⁻² to 7.2 μW cm⁻¹ K⁻², and 0.032 W cm⁻¹ K⁻¹, respectively, at 300 K.     

Cyclic Annealing During Metalorganic Vapor-Phase Epitaxial Growth of (211)B CdTe on (211) Si Substrates

High-quality (211)B CdTe buffer layers on Si substrates are required to enable Hg_1–x Cd _x Te growth and device fabrication on lattice-mismatched Si substrates. Metalorganic vapor-phase epitaxy (MOVPE) of (211)B CdTe on Si substrates using Ge and ZnTe interlayers has been achieved. Cyclic annealing has been used during growth of thick CdTe layers in order to improve crystal quality. The best (211)B CdTe/Si films grown in this study display a low x-ray diffraction (XRD) rocking-curve full-width at half-maximum (FWHM) of 85 arcsec and etch pit density (EPD) of 2 × 10⁶ cm⁻². These values are the best reported for MOVPE-grown (211) CdTe/Si and are comparable to those for state-of-the-art molecular beam epitaxy (MBE)-grown CdTe/Si.     

HgCdZnTe quaternary materials for lattice-matched two-color detectors

As the number of bands and the complexity of HgCdTe multicolor structures increases, it is desirable to minimize the lattice mismatch at growth interfaces within the device structure in order to reduce or eliminate mismatch dislocations at these interfaces and potential threading dislocations that can degrade device performance. To achieve this we are investigating the use of Hg_1−x−yCd_xZn_yTe quaternary alloys which have an independently tunable lattice constant and bandgap. Lattice matching in Hg_1−x−yCd_xZn_yTe structures can be achieved using small additions of Zn (y<0.015) to HgCdTe ternary alloys. We have investigated some of the basic properties of Hg_1−x−yCd_xZn_yTe materials with x≈0.31 and 0≤y≤0.015. The quaternary layers were grown on (112)CdZnTe substrates using MBE and the amount of Zn in the layers was determined from calibrated SIMS measurements. As expected, the lattice constant decreased and the bandgap increased as Zn was added to HgCdTe to form Hg_1−x−yCd_xZn_yTe. Hall-effect results for both n-type (In) and p-type (As) Hg_1−x−yCd_xZn_yTe layers were very similar to HgCdTe control samples. We have also utilized x-ray rocking curve measurements with (246) asymmetric reflections as a novel sensitive technique to determine the correct amount of Zn needed to achieve lattice matching at an interface. MWIR/LWIR n-p-n two-color triple-layer heterojunction structures were grown to evaluate the effects of minimizing the lattice mismatch between the widest bandgap p-type collector layer, using Hg_1−x−yCd_xZn_yTe, and the HgCdTe MWIR and LWIR collector layers and compared to structures that did not incorporate the quaternary. Sequential mode two-color detectors were fabricated using a 256 × 256, 30 μm unit cell design. There were several interesting findings. Macro defects predominantly affected the LWIR band (Band 2) operability and had little effect on the MWIR band (Band 1). The incorporation of Hg_1−x−yCd_xZn_yTe p-type collector layers had little effect on MWIR detector performance, but overall the LWIR performance was generally better. These initial detector results indicate that the use of Hg_1−x−yCd_xZn_yTe alloys in multicolor detector structures are potentially promising and should be pursued further.     

Electrical Activation Studies of Silicon-Implanted Al<Subscript><Emphasis Type="Italic">x</Emphasis></Subscript>Ga<Subscript>1−<Emphasis Type="Italic">x</Emphasis></Subscript>N with Aluminum Mole Fraction of 11% to 51%

Electrical activation studies of Si-implanted Al _x Ga_1−x N with an Al mole fraction of 11% to 51% have been carried out as a function of ion dose and annealing temperature. The Al _x Ga_1−x N samples were implanted at room temperature with Si ions at 200 keV in doses ranging from 1 × 10¹⁴ cm⁻² to 1 × 10¹⁵ cm⁻², and subsequently annealed from 1100°C to 1350°C for 20 min in a nitrogen environment. The maximum electrical activation efficiencies for the Al _x Ga_1−x N samples with an Al mole fraction less than 40% were obtained for samples implanted with the highest Si dose of 1 × 10¹⁵ cm⁻². On the other hand, for the Al _x Ga_1−x N samples with an Al mole fraction more than 40%, nearly perfect activation efficiencies of 99% and 100% were obtained for the samples implanted with the lowest Si dose of 1 × 10¹⁴ cm⁻². The mobility of the Si-implanted Al _x Ga_1−x N samples increased with increasing annealing temperature in spite of the increased number of ionized donors and thus increased impurity scattering, indicating that a greater amount of lattice damage is being repaired with each successive increase in annealing temperature. These results provide suitable annealing conditions for Si-implanted Al _x Ga_1−x N-based devices with an Al mole fraction from 11% to 51%.     

Distinctive features of the far-infrared reflection spectra of the semimagnetic semiconductors Hg1−x MnxTe1−y Sey

Reflection spectra of single crystals of Hg_1−x Mn_xTe_1−y Se_y (0.01<x<0.14, y=0.01) in the far-infrared range (10–600 cm⁻¹) are investigated at 300 and 77 K. A series of new phonon modes is observed, in addition to the longitudinal and transverse modes corresponding to the ternary compounds. Fiz. Tekh. Poluprovodn. 32, 546–548 (May 1998)     

Molecular beam epitaxial growth of Cd<Subscript>1−y</Subscript>Zn<Subscript>y</Subscript>Se<Subscript>x</Subscript>Te<Subscript>1−x</Subscript> on Si(211)

We report on the first successful growth of the quaternary alloy Cd_1−yZn_ySe_xTe_1−x(211) on 3-in. Si(211) substrates using molecular beam epitaxy (MBE). The growth of CdZnSeTe was performed using a compound CdTe effusion source, a compound ZnTe source, and an elemental Se effusion source. The alloy compositions (x and y) of the Cd_1−yZn_ySe_xTe_1−x quaternary compound were controlled through the Se/CdTe and ZnTe/CdTe flux ratios, respectively. Our results indicated that the surface morphology of CdZnSeTe improves as the Zn concentration decreases, which fits well with our previous observation that the surface morphology of CdZnTe/Si is poorer than that of CdSeTe/Si. Although the x-ray full-width at half-maximums (FWHMs) of CdZnSeTe/Si with 4% of Zn + Se remain relatively constant regardless of the individual Zn and Se concentrations, etched-pit density (EPD) measurements exhibit a higher dislocation count on CdZnSeTe/Si layers with about 2% Zn and Se incorporated. The enhancement of threading dislocations in these alloys might be due to an alloy disorder effect between ZnSe and CdTe phases. Our results indicate that the CdZnSeTe/Si quaternary material with low Zn or low Se concentration (less than 1.5%) while maintaining 4% total Zn + Se concentration can be used as lattice-matching composite substrates for long-wavelength infrared (LWIR) HgCdTe as an alternative for CdZnTe/Si or CdSeTe/Si.     

Investigation of microstructure and V-defect formation in In<Subscript>x</Subscript>Ga<Subscript>1−x</Subscript>N/GaN MQW grown using temperature-gradient metalorganic chemical vapor deposition

Temperature-gradient metalorganic chemical vapor deposition (MOCVD) was used to deposit In_xGa_1−xN/GaN multiple quantum well (MQW) structures with a concentration gradient of indium across the wafer. These MQW structures were deposited on low defect density (2×10⁸ cm⁻²) GaN template layers for investigation of microstructural properties and V-defect (pinhole) formation. Room temperature (RT) photoluminescence (PL) and photomodulated transmission (PT) were used for optical characterization, which show a systematic decrease in emission energy for a decrease in growth temperature. Triple-axis x-ray diffraction (XRD), scanning electron microscopy, and cross-sectional transmission electron microscopy were used to obtain microstructural properties of different regions across the wafer. Results show that there is a decrease in crystal quality and an increase in V-defect formation with increasing indium concentration. A direct correlation was found between V-defect density and growth temperature due to increased strain and indium segregation for increasing indium concentration.