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1.
本文研究了各种实验参数对O-SIMS和Cs-SIMS中GaAs二次离子发射的影响,和样品室中氧分压对GaAs二次离子发射的增强效应.实验表明,与Ar-SIMS不同,O-SIMS和Cs-SIMS中随Ep增加二次离子的强度反而有所下降,而样品室注入氧可以提高正二次离子产额,但需要达到较高的氧分压:10-3Pa.二次离子能量分布测量表明,对O-SIMS,二次离子强度在Vbias=30V左右达到最大值,对Cs-SIMS,二次离子强度在Vbias=-20V左右达到最大值.  相似文献   

2.
陈维德  谢小龙 《半导体学报》1996,17(10):784-788
利用Ge/Pd/GaAs结构和快速热退火工艺在n-GaAs上形成低阻的欧姆接触,研究了比接触电阻率与退火的温度和时间关系,400-500℃之间退火的欧姆接触的比接触电阻率为-10^-6Ω.cm^2,接触层的表面光滑、界面平整,利用俄歇电子谱(AES)和二次离子质谱(SIMS)揭示和讨论了比接触电阻率的欧姆接触形成的机理。  相似文献   

3.
利用Ge/Pd/GaAs结构和快速热退火工艺在n-GaAs上形成低阻的欧姆接触.研究了比接触电阻率与退火的温度和时间关系,400~500℃之间退火的欧姆接触的比接触电阻率为~10-6Ω·cm2.接触层的表面光滑、界面平整.利用俄歇电子谱(AES)和二次离子质谱(SIMS)一揭示和讨论了比接触电阻率的欧姆接触形成的机理.  相似文献   

4.
本文采用Si+和Si+、As+单、双离子多重注入半绝缘砷化镓[HB-SIGaAs(Cr)].研究发现,双离子注入层经无包封快速热退火后,激活率和电子迁移率较单Si+注入样品明显提高.Raman谱显示结构完整性好,并且有好的载流子剖面分布.文中从化学计量比角度出发分析了激活率提高的原因和从注入离子增强扩散系数分布来解释了多重Si+、As+双注入的载流子浓度剖面分布.  相似文献   

5.
研究了Si^+和Si^+/As^+注入到Horizontal Bridgman(HB)和Liquid Encapsulated Czochralski(LEC)方法制备的半绝缘GaAs衬底电激活效率与均匀性。结果发现:在相同条件下(注入与退火),不同生长方法的半绝缘GaAs衬底电激活不同,通常电激活HB〉LEC,HB SI--GaAs(Cr)(100)A面〉(100)B面,Si^+/As^+双离子  相似文献   

6.
GaAs(100)表面钝化和Mg/S/GaAs界面的SRPES研究   总被引:1,自引:1,他引:0  
应用同步辐射光电子谱(SRPES)表征了一种新的CH3CSNH2/NH4OH溶液体系处理的GaAs(100)表面的成键特性和电子态.结果表明,经过处理的GaAs(100)表面,S既与As成键也与Ga成键,形成了S与GaAs的新界面,这说明CH3CSNH2/NH4OH溶液处理的GaAs(100)表面具有明显的钝化作用.钝化表面退火处理后,发现AS的硫化物不稳定,分解或反应生成Ga-S成分和元素态As;室温下,Mg淀积硫钝化的GaAs表面的实验结果表明,Mg置换GaS的Ga成为金属Ga偏析到表面,而硫以MgS  相似文献   

7.
分析了AlxGa1-xAs/GaAsHBT外基区表面复合电流及外基区复面复合速度对直接增益的影响,用光致发光(PL)谱和Al/SiNx-S/GaAsMIS结构CV特性,研究了GaAs表面(NH4)2S/SiNx钝化工艺的效果及其稳定性。结果表明,ECR-CVD淀积SiNx覆盖并在N2气氛中退火有助于改善GaAs表面硫钝化效果的稳定性,在此基础上形成了一套包括(NH4)2S处理,SiNxECR-CV  相似文献   

8.
分析了AlxGa1-xAs/GaAsHBT外基区表面复合电流及外基区表面复合速度对直流增益的影响,用光致发光(PL)谱和Al/SiNx-S/GaAsMIS结构C-V特性,研究了GaAs表面(NH4)2S/SiNx钝化工艺的效果及其稳定性。结果表明,ECR-CVD淀积SiNx覆盖并在N2气氛中退火有助于改善GaAs表面硫钝化效果的稳定性。在此基础上形成了一套包括(NH4)2S处理、SiNxECR-CVD淀积及退火并与现有HBT工艺兼容的外基区表面钝化工艺,使发射区面积为4×10μm2的器件增益比钝化前提高了4倍,且60天内不退化。  相似文献   

9.
本文用低温光致发光光谱(PL)、椭圆偏振光谱(SE)、背散射及沟道技术(RBS/C)、扫描电镜技术(SEM)等研究了2MeV高能N+注入Gasb晶体损伤及其光学性质.结果表明高能N+注入Gasb晶体不会产生反常膨胀(Swelling),通过合理的退火可使注入样品晶格得到很好恢复.椭圆偏振光谱能准确反映注入样品晶格损伤情况,并与背散射结果吻合.用有效介质模型(EMA)对椭偏谱进行似合可对注入损伤有定量的了解.  相似文献   

10.
用激光加热基座法生长了Er:YAG、(Nd、Er):YAG和Nd:YAG单晶光纤,测试了单晶光纤的透过率谱和Er^3+离子^4I11/2、^4I13/2态,Nd^2+离子^4F3/2态的固有寿命τ0,双掺晶体中这些态的平均寿命τ0。讨论了Nd^3+离子对Er^3+离子的敏化作用。  相似文献   

11.
From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.  相似文献   

12.
The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.  相似文献   

13.
The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.  相似文献   

14.
Today, micro-system technology and the development of new MEMS (Micro-Electro-Mechanical Systems) are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.  相似文献   

15.
A new quantum protocol to teleport an arbitrary unknown N-qubit entangled state from a sender to a fixed receiver under M controllers(M < N) is proposed. The quantum resources required are M non-maximally entangled Greenberger-Home-Zeilinger (GHZ) state and N-M non-maximally entangled Einstein-Podolsky-Rosen (EPR) pairs. The sender performs N generalized Bell-state measurements on the 2N particles. Controllers take M single-particle measurement along x-axis, and the receiver needs to introduce one auxiliary two-level particle to extract quantum information probabilistically with the fidelity unit if controllers cooperate with it.  相似文献   

16.
A continuous-wave (CW) 457 nm blue laser operating at the power of 4.2 W is demonstrated by using a fiber coupled laser diode module pumped Nd: YVO4 and using LBO as the intra-cavity SHG crystal With the optimization of laser cavity and crystal parameters, the laser operates at a very high efficiency. When the pumping power is about 31 W, the output at 457nm reaches 4.2 W, and the optical to optical conversion efficiency is about 13.5% accordingly. The stability of the out putpower is better than 1.2% for 8 h continuously working.  相似文献   

17.
Call for Papers     
正Wireless Body-area Networks The last decade has witnessed the convergence of three giant worlds:electronics,computer science and telecommunications.The next decade should follow this convergence in most of our activities with the generalization of sensor networks.In particular with the progress in medicine,people live longer and the aging of population will push the development of wireless personal networks  相似文献   

18.
正Information Centric Networking Information-Centric Networking(ICN) is an emerging direction in Future Internet architecture research,gaining significant tractions among academia and industry.Aiming to replace the conventional host-to-host communication model by a data-centric model,ICN treats data content as the first  相似文献   

19.
20.
正Journal of Electronics(China)(JE)was founded in 1984,sponsored by the Institute of Electronics,Chinese Academy of Sciences.JE is one of the first English academic journals in China in the field of Electronics and Information technology.The journal was published quarterly since it was launched in 1984 to 2003,then it is published bimonthly till now.During  相似文献   

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