Rapid,simple and low cost fabrication of a microfluidic direct methanol fuel cell based on polydimethylsiloxane

In this paper a simple and rapid fabrication method for a microfluidic direct methanol fuel cell using polydimethylsiloxane (PDMS) as substrate is demonstrated. A gold layer on PDMS substrate as seed layer was obtained by chemical plating instead of conventional metal evaporation or sputtering. The morphology of the gold layer can be controlled by adjusting the ratio of curing agent to the PDMS monomer. The chemical properties of the gold films were examined. Then catalyst nanoparticles were grown on the films either by cyclic voltammetry or electrophoretic deposition. The microfluidic fuel cell was assembled by simple oxygen plasma bonding between two PDMS substrates. The cell operated at room temperature with a maximum power density around 6.28 mW cm^?2. Such a fuel cell is low-cost and easy to construct, and is convenient to be integrated with other devices because of the viscosity of the PDMS. This work will facilitate the development of miniature on-chip power sources for portable electronic devices.     

Fabrication of buried microfluidic channels with observation windows using femtosecond laser photoablation and parylene-C coating

We developed an advanced method for fabricating microfluidic structures comprising channels and inputs/outputs buried within a silicon wafer based on single level lithography. We etched trenches into a silicon substrate, covered these trenches with parylene-C, and selectively opened their bottoms using femtosecond laser photoablation, forming channels and inputs/outputs by isotropic etching of silicon by xenon difluoride vapors. We subsequently sealed the channels with a second parylene-C layer. Unlike in previously published works, this entire process is conducted at ambient temperature to allow for integration with complementary metal oxide semiconductor devices for smart readout electronics. We also demonstrated a method of chip cryo-cleaving with parylene presence that allows for monitoring of the process development. We also created an observation window for in situ visualization inside the opaque silicon substrate by forming a hole in the parylene layer at the silicon backside and with local silicon removal by xenon difluoride vapor etching. We verified the microfluidic chip performance by forming a segmented flow of a fluorescein solution in an oil stream. This proposed technique provides opportunities for forming simple microfluidic systems with buried channels at ambient temperature.     

高聚物微流控芯片上集成化气动微阀的研制

报道了一种新型的聚甲基丙烯酸甲酯(PMMA)/聚二甲基硅氧烷(PDMS)复合芯片。该芯片采用PMMA-PDMS…PDMS-PMMA的四层构型,以在芯片上集成气动微阀。具有液路和控制通道网路的PMMA基片与PDMS弹性膜间采用不可逆封接,分别形成液路半芯片和控制半芯片,而2个半芯片则依靠PDMS膜间的粘性实现可逆封接,组成带有微阀的全芯片。这种制备方法解决了制备PMMA-PDMS-PMMA三层结构芯片的封接难题,封接过程简单可靠。其控制部分和液路部分可以单独更换,可进一步降低使用成本,尤其适合一次性应用场合。初步实验表明:该微阀具有良好的开关性能和耐用性。     

A Rapid and Low-Cost Procedure for Fabrication of Glass Microfluidic Devices

In this paper, we present a simple, rapid, and low-cost procedure for fabricating glass microfluidic chips. This procedure uses commercially available microscopic slides as substrates and a thin layer of AZ 4620 positive photoresist (PR) as an etch mask for fabricating glass microfluidic components, rather than using expensive quartz glasses or Pyrex glasses as substrates and depositing an expensive metal or polysilicon/amorphous silicon layer as etch masks in conventional method. A long hard-baking process is proposed to realize the durable PR mask capable of withstanding a long etching process. In order to remove precipitated particles generated during the etching process, a new recipe of buffered oxide etching with addition of 20% HCl is also reported. A smooth surface microchannel with a depth of more than 110 mum is achieved after 2 h of etching. Meanwhile, a simple, fast, but reliable bonding process based on UV-curable glue has been developed which takes only 10 min to accomplish the efficient sealing of glass chips. The result shows that a high bonding yield (~ 100%) can be easily achieved without the requirement of clean room facilities and programmed high-temperature furnaces. The presented simple fabrication process is suitable for fast prototyping and manufacturing disposable microfluidic devices.     

Stamp-and-stick room-temperature bonding technique for microdevices

Multilayer MEMS and microfluidic designs using diverse materials demand separate fabrication of device components followed by assembly to make the final device. Structural and moving components, labile bio-molecules, fluids and temperature-sensitive materials place special restrictions on the bonding processes that can be used for assembly of MEMS devices. We describe a room temperature "stamp and stick (SAS)" transfer bonding technique for silicon, glass and nitride surfaces using a UV curable adhesive. Alternatively, poly(dimethylsiloxane) (PDMS) can also be used as the adhesive; this is particularly useful for bonding PDMS devices. A thin layer of adhesive is first spun on a flat wafer. This adhesive layer is then selectively transferred to the device chip from the wafer using a stamping process. The device chip can then be aligned and bonded to other chips/wafers. This bonding process is conformal and works even on surfaces with uneven topography. This aspect is especially relevant to microfluidics, where good sealing can be difficult to obtain with channels on uneven surfaces. Burst pressure tests suggest that wafer bonds using the UV curable adhesive could withstand pressures of 700 kPa (7 atmospheres); those with PDMS could withstand 200 to 700 kPa (2-7 atmospheres) depending on the geometry and configuration of the device.     

Fabrication techniques to realize CMOS-compatible microfluidicmicrochannels

With microfluidic systems becoming more prominent, fabrication techniques for microfluidic systems are increasingly more important. An interesting alternative to existing fabrication techniques is to embed fluidic systems within an integrated circuit by micromachining materials in the integrated circuit itself. This paper describes novel methods for fabricating one component in the complementary metal-oxide-semiconductor (CMOS) microfluidic system, the microchannel. These techniques allow direct integration of sensors, actuators, or other electronics with the microchannel. This method expands the functional applications for microfluidic systems beyond their current abilities. By utilizing the methods described within this paper, a complete “smart” microfluidic system could be batch fabricated on a single integrated circuit (IC) chip     

SU-8 microchannels for live cell dielectrophoresis improvements

In this work a novel highly precise SU-8 fabrication technology is employed to construct microfluidic devices for sensitive dielectrophoretic (DEP) manipulation of budding yeast cells. A benchmark microfluidic live cell sorting system is presented, and the effect of microchannel misalignment above electrode topologies on live cell DEP is discussed in detail. Simplified model of budding Saccharomyces cerevisiae yeast cell is presented and validated experimentally in fabricated microfluidic devices. A novel fabrication process enabling rapid prototyping of microfluidic devices with well-aligned integrated electrodes is presented and the process flow is described. Identical devices were produced with standard soft-lithography processes. In comparison to standard PDMS based soft-lithography, an SU-8 layer was used to construct the microchannel walls sealed by a flat sheet of PDMS to obtain the microfluidic channels. Direct bonding of PDMS to SU-8 surface was achieved by efficient wet chemical silanization combined with oxygen plasma treatment of the contact surface. The presented fabrication process significantly improved the alignment of the microstructures. While, according to the benchmark study, the standard PDMS procedure fell well outside the range required for reasonable cell sorting efficiency. In addition, PDMS delamination above electrode topologies was significantly decreased over standard soft-lithography devices. The fabrication time and costs of the proposed methodology were found to be roughly the same.

     

A post-bonding-free fabrication of integrated microfluidic devices for mass spectrometry applications

This paper presents a novel process for fabricating integrated microfluidic devices with embedded electrodes which utilizes low-cost UV curable resins. Commercial UV glue is sandwiched between two substrates and is used for both the structural material and the bonding adhesive. During the exposure procedure, the pattern of micro-fluidic channels is defined using a standard lithography process while the two substrates are bonded. The un-cured UV glue is then removed by vacuum suction to form the sealed microfluidic channel. With this simple approach, conventional high-temperature bonding processes can be excluded in the fabrication of sealed microfluidic structures such that the developed method is highly advantageous for fabricating microchip devices with embedded electrodes. The overall time required to fabricate the sealed microchip device is less than 10 min since no time-consuming etching and bonding process is necessary. An innovative micro-reactor integrated with an in-channel micro-plasma generator for real-time chemical reaction analysis is fabricated using the developed process. On-line mass-spectrum (MS) detection of an esterification reaction is successfully demonstrated, which results in a fast, label-free, preparation-free analysis of chemical samples. The developed process can thus show its potential for rapid and low-cost microdevice manufacturing.     

Fabrication of a surface stress-based PDMS micro-membrane biosensor

With the development of technology and society, biosensors are more and more important in the areas of healthcare. Specially, the design and fabrication of perfect biosensors play a crucial role in the whole process. In the paper, a surface stress-based polydimethylsiloxane (PDMS) micro membrane biosensor array has been fabricated based on the surface and bulk microfabrication technology. The challenges in fabrication, such as integration of PDMS processing with conventional microfabrication processes, were successfully mastered to build the biosensor. In addition, the bonding technique, uncured PDMS as the intermediate layer for bonding the biosensor with microfluidic devices or components, has been developed to later construct the BioMEMS. Bond strength is close to that of bulk PDMS. Through the bio-experiments to Escherichia coli (E. coli), the cells can be detected based on the membrane deflection induced by surface stress.     

Miniaturized DNA amplification platform with soft-lithographically fabricated continuous-flow PCR microfluidic device on a portable temperature controller

Fabrication of 3D microfluidic devices is normally quite expensive and tedious. A strategy was established to rapidly and effectively produce multilayer 3D microfluidic chips which are made of two layers of poly(methyl methacrylate) (PMMA) sheets and three layers of double-sided pressure sensitive adhesive (PSA) tapes. The channel structures were cut in each layer by cutting plotter before assembly. The structured channels were covered by a PMMA sheet on top and a PMMA carrier which contained threads to connect with tubing. A large variety of PMMA slides and PSA tapes can easily be designed and cut with the help of a cutting plotter. The microfluidic chip was manually assembled by a simple lamination process.The complete fabrication process from device design concept to working device can be completed in minutes without the need of expensive equipment such as laser, thermal lamination, and cleanroom. This rapid frabrication method was applied for design of a 3D hydrodynamic focusing device for synthesis of gold nanoparticles (AuNPs) as proof-of-concept. The fouling of AuNPs was prevented by means of a sheath flow. Different parameters such as flow rate and concentration of reagents were controlled to achieve AuNPs of various sizes. The sheet-based fabrication method offers a possibility to create complex microfluidic devices in a rapid, cheap and easy way.

     

Enhancement of the surface free energy of PDMS for reversible and leakage-free bonding of PDMS–PS microfluidic cell-culture systems

Polydimethylsiloxane (PDMS) has become one of the most widely used materials in the fabrication of microfluidic systems bonded onto glass substrates, especially for cell biology applications. However, PDMS is often unsuitable for building microfluidic systems onto polystyrene (PS) which is the preferred substrate in most cell-culture protocols. In particular, PS is required for culturing many stem cell and primary cell types. Here, we propose a novel approach to building PDMS–PS microfluidic cell-culture systems, specifically realizing a strong and reversible bonding of PDMS on PS without using chemical agents which can have negative effects on cell viability. Our strategy to strengthen the bonding of PDMS to PS surfaces is to increase the surface free energy (SFE) by adjusting the mixing ratio of PDMS base to curing agent and by treating the surfaces of PDMS and PS with O₂ plasma and annealing. Our results show that using this method for PDMS–PS bonding, we are able to produce reliable reversible and leakage-free PDMS–PS microfluidic cell-culture systems.     

Low-cost polymer microfluidic device for on-chip extraction of bacterial DNA

A polymer microfluidic device for on-chip extraction of bacterial DNA has been developed for molecular diagnostics. In order to manufacture a low-cost, disposable microchip, micropillar arrays of high surface-to-volume ratio (0.152 μm⁻¹) were constructed on polymethyl methacrylate (PMMA) by hot embossing with an electroformed Ni mold, and their surface was modified with SiO₂ and an organosilane compound in subsequent steps. To seal open microchannels, the organosilane layer on top plane of the micropillars was selectively removed through photocatalytic oxidation via TiO₂/UV treatment at room temperature. As a result, the underlying SiO₂ surface was exposed without deteriorating the organosilane layer coated on lateral surface of the micropillars that could serve as bacterial cell adhesion moiety. Afterwards, a plasma-treated PDMS substrate was bonded to the exposed SiO₂ surface, completing the device fabrication. To optimize manufacturing throughput and process integration, the whole fabrication process was performed at 6 inch wafer-level including polymer imprinting, organosilane coating, and bonding. Preparation of bacterial DNA was carried out with the fabricated PDMS/PMMA chip according to the following procedure: bacterial cell capture, washing, in situ lysis, and DNA elution. The polymer-based microchip presented here demonstrated similar performance to Glass/Si chip in terms of bacterial cell capture efficiency and polymerase chain reaction (PCR) compatibility.     

Investigation and improvement of reversible microfluidic devices based on glass–PDMS–glass sandwich configuration

Reversibly assembled microfluidic devices are dismountable and reusable, which is useful for a number of applications such as micro- and nano-device fabrication, surface functionalization, complex cell patterning, and other biological analysis by means of spatial–temporal pattern. However, reversible microfluidic devices fabricated with current standard procedures can only be used for low-pressure applications. Assembling technology based on glass–PDMS–glass sandwich configuration provides an alternative sealing method for reversible microfluidic devices, which can drastically increase the sealing strength of reversibly adhered devices. The improvement mechanism of sealing properties of microfluidic devices based on the sandwich technique has not been fully characterized, hindering further improvement and broad use of this technique. Here, we characterize, for the first time, the effect of various parameters on the sealing strength of reversible PDMS/glass hybrid microfluidic devices, including contact area, PDMS thickness, assembling mode, and external force. To further improve the reversible sealing of glass–PDMS–glass microfluidic devices, we propose a new scheme which exploits mechanical clamping elements to reinforce the sealing strength of glass–PDMS–glass sandwich structures. Using our scheme, the glass–PDMS–glass microchips can survive a pressure up to 400 kPa, which is comparable to the irreversibly bonded PDMS microdevices. We believe that this bonding method may find use in lab-on-a-chip devices, particularly in active high-pressure-driven microfluidic devices.     

Fabrication of microfluidic channels based on melt-electrospinning direct writing

Microfluidics is a flourishing field, enabling a wide range of applications. However, the current fabrication methods for creating the microchannel structures of microfluidic devices, such as photolithography and 3D printing, mostly have the problems of time-consuming, high cost or low resolution. In this work, we developed a simple and flexible method to fabricate PDMS microfluidic channels, based on poly(ε-caprolactone) (PCL) master mold additive manufactured by a technique termed melt-electrospinning direct writing (MEDW). It relies on the following steps: (1) direct writing of micrometric PCL 2D or 3D pattern by MEDW. (2) Casting PDMS on the printed PCL pattern. (3) Peeling off of patterned PDMS from the embedded sacrificial PCL layer. (4) Bonding the PDMS with microchannel to another PDMS layer by hot pressing. The process parameters during MEDW such as collector speed, nozzle dimension and temperature were studied and optimized for the quality and dimension of the printed micropatterns. Multilayer fiber deposition was developed and applied to achieve microscale architectures with high aspect ratio. Thus, the microchannels fabricated by the proposed approach could possess tunable width and depth. Finally, T-shape and cross-channel devices were fabricated to create either laminar flow or microdroplets to illustrate the applicability and potential of this method for microfluidic device manufacture.     

Rapid prototyping of single-layer microfluidic PDMS devices with abrupt depth variations under non-clean-room conditions by using laser ablation and UV-curable polymer

The growing demand for microfluidic analytical devices calls for fast, cost-effective and high-throughput fabrication methods. Here we report a low-cost rapid prototyping method for single-layer microfluidic PDMS devices with abrupt depth variations under non-clean-room conditions. Channel patterns with different user-designed depths ranging from micrometres to millimetres are engraved on a polymethylmethacrylate (PMMA) plate in one step based on a laser ablation approach. A UV-curable polymer, Norland Optical Adhesive (NOA) 81, is then used to replicate the channel patterns from the PMMA female mould and is finally used as the master for single-layer polydimethylsiloxane (PDMS) microfluidic devices. This rapid prototyping method can significantly facilitate the fast evaluation of proof of concept in microfluidic researches and small-scale mass production for commercialization applications.     

Bench scale glass-to-glass bonding for microfluidic prototyping

Microfluidics, an increasingly ubiquitous technology platform, has been extensively utilized in assorted research areas. Commonly, microfluidic devices are fabricated using cheap and convenient elastomers such as poly(dimethylsiloxane) (PDMS). However, despite the popularity of these materials, their disadvantages such like deformation under moderate pressure, chemical incompatibility, and surface heterogeneity have been widely recognized as impediments to expanding the utility of microfluidics. Glass-based microfluidic devices, on the other hand, exhibit desirable properties including rigidity, chemically inertness, and surface chemistry homogeneity. That the universal adoption of glass-based microfluidics has not yet been achieved is largely attributable to the difficulties in device fabrication and bonding, which usually require large capital investment. Therefore, in this work, we have developed a bench-scale glass-to-glass bonding protocol that allows the automated bonding of glass microfluidic devices within 6 h via a commercially available furnace. The quality of the bonds was inspected comprehensively in terms of bonding strength, channel deformation and reliability. Additionally, femtosecond pulsed laser micromachining was employed to rapidly engrave channels on a glass substrate with arbitrary-triangular in this case-cross-section. Bonded glass microfluidic devices with machined channels have been used to verify calculated capillary entry pressures. This combination of fast laser micromachining that produces arbitrary cross-sectioned microstructures and convenient bench-scale glass bonding protocol will facilitate a broad range of micro-scale applications.

     

A positive pressure-driven PDMS pump for fluid handling in microfluidic chips

By utilizing the high gas permeability of polydimethylsiloxane (PDMS), a simple positive pressure-driven pumping method was introduced. The pump was an aerated PDMS with a central channel in it and packing with a transfusion bottle. It could be attached to the inlet of microfluidic chip using a Teflon tube to release the air into the microfluidic system and then to create a positive pressure for driving fluid. In comparison with the degas-based PDMS pump, positive pressure-driven PDMS pump offered increased system flexibility and reduced individual device fabrication complexity due to its independence and versatility. More importantly, it offered the advantages that the PDMS pump could be wrapped in transfusion bottles to meet the readily available requirements, and it also easily assembled, which only required the user use a Teflon tube to connect a PDMS pump and a microfluidic chip. This assembly provided great freedom to meet different pumping requirements. Furthermore, this PDMS pump could offer many possible configures of pumping power by adjusting the geometries of the pump or by combining different pump modules, the adjustment of pumping capacity was investigated. To help design pumps with a suitable pumping performance, the sealing effect, pumping pressure and flow rate were also investigated. The results indicated that the performance of the positive pressure-driven PDMS pump was reliable. Finally, we demonstrated the utility of this pumping method by applying it to a PDMS-based viscometer microfluidic chip.     

Fabrication of polyimide microfluidic devices by laser ablation based additive manufacturing

Polyimide microfluidic devices (MFDs) have been attached enormous significance because of its excellent organic-solvent inertness, biocompatibility, and thermal stability. In this paper, a novel fabrication method based on the thought of additive manufacturing, which is adding materials layer by layer from bottom to top, was used to construct a multilayer polyimide MFD. The MFD has sophisticated three-dimensional (3D) microchannels with adjustable cross-sectional geometries and high bonding strength, which leads to good reagent mixing performance, large surface-to-volume ratio, and great durability. Starting from a single polyimide film, ultraviolet (UV) laser was utilized to ablate microchannels on the film. Due to the studies over the influence of UV laser on the channel width, the microchannel edge shape is under control, varying from trapezoid to rectangle. From monolayer to multilayer MFDs, thermal bonding with fluorinated ethylene propylene (FEP) nanoparticle dispersion as the adhesive was adopted to stack polyimide films tightly with precise alignment. In this way, microchannels can be connected vertically between layers to form 3D structures. Besides, a homogeneous adhesive interlayer and polyimide-FEP mixing regime were formed, which can provide high bonding strength. Results of computational fluid dynamics simulation of 3D microchannel structures and organic synthesis experiment revealed that our device has great reagent mixing efficiency and promising application prospects in diverse research fields, especially organic chemical and biological studies.

     

Fabrication of miniature Clark oxygen sensor integrated with microstructure

A miniature Clark-type oxygen sensor has been integrated with a microstructure using a novel fabrication technique. The oxygen chip consists of a glass substrate with a three-electrode configuration, which is separated and connected by a groove, and a poly(dimethylsiloxane) (PDMS) container with an immobilized PDMS oxygen-permeable membrane. The assembly of the different substrates only uses the O₂ plasma bonding technique, and the fabrication temperatures do not exceed 95 °C. Characteristics of the miniature sensor include the fastest response time of 6.8 s, good linearity with a correlation coefficient of 0.995, and a long lifetime of at least 60 h. The present miniature Clark oxygen sensor can be readily integrated with a microfluidic system to form a μ-TAS.     

Preparation of normally open microvalves with fluorinated ethylene propylene membrane and poly(methyl methacrylate) substrates

Substitution of PDMS membrane with fluorocarbon membrane serving as the actuating elements has been reported in preparation of normally closed pneumatic valves, but rarely reported in fabrication of normally open valves. We presented a photoresist-free method to fabricate normally open valves using fluorinated ethylene propylene (FEP) film as the actuating membrane to close PMMA-based microfluidic channels. An arched FEP film top wall of compressed-gas-filled channel was used as the relief pattern to prepare a positive epoxy resin stamp, which was employed to hot-emboss the fluid channels with round cross section into PMMA substrates. An adhesive-assisted bonding technique was used to irreversibly bond the PMMA substrates to the FEP membrane. The chemical resistance, small molecule absorption and valve/pump properties of the fabricated pneumatic valves were characterized.