共查询到16条相似文献,搜索用时 125 毫秒
1.
在Si(100)衬底上用分子束外延在不同的温度下生长了不同组份的GexSi1-x/Si应变层超晶格。用反射式高能电子衍射、X射线双晶衍射、卢瑟福背散射、透射电子显微镜以及Raman。散射等测试方法研究了GexSi1-x/Si超晶格的生长及其结构特性。结果表明,对不同合金组份的超晶格,其最佳生长温度不同。x值小,生长温度高;反之,则要求生长温度低。对于x为0.1—0.6,在400—600℃的生长温度范围能够长成界面平整、
关键词: 相似文献
2.
3.
用分子束外延生长了23周期的GexSi1-x/Si超晶格,用计算机控制的衍射仪(CuKa辐射)测量了X射线衍射曲线,共观察到13级超晶格结构的衍射峰。超晶格的周期和Ge平均含量可以根据考虑折射修正的布喇格定律得出。用光学多层膜反射理论分析衍射曲线可以确定超晶格的结构参数,第2级衍射峰与第一级峰的强度比对应于超晶格两种材料的相对厚度变化非常灵敏,通过比较实验和计算的I2/I1值,可以确定Si,GexSi1-x层的厚度以及合金组份x。用光学多层膜反射理谁计算得到的衍射曲线与实验曲线趋于一致。
关键词: 相似文献
4.
5.
采用经验紧束缚理论,以类似闪锌矿结构的晶体模型模拟GexSi1-x合金,根据总能最小原则计算了GexSi1-x合金中的键长及点阵常数.同时以紧束缚方法计算了原子位置发生弛豫前后的电子能带结构,并与虚晶近似下的计算结果进行了比较.计算结果表明,GexSi1-x合金中的键长基本上与合金组分无关,各自接近于Ge,Si晶体中的键长,与广延x射线吸收精细结构(EXAFS)测量结果符合得
关键词: 相似文献
6.
7.
利用X射线衍射(XRD)和X射线吸收近边结构(XANES)方法研究了在Si(100)衬底上及600℃温度条件下用分子束外延(MBE)共蒸发方法生长的MnxSi1-x磁性薄膜的结构.由XRD结果表明,只有在高Mn含量(8%和17%)样品中存在着Mn4Si7化合物物相.而XANES结果则显示,对于Mn浓度在0.7%到17%之间的MnxSi1-x样品,其Mn原子的XANES谱表现出了一致的谱线特征.基于多重散射的XANES理论计算进一步表明,只有根据Mn4Si7模型计算出的理论XANES谱才能够很好的重构出MnxSi1-x样品的实验XANES谱.这些研究结果说明在MnxSi1-x样品中,Mn原子主要是以镶嵌式的Mn4Si7化合物纳米晶颗粒存在于Si薄膜介质中,几乎不存在间隙位和替代位的Mn原子.
关键词:
xSi1-x磁性薄膜')" href="#">MnxSi1-x磁性薄膜
分子束外延
XRD
XANES 相似文献
8.
9.
室温下在单晶Si中注入(0.6—1.5)%的C原子,利用高温退火固相外延了Si1-xCx合金,研究了不同注入剂量下Si1-xCx合金的形成及其特征.如果注入C原子的浓度小于0.6%,在850—950℃退火过程中,C原子容易与注入产生的损伤缺陷结合,难于形成Si1-xCx合金相.随注入C原子含量的增加,C原子几乎全部进入晶格位置形成Si1-xCx
关键词:
1-xCx合金')" href="#">Si1-xCx合金
离子注入
固相外延 相似文献
10.
11.
Y.H. Luo J.L. Liu G. Jin J. Wan K.L. Wang 《Applied Physics A: Materials Science & Processing》2002,74(5):699-702
An effective compliant substrate for Si1-xGex growth is presented. A silicon-on-insulator substrate was implanted with B and O forming 20 wt % borosilicate glass within
the SiO2. The addition of the borosilicate glass to the buried oxide acted to reduce the viscosity at the growth temperature of Si1-xGex, promoting the in situ elastic deformation of the thin Si (∼20 nm) layer on the insulator. The sharing of the misfit between
the Si and the Si1-xGex layers was observed and quantified by double-axis X-ray diffraction. In addition, the material quality was assessed using
cross-sectional transmission electron microscopy, photoluminescence and etch pit density measurements. No misfit dislocations
were observed in the partially relaxed 150-nm Si0.75Ge0.25 sample as-grown on a 20% borosilicate glass substrate. The threading dislocation density was estimated at 2×104 cm-2 for 500-nm Si0.75Ge0.25 grown on the 20% borosilicate glass substrate. This method may be used to prepare compliant substrates for the growth of
low-dislocation relaxed SiGe layers.
Received: 4 January 2001 / Accepted: 30 May 2001 / Published online: 17 October 2001 相似文献
12.
通过测量GeSi多量子阱的红外谱,同时观察到了相应于量子阱内重空穴基态HH1到重空穴激发态HH1、轻空穴激发态LH1和自旋分裂带SO及连续态间的跃迁吸收.测量了GeSi多量子阱探测器的正入射光电流谱,看到了明显的光响应峰.理论计算中计及了轻、重和自旋分裂带间的耦合及能带的非抛物性,并自洽考虑了哈特里势和交换相关势.与实验结果比较,认为带之间的耦合,使子带间的跃迁情况变得复杂,是正入射吸收产生的原因
关键词: 相似文献
13.
R. Turan B. Aslan O. Nur M.Y.A. Yousif M. Willander 《Applied Physics A: Materials Science & Processing》2001,72(5):587-593
We have studied the effect of the strain relaxation on the band-edge alignments in a Pt/p-Si1-xGex Schottky junction with x=0.14 by internal photoemission spectroscopy and current–voltage measurements. We have shown that
the variations in the band-edge alignments can be observed directly by measuring the optical and electrical properties of
a simple Schottky junction. The strain in the Si1-xGex layer has been partially relaxed by thermal treatments at two different temperatures. The degree of relaxation and other
structural changes have been determined by a high-resolution X-ray diffractometer. Both optical and electrical techniques
have shown that the barrier height of the Pt/Si0.86Ge0.14 junction increases with the amount of relaxation in the Si1-xGex layer. This shows that the valence-band edge of the Si1-xGex layer moves away from the Fermi level of the Pt/Si1-xGex junction. The band-edge movement results from the increase in the band gap of the Si1-xGex layer after the strain relaxation. This result agrees with the theoretical predictions for the strain-induced effects on
the Si1-xGex band structure.
Received: 18 October 2000 / Accepted: 19 December 2000 / Published online: 23 March 2001 相似文献
14.
The electroluminescence of GexSi1-x/Si single quantum well was measured at temper-atures above room temperature along the growth direction and the direction normal to it. TO and NP peaks were resolved. 相似文献
15.
16.
采用经验的紧束缚方法对生长在Si(001)衬底上的应变合金GexSi1-x的光学常数进行了计算。应变对电子能带结构的影响,通过紧束缚参数随键角方向余弦的变化以及键长按经验的标度定则的变化而进行计算。其中标度指数根据对Ge和Si的畸变势常数的实验值进行拟合而确定。计算介电常数虚部时出现的动量矩阵元,根据对Ge和Si的介电常数虚部的实验曲线拟合而决定。列出了当x=0.2和1时的光学常数——介电常数虚部ε2、折射率n、吸收系数α和反射率R的计算结 相似文献