扫描探针显微术在GaAs等半导体研究中的应用

扫描探针显微术（ＳＰＭ）是８０年代初发展起来的一类新型表面研究技术。由于其分辨率高、蝗操作和可扩展性,扫描探针显微术越来越受到人们的重视。１９８６年Ｇ．宾尼希（Ｇ．Ｂｉｎｎｉｇ）和Ｈ．罗雷尔（Ｈ．Ｒｏｈｒｅｒ）为此获得了诺贝尔物理学奖。本文中我们详细阐述扫描隧道显微镜（ＳＴＭ）、原子力显微镜（ＡＦＭ）、扫描电容是微镜（ＳＯＭ）、扫描热显微镜（ＳＴｈＭ）等几种扫描探针显微术的工作原理,也描述队们在探     

GaAs功率场效应管失效中源一漏烧毁现象的SEM／SAM研究

采用光学显微镜、扫描电子显微镜（ＳＥＭ）及扫描俄歇微探针（ＳＡＭ）等表面分析技术对ＧａＡｓ功率场效应管（ＦＥＴ）源－漏烧毁失效现象进行了分析研究。ＳＥＭ分析结果表明，源－漏烧毁失效的表面形貌状况较为复杂，烧伤区域的表面形态不尽一致。有源极烧毁较为严重的情况，也有漏极烧伤较严重的情况。ＳＡＭ分析结果说明，源－漏烧毁ＦＥＴ中烧毁处附近的外表完好的源、漏条Ａｕ薄膜下欧姆接触金属薄膜层已完全消失，烧毁源、漏条部位表面化学元素有Ｃ、Ｏ、Ｔｉ、Ｎ和Ｇａ，其中Ｃ、Ｏ在表层几十纳米深度内均有相当高的含量。结合分析结果，讨论了源－漏烧毁的物理机理。     

薄膜SIMOX顶层单晶硅位错的研究

通过超声搅拌的增强化学腐蚀，结合普通的光学显微镜研究不同制备参数的形成的ＳＩＭＯＸ材料顶层单晶硅的位错缺陷，讨论了位错密度同ＳＩＭＯＸ制备工艺的关系。     

有机染料掺杂的凝胶基质的制备及其性能

论述了适合于有机染料掺杂的凝胶基质ＴｉＯ２－ＭＭＡ－ＧＬＹＭＯ的制备过程,并将７种染料掺入此ＯＲＭＯＳＩＬ基质中,用Ｚ扫描的方法测试了样品的光学非线性折射率,在这些材料中获得了较大的ｎ２数值,将ＤＣＭ染料掺杂到ＴｉＯ２－ＭＭＡ－ＧＬＹＭＯ基质中,在５３２ｎｍ激光泵浦下获得了５９０．７－６５４．３ｎｍ的连续可调谐激光输出,实验发现,ＴｉＯ２－ＭＭＡ－ＧＬＹＭＯ基质具有较好的机械性能,热性能及光学性能     

STM及AFM在材料断裂与疲劳研究中的应用

扫描隧道显微镜（ＳＥＭ）和原子力显微镜（ＡＦＭ）具有原子级的极高分辨率,可在纳米尺度上获得实空间的表面微观三维菜貌,且可定量表征,因此可用来研究材料断裂与疲劳的微观机理。简要介绍ＳＴＭ和ＡＦＭ在该领域的应用及所取得的若干进展。     

金属-陶瓷复合涂层摩擦学特性的SEM和SEAM研究

在ＳＲＶ摩擦磨损试验机上进行常温干摩擦试验,比较了ＣｏＣｒＭｏＳｉ＋Ａｌ_２Ｏ_３ＺｒＯ_２和ＣｏＣｒＭｏＳｉ＋Ｆｅ_３Ｏ_４两种大气等离子喷涂金属－陶瓷复合涂层以及Ｃ１Ｍｎ１Ｃｒ１碳钢涂层与３５＃中碳钢对磨的摩擦学特性;利用扫描电子显微镜（ＳＥＭ）和扫描电声显微镜（ＳＥＡＭ）观察了磨损表面和亚表层的显微结构,分析了金属－陶瓷复合涂层的磨损机理．结果表明,粘着磨损占主导地位,同时存在微切削和微裂纹的扩展、连接．     

CONTENTS OF NEW CARBON MATERIALS OF Vol.16

Ｎｏ .1ＲｅｓｅａｒｃｈａｒｔｉｃｌｅｓＳＴＵＤＹＯＮＴＨＥＭＩＣＲＯＷＡＶＥＡＢＳＯＲＢＩＮＧＰＲＯＰＥＲＴＹＯＦＣＯＭＰＯＳＩＴＥＭＡＴＥＲＩＡＬＣＯＮＴＡＩＮＩＮＧＣＡＲＢＯＮＮＡＮＯＴＵＢＥＳ　ＷＩＴＨＮＩＣＯＡＴＩＮＧＳＨＥＮＺｅｎｇ ｍｉｎ　ＺＨＡＯＤｏｎｇ ｌｉｎ(1) :1………………………………………………………………………ＡＮＥＦＦＥＣＴＩＶＥＭＥＴＨＯＤＦＯＲＰＩＴＣＨＣＯＭＰＯＳＩＴＩＯＮＤＥＳＩＧＮＺＨＩＬｉｎ ｊｉｅ　ＳＯＮＧＪｉｎ ｒｅｎ　ＬＩＵＬａｎｇ(1) :5………………………     

聚醚砜微孔膜制备中非溶剂添加剂作用研究

以聚醚砜（ＰＥＳ）为膜材料，ＤＭＡｃ为溶剂，研究了３种非溶剂加剂（ＮＳＡ）－ＥｇＯＨ，ＤｅＯＨ和ＢｕＯＨ在水和ＮＳＡ中凝胶对于板微孔膜性能的影响，利用浊点法得到ＰＥＳ／ＤＭＡｃ／ＮＳＡ和ＰＥＳ／ＤＭＣｓ／ＮＳＡ／Ｈ２Ｏ体系２５℃的相图，并以邻近比α值来表征膜溶液组成点靠近相分离的程度，添加了ＮＳＡ的铸膜液在水中凝胶制备微孔膜，以ＥｇＯＨ为非溶剂添加物，在相同聚合物浓度，相同凝胶条件下，仅仅改变铸膜     

UHMWPE-SiAlON陶瓷摩擦副的生物摩擦学特性及机理的研究

为了探索ＳｉＡｌＯＮ陶瓷与超高分子量聚乙烯（ＵＮＭＷ－ＰＥ）组合作为人工关节置换材料的可能性,利用Ｆａｌｅｘ摩擦磨损实验机测定了ＳｉＡｌＯＮ陶瓷与ＵＨＭＷＰＥ在３７℃、血浆润滑条件下的生物摩擦学性能。同时,在扫描电镜下观察了摩擦副表面形貌。实验结果表明ＵＨＭＷＰＥ－ＳｉＡｌＯＮ陶瓷摩擦副的摩擦系数为０．０６,ＵＨＭＷＰＥ的磨损系数小于８．４５×１０－１０ｍｍ３／（Ｎ·ｍ）。表面轮廓仪对摩擦磨损前后ＳｉＡｌＯＮ陶瓷表面测试,未发现明显变化,说明陶瓷磨损甚微。根据ＸＰＳ分析结果,提出了生物摩擦磨损机理。     

商品条码在包装中的定位与印刷

商品条码在包装中的定位与印刷陈克愚ＰＯＳＩＴＩＯＮＩＮＧＡＮＤＰＲＩＮＴＩＮＧＯＦＢＡＲＣＯＤＥＳＯＮＣＯＭＭＯＤＩＴＩＥＳ￥ＣｈｅｎＫｅｙｕＡｂｓｔｒａｃｔ：Ｂａｒｃｏｄｅｉｓｂｒｉｎｇｉｎｇａｂｏｕｔａｒｅｖｏｌｕｔｉｏｎｔｏｔｈｅｃｉｒｃｕｌａ...     

Observation of nanostructure by scanning near-field optical microscope with small sphere probe

Step and terrace structure has been observed in an area of 1 μm×1 μm on the cleaved surface of KCl-KBr solid-solution single crystal by scanning near-field optical microscope (SNOM) with a small sphere probe of 500 nm diameter. Lateral spatial resolution of the SNOM system was estimated to be 20 nm from the observation of step width and the scanning-step interval. Vertical spatial resolution was estimated to be 5-2 nm from the observation of step height and noise level of photomultiplier tube (PMT). With applying a dielectric dipole radiation model to the probe surface, the reason why such a high spatial resolution was obtained in spite of the 500 nm sphere probe, was understood as the effect of the near-field term appeared in the radiation field equations.     

扫描近场光学显微镜光纤探针的制作与分析

描述了制作扫描近场光学显微镜光纤探针的两种简便有效的方法－－带保护层的化学腐蚀法和光纤熔接机拉锥法,从实验中比较、分析了两种制作方法的优缺点,实验表明这两种方法均能制作出针尖直径为５０ｎｍ左右的光纤探针。     

Apertureless near-field/far-field CW two-photon microscope for biological and material imaging and spectroscopic applications

We present the development of a versatile spectroscopic imaging tool to allow for imaging with single-molecule sensitivity and high spatial resolution. The microscope allows for near-field and subdiffraction-limited far-field imaging by integrating a shear-force microscope on top of a custom inverted microscope design. The instrument has the ability to image in ambient conditions with optical resolutions on the order of tens of nanometers in the near field. A single low-cost computer controls the microscope with a field programmable gate array data acquisition card. High spatial resolution imaging is achieved with an inexpensive CW multiphoton excitation source, using an apertureless probe and simplified optical pathways. The high-resolution, combined with high collection efficiency and single-molecule sensitive optical capabilities of the microscope, are demonstrated with a low-cost CW laser source as well as a mode-locked laser source.     

Three-dimensional imaging with optical tweezers

We demonstrate a three-dimensional scanning probe microscope in which the extremely soft spring of an optical tweezers trap is used. Feedback control of the instrument based on backscattered light levels allows three-dimensional imaging of microscopic samples in an aqueous environment. Preliminary results with a 2-mum-diameter spherical probe indicate that features of approximately 200 nm can be resolved, with a sensitivity of 5 nm in the height measurement. The theoretical resolution is limited by the probe dimensions.     

Plasmonic nearfield scanning probe with high transmission

Nearfield scanning optical microscopy (NSOM) offers a practical means of optical imaging, optical sensing, and nanolithography at a resolution below the diffraction limit of the light. However, its applications are limited due to the strong attenuation of the light transmitted through the subwavelength aperture. To solve this problem, we report the development of plasmonic nearfield scanning optical microscope with an efficient nearfield focusing. By exciting surface plasmons, plasmonic NSOM probes are capable of confining light into a 100 nm spot. We show by nearfield lithography experiments that the intensity at the near field is at least one order stronger than the intensity obtained from the conventional NSOM probes under the same illumination condition. Such a high efficiency can enable plasmonic NSOM as a practical tool for nearfield lithography, data storage, cellular visualization, and many other applications requiring efficient transmission with high resolution.     

一种用于扫描力显微镜的微型干涉光探针

论证了氮化硅三角形微探针可以作为一个后向点衍射板的光学原理，并根据这一原理设计了一种用于扫描力显微镜的微型干涉光探针，它利用微探针表面向以射波与反向点衍射波之间的干涉来检测微探针的形变，其纵向分辨率达到了０．０１ｎｍ。     

Cold-atom scanning probe microscopy

Scanning probe microscopes are widely used to study surfaces with atomic resolution in many areas of nanoscience. Ultracold atomic gases trapped in electromagnetic potentials can be used to study electromagnetic interactions between the atoms and nearby surfaces in chip-based systems. Here we demonstrate a new type of scanning probe microscope that combines these two areas of research by using an ultracold gas as the tip in a scanning probe microscope. This cold-atom scanning probe microscope offers a large scanning volume, an ultrasoft tip of well-defined shape and high purity, and sensitivity to electromagnetic forces (including dispersion forces near nanostructured surfaces). We use the cold-atom scanning probe microscope to non-destructively measure the position and height of carbon nanotube structures and individual free-standing nanotubes. Cooling the atoms in the gas to form a Bose-Einstein condensate increases the resolution of the device.     

用于纳米级表面形貌测量的光学显微测头

为了满足纳米级表面形貌样板的高精度非接触测量需求,研制了一种高分辨力光学显微测头。以激光全息单元为光源和信号拾取器件,利用差动光斑尺寸变化探测原理,建立了微位移测量系统,结合光学显微成像系统,形成了高分辨力光学显微测头。将该测头应用于纳米三维测量机,对台阶高度样板和一维线间隔样板进行了测量实验。结果表明：该光学显微测头结合纳米三维测量机可实现纳米级表面形貌样板的可溯源测量,具有扫描速度快、测量分辨力高、结构紧凑和非接触测量等优点,对解决纳米级表面形貌测量难题具有重要实用价值。     

Imaging of localized electronic states at a nonconducting surface by single-electron tunneling force microscopy

Localized electronic states near a nonconducting SiO(2) surface are imaged on a approximately 1 nm scale by single-electron tunneling between the states and a scanning probe tip. Each tunneling electron is detected by electrostatic force. The images represent the number of tunneling electrons at each spatial location. The spatial resolution of the single electron tunneling force microscope is determined by quantum mechanical tunneling, providing new atomic-scale access to electronic states in dielectric surfaces and nonconducting nanostructures.     

声强传感器特性对扫描声强法确定声源声功率的影响

文中以典型的矩形测量面方波扫描路径为例 ,分析了扫描声强法测量声源声功率时双传声器互谱声强传感器的有限差分近似误差、近场效应误差、相位不匹配误差与声源频率、测量面离声源的距离以及声强传感器两传声器间的间隔之间的关系。结果表明根据声源频率合理地选取参数可以减小声强传感器所带来的误差 ,从而为保证扫描声强法测量声源声功率测量准确度提供了依据。