边缘电场传感器测量金属衬底绝缘层厚度

针对金属衬底上的绝缘层,研究基于边缘电场传感器的厚度测量方法。位于同一平面的传感电极形成边缘场电容,边缘电场将穿透绝缘层,在衬底表面发生突变。本文用三电容模型分析了传感器的测量原理,衬底作为一个浮动电极分别与两个传感器电极构成平行极板电容,与边缘场电容共同构成传感电容。通过二维仿真讨论了电容结构参数对传感电容的影响。实验结果表明,边缘场电容传感器应用于金属衬底上的绝缘层测量时,表现出边缘场电容与平行板电容复合的特性,传感器灵敏度高。当绝缘层厚度相比电极长度较小时,电极的间距对传感器电容输出影响小。     

多波长边缘电场传感器参数估计算法的研究

多波长边缘电场传感器由于具有单边穿透、多种穿透深度及层析成像等优点,广泛用于工业过程控制中被测多层样本特性的无损测量.如何建立传感器的输出与多层特性之间的关系一直是参数估计算法的研究难点.以三波长交叉指型边缘电场传感器为例,基于三维有限元仿真,建立了多层样本介电特性和互导电容之间的多元非线性回归模型,研究参数估计算法,实验结果表明算法的有效性.     

一种基于电容应变式传感器的信号调节电路

电容应变式传感器是一种结构型传感器,是依赖其结构参数的变化实现信息转换,将电容的变化转化为输出电压的变化。基于这一原理,利用虚拟电子仿真软件设计了电容式传感器信号调节电路,并进行应用仿真。通过仿真可以看出,输出电压的实际值与测量值的接近程度非常高,非线性误差很小,性能优越,灵敏度较高。     

用于电容式传感器的差动线性电路

提出了一种差动电容式传感器的前置电路 ,基于电容 /电压转换的原理 ,对微小电容变化量进行测量。电路输出的直流电压与差动电容变化量成线性关系 ,且能对偏差电容和电路的漂移进行自动补偿。实验表明 ,被测电容分辨力为 8fF ,灵敏度可达 3.82× 10 11V/F。实验结果和理论分析具有良好的一致性     

基于电场感应的冰层厚度检测传感器及其系统的研究

给一个金属电极通过电阻施加交流激励,当冰或水作为电介质接近该电极时,电极周围的电场发生改变,表现为该电极与"虚地"形成的电容的改变.利用这一电场感应机理,设计了同面多电极电容式冰层厚度传感器; 利用MAXWELL软件对传感器检测机理进行了仿真,并通过实验验证了利用电场感应的方法测量冰层厚度的可行性,仿真结果和实验结果证明该方法能实现定点冰层厚度的准确测量.     

磁致伸缩位移传感器双磁环间测量盲区的影响分析

为减小双磁环磁致伸缩位移传感器磁环间的测量盲区,对传感器在测量盲区内的输出信号进行了分析。从双磁环偏置磁场与磁环间距的关系进行研究,建立了双磁环磁致伸缩位移传感器的输出电压模型,计算了不同偏置磁场强度的双磁环在不同间距与放置方向时传感器的输出电压,并通过实验进行了验证。结果表明,磁环规格相同时,测量盲区的大小与磁环放置方向无关,磁环偏置磁场强度越小,磁环间的测量盲区越小,磁场叠加影响的电压幅值变化量也越小。且在传感器的测量盲区内,电压输出信号将会受到偏置磁场与电压输出波形叠加的影响,这两种因素都会导致传感器检测失效。该研究结果为多磁环位移传感器磁环的选型及减小传感器磁环间的测量盲区提供理论基础。     

基于磁致伸缩位移传感器原理测量波导丝泊松比与线膨胀系数

为减小双磁环磁致伸缩位移传感器磁环间的测量盲区,对传感器在测量盲区内的输出信号进行了分析,从双磁环偏置磁场与磁环间距的关系进行研究,建立了双磁环磁致伸缩位移传感器的输出电压模型,计算了不同偏置磁场强度的双磁环在不同间距与放置方向时传感器的输出电压,并通过实验进行了验证。结果表明,磁环规格相同时,测量盲区的大小与磁环放置方向无关,磁环偏置磁场强度越小,磁环间的测量盲区越小,磁场叠加影响的电压幅值变化量也越小。且在传感器的测量盲区内,电压输出信号将会受到偏置磁场与电压输出波形叠加的影响。这两种因素都会导致传感器检测失效。该研究结果为多磁环位移传感器磁环的选型及减小传感器磁环间的测量盲区提供理论基础。     

基于电场传感器的人体坐姿监测

研究表明经常处于同一姿势或者久坐都会对人体的健康造成危害,因此进行相应的坐姿监测并适时给出运动提醒是有必要的.将单只电场传感器安装在办公座椅靠背上,通过测量人体与传感器之间的相对运动,实现人体坐姿监测.人体背部与电场传感器之间的距离发生变化时,两者之间的耦合电容相应发生改变,导致电场传感器输出的电压信号幅值与形状发生变化,对信号特征进行分析即可得到人体坐姿和微动信息.信号经嵌入式系统处理后,坐姿类别以及相应时长可以传输到手机上进行实时显示.实验结果表明,从电场传感器的输出信号中,可准确分辨出座椅上人体的四种状态.     

电容接近觉传感器的研究

提出一和中双极板式电容传感器,其利用静电感应原理,当障碍物或工件靠近传感器时,电场发生变化,使输出电压变化,从而得到待测物体的接近度。文中对其原理作了详尽分析与讨论,并给出了初步实验结果。     

微型集成光波导电场传感器的设计

针对现有测量手段对时域脉冲电场测量的不足,利用铌酸锂晶体的电光效应,设计了一种集成了光波导与锥形天线的新型电场传感器。采用退火质子交换技术与溅射法制备的集成光波导电场传感器体积为仅为 70 mm×15 mm×15 mm。对该传感器的频响特性与时域动态范围进行测试,实验结果表明：传感器带宽为100 kHz至10 GHz,可测量电场范围为6.67 kV/m~133.33 kV/m,线性拟合相关系数为0.98535。与直接感应式电场传感器与电光直调电场传感器相比,集成光波导电场传感器体积更小,无需供电,无金属干扰,带宽宽,更适用于瞬态电磁场的测量。     

一种基于有源电桥的电容式粮食水分传感器

在传统电桥电路的基础上,设计了一种有源电桥的电容式检测电路。该电路具有灵敏度高、线性范围宽的特点。将其用于粮食水分的检测,实现了一种具有线性特性的粮食水分传感器。通过试验测试粮食的电阻抗特性,尤其是电容特性与粮食水分之间的关系,确定了电路的工作频率。试验结果表明:这种粮食水分传感器的输出电压与粮食水分之间呈良好的线性关系,可满足粮食水分在线检测的要求。     

Characterization of a capacitive tactile shear sensor for application in robotic and upper limb prostheses

This paper presents the characterization of a novel tactile sensor designed to measure shear forces. The sensor design is targeted for use in robotic and prosthetic hands, where haptic feedback or ability to detect shear forces associated with slip are critical. The presented sensor utilizes the principle of differential capacitance to measure the mechanical deflection of the sensor element. The dynamic range of the sensor can be varied by encapsulating the sensor terminal within silicone of varying hardness. The design features ease of mass production, low per-unit-cost, novel overload protection and low wire count, while still preserving the ability to achieve reasonable spatial resolutions and array densities. Mathematical and COMSOL multiphysics models of the sensor are presented, in addition to results from practical experiments. Sensors with a full scale displacement range of ±0.525 mm were produced and the differential capacitance was measured. Shear force transduction was characterized over the range of 0 N–4 N with the sense terminal encapsulated by silicone with a shore A hardness of 20. The effect of elastomer hardness on the sensor's dynamic range was analyzed. The differential capacitance, when measured at each fixed interval, was found experimentally to have a maximum standard deviation of 4.28e?16 F over a ±2 N range. A maximum standard deviation of 1.35e?15 F was measured across characterized full scale sensor range of ±4 N. The sensor design has a sensitivity of 1.967 fF/N of applied force and the sensor output was found to be approximately linear. The coefficient of determination, r², was found to be 0.941.     

Fe-Ga磁致伸缩位移传感器驱动电流位置调整与回波速度校正

通过对传统Fe￣Ga磁致伸缩位移传感器驱动脉冲电流输入端位置的改进,降低了驱动脉冲电流噪声对检测线圈输出电压的影响,并使检测线圈输出电压信噪比由15.5 dB提高至23.7 dB。基于应力波无阻尼反射原理提出一种新的回波速度校正法,确立了回波速度与波导丝长度、应力波传播时间、反射波传播时间的数学关系,并给出此表达式适用的驱动脉冲电流频率范围。制作了样机,通过实验验证了此方法最大位移测量误差减小到原来的1/5,为Fe￣Ga磁致伸缩位移传感器输出性能研究提供了理论依据。     

一种提高电容式力传感器线性度的结构设计

在MEMS电容式力传感器中,力被变换为电容的变化,再用电路检测电容的变化以反映力的信号。这种力-电容变换方式的一个缺点是在大量程下,由于电容变化量与极板位移之间的非线性,检测输出与被检测的力之间具有较为严重的非线性关系。本文提出一种用力-极板位移之间的非线性抵消极板位移-电容变化量之间的非线性的结构方式,用瑞利-里兹法计算了结构中具有"硬弹簧"特性的梁的受力与变形之间的非线性关系。实验结果表明,采用这种设计的结构非线性降低了约1/3。     

与汽车发动机电喷系统配套的压力传感器设计

论述了以具有ICP功能的单片机PIC12F675为核心,通过测量传感器桥路电压来测量传感器的温度场,利用硅压阻器件的温度特性方程进行汽车压力传感器温度补偿计算的原理;分析了利用PWM实现D/A输出精度的控制方法;通过温度补偿后的压力传感器,在工作温度下测量精度为1%,在极限温度下小于2%。     

Consideration of theoretical equation for output voltage of linear displacement sensor using meander coil and pattern guide

This paper discusses the development and derivation of theoretical equation for output voltage on a displacement sensor based on inductive concept. A linear displacement sensor is used to detect the displacement of moving part on linear machines. It consists of a sensor head and a pattern guide. The sensor head is made from copper meander coil while the pattern guide is made from a soft iron (SS400). The mathematical equation of the sensor output voltage is derived using magnetic coupling method. The effect of input frequency on the output voltage is analyzed and has been compared with the measurement data.     

Meter-scale large-area capacitive pressure sensors with fabric with stripe electrodes of conductive polymer-coated fibers

We developed meter-scale large-area capacitive fabric pressure sensors for floor sensors to monitor human position. In the fabric pressure sensor, two fabrics with stripe electrodes of conductive polymer-coated fibers woven into them were stacked vertically, and the capacitance changes between the top and bottom stripe electrodes were measured when pressure was applied. By using the die-coating of a conductive polymer and weaving the resultant fibers with meter-scale automatic looming machines, the 1 m × 1 m area with stripe electrodes at a 20 cm pitch was constructed. The pressure sensitivity, which depends on the number of the sensor fibers forming the stripe electrodes, was characterized and optimized to increase output capacitance change. The stripe electrodes with five sensor fibers were found to exhibit a capacitance change of 1.37 pF when pushed with the average foot pressure (i.e., 2.6 N/cm²), which is large enough to detect with conventional capacitance measurement circuits. Finally, pressure sensing with our woven pressure sensor fabric is demonstrated. Our meter-scale pressure sensor fabric technology will be used for bed and floor sensors for monitoring old people in nursing homes and hospitals.     

一种交流激励电容测量电路的性能测试

差动电容传感器已广泛地应用于压力、压差、位移、加速度、振动等非电量的精密测量,参比电容传感器有望用于煤粉浓度测量等领域,而微小电容测量电路是电容传感器应用中的核心和关键技术。微小电容测量的难点在于杂散电容的存在以及电磁干扰,而交流激励电容测量电路可以采用调制解调方式将缓慢变化的电容传感器信号调制在激励源提供的高频载波上,有效抑制同频干扰,工频干扰,运算放大器的失调电压和失调电流,电阻电容等器件的低频噪声干扰。在活塞压力平台上对交流激励电容测量电路进行了性能测试。结果表明,交流激励电容测量电路迟滞误差为0.19%,非线性误差为0.23%,重复性误差为0.29%,可应用于参比电容传感器测量系统。     

A microfabricated wall shear-stress sensor with capacitative sensing

A silicon-based micromachined, floating-element sensor for low-magnitude wall shear-stress measurement has been developed. Sensors over a range of element sizes and sensitivities have been fabricated by thin-wafer bonding and deep-reactive ion-etching techniques. Detailed design, fabrication, and testing issues are described in this paper. Detection of the floating-element motion is accomplished using either direct or differential capacitance measurement. The design objective is to measure the shear-stress distribution at levels of O(0.10 Pa) with a spatial resolution of approximately O(100 /spl mu/m). It is assumed that the flow direction is known, permitting one to align the sensor appropriately so that a single component shear measurement is a good estimate of the prevalent shear. Using a differential capacitance detection scheme these goals have been achieved. We tested the sensor at shear levels ranging from 0 to 0.20 Pa and found that the lowest detectable shear-stress level that the sensor can measure is 0.04 Pa with an 8% uncertainty on a 200 /spl mu/m/spl times/500 /spl mu/m floating element plate.