MgO衬底上YBa2Cu3O7-δ台阶边沿型约瑟夫森结的制备及特性

MgO衬底上的YBa2Cu3O7-δ(YBCO)台阶边沿型约瑟夫森结(台阶结)在高灵敏度高温超导量子干涉器(superconducting quantum interference device,SQUID)等超导器件研制方面具有重要的应用价值和前景.本文对此类YBCO台阶结的制备和特性进行了研究.首先利用离子束刻蚀技术和两步刻蚀法在MgO(100)衬底上制备陡度合适、边沿整齐的台阶,然后利用脉冲激光沉积法在衬底上生长YBCO超导薄膜,进而利用紫外光刻制备出YBCO台阶结.在结样品的电阻-温度转变曲线中,观测到低于超导转变温度时的电阻拖尾现象,与约瑟夫森结的热激活相位滑移理论一致.伏安特性曲线测量表明结的行为符合电阻分路结模型,在超导转变温度TC附近结的约瑟夫森临界电流密度TC随温度T呈现出(TC-T)^2的变化规律,77 K时JC值为1.4×10^5 A/cm^2.利用制备的台阶结,初步制备了YBCO射频高温超导SQUID,器件测试观察到良好的三角波电压调制曲线,温度77 K、频率1 kHz时的磁通噪声为250μΦ0/Hz^1/2.本文结果为进一步利用MgO衬底YBCO台阶结研制高性能的高温超导SQUID等超导器件奠定了基础.     

串联SQUID和不同圈数Washer输入线圈SQUID的制备与表征（英文）

超导量子干涉放大器常被用于读出微弱的磁通以及电流信号,可以将微弱信号转化成为大的电压信号.但是对于单个超导量子干涉放大器而言,其输出电压太小不能直接与室温放大器相连,我们考虑将相同参数的超导量子干涉放大器串联到一起,使其输出电压足够大并达到可直接与室温放大器连接的要求.我们已经制备并测试了约瑟夫森结,过阻尼约瑟夫森结,不同输入线圈的单个超导量子干涉放大器以及既有调制线圈又有反馈线圈的串联超导量子干涉放大器,获得了较好的伏安特性曲线,调制曲线以及将调制曲线进行傅里叶变换后的幅频特性曲线.通过分析约瑟夫森结的伏安特性曲线可知我们的制备工艺流程比较稳定.制备与测试超导量子干涉放大器对于以后将其应用于读出微弱信号领域具有重要的意义.     

超导量子干涉器件

超导现象是一种宏观量子现象.磁通量子化和约瑟夫森效应是两个最能体现这种宏观量子特性的物理现象.超导量子干涉器件(superconducting quantum interference device,SQUID)是利用这两个特性而形成的超导器件.SQUID器件在磁信号灵敏探测方面具有广泛的应用.本文简要介绍低温超导和高温超导SQUID器件的相关背景和发展现状以及应用领域.     

高温超导量子干涉器中的约瑟夫森结

超导量子干涉器(SQUID)是以约瑟夫森结为核心元件的极其灵敏的磁通-电压转换器.在最近20年间,超导电子学界利用多种铜氧化物高温超导材料,制造出了高温超导约瑟夫森结乃至高温超导量子干涉器(高TcSQUID);特别是,利用YBa2Cu3O7-δ(YBCO)制出了多种高温超导约瑟夫森结,并进而制成了具有一定实用性的高TcSQUID.文章主要是对高TcSQUID中所使用的高温超导约瑟夫森结进行评述.     

基于LSAT衬底YBa2Cu3O7-δ台阶结的射频高温超导量子干涉器的制备和表征

基于 YBa2Cu3 O7 -δ (YBCO) 台阶边沿型约瑟夫森结( 台阶结) 的高温超导量子干涉器(Superconducting Quantum Interference Device, 简称 SQUID) 在微弱磁场测量等领域具有重要应用价值. 制 备 YBCO 台 阶 结 及SQUID 的常用单晶衬底包括 LaAlO3 (LAO) 、SrTiO3 (STO) 及 MgO 等. (La0 .3 ,Sr0 .7 ) (Al0 .65 ,Ta0 .35 )O3 (LSAT) 没有孪晶现象、 与 YBCO 的晶格失配度很小(仅为0.4% ) , 有潜力成为制备 YBCO 台阶结及相应的高温超导 SQUID器件的新的衬底选择. 本文首次探索研究了 LSAT 衬底上 YBCO 台阶结型射频超导量子干涉器(rf SQUID) 的制备和表征. 采用氩离子束刻蚀技术在 LSAT(100) 衬底上制备角度约为46°的台阶, 利用脉冲激光沉积法在衬底上生长 YBCO 超导薄膜, 然后利用传统紫外光刻技术制备出高温超导rf SQUID 器件. 在温度为77 K 时, 器件测试观察到幅度较大的电压-磁通特性曲线, 且在部分器件的特性曲线中观察到接近方波的非传统波形, 表明器件工作于噪声较低的色散模式下. 频率1 kHz 时器件的磁通噪声约为20 μΦ0/Hz1/2 , 与文献中报道的 LAO、STO 衬底上台阶结型SQUID 器件的典型结果相当. 本工作展示了利用 LSAT 衬底制备低噪声台阶结型rf SQUID 器件的可行性, 并为进一步研制该衬底上更高性能的高温超导SQUID 器件奠定了基础     

超导量子干涉器件读出电路中匹配变压器的传输特性研究

在磁通调制超导量子干涉器件(SQUID)的读出电路中, 匹配变压器具有放大信号和阻抗匹配的功能, 是实现SQUID低噪声读出的关键元件. 利用模拟SQUID电路对匹配变压器进行性能测试, 研究了不同绕制匝数变压器的传输特性, 确定最佳绕制匝数比. 在变压器拾取SQUID电压信号的耦合网络中, 研究了不同电容对变压器传输特性的影响, 实现了变压器耦合网络参数的匹配和优化. 室温下匝数比为1:20的匹配变压器在匹配电容C=1μF时, 输出源电压增益为21.2, 带宽范围可达到210 kHz. 最后在基于磁通调制式DC SQUID读出电路中, 对匹配变压器的工作性能进行了评估与验证. 关键词： 超导量子干涉器件读出电路 匹配变压器 低噪声 传输特性     

硅衬底MgB_2-B-MgB_2超导SNS约瑟夫森结的制备与特性

利用两步原位电子束蒸发技术,在Si(111)衬底上制备了MgB2-B-MgB2超导SNS约瑟夫森夹心结.夹心硼(B)层厚度从10nm到80nm范围内MgB2-B-MgB2/Si(111)薄膜表现出明显的SNS约瑟夫森结特性,而在5nm和100nm处薄膜分别是整体超导和正常金属特性.在同一温度下,随着硼层厚度的增加,临界结电流减小,对同一厚度下,临界结电流随着温度的增加而减小.同时,实验指出,夹心硼SNS超导MgB2约瑟夫森结的电流-电压(I-V)曲线具有回滞现象,符合SM模型.     

约瑟夫森结跳变电流在微波辐照下的分布

在16 mK的极低温下,我们对电流偏置的Nb/AlOx/Nb结进行了跳变电流统计分布的测量.在没有外加微波的辐照时,分布曲线只有一个峰;在有外加微波的辐照时,其跳变电流的统计分布除了基峰外,会出现谐振峰,形成双峰结构.该谐振峰的位置和结的量子化的能级相关,其高度随外加微波功率的改变而改变.研究约瑟夫森结跳变电流在微波辐照下的分布,对于研究超导量子比特的能级量子化、Rabi振荡等具有重要的意义.     

用于电压基准的Nb/NbxSi1-x/Nb约瑟夫森单结的研制

现代可编程约瑟夫森电压基准的核心器件是约瑟夫森结阵.目前最具有优势的约瑟夫森结阵是 Nb/Nb_xSi_1-x/Nb材料的结阵. Nb/Nb_xSi_1-x/Nb材料的约瑟夫森结 具有三层薄膜的制作过程简便, Nb和Nb_xSi_1-x刻蚀工艺相同以及Nb_xSi_1-x 势垒层成分可调等优点.中国计量科学研究院设计制作了Nb/Nb_xSi_1-x/Nb约瑟夫森单结. 通过在4.2 K低温下对所做单结进行直流电流-电压特性测量,观测到了清晰的超导隧穿电流和 从零电压态向电压态的跳变,最后就测量结果进行了分析讨论.此项工作属于国内首个开展 Nb/Nb_xSi_1-x/Nb材料约瑟夫森单结研究的工作.     

高临界电流密度NbN约瑟夫森结的制备和特性表征

我们开展了高临界电流密度的NbN约瑟夫森结的制备和特性研究.利用直流磁控溅射方法在单晶MgO(100)衬底上外延生长NbN/AlN/NbN三层膜,并使用微加工工艺制备了NbN约瑟夫森隧道结,在液氦温度下对NbN约瑟夫森结的电流-电压特性进行了测量,实验结果表明,NbN约瑟夫森结具有良好的隧穿特性,其临界电流密度J_c为10 kA/cm^2,质量因子大于10,能隙是5.7 mV,这些实验结果为基于NbN结的超导数字电路研究奠定了坚实的基础.     

Modulation depth of series SQUIDs modified by Josephson junction area

The superconducting quantum interference device(SQUID) amplifier is widely used in the field of weak signal detection for its low input impedance, low noise, and low power consumption. In this paper, the SQUIDs with identical junctions and the series SQUIDs with different junctions were successfully fabricated. The Nb/Al-AlO_x/Nb trilayer and input Nb coils were prepared by asputtering equipment. The SQUID devices were prepared by a sputtering and the lift-off method.Investigations by AFM, OM and SEM revealed the morphology and roughness of the Nb films and Nb/Al-AlO_x/Nb trilayer.In addition, the current–voltage characteristics of the SQUID devices with identical junction and different junction areas were measured at 2.5 K in the He~3 refrigerator. The results show that the SQUID modulation depth is obviously affected by the junction area. The modulation depth obviously increases with the increase of the junction area in a certain range. It is found that the series SQUID with identical junction area has a transimpedance gain of 58 ? approximately.     

Development of series SQUID array with on-chip filter for TES detector

A cold preamplifier based on superconducting quantum interference devices(SQUIDs)is currently the preferred readout technology for the low-noise transition edge sensor(TES).In this work,we have designed and fabricated a series SQUID array(SSA)amplifier for the TES detector readout circuit.In this SSA amplifier,each SQUID cell is composed of a first-order gradiometer formed using two equally large square washers,and an on-chip low pass filter(LPF)as a radiofrequency(RF)choke has been developed to reduce the Josephson oscillation interference between individual SQUID cells.In addition,a highly symmetric layout has been designed carefully to provide a fully consistent embedded electromagnetic environment and achieve coherent flux operation.The measured results show smooth V-Φcharacteristics and a swing voltage that increases linearly with increasing SQUID cell number N.A white flux noise level as low as 0.28μφ;/Hz;is achieved at 0.1 K,corresponding to a low current noise level of 7 pA/Hz;.We analyze the measured noise contribution at mK-scale temperatures and find that the dominant noise derives from a combination of the SSA intrinsic noise and the equivalent current noise of the room temperature electronics.     

用于精密测量玻尔兹曼常数的量子电压噪声源芯片研制

量子噪声温度计系统可通过比较导体中电子运动的热噪声和量子电压参考噪声精密测量玻尔兹曼常数,其中量子电压噪声源所合成的量子电压参考噪声由一组超导约瑟夫森结阵产生.本文详细介绍了基于Nb/Nb_xSi_(1-x)/Nb约瑟夫森结的量子电压噪声源芯片的设计、制备及测试;采用脉冲驱动模式,合成了具有量子精度的100 kHz交流量子电压信号.结果表明:本文所研制的噪声温度计核心芯片已具备了合成交流电压的功能,可为后续玻尔兹曼常数精密定值、重新定义及复现热力学温度研究提供核心器件.     

Numerical analysis of the smart DROS

A digital superconducting quantum interference device (SQUID) has the potential for a very large dynamic range and a very high slew rate. Our concept of the digital SQUID consists of a double relaxation oscillation SQUID (DROS) with the complete flux locked loop (FLL) electronics on one single chip. The key element of the FLL circuitry is a superconducting up-down counter, which supplies the feedback flux to the DROS. In this paper we will concentrate on the numerical simulations of our new 100 MHz smart DROS. In this new design, the quantization unit of the feedback flux, δΦ_fb=52 mΦ₀, was optimized with respect to the flux noise of the DROS. By doing so, the flux slew rate was maximized without compromising the sensitivity. The optimization resulted in a maximum flux slew rate of δΦ_sig/δt=5×10⁶Φ₀/s.     

中国超导电子学研究及应用进展

超导体的发现距今已有近110年了,高温超导体的发现也已经有30多年了.超导材料的电子学应用在最近一二十年取得了突破性进展.高温超导微波器件显示了比传统微波器件更优越的性能,已经在移动通信、雷达和一些特殊通信系统中取得了规模化应用.超导量子干涉器件以其磁场和电流测量的超高灵敏度,成为地质勘探、磁共振成像和生物磁成像等领域不可替代的手段.包括超导隧道结混频器、超导热电子混频器、超导转变沿探测器及超导单光子探测器等在内的超导传感器/探测器可以探测全波段的电磁波及各种宇宙辐射,具有接近量子极限的超高灵敏度,在地球物理、天体物理、量子信息技术、材料科学及生物医学等众多前沿领域发挥越来越重要的作用.超导参量放大器已经成为实现超导量子计算的关键器件.超导集成电路技术已被列入国际器件与系统技术路线图,成为后摩尔时代微电子领域的前沿阵地之一.在计量科学中,超导约瑟夫森效应及约瑟夫森结阵器件被广泛应用于量子电压基准和国际单位制基本单位的重新定义中.在当前的量子信息技术热潮中,超导电子学扮演重要角色,同时量子热潮也大力推动了超导电子学的发展.本文主要对近几年我国超导电子学研究和应用的现状与进展进行概括总结.     

Boundary field theory approach to the renormalization of SQUID devices

We show that the quantum properties of some Josephson SQUID devices are described by a boundary sine-Gordon model. Our approach naturally describes multi-junction SQUID devices and, when applied to a single junction SQUID (the rf-SQUID), it reproduces the known results of Glazman and Hekking. We provide a detailed analysis of the regimes accessible to an rf-SQUID and to a two-Josephson junction SQUID device (the dc-SQUID). We then compute the normal component of the current-response of a SQUID device to an externally applied voltage and show that the equation describing the current-voltage characteristic function reduces to well-known results when the infrared cutoff is suitably chosen. Our approach helps in establishing new and interesting connections between superconducting devices, quantum Brownian motion, fermionic quantum wires and, more generally, quantum impurity problems.     

Peculiarities of rf SQUID response in finite magnetic fields

Single-layer washer-type high-T_c YBa₂Cu₃O_7−x rf SQUIDs with grain-boundary Josephson junctions, as well as low-T_c Nb rf SQUIDs with Nb–Al₂O₃–Nb tunnel junctions, have been investigated in finite magnetic fields. It was shown experimentally that the suppression of the critical current of the Josephson junction due to the magnetic field leads to a modulation of the amplitude of the SQUID output signal. The role of the “unwanted” junction in high-T_c rf SQUIDs, which is formed by the grain boundary running through the washer of the SQUIDs on bicrystal substrates, has also been clarified. The drop of the SQUID signal at a finite magnetic field is originated by the penetration of the magnetic field into the unwanted junction. Based on these results, a direct radio-frequency method for the determination of the first critical field H_c1 for long Josephson junctions has been developed.