用计算全息图检测非球面时的自补偿效应分析

用计算全息图(CGH)检测非球面时,除了设计零位补偿CGH外,还往往设计辅助调节CGH,从而可以利用干涉图来精确调节CGH的位置。针对这种同时具有零位补偿和辅助调节功能的CGH,提出零位补偿CGH和辅助调节CGH之间具有相互补偿效应。针对一高次非球面,设计了四种不同的CGH配置方案,而后逐一分析了零位补偿CGH和辅助调节CGH之间的补偿效应。分析结果表明,在相同的基板误差的条件下,具有自补偿效应的配置方案的Power项误差小于其他方案的1/40,而球差和高阶球差则小于其他方案的1/70。利用具有自补偿效应的配置方案加工制作了CGH,用此CGH完成了对非球面的加工检测迭代,非球面面形的收敛精度均方根(RMS)达到0.48 nm。     

低空间频率组合计算全息元件检测深度非球面

计算全息元件(CGH)可实现光学非球面的零位干涉高精度检测,但深度非球面的非球面度以及非球面度梯度均较大,使检测所需CGH的局部空间频率偏大,加工困难。提出一种用组合CGH检测深度非球面的方法,该方法通过组合两个低空间频率CGH,实现深度非球面检测时所需的单个高空间频率CGH的功能。由一维线性光栅模型推导组合CGH与传统单个CGH空间频率的关系,并由此给出组合CGH初始相位,逐步优化可求得最佳相位。以最大非球面度193.434μm、最大非球面度梯度75.788μm/mm的深度非球面为测试样例,设计了单个CGH和组合CGH,残留波前误差均小于λ/250,组合CGH最大空间频率约为单个CGH的50%。设计了辅助装调CGH减小装调误差的影响,并分析了组合CGH之间俯仰倾斜偏差、中心偏差以及轴向定位偏差对检测精度的影响。     

Editorial for Focus Issue on Digital and Computer Generated Holography （DCH）

This focus issue Digital and Computer Generated Holography （DCH） combines the contributions from digital holography （DH） and computer-generated holography （CGH） into a single issue. We have classified the papers into four topics： holographic microscopy, computer-generated holography,     

低场核磁共振流体分子结构在线探测技术（英文）

流体分子结构的探测是了解其物理、化学性质的基础.目前主要采用的实验室内分子结构探测技术包括光谱法和波谱法等,但这类测量方法具有测量效率低、需添加化学试剂、实验可重复性差等局限.基于低场核磁共振(NMR)技术进行流体组分的探测技术已十分成熟.该文提出进一步将该技术应用于烃类化合物流体分子结构的检测方法,并研发一种快速二维核磁共振驰豫测量脉冲序列和一套低场核磁共振流体在线检测系统.最终实现了一种快速、无损、清洁、有效的流体组分探测技术.     

一种离轴计算全息图在凹非球面检测中的应用

为了精确检测大口径非球面面型质量,将CGH作为补偿器应用于凹非球面的离轴全息检测系统中.根据计算全息图的离轴全息检测系统检测凹非球面的基本原理,分析了离轴CGH的计算、制作过程,实现了对口径为150 mm,近轴半径为1499.7 mm,非球面系数为-1的凹非球面镜的检测.实验结果与轮廓仪检测结果吻合得很好.     

基于压缩光的量子激光雷达技术（英文）

利用Wigner函数对真空态、单光子态、压缩态在相空间的噪声分布进行仿真,并系统分析了基于压缩光的量子相干激光雷达和压缩光注入式量子激光雷达.研究表明,相比经典激光雷达,较高压缩度有利于量子相干激光雷达探测信噪比的提升,理论上8dB的压缩度可以使信噪比提高6.25倍;而压缩光注入式量子激光雷达系统的空间分辨率主要取决于真空压缩光的压缩度和无噪声相敏放大系统的增益.由于压缩光对探测信噪比的提升作用,量子激光雷达在微弱信号探测和高分辨率成像领域具有显著优势.     

微光成像系统的阈值探测理论和视距探测方程的研究（续）

微光成像系统的阈值探测理论和视距探测方程的研究（续）艾克聪（四安应用光学研究所７１０１００）３实际成像系统探测方程的研究和分析为了克服理想成像系统探测方程存在的局限性和不足之处，许多专家学者对其作了进一步的深入研究，提出了各种不同的改进和修正意见，以...     

基于量子点相干光学谱的马约拉纳费米子探测（英文）

研究了半导体纳米线/超导体复合结构中的马约拉纳费米子的存在情况,提出一种用相干光学谱探测马约拉纳费米子的全光学方法.将一束较强的泵浦激光和一束较弱的探测激光同时作用于半导体量子点,由系统的哈密顿量导出半导体量子点的相干光学谱.数值模拟结果表明,相干光学谱中呈现出由半导体量子点与马约拉纳费米子耦合诱导的明确的马约拉纳费米子迹象.半导体量子点与马约拉纳费米子之间的无接触性,避免了探测中杂质信号的引入.半导体量子点与马约拉纳费米子间的耦合强度和探测吸收谱中两尖峰之间的分裂宽度呈正比,可通过测量分裂宽度获得耦合强度,为耦合强度的确定提供了直观的测量方法.     

Problems on design of computer-generated holograms for testing aspheric surfaces:principle and calculation

Interferometric optical testing using computer-generated hologram (CGH) has provided an approach to highly accurate measurement of aspheric surfaces.While designing the CGH null correctors,we should make them with as small aperture and low spatial frequency as possible,and with no zero slope of phase except at center,for the sake of insuring low risk of substrate figure error and feasibility of fabrication.On the basis of classic optics,a set of equations for calculating the phase function of CGH are obtained.These equations lead us to find the dependence of the aperture and spatial frequency on the axial distance from the tested aspheric surface for the CGH.We also simulate the optical path difference error of the CGH relative to the accuracy of controlling laser spot during fabrication.Meanwhile,we discuss the constraints used to avoid zero slope of phase except at center and give a design result of the CGH for the tested aspheric surface.The results ensure the feasibility of designing a useful CGH to test aspheric surface fundamentally.     

基于主动锁相的二维电子光谱方法（英文）

二维电子光谱是探测复杂系统激发态相干动力学的重要工具,实现二维电子光谱测试的最大挑战是精确控制多束超短脉冲之间的相位差.本综述回顾了利用主动相位管理方法实现二维电子光谱仪装置,主要包括干涉仪相位稳定、声光调制器进行频率标记和多光频梳等三类方法;结合四波混频、泵浦探测及完全共线等不同构型,能实现高时空分辨及量子跃迁通道选择的二维光谱检测.超短脉冲技术与主动相位调控的结合实现二维电子光谱学方法,为研究激发态相干动力学提供新的机遇.     

计算机制全息图的二值化噪声及取样影响

对用于超大规模集成电路光学互连的计算机制全息图(CGH)的量化噪声及取样影响进行了分析.CGH透过率函数的二值化将带来一些噪声,但仍可得到高的信噪比.在光学互连CGH的结构是菲涅耳波带片的条件下,对Nyquist和Whittaker-Shannon两种取样方法进行了分析和比较.结果表明,在小偏转角和高取样频率条件下,用Whittaker-Shannon取样方法得到的衍射效率比用Nyquist取样方法所得到的衍射效率大.     

Computer-generated hologram fabricated by electron-beam lithography for noise reduction

A Lohmann-type computer-generated hologram (CGH) is fabricated using an electron-beam lithographic system. A high-resolution groove width of 0.2 μm is attained in relief gratings by changing the e-beam exposures. A diffraction efficiency close to ∼30.4% is obtained by using resist-on-silicon recording materials and cell-structural apertures in a CGH. The reconstructed images exhibit fewer phase noises owing to the incorporation of a non-overflow cell structure into a CGH. The CGH is designed for reconstruction-noise reduction by using an iterative error-reduction algorithm. The designed CGH exhibits fewer reconstruction noises such that the performance function in the convergence is smaller by a factor of 1/3 than that in the first iteration. Experiments demonstrating the performance of CGHs obtained by electron-beam lithography are presented.     

提高二元计算全息图设计精度的新途径

用于非球面光学元件检测的计算全息图的设计与制作精度对实现非球面的高精度检测是至关重要的。为了提高计算全息图的设计精度,采用Householder变换把矛盾方程组的系数矩阵正交三角化,直接求解波面拟合系数,避免了法方程组的构造。全息图的设计是直接利用MATLAB的内部函数编程来实现的。对具有旋转对称性和非旋转对称性的物波进行了波面拟合,并设计了相应的计算全息图。结果表明,物波函数的拟合精度和全息图的绘制精度均有明显的提高,且计算速度快。     

Problems on design of computer-generated holograms for testing aspheric surfaces: principle and calculation

Interferometric optical testing using computer-generated hologram (CGH) has provided an approach to highly accurate measurement of aspheric surfaces. While designing the CGH null correctors, we should make them with as small aperture and low spatial frequency as possible, and with no zero slope of phase except at center, for the sake of insuring lowisk of substrate figure error and feasibility of fabrication. On the basis of classic optics, a set of equations for calculating the phase function of CGH are obtained. These equations lead us to find the dependence of the aperture and spatial frequency on the axial diszance from the tested aspheric surface for the CGH. We also simulatethe ptical path difference error of the CGH relative to the accuracy of controlling laser spot during fabrication. Meanwhile, we discuss the constraints used to avoid zero slope of phase except at center and give a design result of the CGH for the tested aspheric surface. The results ensure the feasibility of designing a useful CGH to test aspheric urface fundamentally.     

一种三次非旋转对称的相位板的检测系统设计

作为零位干涉检测方法中非常有前途的一种方法.计算全息可以用于非旋转对称的非球面的检测.以三次相位板为例,阐述了利用计算全息图检测非旋转对称的非球面的基本原理.分析并推导了三次相位传播过程引入的高阶波像差的理论公式,给出了三次相位板的检测系统的没计结果.详细讨论了计算全息图衍射级次的分离以及计算全息图的二元化,给出了振幅型的计算全息图的图样.计算全息图的刻线最小问隔是40μm,计算全息图的制作精度对检测结果的波前误差的影响仅仅为0.005λ.对检测系统作了详细的公差分析,结果表明所有调整公差对整个检测系统的影响和方根值为83.954 nm.     

Characteristics in optimization of CGH for array generator

A method of simulated annealing in optimization of a computer generated holo-gram(CGH)is presented.The characteristics of energy in annealing curve are analyzed.Thecooling schedule such as giving an initial temperature,the temperature function,the numberof interactions and stopping criterion are discussed.As an example,an optimization of phaserelief kinoform,a CGH with multiple phase levels,is implemented.     

用双计算全息图检测凹非球面

为实现对凹非球面的高精度检测,提出并设计了一种二元纯相位型双计算全息图.设计的双计算全息图由主全息和对准全息两部分组成,分别用于检测非球面和精确定位主全息.介绍了双计算全息图的工作原理及其设计方法,并给出了一个检测Φ140、F/2抛物面反射镜的双计算全息图设计实例,实验得到的均方根(RMS)误差为0.062λ.通过分析对准全息的误差,推导出主全息的条纹位置畸变误差,最后计算出其综合误差为0.06A.为验证实验结果的可靠性,将其与平面镜自准直检测结果(ERMS=0.062A)比较,结果二者吻合良好.     

用于非球面检测的计算全息设计及其精度分析

介绍了用于非球面检测计算全息(Computer-generated hologram,CGH)的设计方法和步骤,对CGH位相分布求取、载频选取、CGH与干涉仪配合校准所涉及的关键问题展开了讨论,提出了一些全新的设计理念和方法。从理论上定量分析了CGH片基面型误差、全息图样偏差、刻蚀深度不均匀性和线宽不均匀性对再现波面的影响,得出了相应的误差公式指导计算全息元件加工环节的公差分配。给出了一个设计实例,检测不确定度达到λ/20。     

Problems on fabrication of computer-generated holograms for testing aspheric surfaces

Interferometric optical testing using computer-generated hologram （CGH） can give highly accurate measurement of aspheric surfaces has been proved. After the system is designed, a phase function is obtained according to the CGH＇s surface plane. For the requirement of accuracy, an optimization algorithm that transfers the phase function into a certain mask pattern file is presented in this letter, based on the relationship between the pattern error of CGH and the output wavefront accuracy. Then the writing machine is able to fabricate such a mask with this kind of file. With that mask, an improved procedure on fabrication of phase type CGH is also presented. Interferometrie test results of an aspherie surface show that the whole test system obtains the demanded accuracy.     

Direct amplitude detection of Zernike modes by computer-generated holographic wavefront sensor: Modeling and simulation

A fast holographic wavefront sensor is proposed using a computer-generated hologram (CGH). This CGH is a multiplexed hologram of different Zernike mode–amplitude combinations, and is designed in such a manner as to get the corresponding spots on the detector according to the presence and strength of a particular aberration. Interference between the aberrated wavefront (with a single mode–amplitude combination) and the Fourier transform of an image with single bright pixel (defined as dot image) is numerically calculated for one hologram. Different mode–amplitude combination and corresponding different positions of bright pixels (dots) are taken to compute various holograms and then all the holograms are multiplexed to get the final hologram. When the aberrated wavefront with a particular mode–amplitude combination is incident onto the multiplexed hologram, the corresponding dot is generated in the Fourier plane. A lens performs the Fourier transform in optical domain and provides the instant detection of amplitude of the respective Zernike mode. The main advantage of the scheme is to avoid the need of any computations, which makes it really fast. The simulation results are presented with the cross-talk analysis for few Zernike terms.