共查询到20条相似文献,搜索用时 46 毫秒
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空间自由曲面的非接触扫描测量 总被引:1,自引:0,他引:1
研究用程控三坐标测量机非接触扫描测量空间自由曲面。由程控三坐标测量机、PH9/PH10回转体和LB—12型非接触激光测头构成测量系统;用实时跟踪法控制测头运动;以PH9/PH10回转体为核心,建立扫描回转测头系统的数学模型,实现一次性标定转位扫描测头;进行数据规则化处理。实验表明,扫描测量的综合误差不大于±0.07mm。 相似文献
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曲面形状测量中二维激光测量头的设计 总被引:1,自引:0,他引:1
详细阐述了二维光学测量的原理,指出了传统单三角测量中像点位移和表面起伏的关系的不准确性,推导了光学测量头各器件之间的精确关系,给出了测量范围和像点的关系,最后根据设计实例说明测量装置调节的可能性和调节方法 相似文献
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针对在机激光扫描测量中激光测头安装位置和姿态引起的测量误差,提出了一种适用于在机激光测量的测头标定方法。构造了在机激光扫描测量原型系统,建立了激光测头随机床运动的测量模型;通过多角度扫描标准球球面拟合球心,给出了一种线性求解测头安装位姿参数的算法,避免了非线性优化求解中的大量计算和不稳定问题。分析了测量过程中机床各个轴的运动误差对测量结果的影响,建立了误差模型,并给出补偿机床系统误差的方法。实验显示,对直径已知的标准球进行测量时,测头在不同摆角测得的标准球直径误差小于0.05 mm,误差补偿后球心位置误差减小了83%。实验结果验证了该标定方法的可行性,以及机床误差对测量精度影响的模型及补偿方法的正确性。 相似文献
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针对大尺度空间中构件特征隐藏区的空间坐标测量,提出了一种基于无衍射光束的测量探针,并将该探针与全站仪结合构成了空间坐标组合测量系统。介绍了探针姿态测量系统和组合测量系统的结构与原理。测量时,首先将探针测头接触于被测点,并用全站仪或激光跟踪仪瞄准探针的光学系统,测得探针的空间位置坐标。接着,使用探针将测距激光通过axicon透镜变换为无衍射光,并由CCD摄像机获得图像。由无衍射光的中心一对一映射激光的入射方向,通过无衍射光图像定中计算,获得探针的水平角和俯仰角。最后,通过电子倾角仪测得探针滚动角;联合测得各姿态角和位置坐标,通过坐标变换,计算得出被测点的空间坐标。实验显示,该探针的姿态角测量精度为1mrad,组合测量空间位置偏差为±1mm,表明基于无衍射光束的探针与全站仪所构成的组合测量系统可满足大尺度空间中特征隐藏区空间坐标测量的要求。 相似文献
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We have investigated the irradiation conditions of femtosecond laser pulses for quantitative atom probe analyses of rare-earth (RE) doped ceria. The influence of laser wavelength, power, pulse frequency, as well as specimen temperature on mass resolution and background noise of atom probe mass spectra were investigated. Furthermore, quantitative atom probe analysis of yttrium distribution in Y-doped ceria was carried out with the optimized evaporation conditions. The distribution of yttrium was found to be uniform within the grains, but they were confirmed to be segregated at grain boundaries. 相似文献
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As the size of semiconductor devices is reduced the active volumes of material in each device is also decreased. Under these circumstances it becomes more important to understand the microchemistry of semiconducting materials, as small fluctuations in composition can dramatically affect both the operation of the devices, and of the contacts to semiconductors. Atom probe microanalysis has been shown to be able to analyse the microchemistry of metallic materials with plane-by-plane resolution, and by using a pulsed laser to replace the more conventional voltage pulses the analysis of semiconducting and insulating materials becomes possible. The pulsed laser atom probe has been shown to give very accurate chemical analysis of the stoichiometry of extremely small volumes of III-V compound semiconductors, and the composition of the interfacial layer between silicon dioxide and silicon has been identified as SiO of thickness about 0.3 nm. It has been shown to be possible to prepare specimens for analysis from thin films of semiconductors, thus allowing the microanalysis of a wide range of materials that are deposited in thin film form. 相似文献
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An optical probe based on the principle of differential laser autocollimation has been developed for the purpose of on-machine measurement of mirror shapes. The probe is so compact that it can be mounted on diamond lathes. It can be rotated by a stepping motor about an axis perpendicular to the optical axis of measurement, and has been used to measure mirror shapes on an apparatus that imitates the conditions of an on-machine measurement system. The probe can reduce remarkably the measurement errors due to vibrational and thermal noises that could not be avoided previously in on-machine measurement. Estimating from repeatability, accuracy is better than 0.1 μm in measurement of a parabolic curve whose depth is >1 mm and length is ≈ 100 mm. 相似文献
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为了加工形貌稳定且尺寸尽可能小的纳结构,建立了一套连续激光复合微纳探针的加工系统,并研究了光纤探针导光的连续激光辐照微纳探针的近场增强效应以及该系统的加工性能。首先,根据表面等离子体激元理论仿真分析了激光辐照原子力显微镜(AFM)探针的近场增强因子,并研究了微纳探针的针尖温度场和针尖热膨胀。接着,搭建了基于光纤探针导光的连续激光复合微纳探针的纳结构加工系统。最后,对聚乙烯片状材料样品进行了纳结构加工。结果显示:加工得到的纳米点尺度为200nm左右;纳米线的尺度为30~40nm。结果表明:光纤探针导光连续激光复合微纳探针系统避免了复杂的空间光路结构,是一种成本低廉,结构简单的系统,能够实现纳结构的加工。 相似文献
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基于激光三角测量原理的轨距检测系统研究 总被引:1,自引:0,他引:1
轨距是轨道几何尺寸中的一个重要参数,及时掌握轨距信息对保证行车安全具有重要意义.基于激光三角测量原理研发了一种安装于路轨两栖综合检测车上的轨距检测系统.该系统使用2组共6台二维激光扫描传感器获得左右钢轨断面轮廓,利用基于CPLD的同步信号触发模块保证各传感器数据同步.通过对采集的钢轨断面轮廓数据采用基于不连续度的自适应滤波和钢轨弧形区特征提取算法,实时提取轨距特征点并计算显示当前断面轨距值.实验结果表明,该轨距检测系统可实现轨距参数的非接触式动态实时测量,检测车运行速度为40 km/h时钢轨断面采样间隔3.7 mm,轨距检测精度±0.8 mm. 相似文献
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Nanoscale fretting wear was studied by using scanning probe microscopy (SPM) and a newly proposed unified approach of slip index. The production of SiO2 colloidal probes and the SPM calibration are described. Partial and gross slip fretting with displacement amplitudes from 5 to 500 nm were used for the study. Friction coefficient and nanowear results are presented showing a substantial increase of the friction at the transition from partial to gross slip and a significant difference between damaged surfaces in the two fretting regimes. 相似文献