分子束外延GaAs/Si应变层的光致发光和光反射谱研究

研究了分子束外延GaAs/Si光致发光谱的激发强度和温度依赖关系。确定出2个本征发光峰,分别对应于导带至m_J=±3/2和m_J=±1/2价带的复合。这种价带的移动和分裂归因于由GaAs和Si的热膨胀系数不同所引起的GaAs层双轴张应力。还观测到4个非本征发光峰,分别为导带至m_J=±1/2碳受主态发光、可能与缺陷有关的发光以及可能由Mn和Cu受主杂质引起的发光。室温下将GaAs/Si和GaAs/GaAs材料的光反射谱进行比较,前者明显向低能移动约8meV,观测到3个特征谱结构,与光致发光结果相一致。     

ZnO Grown on (111) ZnS Substrates by Plasma-Assisted Molecular Beam Epitaxy

ZnO thin films have been grown by plasma-assisted molecular beam epitaxy on (111) ZnS substrates. The films grown on Zn-face substrates showed better structural and optical properties compared with those grown on S-face substrates, as demonstrated by x-ray diffraction and photoluminescence measurements. Scanning electron microscopy measurements indicated that ZnO films grown on Zn-face substrates also have smoother surface morphology. It is also found that higher growth temperature yields films with better quality.     

Si(100)和Si(111)衬底上的同质分子束外延

用超高真空电子束蒸发系统进行了硅的同质分子束外延.发现采用适当的表面化学处理方法,然后在超高真空中加热,可以在较低温度下(800—814℃)获得清洁和平整的有序表面.Si(100)和Si(111)的外延分别在520℃和714℃进行,外延膜的结构和电学特性良好.     

Microstructure of Heteroepitaxial ZnTe Grown by Molecular Beam Epitaxy on Si(211) Substrates

The interface of ZnTe/Si(211) grown by molecular beam epitaxy was investigated by high-resolution transmission electron microscopy. Several types of defects such as misfit dislocations, stacking faults, agglomerations of vacancies, and precipitates were observed and studied by electron microscopy at the ZnTe/Si interface. The distribution of misfit dislocations at the interface was revealed with the assistance of the fast Fourier transformation filtering technique. A stick-and-ball interface model including misfit dislocation geometry is proposed. The possible origins of the stacking faults, vacancies, and precipitates are discussed.     

Growth of GaN Layers on Si(111) Substrates by Plasma-Assisted Molecular Beam Epitaxy

Semiconductors - The studies of the growth kinetics of GaN layers grown on nitridated Si(111) substrates by plasmaassisted molecular beam epitaxy are presented. The nucleation and overgrowth of the...     

Characterization of HgCdTe Films Grown on Large-Area CdZnTe Substrates by Molecular Beam Epitaxy

Recent advances in growth of Hg_1?x Cd _x Te films on large-area (7 cm × 7.5 cm) CdZnTe (CZT) substrates is presented. Growth of Hg_1?x Cd _x Te with good uniformity on large-area wafers is achieved using a Riber 412 molecular beam epitaxy (MBE) tool designed for growth of Hg_1?x Cd _x Te compounds. The reactor is equipped with conventional CdTe, Te, and Hg sources for achieving uniform exposure of the wafer during growth. The composition of the Hg_1?x Cd _x Te compound is controlled in situ by employing a closed-loop spectral ellipsometry technique to achieve a cutoff wavelength (λ _co) of 14 μm at 78 K. We present data on the thickness and composition uniformity of films grown for large-format focal-plane array applications. The composition and thickness nonuniformity are determined to be <1% over the area of a 7 cm × 7.5 cm wafer. The films are further characterized by Fourier-transform infrared spectroscopy, optical microscopy, and Hall measurements. Additionally, defect maps show the spatial distribution of defects generated during the epitaxial growth of the Hg_1?x Cd _x Te films. Microdefect densities are in the low 10³ cm^?2 range, and void defects are below 500 cm^?2. Dislocation densities less than 5 × 10⁵ cm^?2 are routinely achieved for Hg_1?x Cd _x Te films grown on CZT substrates. HgCdTe 4k × 4k focal-plane arrays with 15 μm pitch for astronomical wide-area infrared imagers have been produced using the recently developed MBE growth process at Teledyne Imaging Sensors.     

LSAT(111)衬底上ZnO单晶薄膜的分子束外延生长

利用射频等离子体辅助分子束外延技术,在LSAT(111)衬底上制备高质量ZnO单晶薄膜.研究了衬底表面预处理及生长温度对ZnO外延膜的生长过程、外延取向关系以及表面形貌的影响.发现在较低温度下生长ZnO时,薄膜中容易形成30°旋转畴,而在较高温度下,可完全消除薄膜中的旋转畴,得到具有单一畴的ZnO单晶薄膜,讨论了旋转畴的起源以及生长温度对于消除旋转畴的作用.锐利的3×3 RHEED图像验证了ZnO薄膜具有O极性.     

LSAT(111)衬底上ZnO单晶薄膜的分子束外延生长

利用射频等离子体辅助分子束外延技术,在LSAT(111)衬底上制备高质量ZnO单晶薄膜.研究了衬底表面预处理及生长温度对ZnO外延膜的生长过程、外延取向关系以及表面形貌的影响.发现在较低温度下生长ZnO时,薄膜中容易形成30°旋转畴,而在较高温度下,可完全消除薄膜中的旋转畴,得到具有单一畴的ZnO单晶薄膜,讨论了旋转畴的起源以及生长温度对于消除旋转畴的作用.锐利的3×3 RHEED图像验证了ZnO薄膜具有O极性.     

LSAT(111)衬底上ZnO单晶薄膜的分子束外延生长

利用射频等离子体辅助分子束外延技术,在LSAT(111)衬底上制备高质量ZnO单晶薄膜.研究了衬底表面预处理及生长温度对ZnO外延膜的生长过程、外延取向关系以及表面形貌的影响.发现在较低温度下生长ZnO时,薄膜中容易形成30. 旋转畴,而在较高温度下,可完全消除薄膜中的旋转畴,得到具有单一畴的ZnO单晶薄膜，讨论了旋转畴的起源以及生长温度对于消除旋转畴的作用.锐利的3×3 RHEED图像验证了ZnO薄膜具有O极性     

ZnCl2掺杂n型ZnSe的分子束外延生长

利用分子束外延(MBE)技术,以5N的ZnCl2作为掺杂源,在半绝缘GaAs (001)衬底上异质外延生长ZnSe:Cl单晶薄膜.研究发现,掺入ZnCl2后,ZnSe外延层的结晶质量和表面形貌与本征ZnSe外延层相比变差,双晶X射线摇摆曲线(DCXRC)的ZnSe (004)衍射峰半峰宽(FWHM)从432 arcsec增大到529 arcsec,表面均方根粗糙度(RMS)从3.00 nm增大到3.70nm.当ZnCl2掺杂源炉的温度为170℃时,ZnSe样品的载流子浓度达到1.238×1019 cm-3,可以满足结型器件制作和隧道结材料设计的要求.     

Microstructural Characterization of HgCdSe Grown by Molecular Beam Epitaxy on ZnTe/Si(112) and GaSb(112) Substrates

Transmission electron microscopy and small-probe microanalysis have been used to investigate the microstructure of HgCdSe thin films grown by molecular beam epitaxy on ZnTe/Si(112) and GaSb(112) substrates. The quality of the HgCdSe material was dependent on the growth temperature and materials flux, independent of the substrate. Samples grown at 100°C were generally of high quality, while those grown at 140°C had {111}-type stacking defects and increased dislocation densities. Improved preparation of the GaSb buffer layer should be developed for future HgCdSe growth on GaSb(112) substrates.     

Microstructure of Heteroepitaxial ZnTe Grown on GaAs(211)B by Molecular Beam Epitaxy

ZnTe was grown on GaAs(211)B by molecular beam epitaxy (MBE). Structural properties and strain relaxation at the ZnTe/GaAs(211)B interface were investigated by high resolution transmission electron microscopy (HRTEM) and scanning transmission electron microscopy (STEM). Application of digital image processing involving a filtered inverse fast Fourier transformation revealed an array of misfit dislocations at the interface and allowed strain relaxation to be estimated. Only one twin defect was observed in the HRTEM images, and details of this twin defect were investigated by STEM.     

Photoluminescence Studies of Si-Doped Epitaxial GaAs Films Grown on (100)- and (111)A-Oriented GaAs Substrates at Lowered Temperatures

The electrical properties and photoluminescence features of uniformly Si-doped GaAs layers grown on GaAs substrates with the (100) and (111)A crystallographic orientations of the surface are studied. The samples are grown at the same As₄ pressure in the growth temperature range from 350 to 510°C. The samples grown on GaAs(100) substrates possess n-type conductivity in the entire growth temperature range, and the samples grown on GaAs(111)A substrates possess p-type conductivity in the growth temperature range from 430 to 510°C. The photoluminescence spectra of the samples exhibit an edge band and an impurity band. The edge photoluminescence band corresponds to the photoluminescence of degenerate GaAs with n- and p-type conductivity. The impurity photoluminescence band for samples on GaAs(100) substrates in the range 1.30–1.45 eV is attributed to V_As defects and Si_As–V_As defect complexes, whose concentration varies with sample growth temperature. Transformation of the impurity photoluminescence spectra of the samples on GaAs(111)A substrates is interpreted as being a result of changes in the V_As and V_Ga defect concentrations under variations in the growth temperature of the samples.     

Photoelectric Properties of GaN Layers Grown by Plasma-Assisted Molecular-Beam Epitaxy on Si(111) Substrates and SiC/Si(111) Epitaxial Layers

Semiconductors - The photoelectric properties of GaN/SiC/Si(111) and GaN/Si(111) heterostructures grown by plasma-assisted molecular-beam epitaxy under the same growth conditions on identical...     

Determination of Critical Thickness for Epitaxial ZnTe Layers Grown by Molecular Beam Epitaxy on (211)B and (100) GaSb Substrates

Cross-section electron micrographs, cathodoluminescence images, and confocal photoluminescence (cPL) images have been acquired for ZnTe layers deposited to various thicknesses on GaSb substrates with (211)B and (100) orientations. The critical thickness of ZnTe on GaSb is predicted to range between 115 nm and 329 nm, depending on the theoretical approach chosen. For ZnTe layers grown on (211)B GaSb with thickness exceeding 150 nm, dark spots and lines are present in all images. We associate these with dislocations generated at the ZnTe/GaSb interface. The discrepancy between this thickness value and a critical thickness value (350 nm to 375 nm) obtained for the (211)B orientation in a previous study is related to the distinction between the onset of misfit dislocations and the onset of significant plastic deformation. The former requires a direct imaging technique, as strain-related measurements such as x-ray diffraction do not have the resolution to detect the effects of small numbers of dislocations. For ZnTe layers on (100) GaSb, x-ray diffraction measurements indicate an abrupt change characteristic of dislocation multiplication at a thickness value in the range from 250 nm to 275 nm. High-resolution electron micrographs of the ZnTe/GaSb interface indicate that deoxidation using atomic hydrogen produces GaSb surfaces suitable for ZnTe epitaxy. cPL images of a 1.2-μm-thick lattice-matched ZnTe_0.99Se _0.01 layer grown on a 150-nm-thick ZnTe buffer layer on a (211)B GaSb substrate yield a threading dislocation density of ～7 × 10⁴ cm^?2.     

分子束外延生长高应变单量子阱激光器

采用分子束外延方法研究了高应变InGaAs/GaAs量子阱的生长技术.将InGaAs/GaAs量子阱的室温光致发光波长拓展至1160nm,其光致发光峰半峰宽只有22meV.研制出1120nm室温连续工作的InGaAs/GaAs单量子阱激光器.对于100μm条宽和800μm腔长的激光器,最大线性输出功率达到200mW,斜率效率达到0.84mW/mA,最低阈值电流密度为450A/cm2,特征温度达到90K.     

分子束外延生长高应变单量子阱激光器

采用分子束外延方法研究了高应变 In Ga As/Ga As量子阱的生长技术 .将 In Ga As/Ga As量子阱的室温光致发光波长拓展至 116 0 nm,其光致发光峰半峰宽只有 2 2 me V.研制出 112 0 nm室温连续工作的 In Ga As/Ga As单量子阱激光器 .对于 10 0 μm条宽和 80 0 μm腔长的激光器 ,最大线性输出功率达到 2 0 0 m W,斜率效率达到 0 .84m W/m A,最低阈值电流密度为 45 0 A/cm2 ,特征温度达到 90 K.     

以金属为缓冲层在Si(111)上分子束外延GaN及其表征

用电子束蒸发方法在Si(111)衬底上蒸发了Au/Cr和Au/Ti/Al/Ti 两种金属缓冲层,然后在金属缓冲层上用气源分子束外延(GSMBE)生长GaN. 两种缓冲层的表面都比较平整和均匀,都是具有Au(111)面择优取向的立方相Au层. 在Au/Cr/Si(111)上MBE生长的GaN,生长结束后出现剥离. 在Au/Ti/Al/Ti/Si(111)上无AlN缓冲层直接生长GaN,得到的是多晶GaN;先在800℃生长一层AlN缓冲层,然后在710℃生长GaN,得到的是沿GaN(0001)面择优取向的六方相GaN. 将Au/Ti/Al/Ti/Si(111)在800℃下退火20min,金属层收缩为网状结构,并且成为多晶,不再具有Au(111)方向择优取向.     

以金属为缓冲层在Si(111)上分子束外延GaN及其表征

用电子束蒸发方法在Si(111)村底蒸发了Au/Cr和Au/Ti/AI/Ti两种金属缓冲层,然后在金属缓冲层上用气源分子束外延(GSMBE)生长GaN.两种缓冲层的表面部比较平整和均匀,都是具有Au(111)面掸优取向的立方相Au层.在Au/Cr/Si(111)上MBE生长的GaN,生长结束后出现剥离.在Au/Ti/Al/Ti/Si(111)上无AIN缓冲层直接生长GaN,得到的是多品GaN;先在800℃生长一层AIN缓冲层,然后在710℃生长GaN,得到的足沿GaN(0001)面择优取向的六方相GaN.将Au/Ti/Al/Ti/Si(111)在 800℃下退火20min,金属层收缩为网状结构,并且成为多晶,不再具有Au(111)方向择优取向.