退火对CNx薄膜光学性质的影响

报道了退火对电子回旋共振(ECR)辅助脉)中激光溅射方法制备的CNx薄膜样品光学性质的影响，X射线衍射(XRD)结果显示CNx薄膜基本为无定形结构，但存在微量的多晶结构，拉曼散射谱显示所制备的CNx薄膜样品主要由C≡N、少量的C—C和微量的C≡N组成，随着退火温度的升高，拉曼散射谱不但在1357cm^-1附近出现了一个新峰(新峰对应无序的CN键)，而且C≡N和CN的相对含量比随着退火温度的提高大致呈先减小后增大再减小的趋势，从而证实在退火过程中部分N原子发生了迁移，椭偏仪所测量的CNx薄膜的光学常数表明退火温度对ε1、ε2、n、κ的大小和谱线的形状均产生了显著影响，结合拉曼散射谱可断定其原因为退火改变了CNx薄膜样品的内部结构和键结构，实验中得到的ε1、ε2、n、κ随光子能量的变化关系可用洛伦兹色散理论得到很好解释。     

La0.5Sr0.5CoO3薄膜的化学溶液法制备及椭偏光谱研究

用化学溶液沉积法在Si衬底上制备了La0.5Sr0.5CoO 3(LSCO)导电薄膜.X-射线衍射结果表明退火温度600℃可以使LSCO薄膜晶化,薄膜没 有明显的择优取向并呈单一的钙钛矿相.原子力显微镜研究结果表明LSCO薄膜表面平整、无 裂纹及晶粒尺寸较大.用椭偏光谱仪测量了波长300～1700nm范围内LSCO薄膜的椭偏光谱.用适当的拟合模型进行拟合,获得了LSCO 薄膜的光学常数(包括折射率,消光系数,吸收系数等)谱.     

掺铒对激光烧蚀制备纳米硅晶薄膜形貌的影响

在2×10-4 Pa真空下，采用XeCl准分子激光器(波长308 nm)，调整激光单脉冲能量密度为3 J/cm2，交替烧蚀高纯单晶硅(Si)靶和铒(Er)靶，通过调整辐照两靶的激光脉冲个数比来控制掺Er浓度，分别在Si衬底和石英衬底上制备了掺Er非晶Si薄膜。在N2气保护下经高温热退火实现纳米晶化，退火时间为30 min。采用扫描电子显微镜(SEM)观察所得到的样品的表面形貌显示，铒掺杂影响着薄膜的表面形貌，与不掺Er情况相比，掺入适量的Er可以在较低的退火温度下得到晶粒尺寸分布更均匀的薄膜;拉曼谱的测量结果表明，在相同的退火温度下，Er的掺入有利于晶粒的长大，但同时降低了薄膜的晶化度，掺Er非晶Si薄膜要实现完全晶化需要更高的退火温度。     

厚度对反铁电锆酸铅薄膜光学折射率的影响

用化学溶液法在Pt／Ti／SiO2／Si(100)上制备了厚度分别为89nm和137nm的PbZrO3(PZ)薄膜。X-射线衍射结果表明晶化好的PZ薄膜是钙钛矿结构。用椭偏光谱仪在波长345～1700nm范围内，测量了不同厚度的PZ薄膜的椭偏光谱。获得了不同厚度薄膜的光学常数谱(折射率n和消光系数k)。结果表明在633nm处，厚度分别为89nm和137nm的PZ薄膜，其折射率n分别为2．090和2．236。     

C60／70薄膜与碘掺杂薄膜的椭偏光谱研究

采用真空蒸镀的方法在玻璃、石英和硅衬底上制备了Ｃ６０／７０薄膜样品,膜厚范围在１５０～７００ｎｍ．用自制的高精度、自动化光度法椭偏光谱仪在２３０～６００ｎｍ波谱范围内测量了掺碘前后Ｃ６０／７０薄膜的椭偏光谱．用洛伦兹振子模型分析了这些椭偏光谱,得到了洛伦兹线型参数值Ｅ０、Ｅｐ、和Γ,并与有关Ｃ６０／７０掺钾的文献进行了比较     

化学溶液法制备的Ba0.9Sr0.1TiO3薄膜的结构及光学特性研究

采用高度稀释的前驱体溶液在LaNiO3(LNO)薄膜上沉积了Ba0.9Sr0.1TiO3(BST)薄膜。X-射线衍射分析表明BST薄膜呈高度的（100）择优取向。原子力显微镜测量发现制备的BST薄膜具有大的晶粒尺寸80-200nm。用椭偏光谱仪测量了光子能量为0.7-3.4eV范围内BST薄膜的椭偏光谱，用Cauchy模型描述BST薄膜的光学性质，获得了BST薄膜的光学常数谱和禁带宽度Eg=3.36eV。     

利用调制式椭偏仪测量薄膜电光系数

利用调制式的椭偏仪测量了掺镧锆钛酸铅PLZT薄膜的电光系数．首先用反射椭偏测量的方法得到薄膜的折射率(n)和厚度(d),然后利用透射椭偏在线测量的功能,在样品上加电场(E),得到薄膜的折射率的改变8n．最后用测量得到的厚度,折射率以及折射率的改变来计算薄膜的电光系数．该仪器的灵敏度很高,很适合较薄的膜层材料电光性质的测量．     

PLD法制备ZnO薄膜的退火特性和蓝光机制研究

通过脉冲激光沉积(PLD)方法,在O2中和100～500℃衬底温度下,用粉末靶在Si(111)衬底上制备了ZnO薄膜,在300℃温度下生长的薄膜在400～800℃温度和N2氛围中进行了退火处理,用X射线衍射(XRD)谱、原子力显微镜(AFM)和光致发光(PL)谱表征薄膜的结构和光学特性。XRD谱显示,在生长温度300℃时获得较好的复晶薄膜,在退火温度700℃时获得最好的六方结构的结晶薄膜;AFM显示,在此退火条件下,薄膜表面平整、晶粒均匀;PL谱结果显示,在700℃退火时有最好的光学特性。     

退火对用PLD法制备ZnO薄膜的发光影响

用脉冲激光沉积(PLD)方法在Si(111)和蓝宝石衬底上制备的氧化锌薄膜,在不同的退火温度和不同的退火氛围中进行了退火处理.退火温度及退火氛围对ZnO薄膜的结构和发光特性的影响用X射线衍射(XRD)谱和光致发光谱进行了表征.实验结果表明,随着退火温度的提高,ZnO薄膜的压应力减小,并向张应力转化.在不同的退火温度退火...     

薄膜材料光学特性研究的椭偏光谱数据处理

椭偏光谱由于其独特性而广泛应用于薄膜材料的光学特性研究。文章综述了椭偏光谱数据处理中常用的物理模型,并对椭偏光谱的一般方法作了总结。     

Structural and optical properties of Cd_(0.8)Zn_(0.2)S thin films

Cd_(1-x)Zn_xS thin films were deposited on glass substrates by a vacuum coevaporation method.The structural,compositional,and optical properties of as-deposited Cd_(0.8)Zn_(0.2)S films were investigated using X-ray diffraction(XRD),X-ray fluorescence(XRF),X-ray photoelectron spectroscopy(XPS),and optical transmittance spectrum.The thin films are hexagonal in structure,with strong preferential orientation along the(002) planes.The composition of Cd_(1-x)Zn_xS thin films monitored by a quartz crystal oscil...     

Bi3．25La0．75Ti3O12超薄铁电薄膜的光学性质研究

采用化学溶液沉积法在Pt／Ti／SiO2／Si衬底上制备了厚度小于100nm的Bi3.25La0.75Ti3O12(BLT)铁电薄膜，测量了光子能量为2～4．5eV的紫外可见椭圆偏振光谱．根据经典的电介质光学色散关系和五相结构模型，拟合获得薄膜在透明区和吸收区的光学常数、表面粗糙度、薄膜与衬底界面层以及BLT薄膜的厚度．薄膜在透明区的折射率色散关系可以通过单电子Sellmeier模型成功地进行解释．最后，根据Tauc’s法则，得到Bi0.25La0.7Ti3O12薄膜的直接禁带宽度为3．96eV．     

Structural and electrical investigation of BLT films deposited at different times using electron beam evaporation technique

Thin films Bi4Ti3O12 (BLT) were deposited using electron beam evaporation on silicon substrate at several times, also on AlN/Si and SiO2/Si substrates. Thin films morphology and thickness were measured via scanning electron microscopy (SEM). The crystallography was studied using X-ray diffraction (XRD) technique for films which have a (0010) preferred orientation in all substrate types. The capacitance values were contingent on frequency value in C-V measurement. The ferroelectric characterization was investigated for BLT film deposited on isolator layer (SiO2 or AlN) for Al/Bi4Ti3O12/SiO2/Si devices. Memory effect value varied from 1 V to 3 V depending on the thin films isolator on substrate.     

脉冲激光沉积法制备氧化锌薄膜

ZnO是一种新型的Ⅱ-Ⅵ族半导体材料,具有优良的晶格、光学和电学性能,其显著的特点是在紫外波段存在受激发射。利用脉冲激光沉积法(PLD)在氧气氛中烧蚀锌靶制备了纳米晶氧化锌薄膜,衬底为石英玻璃,晶粒尺寸约为28-35 nm。X射线衍射(XRD)结果和光致发光(PL)光谱的测量表明,当衬底温度在100-250℃范围内时,所获得的ZnO薄膜具有c轴的择优取向,所有样品的强紫外发射中心均在378-385 nm范围内,深能级发射中心约518-558 nm,衬底温度为200℃时,得到了单一的紫外光发射(没有深能级发光)。这归因于其较高的结晶质量。     

Cd0.8Zn0.2S 薄膜的结构和光学性质

采用真空共蒸发法在玻璃衬底上制备了Cd1-xZnxS薄膜,并用XRD、XRF以及光学透射谱对刚沉积薄膜的结构、组分和光学性质进行了表征。刚沉积的薄膜为六方结构,沿(002) 择优取向。XRF测试结果表明石英振荡法监控的薄膜组分与XRF 获得的结果非常好地吻合。由Cd0.8Zn0.2S薄膜的光学透射谱,通过Swanepoel 原理与Wemple- DiDomenico 单振子模型,推导出薄膜的光学参量,如折射率、单振子能量、色散能、吸收系数、光学能隙等。     

(LaxBi1-x)2Ti2O7薄膜X射线光电子能谱研究

采用化学溶液沉积(CSD)工艺在Si(100)衬底上制备了Bi2Ti2O7(BTO(和(LaxBi1-x)2Ti2O7(BLT(铁电薄膜，薄膜的X射线衍射(XRD)结果显示其具有较好的结晶性，运用X射线光电能谱仪(XPS)对薄膜的结构进行了研究，分析结果表明，薄膜中氧空位的出现影响了其相的稳定性，通过掺La可以改善其性能。     

微测热辐射计氧化钒薄膜工艺研究

用射频磁控反应溅射在石英玻璃和硅片上沉积氧化钒薄膜 .利用X射线衍射 ,X射线光电子谱 ,原子力显微镜 ,分光光度计和电阻测量手段对沉积薄膜结构、形貌和性能进行了测试 .结果表明 ,沉积薄膜的电阻温度系数大于 1.8% /℃ ,方块电阻为 2 2± 5kΩ/□ .     

飞秒脉冲激光沉积Si基a轴择优取向的钛酸铋铁电薄膜

在钛酸铋(Bi4Ti3O12)薄膜的制备过程中容易获得晶粒c轴垂直于基片表面的薄膜,而压电和铁电存储器主要利用a轴的自发极化分量,因而制备a轴择优取向的Bi4Ti3O12铁电薄膜具有特别的意义。采用飞秒脉冲激光作用在钛酸铋陶瓷靶上,采用Si(111)作为衬底,制备了a轴择优取向的钛酸铋薄膜。采用X射线衍射(XRD)的薄膜附件和场发射扫描电镜(FSEM)研究了薄膜的结构和形貌;采用傅里叶红外光谱仪测量了室温(20℃)下在石英基片上沉积的样品的光学特性;室温下沉积的钛酸铋薄膜呈c轴择优取向,晶粒的平均大小为20 nm,其光学禁带宽度约为1.0 eV。在500℃沉积的钛酸铋薄膜呈a轴择优取向,晶粒大小在30~300 nm之间,薄膜的剩余极化强度Pr为15μC/cm2,矫顽力Er为48 kV/cm。     

Effects of annealing temperature on the photoluminescence of RF sputtered Barium titanate thin films

BaTiO₃ thin films were deposited onto quartz substrates by an RF magnetron sputtering method. The films deposited at room temperature and annealed at 773–1173 K were characterized using X-ray diffraction (XRD)Scanning electron microscopy (SEM), UV–vis spectroscopy and Photoluminescence spectroscopy (PL). X-ray diffraction studies revealed that the film is amorphous in nature at 773 K and that the crystallinity increases with increase in annealing temperature. The average crystallite size of the films increased from 13–18 nm and the optical band gap decreased in the range of 4.33–3.43 eV, with increase in annealing temperature. The films exhibited good adherence to the substrates and the SEM images showed smooth surface morphology. Energy dispersive X-ray (EDX) analysis confirmed the presence of barium, titanium and oxygen in the film. The red-shifts of excitonic UV emission peaks were observed in all samples which can be attributed to the stress produced due to lattice distortions. The visible PL emission intensity showed appreciable enhancement with post-deposition annealing.     

Studies of the optoelectronic properties of ZnO thin films

ZnO thin films have been deposited on quartz glass, sapphire, and glass substrates by the sol-gel technique and subjected to different annealing ambients. X-ray diffraction measurements show that all the films are hexagonal wurtzite type. The variations in photoluminescence (PL) and photoconductivity (PC) properties have been correlated to the structural and microstructural changes due to different substrates and annealing ambients. The maximum photoresponse has been observed for the films on quartz substrates. The violet emission in the PL spectra is enhanced for vacuum and nitrogen annealed films. The maximum ultraviolet (UV) photoresponse and photo-to-dark current ratio is observed for ZnO films annealed in air.