用于先进半导体制程的光刻反向计算技术(ILT)(英文)

此篇论文将介绍一个用于半导体光罩上图样设计以及可用于实际生产的光刻反向计算技术(ILT)。在论文中将讨论有关ILT的最新发展,包括在超成像极限协助图样(SRAF)的生成,可增加制程宽容度的ILT,以及如何生成满足光罩生产标准的图样等方面。从内部的研究结果和客户的使用结果可以看出,ILT已经不再只是一种用于研究的工具,而是已经可以用于先进半导体制程的大规模生产。在对各个环节优化之后,ILT可以增加制程的宽容度,同时将光罩的成本控制在可以接受的水平。     

用于先进半导体制程的光刻反向计算技术(ILT)

此篇论文将介绍一个用于半导体光罩上图样设计以及可用于实际生产的光刻反向计算技术(ILT).在论文中将讨论有关ILT的最新发展,包括在超成像极限协助图样(SRAF)的生成,可增加制程宽容度的ILT, 以及如何生成满足光罩生产标准的图样等方面.从内部的研究结果和客户的使用结果可以看出,ILT已经不再只是一种用于研究的工具,而是已经可以用于先进半导体制程的大规模生产.在对各个环节优化之后,ILT可以增加制程的宽容度,同时将光罩的成本控制在可以接受的水平.     

构建相干长度之外的激光干涉仪

用于微型光刻技术中的多数紫外线（UV）或深紫外线激光器，无论是基于气体的准分子或二极管泵浦固态（DPSS）激光器，其输出频谱均较宽。与此同时，能传送紫外或深紫外光的多数光学材料均具有较高度频散性（即它们的折射率，n（λ），随波长λ变化）。在这种情况下构建一台紫外干涉仪比那拥有狭窄光谱的激光和几乎恒定折射率的光学材料的情况要复杂得多。本文描述一项激光干涉技术，据此可以补偿光学材料的高频散性，从而构建传统意义上所定义的相干长度之外的激光干涉仪。给出理论上的陈述，并提供初步实验结果。本文最后讨论了此情况下干涉条纹的对比度、激光相干长度，以及如何控制光源的时域不稳定性和空间不均匀性的方法。     

与CRP相结合的SAFT在混凝土损伤检测成像中的研究

将传统合成孔径聚焦技术(Synthetic aperture focusing technique,SAFT)与共反射点(Common reflection point,CRP)信号叠加法相结合应用于混凝土损伤检测中,可提高在强噪声环境中拾取缺陷回波信号的能力。本文采用二维有限元仿真验证了该思想的合理性,通过混凝土实验检验了该方法在实际应用中的可行性和有效性。与传统SAFT成像结果相比,应用CRP信号叠加法的SAFT提高了成像横向分辨率和损伤定位精度,为工程应用提供了理论和实验参考。     

皖中膨胀土的承载比(CBR)强度特性研究

针对皖中地区高速公路建设中遇到的膨胀土问题,选取合六叶高速公路典型土样开展了系统的承载比（CBR）特性试验研究,并在此基础上探讨了膨胀土作为路基填料的适用性。研究表明:（1）起始含水量对膨胀土CBR值影响显著,CBR最大值对应的含水量高于最佳含水量,且击实功越大,二者差值也越大;（2）CBR膨胀量随起始含水量增大而减小,起始含水量越低,CBR膨胀量就越大,路基的水稳性就越差;（3）当击实功较大时,膨胀土的最佳含水量较小,适合填筑的可变含水量范围较宽,建议现场施工控制采用重型击实标准;（4）在重型击实条件下,将弱膨胀土起始含水量控制在比最优含水量大2%⁴%范围内,能同时满足压实度和CBR值要求以用于填筑下路堤,中膨胀土作为路基填料时必须经过改性处理。研究结果对于在膨胀土地区进行公路建设具有参考意义。     

基于DIHPB技术的高应变率剪切测试方法

在测试材料动态力学性能时，直接撞击式霍布金森压杆（direct impact Hopkinson pressure bar，DIHPB）实验系统相对于分离式霍布金森压杆（split Hopkinson pressure bar，SHPB），往往能获得更高的应变率。本文中采用一种新型双剪切试样，在DIHPB系统下对603钢进行了动态剪切测试。获得了603钢在应变率1 500～33 000 s?1的剪应力-剪应变曲线，并与SHPB系统下的测试结果进行了对比。结果表明，由两种测试方法获得的流动应力具有较好的一致性，但曲线的上升沿存在明显区别。采用数值模拟对DIHPB方法的准确性进行了验证，并对该实验方法的适用条件进行了分析。采用DIHPB方法，可以观察到603钢的流动应力存在明显的应变率效应，但在较高的加载速度下材料的失效应力随着加载速度的增加而呈降低趋势。     

激光陀螺反射镜散射检测方法

闭锁效应是影响激光陀螺性能的重要因素,而光束在反射镜表面反射时的背向散射则是形成闭锁效应的主要原因。基于矢量叠加理论,对激光陀螺反射镜背向散射对谐振腔总背向散射的影响进行了分析。在此基础上,提出一种反射镜散射的在线测量方法,以半导体激光器为光源构成远心光路,通过显微镜收集散射光,并利用CCD记录反射镜膜面的散射光场。根据散射图样对反射镜进行筛选,并最终确定反射镜膜面的安装位置与方向。在某型激光陀螺上进行了实验,结果表明使用该方法选配可以将锁区合格率由原来的75%提升至95%,改进效果明显。该检测方法结构简单,可有效控制由反射镜散射引起的锁区超标问题,在激光陀螺反射镜的在线检测及激光陀螺装调方面有很好应用前景。     

塑封硅器件中介电薄膜的温湿效应分析

随着铜互连以及low-k电介质在超大规模集成电路中地广泛使用，low-k电介质的机械完整性及其对互连可靠性变得更加重要。影响介电膜的机械完整性和互连可靠性的因素包括介电膜的工艺制程，芯片与封装材料的相互影响，以及环境温度和湿度的影响。本文研究集中于了解环境温度和湿度对塑封硅器件中介电薄膜的可靠性影响。采用快速温度和湿度实验条件，对塑封硅器件中介电薄膜受水分和温度损伤的敏感性进行了分析。运用商业有限元（FEA）分析软件，对水分在塑封材料和硅器件中的扩散过程进行了建模及仔细分析。并对硅器件周边密封圈的防水分扩散效力进行了研究。通过这一系列实验与分析，对塑封硅器件中介电薄膜的温湿效应有了完整地了解，并提出和建立了相关的物理模型和经验公式。运用这物理模型和经验公式可对在各种使用环境温度和湿度条件下，塑封硅器件中介电薄膜的可靠性进行评估及分析。     

SPH固壁边界处理方法的改进

提出一种适用于光滑质点水动力学（SPH）方法的改进的边界处理方法。在这种方法中,边界粒子的压力可通过其周围的流体粒子的压力插值得到,从而改进了耦合边界法在边界上压力不准的问题。运用这种改进的边界处理方法模拟了二维方形水箱中的非线性晃荡问题以及二维楔形体自由入水问题。模拟结果与实验结果吻合较好,证明了此改进的边界处理方法是有效的。     

基于TDLAS的层析成像技术TDLAT

可调谐二极管吸收光谱技术（tunable diode laser absorption spectroscopy,TDLAS）已成为超声速燃烧的重要测量手段之一. 为提高其空间分辨能力,需发展基于TDLAS,结合层析成像术的二维断层成像术（tunablediode laser absorption tomography, TDLAT）. 设计了一套基于6 平行光束-旋转测量的新型TDLAT 系统,吸收波长为7 185.6 cm-1 和7 444.3 cm-1 双线,采用分时-直接吸收探测策略. 重建中,使用代数重建算法,先分别反演计算两吸收线的吸收率和吸收比分布,再获得温度和浓度分布. 利用该系统,在CH₄/Air 预混平面燃烧炉上开展初步验证试验. 结果表明,TDLAT 系统可以反演出温度和浓度分布特征,反演的温度分布结果与热电偶测量值吻合较好. 进一步改进该系统,可用于超燃直连台中,测量燃烧室出口气流的温度和组分浓度分布.      

水流损失和热补偿共同作用对增强型地热系统(EGS)产能影响的研究

基于青海共和盆地-3705m地热田实测数据,结合流固耦合传热理论并运用Comsol软件,建立了离散型裂隙岩体流体传热模型。考虑水流损失和热补偿共同作用,模拟得到了开采过程中上、下岩层(盖层和垫层)为绝热不渗透、传热不渗透、渗透传热时,储层(上、下岩层和压裂层)温度场的变化特征,分析了产出流量、水流损失、产出温度、产热速率的变化规律。研究结果表明:采热过程中产出流量始终小于注入流量;产出流量增幅速率先增大后减小,最后趋于稳定,前3a产出流量增幅超过总增幅量的3/4;忽略水流损失,将高估产热速率,采热初期甚至达到考虑水流损失时产热速率的3倍以上;考虑水流损失,产热速率呈先快速上升再趋于稳定后逐渐下降的趋势,最优开采时间为3a^11a;研究上、下岩层对产出温度的影响,仅考虑传热,采热寿命延长5.43%,同时考虑渗流传热时,采热寿命延长2.71%;采热前9a,水流损失占主导作用,即流入上、下岩层水流损失对产热速率的影响高于热补偿效应,开采10a后,热补偿效应占主导作用;同时考虑水流损失和热补偿效应得到的产热速率变化规律与实际工程更为符合,建议选择低渗透能力的上、下岩层延长增强型地热系统(EGS)运行时间。     

Quantitative law of diffusion induced fracture

Through dimension analysis, an almost analyt-ical model for the maximum diffusion induced stress (DIS) and critical temperature (or concentration) difference at which cracks begin to initiate in the diffusion process is devel-oped. It interestingly predicts that the spacing of diffusion-induced cracks is constant, independent of the thickness of specimen and the temperature difference. These conclusions are validated by our thermal shock experiments on alu-mina plates. Furthermore, the proposed model can interpret observed hierarchical crack patterns for high temperature jump cases, and a three-stage relation between the resid-ual strength and the temperature difference. The prediction for crack spacing can guide the biomimetic thermal-shock-failure proof design, in which the hard platelets smaller than the predicted diffusion induced by constant crack-spacing are embedded in a soft matrix, and, therefore, no fracture will happen. This may guide the design of the thermal protec-tion system and the lithium ion battery. Finally we present the maximum normalized DISes for various geometry and boundary conditions by single-variable curves for the stress-independent diffusion process and two-variable contour plots for the stress-dependent diffusion process, which can provide engineers and materialists a simple and easy way to quickly evaluate the reliability of related materials and devices.     

Conservative high precision pseudo arc-length method for strong discontinuity of detonation wave

A hyperbolic conservation equation can easily generate strong discontinuous solutions such as shock waves and contact discontinuity. By introducing the arc-length parameter, the pseudo arc-length method(PALM) smoothens the discontinuous solution in the arc-length space. This in turn weakens the singularity of the equation. To avoid constructing a high-order scheme directly in the deformed physical space, the entire calculation process is conducted in a uniform orthogonal arc-length space. Furthe...     

一种骨小管中液体流动产生的流量及切应力模型

骨组织受力变形后其内部液体就会流动,同时在其微观结构——骨单元壁中扩散,并进一步产生一系列与骨液流动相关的物理效应,如流体剪切应力、流动电位等,这些物理效应被细胞感知并做出破骨或成骨等反应,来使骨适应外部载荷环境.鉴于骨组织产生的内部液体流动很难实验测定,理论模拟是目前的主要研究手段.基于骨单元的多孔弹性性质建立了骨小管内部液体的流动模型,该模型将骨单元所受的外部载荷与骨小管内部液体的压力、流速、流量和切应力联系起来,并进一步可以研究其力传导与力电传导机制.骨小管模型的建立分别基于中空和考虑哈弗液体的骨单元模型,并考虑了骨单元外壁的弹性约束和刚性位移约束两种边界条件.最终得到骨单元在外部轴向载荷作用下,骨小管内部液体的流量及流体切应力的解析解.结果表明:骨小管中的液体流量与流体切应力都正比于应变载荷幅值和频率,并由载荷的应变率决定.因此应变率可以作为控制流量和流体切应力的一种生理载荷因素.流量随着骨小管半径的增大而非线性增大,而流体切应力则随着骨小管半径的增大而线性增大.此外,在相同的载荷下,含哈弗液体的骨单元的模型中,骨小管中液体的流量和切应力均大于中空骨单元模型.     

驱动电路一致性对光纤陀螺用SLD光源特性的影响

针对目前同批次驱动电路对同一光源控制效果存在差异的问题,开展器件一致性对光纤陀螺用SLD光源特性影响的研究,找到影响驱动电路一致性的关键部位,并提出解决方案,从而规范驱动电路制作过程。理论分析结果表明:造成温控电路差异的因素由大到小依次是惠斯通桥两臂电阻偏差、热敏电阻与同臂电阻偏差、正/负电源精度、运算放大器输入失调电压,以及积分电路的运放精度;造成恒流源电路差异的因素主要是指示器误差、驱动电流漂移误差和恒流源器件选配误差;通过采取元器件配对、调试、更换高精度器件等措施,可消除或大幅降低上述电路差异。试验结果证明,按照理论规范生产的驱动电路板一致性显著提高,可达到同类进口驱动电路的水平。     

Visual hull method for tomographic PIV measurement of flow around moving objects

Tomographic particle image velocimetry (PIV) is a recently developed method to measure three components of velocity within a volumetric space. We present a visual hull technique that automates identification and masking of discrete objects within the measurement volume, and we apply existing tomographic PIV reconstruction software to measure the velocity surrounding the objects. The technique is demonstrated by considering flow around falling bodies of different shape with Reynolds number?~1,000. Acquired image sets are processed using separate routines to reconstruct both the volumetric mask around the object and the surrounding tracer particles. After particle reconstruction, the reconstructed object mask is used to remove any ghost particles that otherwise appear within the object volume. Velocity vectors corresponding with fluid motion can then be determined up to the boundary of the visual hull without being contaminated or affected by the neighboring object velocity. Although the visual hull method is not meant for precise tracking of objects, the reconstructed object volumes nevertheless can be used to estimate the object location and orientation at each time step.     

Multi-scale analysis in elasto-viscoplasticity coupled with damage

The purpose of this study is to present a micromechanical approach, based on the transformation field analysis (TFA), proposed by Dvorak, which has been generalized at Onera in order to analyze the nonlinear behavior of heterogeneous materials in elasto-viscoplasticity coupled with damage. In such analysis, the macroscopic constitutive equations are not purely phenomenological but are built up from multi-scale approaches starting from the knowledge of the properties of the constituents at the microscopic or mesoscopic scales. The model can take into account some local characteristics that can evolve during the thermo-mechanical applied loads or the manufacturing process, like the grain size for metallic alloys or the fiber volume fraction for composites.The determination of some specific tensors which are present in this formulation is closely linked to the microstructure morphology of heterogeneous materials constituting the macroscopic structure. For example, an Eshelby’s based approach is more appropriate to characterize polycrystalline materials with a random microstructure, while the homogenization of periodic media technique can be used for composite materials with a sufficiently regular microstructure. The proposed methodologies allowing to perform this nonlinear analysis across the scales are illustrated with examples based on the behavior of structures reinforced with a long fiber unidirectional metal matrix composite.     

Numerical investigations of the vortex interactions for a flow over a pitching foil at different stages

The fluid–structure interaction is investigated numerically for a two-dimensional flow (Re=2.5·10⁶) over a sinusoid-pitching foil by the SST (Shear Stress Transport) k–ω model. Although discrepancies in the downstroke phase, which are also documented in other numerical studies, are observed by comparing with experimental results, our current numerical results are sufficient to predict the mean features and qualitative tendencies of the dynamic stall phenomenon. These discrepancies are evaluated carefully from the numerical and experimental viewpoints.In this study, we have utilized Λ, which is the normalized second invariant of the velocity gradient tensor, to present the evolution of the Leading Edge Vortex (LEV) and Trailing Edge Vortex (TEV). The convective, pressure, and diffusion terms during the dynamic stall process are discussed based on the transport equation of Λ. It is found that the pressure term dominates the rate of the change of the rotation strength inside the LEV. This trend can hardly be observed directly by using the vorticity transport equation due to the zero baroclinic term for the incompressible flow.The mechanisms to delay the stall are categorized based on the formation of the LEV. At the first stage before the formation of the LEV in the upper surface, the pitching foil provides extra momentum into the fluid flows to resist the flow separation, and hence the stall is delayed. At the second stage, a low-pressure area travels with the evolution of the LEV such that the lift still can be maintained. Three short periods at the second stage corresponds to different flow patterns during the dynamic stall, and these short periods can be distinguished according to the trend of the pressure variation inside the LEV. The lift stall occurs when a reverse flow from the lower surface is triggered during the shedding of the LEV. For a reduced frequency k_f=0.15, the formation of the TEV happens right after the lift stall, and the lift can drop dramatically. With a faster reduced frequency k_f=0.25, the shedding of the LEV is postponed into the downstroke, and the interaction between the LEV and TEV becomes weaker correspondingly. Thus, the lift drops more gently after the stall. In order to acquire more reliable numerical results within the downstroke phase, the Large Eddy Simulation (LES), which is capable of better predictions for the laminar-to-turbulent transition and flow reattachment process, will be considered as the future work.     

Creep performance of PVC aged at temperature relatively close to glass transition temperature

In order to predict the mechanical performance of the polyvinyl chloride(PVC) at a high operating temperature,a series of short-term tensile creep tests(onetenth of the physical aging time) of the PVC are carried out at 63 C with a small constant stress by a dynamic mechanical analyzer(DMA).The Struik-Kohlrausch(SK) formula and Struik shifting methods are used to describe these creep data for various physical aging time.A new phenomenological model based on the multiple relaxation mechanisms of an amorphous polymer is developed to quantitatively characterize the SK parameters(the initial creep compliance,the characteristic retardation time,and the shape factor) determined by the aging time.It is shown that the momentary creep compliance curve of the PVC at 63 C can be very well fitted by the SK formula for each aging time.However,the SK parameters for the creep curves are not constant during the aging process at the elevated temperatures,and the evolution of these parameters and the creep rate versus aging time curves at the double logarithmic coordinates have shown a nonlinear phenomenon.Moreover,the creep master curves obtained by the superposition with the Struik shifting methods are unsatisfactory in such a case.Finally,the predicted results calculated from the present model incorporating with the SK formula are in excellent agreement with the creep experimental data for the PVC isothermally aged at the temperature relatively close to the glass transition temperature.     

工艺过程对固体氧化物燃料电池材料力学性能的影响

固体氧化物燃料电池在生产过程中采用不同的加工手段,加工过程会产生一定的损伤,同时材料烧结过程产生比较大的残余应力,这些因素都会影响电池的使用寿命和完整性.本文通过实验测试,研究了不同加工过程对材料性能的影响,其中包括直接冲剪,激光切割以及切割后研磨等方法,并测试了这些加工手段对应的试件的强度.结果显示,直接冲剪法造成性能的分散性比较大,激光切割的性能较好,而研磨加工法对材料的性能影响最小;受残余应力或各层有效应力的作用,单层阳极材料的强度要高于双层电池结构材料的强度;利用弯曲法测试了半电池结构中的残余应力和不同薄膜对应的厚度残余应力,测试的结果和热弹性力学计算结果进行了对比.由于在高温时阳极材料有应力松弛现象,计算得出的残余应力高于实验测试结果.