介绍一个镀膜机真空系统操作训练软件

介绍了一个培训镀膜机操作人员的真空训练软件.     

介绍一个镀膜机真空系统操作训练软件

介绍了一个培训镀膜机操作人员的真空训练软件.     

全自动智能化计算机控制系统在真空离子镀膜机中的应用

本文介绍一种全自动、智能化计算机控制系统在真空离子镀膜机设备中的应用,可实现对真空离子镀膜机设备中各设备(泵阀机组、真空计、多路气路系统、电弧电源系统、偏压电源系统、溅射电源系统等)的全自动控制,实现对各种工件镀膜过程的装炉、自动抽气、镀膜、充气以及卸载工件等过程。     

真空溅射镀膜机中工作气体对镀件色差的影响

真空溅射镀膜机镀件的色差是衡量一件镀件质量好坏的重要的指标,也是评估一台设备质量的重要技术指标.影响镀件色差有多种因素,工作气体是其中一个重要因素.从真空溅射机的工作原理、工作气体对膜层的影响及试验研究入手,从气体压力和气体分布均匀性两个方面探讨了真空溅射机镀膜过程中工作气体对镀件色差的影响.为镀件色差分析、真空溅射镀...     

真空溅射镀膜机继电器-接触器控制系统的设计与研究

真空溅射镀膜技术及设备在当今和未来都拥有十分广阔的应用领域和发展前景。本文针对真空溅射镀膜机采用继电器-接触器的控制系统进行了设计与研究,对控制系统的工艺流程、要求、及控制过程进行了详细的分析和论述。本文对同类产品的设计与开发具有一定的指导作用,同时对一般的工业生产也具有较高的实用价值。     

PLC在多弧离子镀膜机系统中的应用研究

本文介绍了一种利用欧姆龙(OMRON)PLC作为主控设备对传统的手动MIPS-8型多弧离子镀膜机系统进行自动化改造的设计方法,阐述了控制系统硬件结构及软件的设计思想,在实际生产中,该自动化控制系统运行稳定可靠,并获得了良好的经济效益。     

LHD—800型多弧离子镀膜机复合热处理

LHD——800型多弧离子镀膜机是在真空环境中,采用蒸发源新技术,使钛等金属材料蒸发并电离,同时通入氮气,使它在等离子体环境中游离为正离子,然后靠电场力将这些离子加速并沉积在工件表面,化合为氧化钛硬质薄瑛。也可在较大型刀具,工模具表面离子氮化,离子茂膜(TIN)和离子渗镀—渗氮后再涂复一层氮化钛,对耐磨、耐腐蚀起到超硬膜的作用,以改善刀、模具性能,提高使用寿命。一、试验用设备试验用设备LHD—800型多弧离子镀膜机,性能如下。     

斩控式交流调压在卷绕式镀膜机中的应用

研究了一种基于DSP控制的斩控式交流调压电源.分析了其控制原理,设计了以TMS320F2812型DSP为核心的控制电路.介绍了电源的拓扑结构,主回路工作原理,硬件控制系统与控制软件的设计.该电源具有电压调节范围宽、功率因数高、谐波容易滤除等优点.实验结果验证了设计的正确性和有效性.     

MCGS组态软件在真空钽材退火炉中的应用研究

高温真空钽材退火炉是用来生产难熔金属钽的工业化批量生产专业设备。钽材退火是一道精细的冶金工艺,要求真空度、温度、时间三者之间精确配合,从而达到出炉产品的化学成分和物理性能指标满足要求。因此,就需要精确的自动控制系统对其进行几乎分毫不差的控制。该文研究设计了一种以MCGS触摸屏组态软件为核心,通过该软件内部程序控制温控表输出和PLC等硬件执行器的开关,从而达到工艺控制的自动化系统。根据现场使用情况分析,在应用了该套系统后,提高了使用厂家的生产效率和产品稳定性,保证了产品的成品率。     

Improved vacuum evaporation unit for beryllium coating for biological X-ray microanalysis

An improved vacuum evaporator is described for coating frozen-hydrated biological samples with beryllium for X-ray microanalysis. The evaporator permits repeated coatings without bringing the main chamber to atmospheric pressure and ambient temperature. The use of a glass sleeve in the evaporation chamber facilitates cleaning.     

真空镀膜技术的现状及发展

本文介绍了真空下各种镀膜技术的基本概念,讨论了各种镀膜装置的镀膜方式、特点和应用及真空镀膜技术的发展现状及趋势。     

一种实用化的光控自动真空镀膜机

采用分布式控制(DCS)的方法,用小型可编程逻辑控制器(PLC)替代中型PLC,提出了镀膜真空的13个子过程概念,实现了基于国产部件的真空过程自动化。以国产光控为核心,采用组态软件和控制软件结合的方法,通过经典和现代滤波技术,实现了光控自动判停,采用监控信号变化率dR/dt来控制薄膜的蒸发束率,制作了相应的分光膜和宽带增透膜,在低成本前提下提高了光学薄膜监控的精度。     

Real-time software methodologies: Are they suitable for developing Manufacturing control software?

Computer-Integrated Manufacturing (CIM) systems may be classified as real-time systems. Hence, the applicability of methodologies that are developed for specifying, designing, implementing, testing, and evolving real-time software is investigated in this article.The paper highlights the activities of the software development process. Among these activities, a great emphasis is placed on automating the software requirements specification activity, and a set of formal models and languages for specifying these requirements is presented. Moreover, a synopsis of the real-time software methodologies that have been implemented by the academic and industrial communities is presented together with a critique of the strengths and weaknesses of these methodologies.The possible use of the real-time methodologies in developing the control software of efficient and dependable manufacturing systems is explored. In these systems, efficiency is achieved by increasing the level of concurrency of the operations of a plan, and by scheduling the execution of these operations with the intent of maximizing the utilization of the devices of their systems. On the other hand, dependability requires monitoring the operations of these systems. This monitoring activity facilitates the detection of faults that may occur when executing the scheduled operations of a plan, recovering from these faults, and, whenever feasible, resuming the original schedule of the system.The paper concludes that the set of surveyed methodologies may be used to develop the real-time control software of efficient and dependable manufacturing systems. However, an integrated approach to planning, scheduling, and monitoring the operations of these systems will significantly enhance their utility, and no such approach is supported by any of these methodologies.     

一种电控式带紧急制动功能的真空助力器

提出一种新型机电一体化的带紧急制动功能的真空助力器,除具有传统真空助力器的功能外,在行驶中发现突发事件时真空助力器会提供更快的制动。通过缩短制动距离来保证驾乘人员及行人的人身安全、避免财产损失。     

真空镀膜领域射频叠加直流偏压技术研究

针对射频辉光放电过程中射频电源与直流偏压电源的叠加问题,通过分析阻抗匹配网络和高频屏蔽网络的工作原理,利用阻抗匹配网络将射频电源的高频能量最大效率的输出到真空室,利用高频屏蔽网络将射频电源的高频能量进行屏蔽的同时将直流偏压电源的低频能量最大效率的输出到真空室.对射频辉光放电过程中射频电源、直流偏压电源以及真空室模型进行了系统的电路仿真,实现了射频电源与直流偏压电源的叠加,利用自制的射频电源与直流偏压电源系统进行了真空镀膜实验,证实了双电源系统的可行性.研究结果表明,利用阻抗匹配网络和高频屏蔽网络能够很好地将射频电源与直流偏压电源进行叠加,由双电源系统产生的带有负偏压的高频能量能够对真空镀膜工艺产生影响,有助于探索新的镀膜工艺.     

An optical profilometer for characterizing complex surfaces under high vacuum conditions

The requirements for high precision metrology devices have increased rapidly in recent years. Furthermore, the applications are spreading to many new branches of science and technology. Hence new demands are appearing which are related not only to classical parameters such as precision and speed but also to other factors including the environment in which the measurements must be performed. In this paper we present a new device for measuring complex surface profiles of samples held under high vacuum conditions. The surface profile is obtained by scanning an optical sensor, held in air, across a standard view-port. The sensor has a lateral resolution of 25 m and a perpendicular distance resolution of 0.12 m over a range of 3 mm. The maximum scanning area is a circle, 30 mm in diameter. The device was developed to characterize silicon wafers for use as mirrors for atom optical applications. The mirrors are formed by bending the silicon under an applied electric field, which requires high vacuum conditions to prevent arc discharge. In the last part of the paper we discuss how simulations can be used to determine the required sampling grid spacing for obtaining the surface profile shape with a given accuracy.