获得2.9×10~(-10)Pa的三极溅射离子泵

我所为完成原第一机械工业部下达的７２１８１超高真空技术研究课题，研制了Ｌ－１００型三极溅计射离子泵。经试验、鉴定，该泵抽速为１６０Ｌ／ｓ，极限真空为２．９×１０－１０Ｐａ（ＳＧ－４型冷磁控极高真空测量），并成功地应用到为航天工业部某单位研制的ＪＷＺ－１００型静电支承仪表无油超高真空排气台上做为主泵。该排气台系统极限真空达到５．５×１０－８Ｐａ。     

兰州重离子冷却储存环10-10 Pa 大型超高真空系统

形成并成功地实施一套完整的超高真空获得方案,以满足兰州重离子加速器冷却储存环(HIRFL-CSL)6×10-9Pa超高真空度的要求.这套方案包括合理选择和配置真空排气系统及其他设备、合理选择材料、采用真空炉除气及在线烘烤等有效措施及大幅度降低材料出气率等.首先在样机上获得了5×10-10Pa的超高真空度,然后将样机的成功经验应用于HIR-FL-CSR大型超高真空系统.目前,已建成的各子系统真空度达到了(2×10-9～4×10-10)Pa.     

10^—10Pa溅射离子泵的研制

本文主要介绍１０－１０Ｐａ溅射离子泵的研制，提高极限真空和抽气速率的方法。     

超高真空的获得—泵与抽气系统

在“超高真空”历史发展的几十年间,技术和用户需求两方面都发生了许多变化。甚至超高真空的含义也有些演变。问题的焦点是：从如何获得只有泵壁出气气体负载的最低压强的静态真空转向如何获得生产过程气体低污染和高纯度的动态真空。现在,想用一种全能的泵来实现这一设想是不实际的,因为不同的真空抽气技术有着更明显的应用范围。这种情况对传统的超高真空泵－离子吸气砂来说是一样的。在大多数情况下,在设计系统时离子吸气泵是     

无油分子泵机组的组装

介绍了将ALCATEL公司生产的一台ATPl00涡轮分子泵、一台MDP50ll牵引分子泵及一台VRC公司生产的lBy6型干泵组装成无油分子泵机组的过程。文中给出了泵间配合的计算、机组方案的设计、连接管路、仪器支架的设计及选择。本机组所采取的设计方案使三个泵都最大限度地发挥了优点避免了缺陷，较好地满足了使用要求，为今后选购单泵和组装无油分子泵机组提供了可靠的理论和实验依据。     

低温水泵和分子泵组合替代低温泵的新设备

本文介绍了一种新型超高真空辅助设备－低温水泵，用之和分子泵组合，可以获得１０＾－８Ｐａ的清洁超高真空，用在半导体集成电路生产过程中，可以使产品质量以及生产效率均得到改善和提高，抽气机理以及设计要点均在文中有所论述。     

10—^10Pa测射离子泵的研制

本文介绍10－^10Pa溅射离子泵的研制，论述提高极限真空度和抽气速率的方法。     

全玻璃太阳集热管烘烤排气工艺采用复合分子泵抽高真空

采用复合分子泵替代油扩散泵进行全玻璃真空太阳集热管排气烘烤抽高真空试验。选用了三种型号分子泵,在集热管自动连续烘烤排气线上进行实验。经过约一年较长时间生产运行试验后,分子泵经受了190次以上的集热管管口破裂引起的大气冲击,没有损坏,抽真空性能无明显变化。采用分子泵烘烤排气工艺制备的集热管,按国标在温度350℃,48 h高温老化试验后,吸气剂镜面消失率约为5%,仅为国标规定值的10%。     

罗茨真空泵的最大允许压差和溢流阀压差

文章分析了影响提高罗茨真空泵最大允许压差因素，提出了解决方法。介绍了带溢流阀罗茨泵的特点和溢流阀压差的试验方法，明确提出应对带溢流阀罗茨泵考核溢流阀压差。     

采用流量计测量复合分子泵抽速装置研制

本工作研制了一台采用流量计测量复合分子泵抽速的装置.本装置由测试台车、机柜、计算机自动控制和数据采集处理系统三部分组成.选用3个高精度流量计,满量程分别为1000 sccm、100 sccm和10 sccm,并联组成流量计组件用于测量输入气体的流量,选用高精度的复合真空计测量真空测试罩内气压.抽速测试结果显示,一台1200 L/s的复合分子泵N2抽速重复测量5次,14个气压测试点对应的抽速的最大相对标准偏差小于2％,重复性好.抽速测量的误差主要由流量计和真空计的系统误差决定.采用流量计测量一台分子泵在气压2.00×10-3 Pa～2.00 Pa范围的抽速,测量时间20 min以内.     

INRIM continuous expansion system as high vacuum primary standard for gas pressure measurements below 9 × 10 Pa

The continuous expansion system can be considered the state of the art for pressure measurement in the ultra high vacuum range. In the last years, at INRIM, a new continuous expansion system was designed, assembled and characterized. The system is the high vacuum primary standard in the pressure range from 1 × 10⁻⁶ Pa to 9 × 10⁻² Pa with relative standard uncertainty ranging from 2.1% at 1 × 10⁻⁶ Pa down to 0.4% at 9 × 10⁻² Pa. The system is based on the passing of a measured gas flow through a fixed and known conductance. The gas flow is generated and measured by a primary gas flowmeter based on the constant-pressure-variable-volume method.In the first part of the paper both a correction for the effect of transitional flow through the orifice and a new analytical evaluation of orifice conductance are presented. In the second part the accuracy of the system and the pressure uncertainty evaluation are described.     

Dynamic extension - A new principle for a vacuum primary standard for UHV-range (10-10 Pa) calibration of hot cathode ionisation gauges

The main obstacle in the construction of primary vacuum standards for very low pressures - ultra-high vacuum (UHV) - is outgassing from the walls of the apparatus. Thus, principles utilising a higher pumping rate in the calibration chamber, e.g., the pressure ratio technique, seem to be more useful for this range. However, a serious problem is inherent in this method, namely, that the gas in the calibration chamber is not in equilibrium and thus cannot be characterised by a single scalar pressure value, although such a value is then used to evaluate the measurement. This discrepancy can be overcome by using a hot cathode ionisation gauge as a transfer standard calibrated by the dynamic extension method.The dynamic extension method is explained and compared with the pressure ratio technique. The basic conditions for achieving acceptable uncertainty values are considered.     

偏心圆弧罗茨转子型线的研究

罗茨真空泵的转子型线有很多种。本文主要介绍一种国内未见使用的新型转子型线——偏心圆弧转子型线。实际上，偏心圆弧转子型线在国外已有提出，只是由于计算困难等原因，这种型线没有在国内得到应用。本文对该种型线进行了设计研究并予以完善，该型线的众多优点也即显示出来，希望能够供同行参考。     

油扩散泵的现状及发展

对国内外油扩散泵的主要性能及现状作了比较，初步分析出存在的差距，提出了今后泵的发展趋势。     

从第十届国际真空展看真空行业发展

根据多次真空展的统计数据,总结出第10届国际真空展的四大亮点:参展厂商数及参展外商数、展位数均创历史新高;干泵成展会主角;流通、服务业方兴未艾,国内参展厂商高端产品比重增加.通过参展,作者认为:应从新能源开发,在新一轮产业革命中寻求真空行业发展的新机遇.     

重离子深层治癌束运线极高、超高真空系统压力分布与受力分析研究

重离子深层治癌柬运线真空系统与兰州重离子加速器冷却储存环（HIRFL—CSR）相连接,要求极高、超高真空度。本文介绍了深层治癌线真空系统的布局;根据极高和超高真空段不同的气载和有效抽速进行了系统的压力分布计算;对真空室在常温和烘烤状态下的应力和变形进行了分析;通过系统的实验测试,验证了计算数据。     

Comparison of the heating performance of air-source heat pumps using various types of refrigerant injection

The performance degradation of air-source heat pumps cannot be avoided when they operate at both very low and high ambient temperatures. The refrigerant injection technique has rapidly developed in recent years due to its outstanding performance at low ambient temperatures. This study measured the heating performance of air-source heat pumps in which novel vapor injection techniques of a combined flash tank and sub-cooler (FTSC) cycle and a double expansion sub-cooler (DESC) cycle were applied. The performance of these cycles was compared with that of a flash tank (FT) and a sub-cooler (SC) cycle. The average heating capacities of the FT, FTSC, and DESC cycles were higher by 14.4%, 6.0%, and 3.8%, respectively, relative to that of the SC cycle, but the average COPs for the respective cycle options were very similar.