基于微力传感的扫描近场声显微镜

描述了一种用于检测超精表面形貌的扫描近场声显微镜 (SNAM )。以谐振频率为 1MHz的未封装伸长型晶振作为微力传感器逼近样品表面 ,在此过程中晶振受到流体阻尼 ,其振动特性发生变化 ,通过检测振动幅值的变化即可获得样品表面形貌信息。在分析SNAM检测机理的基础上设计了SNAM系统 ,测量时的垂直分辨率可达到纳米级     

分焦平面红外偏振微扫描图像超分辨重建

分焦平面偏振探测系统受其探测器结构的影响,成像分辨率低于探测器实际分辨率,本文在不改变光学系统结构下使用微扫描获取亚像元微位移帧序列,提出一种改进的凸集投影(Projection On Convex Sets, POCS)算法用于提升偏振成像系统的成像分辨率。该算法首先对获取到的偏振微扫描图像序列进行检偏角分离,将同组检偏角图像序列作为输入,其次进行位移匹配与凸集投影迭代初步重建高分辨率图像,然后将图像分组进行滑动窗口非邻域聚类,利用主成分分析将聚类后的图像进行降维,最后将每一维信息视为时间采样函数,在小波域进行软阈值降噪。实验表明,本算法可以有效的提高传统POCS算法的抗噪性能,提高分焦平面偏振探测系统的成像分辨率,和同类算法相比结构相似性系数提升0.02,峰值信噪比提升约1 dB,并且拥有更高的噪声鲁棒性。     

微腔对有机发光的影响的研究

利用介质膜反射镜,在光泵浦有机小分子薄膜微腔的研究中,观察到了谱线窄化、峰值强度增强、方向性集中于腔轴、控制发射波长和荧光寿命的缩短等一系列腔效应.其中用软膜反射镜,消除了镀制过程中热辐射对有机发光材料的影响,谱线半宽最窄达3.4nm,窄化了25倍;峰值强度最大增强了16倍.     

微腔对有机发光的影响的研究

利用介质膜反射镜,在光泵浦有机小分子薄膜微腔的研究中,观察到了谱线窄化、峰值强度增强、方向性集中于腔轴、控制发射波长和荧光寿命的缩短等一系列腔效应.其中用软膜反射镜,消除了镀制过程中热辐射对有机发光材料的影响,谱线半宽最窄达3.4nm,窄化了25倍;峰值强度最大增强了16倍.     

微腔对有机发光的影响的研究

利用介质膜反射镜 ,在光泵浦有机小分子薄膜微腔的研究中 ,观察到了谱线窄化、峰值强度增强、方向性集中于腔轴、控制发射波长和荧光寿命的缩短等一系列腔效应。其中用软膜反射镜 ,消除了镀制过程中热辐射对有机发光材料的影响 ,谱线半宽最窄达3.4nm,窄化了 2 5倍 ;峰值强度最大增强了 1 6倍。     

一种高稳定低电压扫描隧道显微镜镜体结构

本文报告了一种高稳定的扫描隧道显微镜镜体结构.该镜体结构融入了多项提高稳定性和成像精度的考虑:(1)镜体被设计成了高中心对称结构;(2)粗逼近马达(竖直安置的压电惯性马达)和扫描结构被设计成互相独立,使得粗逼近马达的不稳定性不会传递到扫描结构中去;(3)粗逼近马达的向上步进被设计成了由压电体更有力的伸长形变(而非驱动力较小的收缩形变)来驱动,以降低控制电压(从而改善电子学噪声与精度),实现了首个＜18V低电压竖直步进STM;(4)扫描结构被设计成小型,且由热膨胀系数较小且相近的蓝宝石和高纯钛按热膨胀并行相消来设计;(5)粗逼近马达的步进由高抛光的蓝宝石珠在高抛光的蓝宝石棒导轨上的滑动实现,从而在不增加摩擦力阻力的条件下(利于实现低电压STM)可大大增加镜体刚性,减少漂移.该扫描隧道显微镜的性能测试由其所成的清晰原子分辨率图像(室温大气环境中的石墨样品成像)得到展示.     

压电微音叉扫描探针显微镜测头研究

压电微音叉具有良好的谐振特性，并易于实现其振动的检测。利用这些特性，与钨探针结合，构成了一种新型的表面轮廓扫描测头。该新型测头与X-Y压电工作台结合，采用与TM-AFM相同的工作原理，构成了扫描探针显微镜。介绍了压电微音叉扫描测头的构成、工作原理及主要特性，给出了所构成的扫描探针显微镜测量系统。通过实验及其结果，证明了新型测头具有高垂直分辨率、低破坏力等优点。除此之外，由于采用了有效长度大的钨探针，使大台阶微观表面的测量成为可能。     

依靠自主技术的OLED大规模生产线投产

我国第一条自主设计建设OLED（有机发光显示器）大规模生产线日前在江苏昆山投产。这是我国在显示产业领域第一次依靠自主掌握的技术实现大规模生产,标志着我国在新型平板显示技术领域取得重大突破。     

用扫描隧道显微技术实现原子识别的原理初探

本文阐述用扫描探针显微技术获取样品表面功函数、局域态密度以及原子表观半径的基本理论和方法,提出了根据这些表面信息进行原子识别的基本思想。     

Development of a fast atom beam gun for surface-activated bonding

Surface-activated bonding (SAB), also called room-temperature bonding, is used in three-dimensional integration technology for semiconductor devices. An Ar fast atom beam (FAB) is used for SAB. However, conventional FAB guns must be replaced after hundreds of minutes of irradiation because carbon abrasion powders are generated by Ar ions sputtering in the gun. Therefore, this study develops a novel FAB gun with improved lifetime. The proposed FAB gun applies magnetic fields to guide Ar ions to reduce sputtering in the gun and improve irradiation efficiency. The proposed FAB gun indicates the possibility of improving gun lifetime.     

固态体积式真三维立体显示发光二极管投影光源

针对固态体积式真三维立体显示对高亮度和色温可调的要求,设计了采用大功率、单芯片发光二极管(LED)的投影光源。理论计算了投影光源的亮度,结合液晶光阀对不同波长透过率的影响,对理论设计结果进行了修正。考虑寿命、散热等影响因素,提出了采用大功率红绿蓝LED加白光LED的投影光源方案。针对选取的LED发光特性,采用混合集光方法设计了准直器,并进行了仿真和实际测试。测试结果表明:采用准直器后,LED的发散角从±75°减小为±20°。搭建了真三维显示系统样机,测试其屏前亮度达到149cd/m2,且无闪烁,立体感强,但存在视角较小的问题。实验显示,设计的投影光源满足固态体积式真三维立体显示的要求。     

Temperature analysis for optimizing the configuration of the linear cell

The market demand of display devices is drastically increasing in the information technology age. The research on OLED (Organic Light Emitting Diodes) display with the luminescence in itself is being more paid attention than LCD (Liquid Crystal display) with the light source from the back. The vapor deposition process is most essential in manufacturing OLED display. The temperature distribution of the linear cell in this process is closely related to securing the uniformity of organic materials on the substrate. This work analyzed the temperature distribution depending on the intervals between the crucible and the heating band as well as on the amount of the heat flux from the heating band. Moreover, the roles of the water jacket and the configuration of the cover within the linear cell were examined through the temperature analysis for six configurations of the linear cell. Under the above temperature analysis, the variations in the intervals and the amount of the heat flux were considered to have an effect on building the uniform temperature distribution within the crucible. It is predicted that the water jacket and the adequate configuration of the cover will prevent the blowout and clogging phenomena, respectively. The results can be used as the fundamental data for designing the optimal linear cell.     

Optimization of pulsed laser atom probe (PLAP) for the analysis of nanocomposite Ti–Si–N films

Laser-assisted atom probe tomography was used to investigate the nanostructure and composition of high-performance, ultra-hard Ti–Si–N nanocomposite films. However, the quality of data is heavily dependent on analysis conditions. In order to obtain reliable data from these, and other ‘less conducting’ specimens, the analysis parameter space was thoroughly investigated to optimize the mass resolution and hit multiplicity obtained in atom probe tomography. Geometric factors including tip radius and shank angle were found to play a significant role in mass resolution but had no apparent effect on the number of multiple hits observed. Increased laser energy led to a gradual increase in the number of single hits, but a modest improvement in mass resolution. The influence of other instrumental factors including detection rate and base temperature was investigated separately. Preliminary PLAP results are presented, and correlated with TEM analysis of the microstructure of the film.     

Temperature analysis for the point-cell source in the vapor deposition process

The information indicating device plays an important part in the information times. Recently, the classical CRT (Cathod Ray Tube) display is getting transferred to the LCD (Liquid Crystal Display) one which is a kind of the FPDs (Flat Panel Displays). The OLED (Organic Light Emitting Diodes) display of the FPDs has many advantages for the low power consumption, the luminescence in itself, the light weight, the thin thickness, the wide view angle, the fast response and so on as compared with the LCD one. The OLED has lately attracted considerable attention as the next generation device for the information indicators. And also it has already been applied for the outside panel of a mobile phone, and its demand will be gradually increased in the various fields. It is manufactured by the vapor deposition method in the vacuum state, and the uniformity of thin film on the substrate depends on the temperature distribution in the point-cell source. This paper describes the basic concepts that are obtained to design the point-cell source using the computational temperature analysis. The grids are generated using the module of AUTOHEXA in the ICEM CFD program and the temperature distributions are numerically obtained using the STAR-CD program. The temperature profiles are calculated for four cases, i.e., the charge rate for the source in the crucible, the ratio of diameter to height of the crucible, the ratio of interval to height of the heating bands, and the geometry modification for the basic crucible. As a result, the blowout phenomenon can be shown when the charge rate for the source increases. The temperature variation in the radial direction is decreased as the ratio of diameter to height is decreased and it is suggested that the thin film thickness can be uniformed. In case of using one heating band, the blowout can be shown as the higher temperature distribution in the center part of the source, and the clogging can appear in the top end of the crucible in the lower temperature. The phenomena of both the blowout and the clogging in the modified crucible with the nozzle-diffuser can be prevented because the temperature in the upper part of the crucible is higher than that of other parts and the temperature variation in the radial direction becomes small.     

Characterization of dilute species within CVD‐grown silicon nanowires doped using trimethylboron: protected lift‐out specimen preparation for atom probe tomography

Three‐dimensional quantitative compositional analysis of nanowires is a challenge for standard techniques such as secondary ion mass spectrometry because of specimen size and geometry considerations; however, it is precisely the size and geometry of nanowires that makes them attractive candidates for analysis via atom probe tomography. The resulting boron composition of various trimethylboron vapour–liquid–solid grown silicon nanowires were measured both with time‐of‐flight secondary ion mass spectrometry and pulsed‐laser atom probe tomography. Both characterization techniques yielded similar results for relative composition. Specialized specimen preparation for pulsed‐laser atom probe tomography was utilized and is described in detail whereby individual silicon nanowires are first protected, then lifted out, trimmed, and finally wet etched to remove the protective layer for subsequent three‐dimensional analysis.