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本文应用透射电子显微镜,X射线衍射等手段研究了Cu-Ti合金时效相变早期的分解过程。研究了表明,过饱和的Cu-Ti合金固溶体可能首先发生的是溶质原子的短程有序化,然后通过调发解机理分解为贫富溶质区,富溶质区原子进行长程有序排列,形成了D1a型的CuTi有序相。 相似文献
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低碳钢表面激光相变硬化研究 总被引:3,自引:2,他引:1
为了研究不同激光功率及不同的冷却条件下,激光相变硬化处理对低碳钢表面性能和组织的影响,采用激光表面相变硬化方法,在低碳钢表面获得了比原先母材硬度高100HV~150HV的硬化层,采用金相显微镜分析了激光处理区的组织,且用显微硬度计测量了单道扫描时的纵向和横向的硬度分布.研究发现,激光作用区主要是低碳板条马氏体与未转变的索氏体甚至屈氏体、回火索氏体组织.搭接区组织均为细小的马氏体及中间分布着索氏体组织;由于10CrNiMo钢含碳量较低和碳扩散系数不同的原因,其最高硬度层并未在表面形成,而是形成在次表层.在软化区,前一道扫描形成的马氏体受到回火作用,原先固溶在马氏体中的碳析出,形成了回火索氏体,降低了硬度.结果表明,激光相变硬化工艺可以将10CrNiMo钢的表面硬度提高100HV~150HV左右,且表面保持很好的韧性,若想进一步提高其表面硬度,还需采取熔覆等其它工艺. 相似文献
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本文用TEM确定了Cu—Ni—Be合金时效时G·P区和γ’析出相(NiBe)是合金硬度、电导率变化的重要原因,同时确立了NiBe与母相之间的相位关系:(110)_P//(100)_M,[001]_P//[001]_M;惯析面为[001]。 相似文献
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ZnAl40合金时效过程中组织结构变化的跟踪观察 总被引:1,自引:0,他引:1
本文利用扫描电子显微术(SEM),透射电子显微术(TEM)及X射线衍射(XRD)研究了ZnAl40合金在固溶时效过程中的组织结构变化,结果表明,在时效过程中,过饱和固溶体将发生不连续沉淀反应及调幅(Spinodal)分解,不连续沉淀机制形成的胞状(Cellular)组织α η-Zn通过晶界迁移长入已发生Spinodal分解的基体,环境温度下时效,调幅组织将逐渐粗化,形成较细的的粒状亚稳R组织,且调幅分解区与胞状分解区交界处更易粗化。由于析出η-Zn相,过饱和固溶体的点阵参数将增加。 相似文献
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利用硬度测试和透射电子显微镜观察,对Cu含量分别为0.0%、0.15%、0.8%(wt.%)的AlMgSi合金进行了较系统地显微组织结构和时效硬化行为研究。热处理状态为固溶淬火后直接180℃人工时效及固溶淬火后自然时效两周再180℃人工时效。结果表明:添加Cu可以抑制自然时效对180℃人工时效硬度峰值的负面作用;与固溶淬火后先自然时效两周再180℃人工时效峰值样品比较,固溶淬火后直接180℃人工时效峰值样品中针状析出相的数量密度较大;含0.15%Cu的合金峰值时效样品中只观察到β″析出相,而含0.8%Cu的合金峰值时效样品中观察到β″和Q″析出相;与不含Cu和含0.15%Cu的合金比较,含0.8%Cu的合金时效峰值出现时间延迟。这种现象与Q″相的析出有关,因为析出Q″相需要额外的时效时间。 相似文献
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激光相变硬化性能与工艺参数关系的数学模型 总被引:1,自引:0,他引:1
用回归正文分析的方法.建立了中碳结构钢、碳素工具钢和合金结构钢的激光相变硬化性能与工艺参数间关系的数学模型。分析了回归力程的显著性并预测了各硬化指标的精度。 相似文献
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采用直流磁控溅射法分别将Cu (Ti)和Cu (Cr)合金层沉积在SiO2/Si衬底上,随后将制得的样品在真空(2×10-3 Pa)中退火1h,退火温度为300 ~ 700℃.对Cu (Ti)及Cu (Cr)自形成阻挡层进行对比研究,通过X射线衍射(XRD)、X射线光电子能谱(XPS)和透射电子显微镜(TEM)观察并表征样品的微观结构.通过半导体分析仪测试样品的电学性能,并分析了其热稳定性.结果表明,在Cu膜中分别加入少量的Ti或Cr可使Cu沿〈111〉晶向择优取向生长.两种样品交界面处的Cu及Si元素含量迅速下降,表明在交界面处自形成阻挡层,抑制了Cu与Si元素之间的扩散.Cu (Ti) /SiO2/Si和Cu (Cr) /SiO2/Si样品漏电流测试结果表明,Cr自形成的阻挡层具有更好的热稳定性. 相似文献
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S. Tsukimoto T. Morita M. Moriyama Kazuhiro Ito Masanori Murakami 《Journal of Electronic Materials》2005,34(5):592-599
In order to study a formation mechanism of thin Ti-rich layers formed on the surfaces of Cu(Ti) wires after annealing at elevated
temperatures, the 300-nm-thick Cu(Ti) alloy films with Ti concentration of 1.3 at.% or 2.9 at.% were prepared on the SiO2/Si substrates by a co-sputter deposition technique. The electrical resistivity and microstructural analysis of these alloy
films were carried out before and after annealing at 400°C. The Ti-rich layers with thickness of ∼15 nm were observed to form
uniformly both at the film surface and the substrate interfaces in the Cu(2.9at.%Ti) films after annealing (which we call
the self-formation of the layers) using Rutherford backscattering spectrometry (RBS) and transmission electron microscopy
(TEM). Both the resistivities and the microstructures of these Cu(Ti) films were found to depend strongly on the Ti concentrations.
The resistivities of the films decreased upon annealing due to segregation of the supersaturated Ti solutes in the alloy films
to both the top and bottom of the films. These Ti layers had excellent thermal stability and would be applicable to the self-formed
diffusion barrier in Cu interconnects of highly integrated devices. The selection rules of the alloy elements for the barrier
self-formation were proposed based on the present results. 相似文献
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In our previous studies, thin Ti-rich layers were found to uniformly cover SiO2/Si substrate surfaces at the interface with Cu(Ti) alloy films after annealing at elevated temperature. These Ti-rich layers
were also found to prevent intermixing between the Cu(Ti) alloy films and the substrate, resulting in a simple barrier formation
technique, called “self-formation of the diffusion barrier,” which is attractive for fabrication of ultra-large scale integrated
(ULSI) interconnect structures. In the present study, to understand the mechanism of self-formation of the Ti-rich barrier
layers on the substrate surface, the effects of SiO2/Si, SiN/SiO2/Si and NaCl substrate materials on the interfacial microstructure were investigated. The microstructures were analyzed by
transmission electron microscopy (TEM) and secondary ion mass spectrometry (SIMS), and correlated with the electrical properties
of the Cu(Ti) interconnects. It was concluded that the chemical reaction of Ti with the substrate materials was essential
for the self-formation of the Ti-rich layers. 相似文献
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Kazuyuki Kohama Kazuhiro Ito Susumu Tsukimoto Kenichi Mori Kazuyoshi Maekawa Masanori Murakami 《Journal of Electronic Materials》2008,37(8):1148-1157
In our previous studies, thin Ti-rich diffusion barrier layers were found to be formed at the interface between Cu(Ti) films
and SiO2/Si substrates after annealing at elevated temperatures. This technique was called self-formation of the diffusion barrier,
and is attractive for fabrication of ultralarge-scale integrated (ULSI) interconnects. In the present study, we investigated
the applicability of this technique to Cu(Ti) alloy films which were deposited on low dielectric constant (low-k) materials (SiO
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C
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), SiCO, and SiCN dielectric layers, which are potential dielectric layers for future ULSI Si devices. The microstructures
were analyzed by transmission electron microscopy (TEM) and secondary-ion mass spectrometry (SIMS), and correlated with the
electrical properties of the Cu(Ti) films. It was concluded that the Ti-rich interface layers were formed in all the Cu(Ti)/dielectric-layer
samples. The primary factor to control the composition of the self-formed Ti-rich interface layers was the C concentration
in the dielectric layers rather than the enthalpy of formation of the Ti compounds (TiC, TiSi, and TiN). Crystalline TiC was
formed on the dielectric layers with a C concentration higher than 17 at.%. 相似文献
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TiNi合金相变的原位观察 总被引:1,自引:0,他引:1
本文利用透射电镜原位观察研究TiNi合金中的相变。研究表明,TiNi合金中电子衍射谱上的漫散射条纹的出现是由于具有<111>极化的声子模软化,经张应有利于R相及马氏体相形核有关的软模。 相似文献
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Kazuyuki Kohama Kazuhiro Ito Kenichi Mori Kazuyoshi Maekawa Yasuharu Shirai Masanori Murakami 《Journal of Electronic Materials》2009,38(9):1913-1920
A new fabrication technique to prepare ultrathin barrier layers for nanoscale Cu wires was proposed in our previous studies.
Ti-rich layers formed at Cu(Ti)/dielectric layer interfaces consisted of crystalline TiC or TiSi and amorphous Ti oxides.
The primary control factor for the Ti-rich interface layer composition was C concentration in the dielectric layers rather
than the formation enthalpy of the Ti compounds. To investigate Ti-rich interface layer growth in Cu(Ti)/dielectric layer
samples annealed in ultrahigh vacuum, Rutherford backscattering spectrometry (RBS) was employed in the present study. Ti peaks
were obtained only at the interfaces for all samples. Molar amounts of Ti atoms segregated to the interfaces (n) were estimated from Ti peak areas. Log n values were proportional to log t values. Slopes were similar for all samples, suggesting similar growth mechanisms. The activation energy (E) for Ti atoms reacting with the dielectric layers containing carbon (except SiO2) tended to decrease with decreasing C concentration (decreasing k), while those for the SiO2 layers were much higher. Reaction rate coefficients [Z · exp(−E/RT)] were insensitive to C concentration in the dielectric layers. These factors lead to the conclusion that growth of the Ti-rich
interface layers is controlled by chemical reactions, represented by the Z and E values, of the Ti atoms with the dielectric layers, although there are a few diffusion processes possible. 相似文献