半导体制造过程中的先进控制技术

随着晶圆日趋增大和关键尺寸的不断缩小,半导体制造过程的质量实时控制变得越来越重要。在分析半导体制造过程的动态特性、模型辨识、扰动来源及特征、量测方法及控制要求的基础上,从机台级控制、产品级控制和厂级控制三个方面综合评价了目前可用的控制技术以及各类Run-to-run算法设计及特点。最后指出了半导体制造过程在量测、建模和控制设计等方面所取得的研究进展以及面临的挑战性问题。     

Data Mining using Genetic Programming for Construction of a Semiconductor Manufacturing Yield Rate Prediction System

The complexity of semiconductor manufacturing is increasing due to the smaller feature sizes, greater number of layers, and existing process reentry characteristics. As a result, it is difficult to manage and clarify responsibility for low yields in specific products. This paper presents a comprehensive data mining method for predicting and classifying the product yields in semiconductor manufacturing processes. A genetic programming (GP) approach, capable of constructing a yield prediction system and performing automatic discovery of the significant factors that might cause low yield, is presented. Comparison with the results then is performed using a decision tree induction algorithm. Moreover, this research illustrates the robustness and effectiveness of this method using a well-known DRAM fab’s real data set, with discussion of the results. Received: November 2004 / Accepted: September 2005     

Evaluation of mixed‐model U‐line operational designs

Often in lean manufacturing, multiple products are produced in U‐shaped manufacturing cells to simultaneously achieve product variety and production efficiency. We examine two design issues for mixed‐model U‐lines: work rules (a first‐come‐first‐serve rule and a crossover‐and‐return rule) and inventory flow choices (direct flow and buffered flow). Simulation results indicated that throughput and labor utilization can be improved by implementing a “buffer” with the first‐come‐first‐serve rule. Interestingly, the effectiveness of an inventory flow choice was dependent on the work rule (interaction effect), and relationships among performance dimensions differed across the designs.     

High‐contrast driving method for advanced CEL structure with magnesium oxide single‐crystal powder in ACPDP

Abstract— A new driving method for an advanced‐CEL‐structure panel has been developed. Picture qualities have been upgraded. Discharge time lags are drastically shortened by priming electron emission from magnesium oxide (MgO) single‐crystal powder, refered to as a crystal emissive layer (CEL). The advanced‐CEL‐structure panel has CEL material on the surface of not only the surface‐discharge‐electrode side but also on the address‐electrode side. This panel structure enables a stable opposed discharge when the address electrode functions as a cathode. By utilizing the opposed discharges in the reset and LSB‐SF sustain periods, the dark‐room contrast ratio has been drastically increased to over 20,000:1, which is higher than five times that of the conventional method, and the luminance of the least‐significant‐bit sub‐field (LSB‐SF) is as low as 0.1 cd/m², which is one‐fourth that of the conventional method. The high‐picture‐quality PDP TVs refered to as “KURO” that employs these technologies have been introduced into the marketplace.     

Low‐temperature amorphous‐silicon backplane technology development for flexible displays in a manufacturing pilot‐line environment

Abstract— A low‐temperature amorphous‐silicon (a‐Si:H) thin‐film‐transistor (TFT) backplane technology for high‐information‐content flexible displays has been developed. Backplanes were integrated with frontplane technologies to produce high‐performance active‐matrix reflective electrophoretic ink, reflective cholesteric liquid crystal and emissive OLED flexible‐display technology demonstrators (TDs). Backplanes up to 4 in. on the diagonal have been fabricated on a 6‐in. wafer‐scale pilot line. The critical steps in the evolution of backplane technology, from qualification of baseline low‐temperature (180°C) a‐Si:H process on the 6‐in. line with rigid substrates, to transferring the process to flexible plastic and flexible stainless‐steel substrates, to form factor scale‐up of the TFT arrays, and finally manufacturing scale‐up to a Gen 2 (370 × 470 mm) display‐scale pilot line, will be reviewed.     

Studies on a LaF3‐coated MgO protecting layer in AC‐plasma‐display panels

A new protecting layer, a LaF₃‐coated MgO layer, in color AC‐plasma‐display panels (PDPs) was studied in order to overcome the weakness of the conventional single MgO protecting layer. The material characteristics of the new layer were examined by using variations in the deposition process. The display characteristics were also examined by implementing their processes to actual PDPs. It was demonstrated that this method is effective in lowering the firing and sustaining voltages of PDPs and enhancing the brightness of the panel as well.     

Large‐area spatial atomic layer deposition of amorphous oxide semiconductors at atmospheric pressure

Indium gallium zinc oxide (IGZO) is deposited using plasma‐enhanced spatial atomic layer deposition (sALD) on substrates as large as 32 × 35 cm². Excellent uniformity and thickness control leads to high‐performing and stable coplanar top‐gate self‐aligned (SA) thin‐film transistors (TFTs). The integration of a sALD‐deposited aluminum oxide buffer layer into the TFT stack further improves uniformity and stability. The results demonstrate the viability of atmospheric sALD as a novel deposition technique for the flat‐panel display industry.     

The impact of multi‐group multi‐layer network structure on the performance of distributed consensus building strategies

We consider a structural approach to the consensus building problem in multi‐group multi‐layer (MGML) distributed sensor networks (DSNs) common in many natural and engineering applications. From among the possible network structures, we focus on bipartite graph structure as it represents a typical MGML structure and has a wide applicability in the real world. We establish exact conditions for consensus and derive a precise relationship between the consensus value and the degree distribution of nodes in a bipartite MGML DSN. We also demonstrate that for subclasses of connectivity patterns, convergence time and simple characteristics of network topology can be captured by explicit algebra. Direct inference of the convergence behavior of consensus strategies from MGML DSN structure is the main contribution of this paper. The insights gained from our analysis facilitate the design and development of large‐scale DSNs that meet specific performance criteria. Copyright © 2012 John Wiley & Sons, Ltd.     

A Class of Cross‐Layer Optimization Design for Congestion and Energy Efficiency with Compressed Sensing in Wireless Sensing Networks

In wireless sensor networks (WSNs), the congestion problem not only causes packet loss, but also leads to an increase in delays and energy consumption. The actual performance of wireless sensor networks (WSNs) can be severely influenced by the quality of the communication channel and the bit in transmission. In this paper, the distributed protocols, which attain global optimum control for signals by the compressed sensing technique and achieve fair channel allocation by the scheduling algorithm, are proposed for WSNs. We take into account the congestion problem by robust optimization with congestion ratio for two classic aspects in energy limited WSNs: minimum transmission rate and maximum transmitted information. To achieve the goal, three protocols are developed. In the first protocol, the desired control input is designed based on the compressed sensing technique. A minimal bit of signal is provided to reduce the transmission flow for the congestion model. The second protocol is resource allocation. The resources can be allocated increasingly to the channel in order to avoid more severe congestion. This can also avoid conservative reduction of resource allocation for eliminating congestion. Channel selection abides by the fair resource allocation principle. The above protocols separately are implemented through a congestion ratio at network layer, transport layer, and MAC layer. Simulation results demonstrate that the proposed algorithm effectively relieves congestion, and achieves higher throughput and lower energy consumption.     

Multi‐Criteria Usability Evaluation of Electronic Devices in a Fuzzy Environment

The user‐oriented design is the most important competition issue in today's market. In recent years, user‐oriented design (i.e., usability) has become expected, particularly in electronic devices. Usability considers high user satisfaction in conjunction with user performance. Usability of electronic products is essential for high customer satisfaction as well as product life cycles in companies. Therefore, MP3 players were selected among the electronic products. Designing usable MP3 players is extremely important for users who have close interaction with them. In this study, MP3 players of different types and sizes were selected and their usability evaluated. The usability criteria used in the MP3 players' evaluation were divided into two major categories: performance and emotional expectations. The alternatives were ranked with fuzzy multi‐criteria decision‐making methods, namely, Fuzzy TOPSIS (FTOPSIS), Fuzzy Analytic Hierarchy Process (FAHP), and Fuzzy Axiomatic Design Theory (FADT), and the results were compared. Although the same decision matrices and data obtained from semantic differential experiment were used for all fuzzy multi‐criteria decision‐making methods, it is shown that different rankings were obtained. © 2012 Wiley Periodicals, Inc.     

An overview of product issues in wide‐viewing TFT‐LCDs

Abstract— Several TFT‐LCD devices exhibiting high image quality have been developed and commercialized, overcoming the narrow viewing‐angle characteristics of conventional twisted‐nematic (TN) devices. Nevertheless, no single device dominates large‐sized TFT‐LCDs. In this paper, the product issues of existing LC devices related to manufacturing process and performance are discussed.     

The role of LiF buffer layer in tris‐(8‐hydroxyquinoline) aluminum‐based organic light‐emitting devices with Mg:Ag cathode

Abstract— The device characteristics of organic light‐emitting devices based on tris‐(8‐hydroxyqunoline) aluminum with a thin layer of LiF inserted at the ITO and organic interface or organic and Mg:Ag cathode interface were investigated. A thin layer of LiF can enhance the electron injection when it was inserted only between the organic electron‐transporting layer and the Mg:Ag alloy cathode, but can block hole injection when inserted between the ITO anode and the organic hole‐transport layer. By inserting both a 1.0‐nm LiF layer at side of the ITO anode and a 0.5‐nm LiF layer under the Mg:Ag cathode, the device, at a current injection of 10 mA/cm², exhibited the highest current efficiency of 8.2 cd/A and power efficiency of 1.93 lm/W for all the types of devices investigated in this study. Both the current efficiency and power efficiency of the device were improved by 1.2 times at a current injection of 10 mA/cm², compared to the standard device without any LiF buffer layer. This is due to the increased electron injection and decreased hole injection that off‐sets the imbalance of electron and hole injection and brings it towards the balanced injection of electrons and holes, thus reducing the non‐productive hole current.     

The effects of multiple firefighting activities on information processing and work performance in a smoke‐diving room: An intervention study

Firefighters perform various tasks during firefighting operations under unknown and unpredictable conditions. The present study investigated the impact of firefighting activities and cooling tactics on information processing and work performance. Firefighters performed typical firefighting tasks in the four experimental conditions, namely i) no cooling device (NC), ii) cooling gel (CG), iii) cool vest (CV), and iv) cooling gel and cool vest (CG + CV). The measurement of information processing, Paced Auditory Serial Addition Test (PASAT) scores decreased significantly after the firefighting activities in the four conditions, relative to baseline. The results revealed no significant difference in PASAT scores among the four conditions. However, the performance time (PT) was significantly shorter for the CV and CG + CV compared to the NC and CG conditions. The findings confirmed that the firefighting activities have a detrimental effect on information processing. The CG + CV and CV were more effective than CG and NC in improving PT during firefighting. However, the cooling strategies have a negligible effect on improving information processing performance.     

Evaluation of single‐, pre‐emphasis,and dual‐driving methods in large‐sized TFT‐LCDs

Abstract— As the panel size and the frame frequency of TFT‐LCDs increases, driving issues become much more important for larger‐sized and higher‐resolution TFT‐LCDs. In our previous paper, the pre‐emphasis driving method was proposed to shorten the driving time of the data line with heavy loads of the large‐sized TFT‐LCDs. This paper proposes a simulation model based on the evaluation results of the developed pre‐emphasis source driver, and the issues of driving the data line with heavy loads are reviewed. The single‐, pre‐emphasis, and dual‐driving methods are compared in terms of their driving time and power consumption for large‐sized TFT‐LCDs with various resistances and capacitances of the data lines. At a panel load of 250‐pF capacitance and 15‐kΩ resistance in full‐HD resolution, the pre‐emphasis driving can reduce the pixel driving time to 66% with a 54% increase in the analog power consumption.     

Flocking of Multi‐Agents Following a Leader with Adaptive Protocol in a Noisy Environment

This paper investigates the flocking problem of multi‐agents following a leader with communication delays in a noisy environment. Based on potential fields and the LaSalle‐type theorem for stochastic differential delay equations, by introducing the adaptive protocol compensating for the desired velocity, a new neighbor‐based flocking protocol is proposed such that all the agents move with a virtual leader's velocity almost surely, and avoidance of collision between the agents is ensured. A numerical example is given to illustrate the effectiveness of the proposed methods.     

Evaluation of thin‐film photodevices and application to an artificial retina

Abstract— First, conventional poly‐Si thin‐film photodevices, p‐i‐n thin‐film photodiodes (TFPDs) and p‐n TFPDs, were evaluated. It was found that the photo‐induced current (Iphoto) is not simultaneously relatively high and independent of the applied voltage (Vapply). Next, a novel poly‐Si thin‐film photodevice, p‐i‐n thin‐film phototransistor (TFPT), is proposed. It is found that the Iphoto is simultaneously relatively high and independent of the Vapply because the depletion layer is formed in the entire intrinsic region and the electric field is always high. These characteristics are preferable for photosensor applications. Finally, the p‐i‐n TFPT was applied to an artificial retina. The photo‐illuminance profile is correctly detected and the output voltage profile is correspondingly outputted. This artificial retina is expected to be suitable for human beings because it can potentially be fabricated on a flexible, harmless, plastic, and organic substrate.     

Design of a dual‐polarized omnidirectional antenna for broadband applications

A broadband dual‐polarized omnidirectional antenna is presented. The proposed antenna consists of two parts, an asymmetric biconical antenna and a cylindrical multilayer polarizer. To have an almost perfect omnidirectional radiation pattern in the horizontal plane and the main radiating beam position at around , in the elevation plane, the asymmetric biconical antenna is used. Moreover, to provide dual polarization performance over the 2–18 GHz operational bandwidth, a multilayer polarizer is designed and optimized. Numerous simulations via Ansoft HFSS and CST microwave Studio CAD tools have been made to optimize the radiation pattern, gain, polarization, and the reflection coefficient of the antenna. Simulation results show that the radiation characteristics of the proposed antenna are extremely sensitive to the configuration and dimensional parameters of the multilayer polarizer. The designed antenna was fabricated with high mechanical accuracy and measured. Satisfactory agreement of computer simulations and experimental results was obtained. The main feature that distinguishes this antenna from the previous designs is the ability to provide the omnidirectional radiation pattern with small ripples, dual polarizations performance, and the wide bandwidth simultaneously. Based on these characteristics, the proposed antenna can be useful for broadband communication applications. © 2015 Wiley Periodicals, Inc. Int J RF and Microwave CAE 25:591–600, 2015.     

The effect of a graph‐oriented computer‐assisted project‐based learning environment on argumentation skills

The purpose of this quasi‐experimental study was to explore how seventh graders in a suburban school in the United States developed argumentation skills and science knowledge in a project‐based learning environment that incorporated a graph‐oriented, computer‐assisted application. A total of 54 students (three classes) comprised this treatment condition and were engaged in a project‐based learning environment that incorporated a graph‐oriented, computer‐assisted application, whereas a total of 57 students (three classes) comprised the control condition and were engaged in a project‐based learning environment without this graph‐oriented, computer‐assisted application. Verbal collaborative argumentation was recorded and the students' post essays were collected. A random effects analysis of variance (ANOVA) was conducted and a significant difference in science knowledge about alternative energies between conditions was observed. A multivariate analysis of variance (MANOVA) was conducted and there was a significant difference in counterargument and rebuttal skills between conditions. A qualitative analysis was conducted to examine how the graph‐oriented, computer‐assisted application supported students' development of argumentation skills and affected the quality of collaborative argumentation. The difference in argumentation structure and quality of argumentation between conditions might explain a difference in science knowledge as well counterargument and rebuttal skills (argumentation) between both conditions. This study concluded that a project‐based learning environment incorporating a graph‐oriented, computer‐assisted application was effective in improving students' science knowledge and developing their scientific argumentation skills.     

The Double‐Edged Sword: The Effects of Journalists' Social Media Activities on Audience Perceptions of Journalists and Their News Products

As social media become popular news platforms, journalists and news organizations have been keen to capitalize on their potential to build and maintain audiences. However, little is known about the extent to which these efforts may have adverse implications. Based on normative theories, the present study investigates the influence of journalists' social media activities (specifically, self‐disclosure and interaction with other users) on audience perceptions of journalists. An experiment (N = 267) revealed that: Although both journalists' self‐disclosure and interaction positively influenced audience perceptions of the journalists in the personal dimension, interaction negatively influenced audience perceptions in the professional dimension; and the perceptions transferred to perceptions of news products, thereby mediating the relationship between journalists' social media activities and audience news perceptions.     

Development of a 10.4‐in. UXGA display using low‐temperature poly‐Si technology

A new 10.4‐in.‐diagonal display with UXGA resolution (1600 H × 1200 V pixels) using low‐temperature polysilicon (poly‐Si) TFTs has been developed for notebook‐PC applications. The source drive technique uses integrated selector switches, which decreases the number of tape carrier packages (TCPs) for a poly‐Si TFT‐LCD and increases the connection pitch of the TCPs to the glass substrate. In this paper, we present a new display configuration and fabrication process.