多次回流对不同成分Sn-Pb凸点IMC生长的影响

以不同成分Sn-Pb凸点为研究对象,分析回流次数对凸点IMC生长的影响。试验结果表明,多次回流中,5Sn95Pb凸点的剪切强度变化幅度最大,其余凸点抗剪切强度波动范围较小。凸点界面处IMC层厚度值均逐渐增大,其中3Sn97Pb和5Sn95Pb凸点界面处的IMC厚度增加速度较慢。界面IMC层晶粒尺寸逐渐增大,10次回流后,3Sn97Pb和63Sn37Pb凸点界面处观测到长轴状凸起,5Sn90Pb和10Sn90Pb凸点界面处IMC层呈现出较为平坦的形态。     

Pb/Sn凸剪切性能研究

在实际使用条件下,Pb/Sn凸点会由于承受温度循环而产生剪切应力,剪切应力导致的主要失效方式是开裂.通过对倒装焊后Pb/Sn凸点剪切强度的测量及对剪切后断口的分析,发现破坏主要发生在凸点下金属(UBM)层内部或UBM与Al焊盘之间,平均剪切强度受凸点尺寸影响很小,范围在21～24MPa。     

微尺寸SnAg凸点的制备技术及其互连可靠性

用电镀法制备了尺寸小于100μm的面阵列Sn-3.0Ag凸点.芯片内凸点的高度一致性约1.42%,Φ100mm硅圆片内的高度一致性约3.57%,Ag元素在凸点中分布均匀.研究了不同回流次数下SnAg/Cu的界面反应和孔洞形成机理,及其对凸点连接可靠性的影响.回流过程中SnAg与Cu之间Cu6Sn5相的生长与奥氏熟化过程相似.SnAg/Cu6Sn5界面中孔洞形成的主要原因是相转变过程中发生的体积缩减.凸点的剪切强度随着回流次数的增多而增大,且多次回流后SnAg/Cu界面仍然结合牢固.Cu6Sn5/Cu平直界面中形成的孔洞对凸点的长期可靠性构成威胁.     

微尺寸SnAg凸点的制备技术及其互连可靠性

用电镀法制备了尺寸小于100μm的面阵列Sn-3.0Ag凸点.芯片内凸点的高度一致性约1.42%,Φ100mm硅圆片内的高度一致性约3.57%,Ag元素在凸点中分布均匀.研究了不同回流次数下SnAg/Cu的界面反应和孔洞形成机理,及其对凸点连接可靠性的影响.回流过程中SnAg与Cu之间Cu6Sn5相的生长与奥氏熟化过程相似.SnAg/Cu6Sn5界面中孔洞形成的主要原因是相转变过程中发生的体积缩减.凸点的剪切强度随着回流次数的增多而增大,且多次回流后SnAg/Cu界面仍然结合牢固.Cu6Sn5/Cu平直界面中形成的孔洞对凸点的长期可靠性构成威胁.     

芯片上Sn／Pb凸点的制作工艺

随着电子产品对小型、轻量、薄型、高性能的需求越来越迫切，使得倒装芯片技术得到了更加广泛的应用，而凸点的形成正是倒装焊接技术中的关键。本文介绍了用电镀法制作Sn／Pb凸点的基本方法，并对其中的厚胶光刻、UBM层溅射、电镀等关键工艺中应该注意的问题进行了描述。     

用于圆片级封装的金凸点研制

介绍了电镀法进行圆片级封装中金凸点制作的工艺流程,并对影响凸点成型的主要工艺因素进行了研究.凸点下金属化层(UBM,under bump metallization)溅射、厚胶光刻和厚金电镀是其中的工艺难点,通过大量的实验研究,确定了TiW/Au的UBM体系,得到了优化的厚胶光刻工艺.同时,研制了用于圆片级封装金凸点制作的垂直喷镀设备,选用不同的电镀液体系和光刻胶体系,对电镀参数进行了控制和研究.对制作的金凸点与国外同类产品的基本特性进行了对比,表明其已经达到可应用水平.     

凸点材料的选择对器件疲劳特性的影响

为了研究凸点材料对器件疲劳特性的影响,采用非线性有限元分析方法、统一型黏塑性本构方程和Coffin-Manson修正方程,对Sn3.0Ag0.5Cu,Sn63Pb37和Pb90Sn10三种凸点材料倒装焊器件的热疲劳特性进行了系统研究,对三种凸点的疲劳寿命进行了预测,并对Sn3.0Ag0.5Cu和Pb90Sn10两种凸点材料倒装焊器件进行了温度循环试验.结果表明,仿真结果与试验结果基本吻合.在热循环过程中,凸点阵列中距离器件中心最远的焊点,应力和应变变化最剧烈,需重点关注这些危险焊点的可靠性;含铅凸点的热疲劳特性较无铅凸点更好,更适合应用于高可靠的场合;而且随着铅含量的增加,凸点的热疲劳特性越好,疲劳寿命越长.     

用于3D集成的精细节距Cu/Sn微凸点倒装芯片互连工艺研究

芯片异构集成的节距不断缩小至10 μm及以下,焊料外扩、桥联成为焊料微凸点互连工艺的主要技术问题.通过对微凸点节距为8 μm的Cu/Sn固液扩散键合的工艺研究,探索精细节距焊料微凸点互连工艺存在的问题,分析Cu/Sn微凸点键合界面金属间的化合物,实现了精细节距和高质量的Cu/Sn微凸点互连,获得了节距为8 μm、微凸点...     

应用于3D集成的高密度Cu/Sn微凸点键合技术

3D-IC技术被看作是应对未来半导体产业不断增长的晶体管密度最有希望的解决方案,而微凸点键合技术是实现3D集成的关键技术之一.采用电镀工艺制作了直径为50μm、间距为130μm的高密度Cu/Sn微凸点,分析了不同预镀时间及电流密度对Cu微凸点形成质量的影响,并使用倒装焊机实现了高密度Cu/Sn微凸点的键合.利用直射式X射线、分层式X射线对键合样片进行无损检测,结果表明键合对准精度高,少量微凸点边缘有锡被挤出,这是由于锡层过厚导致.观察键合面形貌,可以发现Cu和Sn结合得不够紧密.进一步对键合面金属间化合物进行能谱分析,证实存在Cu6 Sn5和Cu3 Sn两种物质,说明Cu6 Sn5没有与Cu充分反应生成稳态产物Cu3 Sn,可以通过增加键合时间、减少Sn层厚度或增加退火工艺来促进Cu3 Sn的生成.     

下填充料对高可靠倒装焊性能的影响

本文对95Pb／5Sn焊料凸点倒装在Al2O3薄膜和厚膜基板上，采用两种下填充料，依据试验样品出现的失效现象，分析了下填充料对倒装焊可靠性的影响。     

Pb-free Sn/3.5Ag electroplating bumping process and under bump metallization (UBM)

Pb-free solder is one of the biggest issues in today's electronic packaging industry. This paper introduces a newly developed Sn/3.5Ag alloy plating process for wafer level bumping. The effects of Under Bump Metallization (UBM) on the process, interfacial reaction, and mechanical strength have been investigated. Four different types of sputtering-based UBM layers-TiW/Cu/electroplated Cu, Cr/CrCu/Cu, NiV/Cu, and TiW/NiV-were fabricated with eutectic Pb/63Sn and Sn/3.5Ag solder. The result shows that the Sn/Ag solder gains Cu or Ni from UBM's and becomes Sn/Ag/Cu or Sn/Ag/Ni during reflow process. Sn/Ag solder has higher reactivity with Cu and Ni than Pb/63Sn. The Intermetallic Compound (IMC) spalling from the interface between UBM/solder has been observed on Cr/CrCu/Cu and TiW/NiV UBM's. However, the IMC spalling phenomena did not decrease the bump shear strength with a bump size of 110 /spl mu/m, whereas a size of 60 /spl mu/m brought a decrease in shear value and failure mode change.     

电镀Au-Sn合金的研究

Au-Sn(质量分数为20%)共晶焊料有着优良的导热和导电特性,已被广泛应用在光电子和微电子的器件封装工业中.对微氰和无氰电镀Au-Sn合金的两种电镀方法进行了研究,概述了镀液组分和电镀工艺条件,用扫描电镜的方法测试不同电流密度下Au-Sn合金组分,用测厚仪测试镀层厚度,计算出镀速,最终确定电镀Au-Sn(质量分数为20%)合金的电镀条件,并对微氰和无氰电镀液优缺点进行了对比分析.     

三层端电极渗边现象的研究

多层陶瓷电容器的端电极在进行电镀镍和锡铅合金时常会出现两边的端电极金属层向瓷体中间逐渐延伸的渗边现象，采用一种前处理化学浸液，对ＭＬＣ芯片进行浸入处理后，可彻底消除以往电镀时的渗边现象     

Degradation by Sn diffusion applied to surface mounting with Ag-epoxy conductive adhesive with joining pressure

Shear and tensile tests were carried out on joints made with an isotropic conductive adhesive (ICA) consisting of Ag and epoxy: Sn–Pb plated components mounted on printed boards and tensile bars consisting of Sn plated Ni and Cu joined under various joining pressures. After 150 °C–100 h, shear strength degraded to 72% and Sn in the plating diffused slightly to the Ag fillers in the ICA for the component mounting. High joining pressure increased the initial tensile strength and volume percentage of Ag fillers in the ICA. After 150 °C–100 h, tensile strengths for all joining pressures degraded on average to 36% of the initial strengths. In the case of low joining pressures, an Ag–Sn intermetallic was formed at only the Ag–Sn contact points of the Sn/ICA interface; leading to reproducibility of the component mounting. The difference of degradation ratios between the mounted components and tensile bars could be explained by the offset of the Sn–Pb area at the component/ICA interface.     

Mitigation of Sn Whisker Growth by Composite Ni/Sn Plating

Tin (Sn) is a key industrial material in coatings on various components in the electronics industry. However, Sn is prone to the development of filament-like whiskers, which is the leading cause of many types of damage to electronics reported in the last several decades. Due to its properties, a tin-lead (Sn-Pb) alloy coating can mitigate Sn whisker growth. However, the demand for Pb-free surface finishes has rekindled interest in the Sn whisker phenomenon. In order to achieve properties similar to those naturally developed in a Sn-Pb alloy coating, we carried out a study on deposited films with other Sn alloys, such as tin-bismuth (Sn-Bi), tin-zinc (Sn-Zn), and tin-copper (Sn-Cu), electrodeposited onto a brass substrate by utilizing a pulse plating technique. The results indicated that the Sn alloy films modified the columnar grain structure of pure Sn into an equiaxed grain structure and increased the incubation period of Sn whisker growth. The primary conclusions were based on analysis of the topography and microstructural characteristics in each case, as well as the stress distribution in the plated films computed by x-ray diffraction, and the␣amount of Sn whisker growth in each case, over 6 months under various environmental influences.     

The Effect of Micro-Alloying of Sn Plating on Mitigation of Sn Whisker Growth

Tin (Sn) is a key industrial material in coatings on various components in the electronics industry. However, Sn is prone to the development of filament-like whiskers, which is the leading cause of many types of damage to electronics reported in the last several decades. Due to its properties, a tin-lead (Sn-Pb) alloy coating can mitigate Sn whisker growth. However, the demand for Pb-free surface finishes has rekindled interest in the Sn whisker phenomenon. In order to achieve properties similar to those naturally developed in a Sn-Pb alloy coating, we carried out a study on deposited films with other Sn alloys, such as tin-bismuth (Sn-Bi), tin-zinc (Sn-Zn), and tin-copper (Sn-Cu), electrodeposited onto a brass substrate by utilizing a pulse plating technique. The results indicated that the Sn alloy films modified the columnar grain structure of pure Sn into an equiaxed grain structure and increased the incubation period of Sn whisker growth. The primary conclusions were based on analysis of the topography and microstructural characteristics in each case, as well as the stress distribution in the plated films computed by x-ray diffraction, and the?amount of Sn whisker growth in each case, over 6 months under various environmental influences.     

Improvement in high-temperature degradation by isotropic conductive adhesives including Ag–Sn alloy fillers

The reliability evaluation of Cu and Sn/Ni joined with isotropic conductive adhesives (ICAs) including Ag–Sn alloy fillers with or without Ag plating instead of Ag fillers was examined using tensile tests, electrical resistivity tests and microstructural observations. For an ICA, including Ag–Sn alloy fillers added to Sn–58wt%Bi fillers, the tensile strength was found to improve, but the electrical resistivity worsened with 150 °C heat exposure. An ICA, including, Ag–Sn alloy fillers with Ag plating, was able to maintain electrical resistivity after being subjected to 150 °C heat exposure. The Ag plating on the Ag–Sn fillers reacted with the Sn in the Ag–Sn fillers, leading to the joining of the fillers with each other though metallurgical connections, and the transformation of Ag into Ag₃Sn within a 1-h curing time at 150 °C, since the Ag plating was microscopic and active. After heat exposure, the Sn distributed itself along the substrate/ICA interface by the diffusion of Sn though the connected fillers, and Cu₃Sn formed at the Cu/ICA interface, in contrast with the Ag–Sn alloy fillers without Ag plating.     

Thermal and mechanical stability of soldering QFP with Sn-Bi-Ag lead-free alloy

Thermal stability of the circuit boards with a quad flat package (QFP) soldered with Sn-58wt%Bi-(0, 0.5 and 1.0) wt% Ag and their microstructural features were evaluated. The addition of 1.0 wt% Ag causes the formation of large primary Ag/sub 3/Sn precipitates in the solder while no primary Ag/sub 3/Sn is found in Sn-57Bi-0.5Ag. Thermo-Calc calculation indicates that the lowest limit content for the formation of primary Ag/sub 3/Sn is about 0.8 wt%. Heat-exposure below 100/spl deg/C has no serious degradation on the joint structure for all solders. Heat-exposure at 125/spl deg/C caused serious degradation in joint strength for all alloys. The contamination of Pb from Sn-Pb surface plating on the components reduces the interface tolerance by forming ternary Sn-Pb-Bi phase melting at low temperature. Thermal fatigue between -20 and 80/spl deg/C does not have any significant influence on joint structure.     

Stress Relaxation Mechanisms of Sn and SnPb Coatings Electrodeposited on Cu: Avoidance of Whiskering

The interrelations of microstructural evolution, phase formation, residual stress development, and whiskering behavior were investigated for the systems of Sn coating on Cu and SnPb coating on Cu during aging at room temperature. It was shown that the whisker-preventing effect of Pb addition to pure Sn can be attributed to a Pb-induced change of the stress relaxation mechanism in the coating: Pure Sn coatings, with a columnar grain morphology, relax mechanical stress via localized, unidirectional grain growth from the surface of the coating (i.e., whisker formation occurs), whereas SnPb coatings, with an equiaxed grain morphology, relax mechanical stress via uniform grain coarsening without whisker formation. It can thus be suggested that tuning of the Sn grain morphology (i.e., establishing an equiaxed grain morphology) is a straightforward method of microstructural control to suppress whisker formation at room temperature. Experimental results obtained in this project validate this conclusion.     

Eutectic Sn-Ag solder bump process for ULSI flip chip technology

A novel eutectic Pb-free solder bump process, which provides several advantages over conventional solder bump process schemes, has been developed. A thick plating mask can be fabricated for steep wall bumps using a nega-type resist with a thickness of more than 50 μm by single-step spin coating. This improves productivity for mass production. The two-step electroplating is performed using two separate plating reactors for Ag and Sn. The Sn layer is electroplated on the Ag layer. Eutectic Sn-Ag alloy bumps can be easily obtained by annealing the Ag/Sn metal stack. This electroplating process does not need strict control of the Ag to Sn content ratio in alloy plating solutions. The uniformity of the reflowed bump height within a 6-in wafer was less than 10%. The Ag composition range within a 6-in wafer was less than ±0.3 wt.% Ag at the eutectic Sn-Ag alloy, analyzed by ICP spectrometry. SEM observations of the Cu/barrier layer/Sn-Ag solder interface and shear strength measurements of the solder bumps were performed after 5 times reflow at 260°C in N₂ ambient. For the Ti(100 nm)/Ni(300 nm)/Pd(50 nm) barrier layer, the shear strength decreased to 70% due to the formation of Sn-Cu intermetallic compounds. Thicker Ti in the barrier metal stack improved the shear strength. The thermal stability of the Cu/barrier layer/Sn-Ag solder metal stack was examined using Auger electron spectrometry analysis. After annealing at 150°C for 1000 h in N₂ ambient, Sn did not diffuse into the Cu layer for Ti(500 nm)/Ni(300 nm)/Pd(50 nm) and Nb(360 nm)/Ti(100 nm)/Ni(300 nm)/Pd(50 nm) barrier metal stacks. These results suggest that the Ti/Ni/Pd barrier metal stack available to Sn-Pb solder bumps and Au bumps on Al pads is viable for Sn-Ag solder bumps on Cu pads in upcoming ULSIs