A 120-mm2 64-Mb NAND flash memory achieving 180 ns/Byteeffective program speed

Emerging application areas of mass storage flash memories require low cost, high density flash memories with enhanced device performance. This paper describes a 64 Mb NAND flash memory having improved read and program performances. A 40 MB/s read throughput is achieved by improving the page sensing time and employing the full-chip burst read capability. A 2-μs random access time is obtained by using a precharged capacitive decoupling sensing scheme with a staggered row decoder scheme. The full-chip burst read capability is realized by introducing a new array architecture. A narrow incremental step pulse programming scheme achieves a 5 MB/s program throughput corresponding to 180 ns/Byte effective program speed. The chip has been fabricated using a 0.4-μm single-metal CMOS process resulting in a die size of 120 mm² and an effective cell size of 1.1 μm²     

A 117-mm2 3.3-V only 128-Mb multilevel NAND flash memoryfor mass storage applications

For a quantum step in further cost reduction, the multilevel cell concept has been combined with the NAND flash memory. Key requirements of mass storage, low cost, and high serial access throughput have been achieved by sacrificing fast random access performance. This paper describes a 128-Mb multilevel NAND flash memory storing 2 b per cell. Multilevel storage is achieved through tight cell threshold voltage distribution of 0.4 V and is made practical by significantly reducing program disturbance by using a local self-boosting scheme. An intelligent page buffer enables cell-by-cell and state-by-state program and inhibit operations. A read throughput of 14.0 MB/s and a program throughput of 0.5 MB/s are achieved. The device has been fabricated with 0.4-μm CMOS technology, resulting in a 117 mm² die size and a 1.1 μm² effective cell size     

A 130-mm2, 256-Mbit NAND flash with shallow trenchisolation technology

A 256-Mbit flash memory has been developed using a NAND cell structure with a shallow trench isolation (STI) process. A tight bit-line pitch of 0.55 μm is achieved with 0.25-μm STI. The memory cell is shrunk to 0.29 μm², which realizes a 130-mm² , 256-Mbit flash memory. Peripheral transistors are scaled with memory cells in order to reduce fabrication process steps. A voltage down converter, which generates 2.5-V constant internal power source, is applied to protect the scaled transistors. An improved bit-line clamp sensing scheme achieves 3.8-μs first access time in spite of long and tight pitch bit-line. A 1-kbyte page mode with 35-ns serial data out realizes 25-Mbyte/s read throughput. An incremental step pulse with a bit by bit verify scheme programs 1-k cells in 1-V Vt distribution within 200 μs. That realizes 4.4-Mbyte/s programming throughput     

A 98 mm2 die size 3.3-V 64-Mb flash memory with FN-NORtype four-level cell

In order to realize high-capacity and low-cost flash memory, we have developed a 64-Mb flash memory with multilevel cell operation scheme. The 64-Mb flash memory has been achieved in a 98 mm² die size by using four-level per cell operation scheme, NOR type cell array, and 0.4-μm CMOS technology. Using an FN type program/erase cell allows a single 3.3 V supply voltage. In order to establish fast programming operation using Fowler-Nordheim (FN)-NOR type memory cell, we have developed a highly parallel multilevel programming technology. The drain voltage controlled multilevel programming (DCMP) scheme, the parallel multilevel verify (PMV) circuit, and the compact multilevel sense-amplifier (CMS) have been implemented to achieve 128 b parallel programming and 6.3 μs/Byte programming speed     

Device characteristics of 0.35 μm P-channel DINOR flash memoryusing band-to-band tunneling-induced hot electron (BBHE)programming

The P-channel DINOR flash memory, which uses the band-to-band tunneling induced hot electron (BBHE) program method having the advantages of high scalability, high efficiency, and high oxide reliability, was fabricated by 0.35-μm-rule CMOS process and was investigated in detail. An ultra-high programming throughput of less than 8 ns/byte (=4 μs/512 byte) and a low current consumption of less than 250 μA were achieved by utilizing 512-byte parallel programming. Furthermore, we investigated its endurance characteristics up to 10⁶ program/erase cycles, and window narrowing and G_m degradation were found to be very small even after 10⁶ cycles. It is thought that the BBHE injection point contributes to the G _m stability and the oxide-damage-reduced operation contributes to the good window narrowing characteristics. The P-channel DINOR flash memory realizing high programming throughput with low power consumption is one of the strongest candidates for the next generation of high-performance, low-voltage flash memories     

A dual-page programming scheme for high-speed multigigabit-scaleNAND flash memories

To realize a low-cost and high-speed programming NAND flash memory, a new programming scheme, a “dual-page programming scheme,” has been proposed. This architecture drastically increases the program throughput without circuit area overhead. In the proposed scheme, two memory cells are programmed at the same time using only one page buffer. Therefore, the page size, i.e., the number of memory cells programmed simultaneously, is doubled and the program speed is improved. As the number of page buffers required in the proposed scheme is the same as that in the conventional one, there is no circuit area increase. This novel operation is made possible by using a bitline as a dynamic latch to temporarily store the program data. As a result, the programming is accelerated by 73% in a 1-Gb generation and 62% in a 4-Gb generation, 18.2-MB/s 1-Gb or 30.7-MB/s 4-Gb NAND flash memory can be realized with this new architecture     

Program load adaptive voltage generator for flash memories

This paper describes a program load voltage generator for flash memories. It is based on an adaptive feedback loop which senses the current delivered to the memory cells during programming and adjusts the output voltage accordingly to compensate for the voltage drop caused by the programming current across the bit-line select transistors. The proposed circuit (silicon area=0.065 mm²) was integrated in a 0.8-μm CMOS 4 Mb flash memory device (0.6 μm in the matrix). Experimental evaluations showed that very effective compensation is achieved, with bit-line voltage kept at the desired value during the whole programming operation. A spread as small as 70 mV was measured between the single-bit and 16-b programming cases     

A 3.3 V 32 Mb NAND flash memory with incremental step pulseprogramming scheme

While the performance of flash memory exceeds hard disk drives in almost every category, the cost of flash memory must come down in order to gain wider acceptance in mass storage applications. This paper describes a 3.3 V-only 32 Mb NAND flash memory that achieves not only high performance but also low cost with a 94.9 mm² die size, improved yields, and a simple process with 0.5 μm CMOS technology. Die size is reduced by eliminating high voltage operation on the bitlines through a self boosted program inhibit voltage generation scheme. Incremental-step-pulse programming results in a 2.3 MB/s program data rate as well as improved process variation tolerance. Interleaved data paths and a boosted wordline results in a 25 ns burst cycle time and a 24 MB/s read data rate. Maximum operating current is less than 8 mA     

A quick intelligent page-programming architecture and a shieldedbitline sensing method for 3 V-only NAND flash memory

This paper describes a quick intelligent page-programming architecture with a newly introduced intelligent verify circuit for 3 V-only NAND flash memories. The new verify circuit, which is composed of only two transistors, results in a simple intelligent program algorithm for 3 V-only operation and a reduction of the program time to 56%. This paper also describes a shielded bitline sensing method to reduce a bitline-bitline capacitive coupling noise from 700 mV to 35 mV. The large 700 mV noise without the shielded bitline architecture is mainly caused by the NAND-type cell array structure. A 3 V-only experimental NAND flash memory, developed in a 0.7-μm NAND flash memory process technology, demonstrates that the programmed threshold voltages are controlled between 0.4 V and 1.8 V by the new verify circuit. The shielded bitline sensing method realizes a 2.5-μs random access time with a 2.7-V power supply. The page-programming is completed after the 40-μs program and 2.8-μs verify read cycle is iterated 4 times. The block-erasing time is 10 ms     

A 56-nm CMOS 99-mm2 8-Gb Multi-Level NAND Flash Memory With 10-MB/s Program Throughput

A single 3.3-V only, 8-Gb NAND flash memory with the smallest chip to date, 98.8 mm², has been successfully developed. This is the world's first integrated semiconductor chip fabricated with 56-nm CMOS technologies. The effective cell size including the select transistors is 0.0075 mum² per bit, which is the smallest ever reported. To decrease the chip size, a very efficient floor plan with one-sided row decoder, one-sided page buffer, and one-sided pad is introduced. As a result, an excellent 70% cell area efficiency is realized. The program throughput is drastically improved to twice as large as previously reported and comparable to binary memories. The best ever 10-MB/s programming is realized by increasing the page size from 4kB to 8kB. In addition, noise cancellation circuits and the dual VDD-line scheme realize both a small die size and a fast programming. An external page copy achieves a fast 93-ms block copy, efficiently using a 1-MB block size     

Novel Co-Design of NAND Flash Memory and NAND Flash Controller Circuits for Sub-30 nm Low-Power High-Speed Solid-State Drives (SSD)

As the cell size of the NAND flash memory has been scaled down by 40%–50% per year and the memory capacity has been doubling every year, a solid-state drive (SSD) that uses NAND as mass storage for personal computers and enterprise servers is attracting much attention. To realize a low-power high-speed SSD, the co-design of NAND flash memory and NAND controller circuits is essential. In this paper, three new circuit technologies, the selective bit-line precharge scheme, the advanced source-line program, and the intelligent interleaving, are proposed. In the selective bit-line precharge scheme, an unnecessary bit-line precharge is removed during the verify-read and consequently the current consumption decreases by 23%. In the advanced source-line program scheme, a hierarchical source-line structure is adopted. The load capacitance during the program pulse is reduced by 90% without a die size overhead. As a result, the current consumption is reduced by 48%. Finally, with the intelligent interleaving, a current peak is suppressed and a high-speed parallel write operation of the NAND flash memories is achieved. By using these three technologies, both the NAND flash memory and the NAND controller circuits are best optimized. At the sub-30 nm generation, the current consumption of the NAND flash memory decreases by 60% and the SSD speed improves by 150% without a cost penalty or circuit noise.      

A 3.3-V single power supply 16-Mb nonvolatile virtual DRAM using aNAND flash memory technology

A 3.3-V 16-Mb nonvolatile memory having operation virtually identical to DRAM with package pin compatibility has been developed. Read and write operations are fully DRAM compatible except for a longer RAS precharge time after write. Fast random access time of 63 ns with the NAND flash memory cell is achieved by using a hierarchical row decoder scheme and a unique folded bit-line architecture which also allows bit-by-bit program verify and inhibit operation. Fast page mode with a column address access time of 21 ns is achieved by sensing and latching 4 k cells simultaneously. To allow byte alterability, nonvolatile restore operation with self-contained erase is developed. Self-contained erase is word-line based, and increased cell disturb due to the word-line based erase is relaxed by adding a boosted bit-line scheme to a conventional self-boosting technique. The device is fabricated in a 0.5-μm triple-well, p-substrate CMOS process using two-metal and three-poly interconnect layers. A resulting die size is 86.6 mm², and the effective cell size including the overhead of string select transistors is 2.0 μm²     

A Fully Performance Compatible 45 nm 4-Gigabit Three Dimensional Double-Stacked Multi-Level NAND Flash Memory With Shared Bit-Line Structure

A 3-dimensional double stacked 4 gigabit multilevel cell NAND flash memory device with shared bitline structure have successfully developed. The device is fabricated by 45 nm floating-gate CMOS and single-crystal Si layer stacking technologies. To support fully compatible device performance and characteristics with conventional planar device, shared bitline architecture including Si layer-dedicated decoder and Si layer-compensated control schemes are also developed. By using the architecture and the design techniques, a memory cell size of 0.0021 mum²/bit per unit feature area which is smallest cell size and 2.5 MB/s program throughput with 2 kB page size which is almost equivalent performance compared to conventional planar device are realized.     

Memory array architecture and decoding scheme for 3 V only sectorerasable DINOR flash memory

A memory array architecture and row decoding scheme for a 3 V only DINOR (divided bit line NOR) flash memory has been designed. A new sector organization realizes one word line driver per two word lines, which is conformable to tight word line pitch. A hierarchical negative voltage switching row decoder and a compact source line driver have been developed for 1 K byte sector erase without increasing the chip size. A bit-by-bit programming control and a low threshold voltage detection circuit provide a high speed random access time at low V_cc and a narrow program threshold voltage distribution. A 4 Mb DINOR flash memory test device was fabricated from 0.5 μm, double-layer metal, triple polysilicon, triple well CMOS process. The cell measures 1.8×1.6 μm² and the chip measures 5.8×5.0 mm ². The divided bit line structure realizes a small NOR type memory cell     

40-mm2 3-V-only 50-MHz 64-Mb 2-b/cell CHE NOR flashmemory

This paper presents a 3-V-only 64-Mb 4-level-cell (2-b/cell) NOR-type channel-hot-electron (CHE) programmed flash memory fabricated in 0.18-μm shallow-trench isolation CMOS technology. The device (die size 40 mm²) is organized in 64 1-Mb sectors. Hierarchical column and row decoding ensures complete isolation between different sectors during any operation, thereby increasing device reliability while still providing layout area optimization. Staircase gate-voltage programming is used to achieve narrow threshold-voltage distributions. The same program throughput as for bilevel CHE-programmed memories is obtained, thanks to parallel programming. A mixed balanced/unbalanced sensing approach allows efficient use of the available threshold window. Asynchronous (130-ns access time) and burst-mode (up to 50-MHz data rate) reading is possible. Both column and row redundancy is provided to ensure extended failure coverage. Error correction code techniques, correcting 1 failed over 32 data cells, are also integrated     

High-performance 1-Gb-NAND flash memory with 0.12-/spl mu/m technology

A 1.8-V, 1-Gb NAND flash memory is fabricated with 0.12-/spl mu/m CMOS STI process technology. For higher integration, a 32-cell NAND structure, which enables row decoder layout in one block pitch, is applied for the first time. Resulting cell and die sizes are 0.076 /spl mu/m/sup 2/ and 129.6 mm/sup 2/, respectively. A pseudo-4-phase charge pump circuit can generate up to 20 V even under the supply voltage of 1.6 V. A newly applied cache program function and expanded page size of (2 k + 64) byte lead to program throughput of 7 MB/s. The page copy-back function is provided for on-chip garbage collection. The read throughput of 27 MB/s is achieved by simply expanding I/O width and page size. A measured disturbance free-window of 3.5 V at 1.5 V-V/sub DD/ is obtained.     

A source-line programming scheme for low-voltage operation NANDflash memories

To realize a low-voltage operation NAND flash memory, a new source-line programming scheme has been proposed. This architecture drastically reduces the program disturbance without circuit area, manufacturing cost, program speed, or power consumption overhead. In order to improve the program disturbance characteristics, a high program inhibit voltage is applied to the channel from the source line, as opposed to from the bit line of the conventional scheme. The bit-line swing is decreased to 0.5 V to achieve a lower power consumption. Although the conventional NAND flash memory cannot operate below 2.0 V due to the program disturbance issue, the proposed NAND flash memory shows excellent program disturbance characteristics irrespective of the supply voltage. A very fast programming of 192 μs/page and a very low power operation of 22 mW at 1.4 V can be realized in the proposed scheme     

A 256-Mb multilevel flash memory with 2-MB/s program rate for massstorage applications

A 256-Mb flash memory is fabricated with a 0.25-μm AND-type memory cell and 2-bit/cell multilevel technique on a 138.6-mm² die. Parallel decoding of four memory threshold voltage levels to 2-bit logical values prevents throughput degradation due to multilevel operation. This parallel decoding has been achieved by sense latches and data latches connected to each bitline. Tight distribution of memory cell threshold voltage is essential to reliable multilevel operation. This chip has several measures to deal with the factors that widen the memory cell V_th. The effect of adjacent memory cell's V_th is eliminated by using an AND-type flash memory cell. An initial distribution width of 0.1 V is achieved. The wordline voltage, which has negative temperature dependency, compensates the positive dependency of memory cell V_th. In the -5-75°C range, memory threshold V_th deviation is reduced from the conventional 0.19-0.07 V. Conventionally, the number of programs without erase operation per one sector is limited by the limitations from program disturb. This chip introduced a new rewrite scheme, and this limit is increased from the conventional 10-2048+64 times/sector     

A 70 nm 16 Gb 16-Level-Cell NAND flash Memory

A 16 Gb 16-level-cell (16LC) NAND flash memory using 70 nm design rule has been developed . This 16LC NAND flash memory can store 4 bits in a cell which enabled double bit density comparing to 4-level-cell (4LC) NAND flash, and quadruple bit density comparing to single-bit (SLC) NAND flash memory with the same design rule. New programming method suppresses the floating gate coupling effect and enabled the narrow distribution for 16LC. The cache-program function can be achievable without any additional latches. Optimization of programming sequence achieves 0.62 MB/s programming throughput. This 16-level NAND flash memory technology reduces the cost per bit and improves the memory density even more.     

A 5-V-only operation 0.6-μm flash EEPROM with row decoder schemein triple-well structure

An experimental 4-Mb flash EEPROM has been developed based on 0.6-μm triple-well CMOS technology in order to establish circuit technology for high-density flash memories. A cell size of 2.0×1.8 μm² has been achieved by using a negative-gate-biased source erase scheme and a self-aligned source (SAS) process technology. A newly developed row decoder with a triple-well structure has been realized in accordance with its small cell size. The source voltage during the erase operation was reduced by applying a negative voltage to the word line, which results in a 5-V-only operation. The chip size of the 4-Mb flash EEPROM is 8.11×6.95 mm², and the estimated chip size of a 16-Mb flash EEPROM is 98.4 mm² by using the minimal cell size (2.0×10 μm²)