Effect of dielectric barrier discharge on semiconductor Si electrode surface

Electrode materials and shapes affected the discharge modes. Meanwhile, the discharge has influence upon electrode surface. In order to study the effect of discharge on semiconductor electrode, the experiments were carried out using single crystal Si wafer as high voltage electrode of atmospheric pressure dielectric barrier discharge in air. The effects of dielectric barrier discharge on Si electrode surface are analyzed by means of field emission scanning electron microscope (FESEM) and X-ray photoelectron spectroscopy (XPS). The results show that surface roughness and oxidation increase with discharge time, while surface nitridation is not observed on Si electrode surface. It is different from Cu electrode. The difference is due to different chemical reactions between electrode surface and air plasma but could also be ascribed to the different analysis techniques used.     

Effect of atmospheric pressure dielectric barrier discharge air plasma on electrode surface

In order to study the influence of plasma on electrode, atmospheric pressure dielectric barrier discharge (DBD) air plasma is employed here to treat copper electrode surface. Plasma is generated between the parallel plate electrodes by means of high voltage produced by a high-frequency power supply with transformer. Electrode surface alterations induced by air plasma are investigated by using field emission scanning electron microscope (FE-SEM), X-ray energy dispersion spectroscopy (EDS) and contact angle measurement. The results show that DBD air plasma removes the organic contaminant on surface and causes electrode surface roughness, oxidization and nitridation. In addition, surface wettability is also improved, as concluded from contact angle measurements.     

Preparation of hydrophobic coating on glass surface by dielectric barrier discharge using a 16 kHz power supply

A 16 kHz power supply was used to investigate the preparation of hydrophobic film on glass surface by means of atmospheric pressure dielectric barrier discharge (DBD). Air nonthermal plasma was induced between the two parallel electrodes with a glass plate as dielectric barrier. The process for hydrophobic film includes two parts: one is plasma pretreatment to produce active layer on glass surface, another is to form hydrophobic film on glass surface by means of the interaction between air plasma and polydimethylsiloxane oil. The surface changes were observed using contact angle measurement and atomic force microscope. The results show DBD can increase surface roughness, and effectively improve glass surface activation and form a hydrophobic coating on glass surface, and it is possibility to prepare hydrophobic glass with middle frequency power supply.     

等离子体介质阻挡放电氟化改性环氧树脂的时效性

等离子体对材料的改性效果随放置时间会有所减弱,即表现出一定的时效性,限制了等离子体改性技术的进一步发展。为了探究等离子体介质阻挡放电（DBD）氟化改性环氧树脂的时效性,利用等离子体介质阻挡放电实现了环氧树脂表面氟化改性,并利用扫描电镜（SEM）、表面轮廓仪、X射线光电子能谱分析（XPS）、接触角测试仪、高阻计和闪络电压、表面电位测试系统对改性前和改性后放置在25 ℃老化箱中0～30 d的环氧树脂表面进行了物理形貌和化学组分的表征以及电气性能的测试。测试结果表明,DBD氟化改性实现了氟元素在环氧树脂表面接枝,这使得环氧树脂表面能降低,表面电阻率减小,陷阱能级变浅,从而加快了表面电位衰减速度,进而提升了沿面闪络电压。同时,等离子体DBD氟化改性环氧树脂表现出一定的时效性,放置30 d后,氟元素含量减少,表面能增大,表面电位衰减速度略有减慢,闪络电压也有所下降,但仍高于未处理的试样。     

不同电介质结构下介质阻挡放电特性研究

设计制作了单面有氧化铟锡(ITO)导电介质层的双玻璃介质层的介质阻挡放电装置,研究了其放电特性,并将其与双玻璃介质层和单玻璃介质层的介质阻挡放电进行了比较.从电荷输运的角度分析,上述三种装置分别实现了电荷的二维、零维和三维输运.采用两种不同的双玻璃介质层装置,获得了单个稳定的放电丝.与无ITO导电层的双玻璃结构得到的单个放电丝相比,单面有导电ITO介质的双玻璃结构中,单放电丝呈"T"字型,其光晕是前者光晕的2倍,其放电电流大于前者电流,其放电时间间隔长短交替现象更为明显,且存在强度大小交替的现象.分析表明,壁电荷输运及二次电子发射的不同导致了不同电介质结构放电特性的不同. 关键词： 介质阻挡放电 壁电荷 二次电子发射     

Contribution of power on cell adhesion using atmospheric dielectric barrier discharge (DBD) plasma system

This study examined the effect of the treatment power on the enhanced cell attachment and proliferation on poly ε-caprolactone (PCL) films treated with atmospheric plasma using a dielectric barrier discharge method (AP-DBD). The peak intensities of the –CH, CO, –OH and –COO vibration modes, and binding energies of carbon and oxygen of the AP-DBD treated-PCL film increased with increasing plasma treatment power. The surfaces of the AP-DBD treated-PCL films were also examined for their in vitro cell adhesion properties using human prostate epithelial cells. The results showed that the level of cell attachment and proliferation on the AP-DBD treated-PCL film was ten times better than that observed on the untreated-PCL films.     

Surface wettability of atmospheric dielectric barrier discharge processed Armos fibers

Wettability of Armos fibers has been investigated after exposed to dielectric barrier discharge (DBD) plasma, which was performed at atmospheric pressure in air while varying the sample treatment time between 9 and 27 s. Contact angles and surface free energy of the original and plasma-treated fibers were measured with dynamic contact angle analysis (DCAA) to reveal the correlation between the fiber wettability and the surface treatment, including surface composition and topography modifications, which were evaluated by X-ray photoelectron spectroscopy (XPS) and atomic force microscopy (AFM), respectively. It was found by XPS analysis that the O/C atomic ratio on Armos fiber surface can be increased from 0.134 to 0.248 after the 18 s exposure to the plasma and many polar functional groups were proved to be incorporated into the surface, which aided good wetting. In addition, AFM observations revealed the changes of fiber surface microstructure, showing significant enhancement of the surface roughness after the treatment, which could also bring the fiber better wettability. What's more, the impacts of fiber surface treatment on its tensile properties were characterized by single fiber tensile strength (SFTS) testing. Results showed that Armos fibers exhibited only slight reductions in their tensile strengths with the great enhancement in fiber surface free energy.     

Surface modification of polypropylene non-woven fabric using atmospheric nitrogen dielectric barrier discharge plasma

In this paper, a dielectric barrier discharge operating in nitrogen at atmospheric pressure has been used to improve the surface hydrophilic property of polypropylene (PP) non-woven fabric. The changes in the hydrophilic property of the modified PP samples are investigated by the contact angle measurements and the variation of water contact angle is obtained as a function of the energy density; micrographs of the PP before and after plasma treatment are observed by scanning electron microscopy (SEM) and the chemical composition of the PP surface before and after plasma treatment is also analyzed by Fourier transform infrared spectroscopy (FTIR) and X-ray photoelectron spectroscopy (XPS). The results show that the surface hydrophilic property of the PP samples is greatly improved with plasma treatment for a few seconds, as evidenced by the fact that the contact angle of the treated PP samples significantly decreases after plasma treatment. The analysis of SEM shows that the surface roughness of the treated PP samples increases due to bonding and etching in plasma processing. The analyses of FTIR and the C1s peak in the high-resolution XPS indicate that oxygen-containing and nitrogen-containing polar functional groups are introduced into PP surface in plasma processing. It can be concluded that the surface hydrophilic property of the modified PP samples has been obviously improved due to the introduction of oxygen-containing and nitrogen-containing polar groups and the increase of the surface roughness on the PP surface.     

Properties of the dielectric barrier discharge in mixtures of methane with helium

The influence of the chemical composition of the feeding gas mixtures CH₄-He on the physical properties of dielectric barrier discharge was investigated experimentally as well as theoretically. Certain changes in the shape of charge-voltage characteristics (Lissajous figures) were observed when the content of He was varied within the range 0–90%. An increase of the He concentration was found to cause monotonous but not linear decrease of the ignition voltage as well as of the burning voltage of the discharge. Measurements of the burning voltage were used to estimate the characteristic energy of electrons in the mixtures under consideration. These estimates were compared with experimentally determined values of the energy consumption for the synthesis of C₂H₂, C₂H₄ and C₂H₆, respectively. It was demonstrated that the observed dependencies of the energy consumption upon He content can be explained taking into consideration the influence of the chemical composition of feeding gas mixture upon the characteristic energy of electrons in the dielectric barrier discharge. Dedicated to Prof. Jan Janča on the occasion of his 60th birthday. The work was supported by the Sonderforschungsbereich 198 “Kinetik partiell ionisierter Plasmen”.     

大气压氩气放电中的斑图形成

采用双水电极的介质阻挡放电装置，在混有0.5％空气的大气压氩气放电中观察到了六边形及正方网格斑图；测量了正方网格中的微放电的时间行为，发现相邻两次放电的时间间隔是长短交替的；分析了壁电荷对放电丝自组织成斑图过程的影响. 关键词： 自组织斑图 微放电     

Characterization of the single nanosecond pulsed surface dielectric barrier plasma actuator: Geometric and electric effects

The influence of the electrode length and the voltage pulses on the discharge characteristics of the surface dielectric barrier discharge actuators were investigated numerically by using the plasma kinetic model. The governing equations including the coupled continuity plasma discharge equation, drift-diffusion equation, electron energy equation, Poisson's equation, and Navier–Stokes equation were solved in quiescent air at atmospheric pressure. The results show that the shorter pulse rising time results in higher discharge characteristics, more intense discharge, and bigger discharge region. Differently, the compared discharge characteristics for the electrodes with different lengths prove that the length of the powered and ground electrodes has little effect on the surface dielectric barrier discharge driven by nanosecond pulsed voltage.     

纳秒脉冲放电对聚对苯二甲酸乙二酯憎水改性

基于自主研制的ns脉冲电源(上升沿约70ns,脉宽约100ns)激励介质阻挡放电产生大气压低温等离子体,在CF4气氛下对聚对苯二甲酸乙二酯(PET)表面进行了憎水改性处理,测量了改性前后的薄膜表面的水接触角,给出了CF4气流量、放电电压、处理时间和CF4比例等参数对改性效果的影响规律。结果表明,大气压ns脉冲DBD表面处理能够实现PET材料的憎水性,改性后的PET表面水接触角由66°提高到最大100°。     

交流和纳秒脉冲Ar/H2O介质阻挡放电聚丙烯材料表面亲水改性对比研究

为了提高等离子体对聚合物材料表面处理的应用效果,优化亲水处理的条件,研究了交流和纳秒脉冲氩气介质阻挡放电（DBD）中添加适量H₂O,对聚丙烯（PP）亲水改性的处理效果。利用电学和光学诊断方法,系统地对比了交流DBD和纳秒脉冲DBD的放电特性,结果表明,纳秒电源驱动DBD具有更高的放电瞬时功率,更好的放电均匀性和更高的能量效率。通过测量不同水蒸气含量下DBD的OH发射光谱强度,确定了PP材料亲水性处理中H₂O添加的最优含量。利用交流和纳秒脉冲电源驱动DBD分别对PP材料进行亲水改性的处理,测量了不同条件下改性处理后的表面水接触角,并利用原子力显微镜（AFM）和傅里叶红外光谱（FTIR）分别对处理前后PP材料的表面物理形貌和表面化学成分进行分析。结果发现,经DBD处理后PP材料的水接触角明显降低,表面粗糙度明显增大,表面的亲水性含氧基团,羟基（?OH）和羰基（C=O）的数量大幅增加。相比交流电源,纳秒脉冲DBD处理的改性效果更好,其处理后的材料表面水接触角,比交流DBD处理的低5°左右,表面粗糙度也有所提升。而水蒸气的加入可使PP材料的表面水接触角进一步减小4°左右,表面粗糙度明显提升。研究结果为优化DBD聚合物材料表面改性实验条件及处理的效果提供了重要的参考依据。     

Amine-containing film deposited in pulsed dielectric barrier discharge at a high pressure and its cell adsorption behaviours

With monomer allylamine, amine-containing functional films were prepared in alternative current pulsed dielectric barrier discharge (DBD) at a high pressure. This paper analyses in detail the film properties and structures, such as hydrophilicity, compounds and microstructures as well as amine density by the water contact angle, Fourier transform infrared spectroscopy, atomic force microscopy, and ultraviolet--visible measurement. The influence of discharge parameters, in particular applied power, on amine density was investigated. As an application the cell adsorption behaviours on plasma polymerization films was performed in-vitro. The results show that at a high pressure pulsed DBD plasma can polymerize films with sufficient amine group on surface, through which the very efficient cell adsorption behaviours was demonstrated, and the high rate of cell proliferation was visualized.     

氩气含量对空气介质阻挡放电发射光谱的影响

利用介质阻挡放电实验系统测量了空气介质阻挡放电的发射光谱,研究了氩气含量对空气介质阻挡放电发射光谱的影响.在280～500 nm波长范嗣内,发现了氮分子第二正带系N2(C3∏u-B3∏g)的谱线和氮分子离子的第一负带系N2+(B3∑u+-X2∑g+)的谱线.在相同条件下加入10%氩气后,起始放电电压由26kV降低到23...     

共面介质阻挡放电特性研究

对共面介质阻挡放电(DBD)的放电过程进行了实验和理论研究. 在实验中设计了分段电极方法来获取放电过程中不同位置上的局域电流和光辐射特性，得到了阴极上等离子体的扩展速度，并与二维流体数值模拟结果进行了比较. 结果表明，在共面DBD的暂态放电过程中，电极上空等离子体区域始终存在有不均匀电场，导致了不同位置上放电电流和光辐射分布的不一致. 同时研究还表明，在DBD放电过程中应当考虑表面光致二次电子发射. 关键词： 介质阻挡放电 分段电极 放电特性     

Uniformity analysis of dielectric barrier discharge (DBD) processed polyethylene terephthalate (PET) surface

A dielectric barrier discharge (DBD) plasma, operating in air at atmospheric pressure, has been used to induce changes in the surface properties of polyethylene terephthalate (PET) films. The effects that the key DBD operating parameters: discharge power, processing speed, processing duration, and electrode configurations, have on producing wettability changes in the PET surface region have been investigated. The approach taken involves the application of an Taguchi experimental design and robust analysis methodology. The various data sets obtained from these analyses have been used to studies the effect of the operating parameters on the surface uniformity and efficiency of the said treatment.In general, the results obtained indicate that DBD plasma processing is an effective method for the controlled surface modification of PET. Relatively short exposures to the atmospheric pressure discharge produces significant wettability changes at the polymer film surface, as indicted by pronounced reductions in the water contact angle measured. It was observed that the wettability of the resultant surface shows no significant differences in respect to orientation parallel (L-direction) or perpendicular (T-direction) to the electrode long axis. However, there was significant differences between the data obtained from these two orientations. Analysis of the role of each of the operating parameters concerned shows that they have a selective effectiveness with respect to resultant surface modification in terms of uniformity of modification and wettability. The number of treatment cycles and the electrode configuration used were found to have the most significant effects on the homogeneity of the resultant PET surface changes in L- and T-orientation, respectively. On the other hand, the applied power showed no significant role in this regard. The number of treatment cycles was found to be the dominant factor (at significance level of 0.05) in respect of water contact angle changes at the processed PET surface in both orientations. The driven metal electrodes (stainless steel or aluminium) were apparently superior to the driven dielectric electrode (ceramic or quartz) configurations. The grounded electrode in each case was a silicon rubber-covered aluminium plate (see later). The nature and scale of the surface changes that originate from the various processing conditions employed have been considered so as to determine the optimum treatment conditions in respect of processing outcomes, properties and any orientation dependence. Thus, it was revealed that higher processing speeds and longer processing durations are key for uniformity along the electrode axial orientation, while lower processing speeds and short exposure durations are key considerations, in the corresponding perpendicular orientation. In general, longer processing durations (low processing speeds and a high number of treatment cycles) and higher plasma powers induced greater changes in the surface wettability of the PET, as demonstrated by the observed water contact angles. This behaviour is taken to indicate that different combinations of DBD operating parameters and electrodes produce discharge conditions that can result in different plasma chemical processes in respect of uniformity, treatment efficiency and orientation dependence.     

重复频率纳秒脉冲介质阻挡放电对聚对苯二甲酸乙二酯表面改性

介绍了0.1 MPa下的纳秒脉冲介质阻挡放电(DBD)对聚对苯二甲酸乙二酯(PET)材料表面进行的亲水性改善。分别采用均匀和丝状放电模式对PET表面改性处理,并采用水接触角测量、原子力显微镜观察、X射线光电子能谱分析对改性材料进行表面分析。实验发现介质阻挡放电处理后PET表面水接触角明显减小,接触角从78°下降到25°,但随处理时间的增加有饱和效应;PET表面粗糙程度增加,亲水性含氧基团被引入,从而改善了材料表面亲水性;纳秒脉冲下的均匀DBD比丝状DBD处理效果更为显著。     

Effective corona discharge and ozone generation from a wire-plate discharge system with a slit dielectric barrier

A new wire-plate-type discharge system, with a slit dielectric barrier, has been proposed and investigated by focusing on the generation of ozone and the discharges on the slit barrier. This wire-plate-type discharge system, with a slit barrier, can generate a corona discharge twice, once from the corona wire electrode and again from the surface and the slits of the slit barrier. As a result, this proposed wire-plate-type discharge system, with the slit barrier, can produce much more ozone than without the slit barrier. The discharge mechanism of the wire-plate-type discharge system, with the slit barrier, would be hard to arc discharge and to break the system down directly because of the blocking action of the slit dielectric barrier. This proposed wire-plate-type discharge system, with the slit barrier, may be useful as an effective means for removing pollutant gases.     

Surface oxidation of a Melinex 800 PET polymer material modified by an atmospheric dielectric barrier discharge studied using X-ray photoelectron spectroscopy and contact angle measurement

Surface properties of a Melinex 800 PET polymer material modified by an atmospheric-pressure air dielectric barrier discharge (DBD) have been studied using X-ray photoelectron microscopy (XPS) and contact angle measurement. The results show that the material surface treated by the DBD was modified significantly in chemical composition, with the highly oxidised carbon species increasing as the surface processing proceeds. The surface hydrophilicity was dramatically improved after the treatment, with the surface contact angle reduced from 81.8° for the as-supplied sample to lower than 50° after treatment. Post-treatment recovery effect is found after the treated samples were stored in air for a long period of time, with the ultimate contact angles, as measured, being stabilised in the range 58-69° after the storage, varying with the DBD-treatment power density. A great amount of the C-O type bonding formed during the DBD treatment was found to be converted into the CO type during post-treatment storage. A possible mechanism for this bond conversion has been suggested.