Roughening of silicon (1 0 0) surface during low energy Cs ion bombardment

Nowadays, the use of low energy ion bombardment in secondary ion mass spectrometry (SIMS) is a mandatory step to obtain high depth resolution for the characterization of ultra shallow junctions. However, increment of roughness during ion bombardment leads to the degradation of depth resolution. The evolution of surface roughening and ripple formation on silicon at ambient temperature under 1 keV Cs⁺ ion bombardment with and without sample rotation has been studied by means of atomic force microscopy.Ripple formation with a perpendicular orientation with respect to the Cs⁺ beam direction has been detected, and their wavelength and correlation length have been monitored as a function of the experimental conditions. Roughness and wavelength increased with increasing ion fluence, while variations of ion flux showed little effect. The effect of sample rotation during ion bombardment led to a critical reduction of the surface roughness and disappearance of ripples.     

Sputtering and surface state evolution of Bi under oblique incidence of 120 keV Ar ions

The sputtering and surface state evolution of Bi/Si targets under oblique incidence of 120 keV Ar⁺ ions have been investigated over the range of incidence angles 0° ? θ_i ? 60°. Increasing erosion of irradiated samples (whose surface thickness reduced by ∼3% at normal incidence up to ∼8% at θ = 60°) and their surface smoothing with reducing grain sizing were pointed out using Rutherford backscattering (RBS), atomic force (AFM) and X-ray diffraction (XRD) techniques. Measured sputtering yield data versus θ_i with fixed ion fluence to ∼1.5 × 10¹⁵ cm⁻² are well described by Yamamura et al. semi-empirical formula and Monte Carlo (MC) simulation using the SRIM-2008 computer code. The observed increase in sputter yield versus incidence angle is closely correlated to Bi surface topography and crystalline structure changes under ion irradiation.     

Temperature-dependent surface modification of InSb(0 0 1) crystal by low-energy ion bombardment

Structural and compositional modification of InSb(0 0 1) single crystal surfaces induced by oblique incidence 2-5 keV Ar and Xe ion irradiation have been investigated by means of scanning tunneling and atomic force microscopies, and time-of-flight mass spectroscopy of secondary ion emission. In general, ion-induced patterns (networks of nanowires, or ripples) are angle of incidence- and fluence-dependent. Temperature dependences (from 300 to 600 K) of the RMS roughness and of the ripple wavelength have been determined for the samples bombarded with various fluences. Secondary ion emission from an InSb(0 0 1) surface exposed to 4.5 keV Ar⁺ ions has been investigated with a linear TOF spectrometer working in a static mode. Mass spectra of the sputtered In⁺, Sb⁺ and In₂⁺ secondary ions have been measured both for the non-bombarded (0 0 1) surface and for the surface previously exposed to a fluence of 10¹⁶ ions/cm². In⁺ and In₂⁺ intensities for the irradiated sample are much higher in comparison to the non-bombarded one, whereas Sb⁺ ions show a reversed tendency. This behavior suggests a significant In-enrichment at the InSb(0 0 1) surface caused by the ion bombardment.     

Computer simulation of CAICISS spectra of clean Cu(1 0 0) surface and Cu(1 0 0) surface by Pt deposition

The clean Cu(1 0 0) surface and Pt/Cu(1 0 0) surface by Pt deposition at room temperature have been investigated using the computer simulation of coaxial impact-collision ion scattering spectroscopy (CAICISS). The computer simulations employing the ACOCT program code, which treats the atomic collisions three-dimensionally and is based on the binary collision approximation (BCA), were carried out for the case of 3 keV He⁺ ions incident along the 〈1 0 0〉 and 〈1 1 0〉 azimuths of the clean Cu(1 0 0) and Pt/Cu(1 0 0) surfaces. The comparisons between ACOCT results and experimental CAICISS data show that the experimental results on the clean Cu(1 0 0) surface are relatively well reproduced by the ACOCT simulations including the inward relaxation of 1.2% in the first interlayer spacing and the outward relaxation of 1.6% in the second interlayer spacing, and that the ACOCT simulations for the Pt deposition with coverages of 2.35 ML and 2.75 ML on the Cu(1 0 0) surface appear the concentrations of 0.24 ML of Pt sitting 2.3 Å and 0.25 ML of Pt sitting 2.5 Å above the outermost atomic layer, respectively.     

Investigations on the effect of 100 MeV Ni ions irradiated chloride vapour phase epitaxy (Cl-VPE) grown GaN epilayers

Gallium nitride (GaN) epilayers have been grown by chloride vapour phase epitaxy (Cl-VPE) technique and the grown GaN layers were irradiated with 100 MeV Ni ions at the fluences of 5 × 10¹² and 2 × 10¹³ ions/cm². The pristine and 100 MeV Ni ions irradiated GaN samples were characterized using X-ray diffraction (XRD), UV-visible transmittance spectrum, photoluminescence (PL) and atomic force microscopy (AFM) analysis. XRD results indicate the presence of gallium oxide phases after Ni ion irradiation, increase in the FWHM and decrease in the intensity of the GaN (0 0 0 2) peak with increasing ion fluences. The UV-visible transmittance spectrum and PL measurements show decrease in the band gap value after irradiation. AFM images show the nanocluster formation upon irradiation and the roughness value of GaN increases with increasing ion fluences.     

Deposition of titanium nitride on Si(1 0 0) wafers using plasma focus

Titanium nitride thin films were deposited on Si(1 0 0) substrates by using a low energy (2.3 KJ) Mather-type plasma focus device. The composition of the deposited films was characterized by X-ray diffraction (XRD). The crystallite size has strong dependence on the numbers of focus shots. The crystallinity of TiN thin films is found to increase with increasing the number of focus shots. The effect of different number of focus shots on micro structural changes of thin films was characterized by Scanning Electron Microscope (SEM) and Atomic Force Microscope (AFM). SEM results showed net-like structure for film deposited for 15 numbers of shots, which are elongated grains of Si₃N₄ in amorphous form embedded into TiN crystals. The average surface roughness was calculated from AFM images of the thin films. These results indicated that the average surface roughness increased for films deposited with increased number of focus shots. The least crystallite size and roughness are observed for film deposited with 25 focus shots.     

Ionization probability of secondary ions sputtered from Si(1 1 1) and Ge(1 1 1) surfaces

We have measured the energy distributions of the secondary ions sputtered from the Si(1 1 1) and Ge(1 1 1) surfaces and investigated the ionization probabilities of sputtered Si⁺ and Ge⁺ ions for clarifying their ionization mechanisms. The observed ionization probabilities depend on the velocity of Si⁺ and Ge⁺ ions. This velocity dependence can be successfully analyzed by a theoretical expression, which was proposed originally for the metal surfaces. This implies that the ionization mechanism of Si⁺ and Ge⁺ ions is the same as ions sputtered from the metal surface, i.e., the resonant electron transfer in the high velocity regime and the thermal excitation process in the low velocity regime. The difference in the ionization probability between Si⁺ and Ge⁺ ions is well explained by the difference in the band gap energy.     

Study of 200 MeV Ag ion induced amorphisation in nickel ferrite thin films

Thin films of nickel ferrite of thickness ∼100 and 150 nm were deposited by pulsed laser deposition. The films were irradiated with a 200 MeV Ag¹⁵⁺ beam of three fluences 1 × 10¹², 2 × 10¹² and 4 × 10¹² ions/cm². X-ray diffraction showed a decrease in the intensity of peaks indicating progressive amorphisation with increased irradiation fluence. Fourier transform infra-red and Raman spectra of pristine and irradiated films were also recorded which showed a degradation of the crystallinity of the samples after irradiation. The damage cross section of the infra-red bands was determined. It was found that the two bands at 557 and 614 cm⁻¹ did not show similar behaviour with fluence.     

Nanoscale self-affine surface smoothing by ion bombardment and the morphology of nanostructures grown on ion-bombarded surfaces

Surface smoothing by ion-bombardment with the concomitant formation of self-affine fractal surfaces at nanometer length scales is reviewed. Results of investigation of the dependence of surface smoothing on ion fluence and the threshold fluence for the formation of self-affine surfaces are presented. Finally, the morphology of self-assembled nanostructures grown by molecular beam epitaxy on surfaces of different fractal dimensions is investigated via studies of the roughness scaling exponent and the correlation length. While the self-assembled Ge islands grown on a pristine Si(1 0 0) surface are square or rectangular shaped, those on the ion-irradiated surface are nearly diamond-shaped.     

Optical absorption and thermoluminescence studies in 100 MeV swift heavy ion irradiated CaF2 crystals

Pure and Ytterbium (Yb) doped Calcium fluoride (CaF₂) single crystals were irradiated with 100 MeV Ni⁷⁺ ions for fluences in the range 5 × 10¹¹-2.5 × 10¹³ ions cm⁻². The irradiated crystals were characterized by Optical absorption (OA) and Thermoluminescence (TL) techniques. The OA spectra of ion irradiated pure CaF₂ crystals showed a broad absorption with peak at ∼556 nm and a weak one at ∼220 nm, whereas the Yb doped crystals showed two strong absorption bands at ∼300 and 550 nm. From the study of OA spectra, the defect centers responsible for the absorption were identified. TL measurements of Ni⁷⁺ ion irradiated pure CaF₂ samples indicated a strong TL glow with peak at ∼510 K. However, the Yb doped crystals showed two TL glows at ∼406 and 496 K. The OA and TL intensity were found to increase with increase of ion fluence upto 1 × 10¹³ ions cm⁻² and thereafter it decreased with further increase of fluence. The results obtained are discussed in detail.     

8 MeV electron irradiation effects in silicon photo-detectors

Results of investigations on the electrical properties of n⁺-p-p⁺ silicon (Si) photo-detectors irradiated with 8 MeV electrons are presented. The photo-detectors were irradiated with electrons of doses up to 100 kGy. Current-voltage (I-V) and capacitance-voltage (C-V) characteristics under dark conditions were measured as a function of dose. A significant change in the diffusion component of the saturation current is observed after irradiation, while the generation-recombination component of the saturation current remains almost unchanged. The series resistance is found to increase with increasing dose while the shunt resistance and carrier concentration decrease with dose. Optoelectronic properties, namely short circuit current I_sc, open circuit voltage V_oc under air mass zero illumination and spectral response, were measured at various doses. From the spectral responses of the devices, the minority carrier diffusion length was estimated.     

X-ray photoelectron and Raman spectroscopic studies of MeV proton irradiated graphite

Poly-crystalline graphite samples were irradiated using 2.25 MeV H⁺ ions with a fluence of 2 × 10¹⁷ ions/cm². Magnetic ordering in highly oriented pyrolytic graphite samples have been reported earlier under the similar irradiation conditions [Esquinazi et al., Phys. Rev. Lett. 91 (2003) 227201]. In that study, the authors attribute the observed irradiation induced magnetic ordering to the formation of a mixed sp²-sp³ hybridized carbon atoms. In the present study, we report the X-ray photoelectron and Raman spectroscopic studies on pristine and irradiated samples. Irradiated samples are found to show an increased number of sp³ hybridized carbon atoms. However, the Raman spectrum, specially the second order data, do indicate that the nature of the graphene lattice structure has been preserved in the irradiated samples. The mechanisms for the irradiation induced enhancement in sp³ hybridization are discussed.     

Swift iodine ion modification of the structural and magnetotransport properties of Fe/Cr systems

Fe/Cr/Fe trilayers and (Fe/Cr)₂₀ multilayers prepared under ultrahigh vacuum conditions by thermal evaporation were irradiated with 200 MeV I¹³⁺ ions in the fluence range between 1 × 10¹¹ and 8 × 10¹² I/cm². The structural properties of the Fe/Cr/Fe trilayers and (Fe/Cr)₂₀ multilayers were measured by X-ray reflectivity (XRR) and conversion electron Mössbauer spectroscopy (CEMS). Magnetic exchange coupling between the Fe layers through the Cr spacer layer was observed by SQUID magnetization measurements. Magnetoresistance effect was measured using four probe method at room temperature. The XRR spectra showed an increase of the interface roughness versus increasing irradiation fluence in the multilayers, while in the trilayers smoothening of the interfaces in the sample irradiated with fluence equal to 4 × 10¹¹ I/cm² and very slight change for other fluences were observed. Improving of the interface structure in the trilayers at this fluence was observed also by CEMS. Moreover the Mössbauer spectra also confirm roughening of the interfaces as a function of fluence for multilayers. Before irradiation an antiferromagnetic coupling fraction dominated in all samples. After irradiation the changes of magnetic coupling were different in both types of samples. The trilayers were less sensitive to the irradiation fluence than multilayers and an increase of the antiferromagnetic fraction at small fluences was observed. In the multilayers a continuous decrease of the antiferromagnetic fraction as a function of fluence was evidenced. Vanishing of the antiferromagnetic coupling, observed for the largest fluence, resulted in the decrease of magnetoresistance effect in the Fe/Cr multilayers.     

Change in magnetic properties of MgB2 thin films after irradiation by 200 MeV Au ion beam

The SHI irradiation induced effects on magnetic properties of MgB₂ thin films are reported. The films having thickness 300-400 nm, prepared by hybrid physical chemical vapor deposition (HPCVD) were irradiated by 200 MeV Au ion beam (S_e ∼ 23 keV/nm) at the fluence 1 × 10¹² ion/cm². Interestingly, increase in the transition temperature T_c from 35.1 K to 36 K resulted after irradiation. Substantial enhancement of critical current density after irradiation was also observed because of the pinning provided by the defects created due to irradiation. The change in surface morphology due to irradiation is also studied.     

Effect of swift heavy ion irradiation on the surface morphology of highly c-axis oriented LSMO thin films grown by pulsed laser deposition

A detailed investigation of the surface morphology of the pristine and swift heavy ion (SHI) irradiated La_0.7Sr_0.3MnO₃ (LSMO) thin film using atomic force microscope (AFM) is presented. Highly c-axis oriented LSMO thin films were grown on LaAlO₃ (1 0 0) (LAO) substrates by the pulsed laser deposition (PLD) technique. The films were annealed at 800 °C for 12 h in air (pristine films) and subsequently, irradiated with SHI of oxygen and silver. The incident fluence was varied from 1 × 10¹² to 1 × 10¹⁴ ions/cm² and 1 × 10¹¹ to 1 × 10¹² ions/cm² for oxygen and silver ions, respectively. X-ray diffraction (XRD) studies reveal that the irradiated films are strained. From the AFM images, various details pertaining to the surface morphology such as rms roughness (σ), the surface rms roughness averaged over an infinite large image (σ_∞), fractal dimension (D_F) and the lateral coherence length (ξ) were estimated using the length dependent variance measurements. In case of irradiated films, the surface morphology shows drastic modifications, which is dependent on the nature of ions and the incident fluence. However, the surface is found to remain self-affine in each case. In case of oxygen ion irradiated films both, σ_∞ and D_F are observed to increase with fluence up to a dose value of 1 × 10¹³ ions/cm². With further increase in dose value both σ_∞ and D_F decreases. In case of silver ion irradiated films, σ_∞ and D_F decrease with increase in fluence value in the range studied.     

Real-time X-ray studies of the growth of Mo-seeded Si nanodots by low-energy ion bombardment

Silicon surface evolution during room temperature low-energy (300, 500 and 1000 eV) normal incidence Ar⁺ ion bombardment in the presence of Mo seed atoms has been studied with real-time grazing-incidence small-angle X-ray scattering and ex situ atomic force microscopy. When a small amount of Mo atoms was supplied to the Si surface during ion bombardment, the development of correlated structures with two different characteristic length scales was observed. The shorter length scale features (“dots”) coarsened with time until they reached a constant spatial wavelength. The longer length scale corrugations associated with kinetic roughening, however, continued to grow in amplitude during bombardment. The overall roughness is dominated by different corrugations at different times in the kinetic evolution, showing a complex behavior. The evolution of the kinetic roughening can be described by the Family-Vicsek scaling hypothesis, but measured scaling exponents are not in agreement with those of existing models.     

Surface exfoliation and defect structures in Si induced by 160 keV He and 110 keV H ion implantation

Cz n-type Si(100) wafers were implanted at room temperature with 160 keV He ions at a fluence of 5 × 10¹⁶/cm² and 110 keV H ions at a fluence of 1 × 10¹⁶/cm², singly or in combination. Surface phenomena and defect microstructures have been studied by various techniques, including scanning electron microscopy (SEM), atomic force microscopy (AFM) and cross-sectional transmission electron microscopy (XTEM). Surface exfoliation and flaking phenomena were only observed on silicon by successive implantation of He and H ions after subsequent annealing at temperatures above 400 °C. The surface phenomena show strong dependence on the thermal budget. At annealing temperatures ranging from 500 to 700 °C, craters with size of about 10 μm were produced throughout the silicon surface. As increasing temperature to 800 °C, most of the implanted layer was sheared, leaving structures like islands on the surface. AFM observations have demonstrated that the implanted layer is mainly transfered at the depth around 960 nm, which is quite consistent with the range of the ions. XTEM observations have revealed that the additional low fluence H ion implantation could significantly influence thermal growth of He-cavities, which gives rise to a monolayer of cavities surrounded by a large amount of dislocations and strain. The surface exfoliation effects have been tentatively interpreted in combination of AFM and XTEM results.     

Desorption of gold nanoclusters (2-30 nm) under low excitation of their electronic subsystem by Ar ions (14 keV/nm)

Gold nanodispersed targets with islands-grains sized 2-30 nm were irradiated by Ar⁷⁺ ions with the energy of 45.5 MeV and (dE/dx)_e = 14.2 keV/nm in gold. The desorbed gold nanoclusters were studied by TEM method. For all the targets desorption of intact gold nanoclusters is observed. However, for inelastic stopping of monatomic Ar ions in gold of 14.2 keV/nm desorption of nanoclusters is observed only up to ∼25 nm. The yield of the desorbed nanoclusters considerably decreases from 3 to 0.02 cluster/ion with the increase of the mean size of the desorbed nanoclusters from 3 to 14.2 nm. The results are discussed.     

Effect of 200 MeV Ag ion irradiation on structural and electrical transport properties of Fe3O4 thin films

Thin films of Fe₃O₄ have been deposited on single crystal MgO(1 0 0) and Si(1 0 0) substrates using pulsed laser deposition. Films grown on MgO substrate are epitaxial with c-axis orientation whereas, films on Si substrate are highly 〈1 1 1〉 oriented. Film thicknesses are 150 nm. These films have been irradiated with 200 MeV Ag ions. We study the effect of the irradiation on structural and electrical transport properties of these films. The fluence value of irradiation has been varied in the range of 5 × 10¹⁰ ions/cm² to 1 × 10¹² ions/cm². We compare the irradiation induced modifications on various physical properties between the c-axis oriented epitaxial film and non epitaxial but 〈1 1 1〉 oriented film. The pristine film on Si substrate shows Verwey transition (T_V) close to 125 K, which is higher than generally observed in single crystals (121 K). After the irradiation with the 5 × 10¹⁰ ions/cm² fluence value, T_V shifts to 122 K, closer to the single crystal value. However, with the higher fluence (1 × 10¹² ions/cm²) irradiation, T_V again shifts to 125 K.     

Physical and chemical response of 145 MeV Ne ion irradiated polymethylmethacrylate (PMMA) polymer

Characterization of ion induced modifications in the physical, chemical and structural properties of polymethylmethacrylate (PMMA) polymer induced by 145 MeV Ne⁶⁺ ions has been carried out by FTIR, UV-Visible, Differential scanning calorimetry (DSC) and X-ray diffraction. Heavy ion irradiation was carried out under a vacuum of ∼10⁻⁶ torr at Variable Energy Cyclotron Centre, Kolkata, India using a low beam current (∼15 nA). Ion fluences of 10¹⁰, 10¹¹, 10¹², 10¹³ ions/cm² were used. The optical band gap (E_g), calculated from the absorption edge of the UV-Vis spectra of these films in 200-800 nm region varied from 2.167 eV to 1.512 eV for virgin and irradiated samples. In FTIR spectra appreciable changes have been observed after irradiation, indicating the molecular fragmentation, cross-linking, formation of unsaturated groups and free radicals. DSC thermograms give information about the thermal stability and type of thermal reactions (exothermic/endothermic) on the application of heat to the polymer. XRD analyses show slight shift of peak position and significant changes in peak intensity. XRD results show a decrease of ∼4.12% in crystallite size of irradiated sample at the higher fluence of 10¹² ions/cm².