用电镀铜锡合金薄膜实现圆片级气密封装

开发了一种基于电镀铜锡合金薄膜的绝压气压传感器圆片级气密封装技术以降低常规的基于阳极键合气密封装技术的成本及难度。通过实验确定了铜锡合金薄膜的电镀参数,实现了结构参数为:Cr/Cu/Sn(30nm/4μm/4μm)的铜锡合金薄膜;通过共晶键合实验确定圆片级气密封装的参数,进行了基于铜锡材料的气密封装温度实验。通过比较各种不同温度下气密封装的结果,确定了完成圆片级气密封装的条件为:静态压力0.02 MPa,加热温度280°,保持20min。最后,对气密封装效果进行X-射线衍射谱(XRD)、X射线分析、剪切力以及氦气泄露分析等实验研究。XRD分析显示:在键合界面出现了Cu3Sn相,证明形成了很好的键合;X射线分析表明封装面无明显孔洞;剪切力分析给出平均键合强度为9.32 MPa,氦气泄露分析则显示泄露很小。得到的结果表明:基于电镀铜锡合金薄膜可以很好地实现绝压气压传感器的圆片级气密封装。     

芯片级原子器件MEMS碱金属蒸气腔室制作

提出了基于两步低温阳极键合工艺的碱金属蒸气腔室制作方法,用于实现原子钟、原子磁力计及原子陀螺仪等器件的芯片级集成.由微机电系统(MEMS)体硅工艺制备了腔室结构.首先采用标准工艺将刻蚀有腔室的硅圆片与Pyrex玻璃阳极键合成预成型腔室,然后引入氮缓冲气体和由惰性石蜡包覆的微量碱金属铷或铯.通过两步阳极键合来密封腔室,键合温度低于石蜡燃点198℃.第一步键合预封装腔室,键合电压小于缓冲气体的击穿电压.第二步键合在大气氛围中进行,电压增至1 200 V来增强封装质量.通过高功率激光器局部加热释放碱金属,同时在腔壁上形成均匀的石蜡镀层以延长极化原子寿命.本文实现了160℃的低温阳极键合封装,键合率达到95％以上.封装的碱金属铷释放后仍具有金属光泽,实现的最小双腔室体积为6.5 mm×4.5 mm×2 mm.铷的吸收光谱表明铷有效地封装在腔室中,证明两步低温阳极键合工艺制作碱金属蒸气腔室是可行的.     

球磨参数对石墨烯增强铜基复合材料性能的影响

采用粉末冶金法制备石墨烯增强铜基复合材料,研究全方位行星球磨机的球磨速度、球磨时间和球料比对复合材料的密度、显微硬度、导电率和拉伸性能的影响,并利用扫描电子显微镜(SEM)分析复合材料的显微形貌。结果表明:采用合适的球磨参数,石墨烯在铜基体中分散均匀;但球磨时间过长、球磨速度过快会导致石墨烯团聚,与铜基体之间的界面结合效果变差;随球料比的增加,复合材料的抗拉强度、延伸率和导电率明显改善;球磨速度为400 r/min时,显微硬度和导电率显示出相似的变化趋势。球磨时间直接影响石墨烯在铜基体中分散效果,球磨转速和球料比则影响铜粉颗粒的塑性变形以及石墨烯与铜基体的有效结合,当球料比为3∶1,球磨速度为300 r/min,球磨时间为6～8 h时复合材料的性能最优。     

工艺参数对石墨/铜基复合材料导电性能的影响

为了制备导电性能良好的石墨/铜基复合材料,研究了球磨时间、热压烧结及热挤压等工艺参数对其导电性能的影响;用扫描电镜分析了材料的拉伸断口形貌.结果表明:复合材料的导电性随球磨时间的延长和挤压温度的提高呈现先升高后降低的规律;提高挤压比和烧结温度、增加热压烧结时的压力以及延长烧结保温时间均有利于改善复合材料的导电性;球磨3h石墨/铜复合粉经压制(压力700 MPa、保压30 s)、真空热压烧结(压力48 MPa、烧结温度600℃、保温1h)和热挤压(挤压温度750℃、挤压比16)后,铜基体连接成连续的三维网络,且石墨均匀分布在网络之间,有效地发挥了石墨/铜基复合材料中铜的导电性.     

MEMS封装中阳极键合技术的影响因素研究和设计因素分析

结合MEMS气密性封装的需要,以玻璃与硅晶片阳极键合为例,给出阳极键合的封装工艺,从键合机理的角度研究了玻璃与硅阳极键合的影响因素,并就玻璃与硅阳极键合的设计因素做了分析,得到直径为100mm的Pyrex7740玻璃晶片和硅晶片在键合温度为500℃时,硅晶片的径向应力σrr=134.29MPa;键合后晶片的径向膨胀μ=0.1274mm。     

谐振式MEMS压力传感器的制作及圆片级真空封装

为了提高传感器的品质因数,有效保护谐振器,提出了一种基于绝缘体上硅(SOI)-玻璃阳极键合工艺的谐振式微电子机械系统(MEMS)压力传感器的制作及真空封装方法。该方法采用反应离子深刻蚀技术(DRIE),分别在SOI晶圆的低电阻率器件层和基底层上制作H型谐振梁与压力敏感膜;然后,通过氢氟酸缓冲液腐蚀SOI晶圆的二氧化硅层释放可动结构。最后,利用精密机械加工技术在Pyrex玻璃圆片上制作空腔和电连接通孔,通过硅-玻璃阳极键合实现谐振梁的圆片级真空封装和电连接,成功地将谐振器封装在真空参考腔中。对传感器的性能测试表明:该真空封装方案简单有效,封装气密性良好;传感器在10kPa~110kPa的差分检测灵敏度约为10.66 Hz/hPa,线性相关系数为0.99999 542。     

基于超声振动的阳极键合试验台设计

基于超声振动理论,针对当前阳极键合面临的键合温度较高、易产生残余应力对器件结构造成破坏等问题,在分析超声在机械加工中的应用后,创造性地将超声振动应用到MEMS封装中的阳极键合工艺中来,设计了一种键合强度高、试验温度低、结构简单、工作可靠的超声振动阳极键合试验台,为研制超声振动阳极键合机奠定了坚实基础,对于缩短阳极键合时间、降低阳极键合所需温度、提高MEMS器件的键合性能、满足实际生产需要具有重要意义。     

基于MEMS技术的原子气室封装工艺

在基于MEMS技术原子气室的制备工艺中，难度较大的是碱金属的填充技术及阳极键合封装工艺，该工艺流程直接影响原子气室的质量。为进一步简化原子气室的制备工艺，设计了“双腔式”原子气室结构，采用先阳极键合，再化学反应的方法实现了原子气室批量化的封装。单个原子气室体积为6 mm×4 mm×2.5 mm,经氦气细检漏气率平均达到5×10^-8 Pa·m³·s^-1,通过搭建实验平台，测得了不同温度下的原子气室D1线吸收谱线图，实验结果表明原子气室封装成功。     

辅助溶剂对PMMA微流控芯片模内键合的影响

为了提高聚合物微流控芯片的键合效率,以聚甲基丙烯酸甲酯(PMMA)微流控芯片为对象,以微型注塑机为平台,研究了聚合物模内键合方法.利用注塑机提供的合模力作为键合力,利用模温机提供键合温度,选择异丙醇作为辅助溶剂,借助溶剂溶解特性来降低模内键合中的键合温度和压力.在30～70℃,用测量显微镜和台阶仪测试分析了不同键合温度条件下,辅助溶剂对芯片的表面形貌和微通道结构的影响;利用辅助溶剂进行模内键合实验,用电子万能实验机测试了芯片的键合强度,对模内键合工艺参数进行了优化.结果表明:异丙醇对键合质量的影响与键合温度、键合时间有关,在较高温度下会使芯片产生皲裂、微沟槽变形和堵塞;在键合温度为35℃,键合时间为5 min时,芯片的表面质量和微沟槽形貌较完整,键合强度不小于2.64 MPa.     

PDMS基体等离子法键合工艺及效果分析

为探究聚二甲基硅氧烷(PDMS)基体在等离子法下以不同工艺参数处理及处理后在不同键合时间,键合加载压力下的PDMS-PDMS键合效果,设计进行了3因素4水平正交试验及对比试验。试验结果表明:因素影响从主到次的顺序为空气流量、改性时间、射频功率,得到快速不可逆键合(键合5 min)工艺参数:400 W,2.5 L/min,2 min;中、高射频功率(300 W以上)键合10 h键合效果达到实验要求,低射频功率(200 W以下)键合超过24 h仍未达到试验要求;当键合加载压力超过0.4 MPa时,键合效果显著提升。     

Minimal Realization of Linear Graph Models for Multi-physics Systems

An engineering system may consist of several different types of components,belonging to such physical"domains"as mechanical,electrical,fluid,and thermal.It is t...     

Non-monotonic material contrast in scanning ion and scanning electron images

30 keV Ga⁺ focused ion beam induced secondary electron (iSE) imaging was used to determine the relative contrast between several materials. The iSE signal compared from C, Si, Al, Ti, Cr, Ni, Cu, Mo, Ag, and W metal layers does not decrease with an increase in target atomic number Z₂, and shows a non-monotonic relationship between contrast and Z₂. The non-monotonic relationship is attributed to periodic fluctuations of the stopping power and sputter yield inherent to the ion–solid interactions. In addition, material contrast from electron-induced secondary electron (eSE) and backscattered electron (BSE) images using scanning electron microscopy (SEM) also shows non-monotonic contrast as a function of Z₂, following the periodic behavior of the stopping power for electron–solid interactions. A comparison of the iSE and eSE results shows similar relative contrast between the metal layers, and not complementary contrast as conventionally understood. These similarities in the contrast behavior can be attributed to similarities in the periodic and non-monotonic function defined by incident particle–solid interaction theory.     

Application of Feature Extraction through Convolution Neural Networks and SVM Classifier for Robust Grading of Apples

This paper proposes a novel grading method of apples,in an automated grading device that uses convolutional neural networks to extract the size,color,texture,an...     

分布动态载荷识别的抗噪处理

针对正交多项式频域法在用多种响应对矩形薄板进行载荷识别中抗噪性较差的问题,综合运用平均法、矩阵预处理和奇异值截断法等方法对之进行改善,并引入空间映射的思想,将该方法的应用范围拓展为复杂的模型.利用仿真算例,证实了该方法具有较好的抗噪性.     

基于MELTAC-N平台的核电厂安全级DCS环网研究与测试

针对工程实践中环网通讯相关问题的处理缺乏理论基础及国产化安全级DCS平台的开发缺乏成熟经验借鉴问题,对基于MELTAC-N平台核电厂安全级DCS环网的软硬件实现进行了研究。提出了安全级DCS环网双环网冗余设计、光切换开关设计等硬件设计方法,以及以RPR协议为基础,采用全数据收发策略的软件设计方法。在CPR1000安全级DCS平台上对安全级DCS环网的可靠性及实时性进行了评价,并进行了容错能力、响应时间及响应时间稳定性测试验证实验。结果表明,基于MELTAC-N平台安全级DCS环网软硬件设计具有较好的容错能力及响应时间稳定性。     

The laboratory simulation of abrasive wear

Abrasive wear has long been recognised as one of the most potentially serious tribological problems facing the operators of many types of plant and machinery; several industrial surveys have indicated that wear by abrasion can be responsible for more than 50% of unscheduled machine and plant stoppages. Locating the operating point of a tribological contact in an appropriate operational ‚map’︁ can provide a useful guide to the likely nature and origins of the surface degradation experienced in use, though care must be exercised in choosing the most suitable parameters for the axes of the plot. Laboratory testing of materials and simulations of machine contacts are carried out for a number of purposes; at one level for the very practical aims of ranking candidate materials or surface hardening treatments in order of their wear resistance, or in an attempt to predict wear lives under field conditions. More fundamentally, tests may be aimed at elucidating the essential physical mechanisms of surface damage and loss, with the longer term aim of building an analytical and predictive model of the wear process itself. In many cases, component surface damage is brought about by the ingress of hard, particulate matter into machine bearing or sealing clearances. These may be running dry although, more usually, a lubricant or service fluid is present at the interface. A number of standardised wear test geometries and procedures have been established for both two- and three-body wear situations, and these are briefly described. Although abrasive wear is often modelled as following an ‚Archard’︁ equation (i.e. a linear increase in material loss with both load and time, and an inverse dependence on specimen hardness) both industrial experience and laboratory tests of particularly lubricated contacts show that this is not always the case: increasing the hardness differential in an abrasively contaminated lubricated pair may not always reduce the rate of damage to the harder surface.     

Limits of topographic measurement by the scanning tunnelling and atomic force microscopes

Parameters describing the topographic character of a surface (height, surface wavelength, slope and curvature) can be derived from equivalent sinusoidal profiles. The response of a surface-measuring instrument may be modelled in terms of instrument parameters such as stylus radius, and scanning range and resolution. The performance of the instrument may then be mapped as a zone in amplitude-wavelength (AW) space to show the sinusoidal profiles it is capable of measuring. In a first-order analysis the STM and AFM are considered as equivalent to contact-stylus instruments with a notional stylus radius equal to the tip radius plus the gap. Comparisons between different instruments and types of instrument are readily made by mapping in AW space. The error arising from convolution of the sinusoidal profile with that of the finite tip may be quantified and plotted as contours in AW space.     

Fractional order nonsingular terminal sliding mode control for flexible spacecraft attitude tracking

This paper investigates a fractional terminal sliding mode control for flexible spacecraft attitude tracking in the presence of inertia uncertainties and extern...     

奥氏体不锈钢表面双辉等离子渗锆的动力学

利用双辉等离子渗金属技术在0Cr18Ni9Ti奥氏体不锈钢表面制备了一层均匀、致密、呈良好冶金结合的渗锆合金层,并对1 060℃下的渗锆动力学进行了研究。结果表明:随着距锆合金层表面距离的增加,锆元素的含量呈梯度递减,扩散系数逐渐减小,而扩散激活能逐步增大;在1 060℃采用双辉等离子技术渗锆时,渗锆合金层表层的空位密度为2.945×(1012~1013)cm-2,与相同温度下采用常规渗金属工艺相比,提高了1~2个数量级。     

气化炉三维扫描测量与数据处理

以德士古气化炉耐火砖的内壁蚀损检测设备为基础,对采集到的点云数据做了进一步处理.通过对数据的筛选和剔除,实现了数据点的平滑降噪细化和精简.然后利用点云对整、网格划分和分色显示等方法,最终完成了内壁腐蚀情况的三维建模.重点讨论了点云数据的预处理及后处理的方法,并根据内壁耐火砖的腐蚀阈值,提出了一种气化炉内壁腐蚀区域的识别与分割方法.对耐火砖的腐蚀分析、气化炉的生产与维修提供了可靠依据,并在工程应用中获得了一致认可.