The realization of an integrated Mach-Zehnder waveguide immunosensor in silicon technology

We describe the realization of a symmetric integrated channel waveguide Mach-Zehnder sensor which uses the evanescent field to detect small refractive-index changes (Δn_min ≈ 1 × 10⁻⁴) near the guiding-layer surface. This guiding layer consists of ridge structures with a height of 3 nm and a width of 4 μm made in Si₃N₄. This layer has a thickness of 100 nm. The sensor device has been tested with glucose solutions of different bulk refractive indices. Results of a slab-model calculation are in good agreement with obtained experimental results. The feasibility of applying this sensor for immunosensing, detecting directly the binding of antigen to an antibody receptor surface, is shown with antibody-antigen binding experiments.     

High sensitivity ethanol gas sensor integrated with a solid-state heater and thermal isolation improvement structure for legal drink-drive limit detecting

The paper reports the successful fabrication of ethanol gas sensors with tin-dioxide (SnO₂) thin films integrated with a solid-state heater, which is realized with technologies of micro-electro-mechanical systems (MEMS), and are compatible with VLSI processes. The main sensing part with dimensions of 450×400 μm² in this developed device is composed of a sensing SnO₂ film, which is fabricated by electron-gun evaporation with proper annealing in ambient oxygen gas to yield fine particles and good structure. An integrated solid-state heater with a 4.5 μm-thick cantilever bridge (1000×500 μm²) structure is made of silicon carbide (SiC) material by MEMS technologies. The sensitivity for 1000 ppm ethanol gas reaches as high as 90 with 10 s and 2 min for the response and recovery time, respectively, at an operating temperature of 300°C. Those experimental results also exhibit a much superior performance to that of a popular commercial ethanol gas sensor TGS-822. Therefore, the developed sensor with high performance is a good candidate for some specific application in automobile to detect drink-drive limit and allows an array integration available with various films for controlling each element at separate resistance.     

Sensitive PAT gene sequence detection by nano-SiO2/p-aminothiophenol self-assembled films DNA electrochemical biosensor based on impedance measurement

Nano-SiO₂/p-aminothiophenol (PATP) film was fabricated by self-assembly and electrodeposition methods. The immobilization and hybridization of DNA on the nano-SiO₂/PATP film were characterized by cyclic voltammetry (CV) and electrochemical impedance spectroscopy (EIS). EIS was applied to label-free detection of the target DNA according to the increase of the electron transfer resistance (R_et) of the electrode surface after the hybridization of the probe DNA with the target DNA. This DNA electrochemical biosensor showed its own performance of simplicity, good stability, fine selectivity and high sensitivity, and was successfully applied to the detection of the PAT gene sequences by a label-free EIS method. The dynamic detection range was from 1.0 × 10⁻¹¹ to 1.0 × 10⁻⁶ mol/L 20-base sequence of the PAT gene, with the detection limit of 1.5 × 10⁻¹² mol/L. This DNA sensor has a good ability of recognizing single- or double-base mismatched DNA sequence with the complementary DNA sequence.     

Perchlorate selective membrane electrodes based on synthesized platinum(II) complexes for low-level concentration measurements

Three synthesized platinum(II) complexes, [PtR₂(NN)] (R = Me, p-MeC₆H₄ and p-MeOC₆H₄; NN = 2,2′-bipyridyl), were studied to characterize their ability as an anion carrier in a PVC membrane electrode. The polymeric membrane electrodes (PME) and also coated glassy carbon electrodes (CGCE) prepared with [Pt(p-MeOC₆H₄)₂(NN)] showed excellent response characteristics to perchlorate ions. The electrodes exhibited Nernstian responses to ClO₄⁻ ions over a wide concentration range from 5 × 10⁻⁷ to 4.0 × 10⁻¹ M for PME and 1.5 × 10⁻⁷ to 2.7 × 10⁻¹ M for CGCE with low detection limits (4.0 × 10⁻⁷ M for PME and 1.0 × 10⁻⁷ M for CGCE). The electrodes possess fast response time, satisfactory reproducibility, appropriate lifetime and, most importantly, good selectivity toward ClO₄⁻ relative to a variety of other common anions. The potentiometric response of the electrodes is independent of the pH of the test solution in the pH range 2.5–9.5. The proposed sensors were used in potentiometric determination of perchlorate ions in mineral water, urine samples and also samples containing interfering anions. The interaction of the ionophore with perchlorate ions was shown by UV–vis spectroscopy.     

Geometrical modulation-based interferometry for displacementsensing using optically coupled suspended waveguides

A geometrical modulation-based interferometry (GMI) for a displacement sensor is presented. The implementation of the GMI is based on the suspended optical waveguide displacement sensors (SOWDSs) technology. The interferometry effect of the GMI results from light propagating in geometrically modulated and mutually coupled suspended waveguides with an in-plane degree of freedom. The building block of the suspended waveguides is a single-crystal silicon (SCS) beam with superficial layers comprising a 0.6-μm-thick SiO₂, 0.4-μm-thick Si₃N₄, and 0.6-μm-thick SiO₂. The SCS beam is fabricated with a cross section of 1.6 μm×10 μm and may guide light with wavelength in the 1.3-1.5-μm range. The first SiO₂ layer serves as a buffer layer that allows light with wavelength in the 0.6-0.9-μm range to be guided in the Si₃N₄ layer. This paper discusses the theoretical consideration and the characterizations of a GMI displacement sensor     

Micromachined silicon bolometers as detectors of soft X-ray, ultraviolet, visible and infrared radiation

This paper presents the development of micromachined thin-film silicon microbolometers which can be used for detection of soft X-ray, UV, visible and infrared radiation. The detector structure is a 1 μm thick polysilicon/Si₃N₄ membrane suspended over a cavity. This structure has been obtained by anisotropic etching of silicon with a previously deposited polysilicon/Si₃N₄ sandwich. Alternatively, porous silicon has been used as the sacrificial layer. Devices have been characterized. Good values of the voltage responsivity and detectivity have been obtained.     

Pyroelectric thin-film sensor array

Pyroelectric thin-film point detectors and 1 × 12 arrays have been fabricated and characterized. They consist of sol-gel-deposited PZT thin-film elements on micromachined Si₃N₄/SiO₂ membranes. The measured current and voltage response as a function of modulation frequency of a 1 × 12 array element is compared with finite-element calculations. Voltage responsivities of almost 3000 V W⁻¹ in vacuum and 800 V W⁻¹ in air have been achieved for 0.4 mm × 0.9 mm elements. Some point detectors have been completely packaged and correct operation in a movement detection system has been demonstrated.     

Metallic thin-film thermocouple for thermoelectric microgenerators

A new metallic thin-film thermocouple orientated towards thermoelectric microgenerators has been developed. It consists of a 3 μm thick NiCr/SiO₂/Sb multilayer structure sputter deposited onto a thermally oxidized silicon substrate. A relative Seebeck coefficient of _ab = 76 μV K⁻¹ and an optimal figure of merit of z_ab = 0.08 × 10⁻³ K⁻¹ have been measured for this material combination. Both parameters are very close to the theoretical values.     

Minimizing the distance to one evader while chasing another

To approach a simple game Δ² of P and E = {E₁, E₂} with no a priori evaders' role assignment and the payoff equal to the distance to one evader at an instant of catching another, we introduce a concept of casting and study the games Δ_1,2 and Δ_2,1 for preassigned and Δ_p² for open-loop casting procedures. Since Δ_p² is reduced to Δ_1,2 or Δ_2,1 which, in turn, are distinguished only by their notations, we focus attention mainly on Δ_1,2. According to the tenet of transition, Δ_1,2 is divided into a concatenation of Δ_1,2^b (basic) and Δ_1,2^a (auxiliary) games that model the problem before and after the first instant of E₁ capture. The games Δ_1,2^a, Δ_1,2^b, Δ_1,2 are studied one after another with use of the Isaacs' approach extended by Berkowitz, Breakwell, Bernhard et al.     

Development of a highly sensitive and selective optical chemical sensor for batch and flow-through determination of mercury ion

A very sensitive, highly selective and reversible optical chemical sensor (optode) for mercury ion is described. The sensor is based on the interaction of Hg²⁺ with 2-mercapto-2-thiazoline (MTZ) in plasticized PVC membrane incorporating a proton-selective chromoionophore (ETH5294) and lipophilic anionic sites (sodium tetraphenylborate, NaTPB). The membranes were cast onto glass substrates and used for the determination of mercury ion in aqueous solutions by batch and flow-through methods. The sensor could be used in the range 2.0 × 10⁻¹⁰ to 1.5 × 10⁻⁵ M (0.04 ng mL⁻¹ to 3 μg mL⁻¹) Hg²⁺ with a detection limit of 5.0 × 10⁻¹¹ M and a response time of <40 s. It can be easily and completely regenerated by dilute nitric acid solution. The sensor has been incorporated into a home-made flow-through cell for determination of mercury ion in flowing streams with improved sensitivity, precision and detection limit. The sensor showed excellent selectivity for Hg²⁺ with respect to several common alkali, alkaline earth and transition metal ions. The results obtained for the determination of mercury ion in river water samples using the proposed optode was found to be comparable with the well-established cold-vapor atomic absorption method.     

Perchlorate-selective membrane sensors based on two nickel-hexaazamacrocycle complexes

The perchlorate salts of nickel(II) complexes of 1,3,5,8,10,13-hexaazacyclotetradecane (1) and 1,8-tert-butyl-1,3,5,8,10,13-hexaazacyclotetradecane (2) were used in construction of PVC based membrane electrodes. These sensors show very good selectivity for ClO₄⁻ ions over a wide variety of anions. These electrodes exhibit Nernstian behavior with the slopes of 59.5 and 59.3 mV per decade for (1) and (2), respectively. The working concentration ranges of the sensors are 1.0 × 10⁻¹–9.0 × 10⁻⁷ M (1) and 1.0 × 10⁻¹–5.0 × 10⁻⁷ M (2) with the detection limits of 6.0 × 10⁻⁷ and 2.0 × 10⁻⁷ M, respectively. The response time of the both sensors is very fast, and can be used for 2 (I) and 12 (II) weeks in a pH range of 3.0–11.0. These electrodes were applied to the determination of perchlorate ions in wastewater and cattle urine samples.     

Periodic solutions of a class of nonlinear difference equations via critical point method

In this paper, we obtain some new sufficient conditions for the existence of nontrivial m-periodic solutions of the following nonlinear difference equation

by using the critical point method, where f: Z × R → R is continuous in the second variable, m ≥ 2 is a given positive integer, p_n+m = p_n for any n  Z and f(t + m, z) = f(t, z) for any (t, z)  Z × R, (−1)^δ = −1 and δ > 0.     

Computational complexity of distributed detection problems with information constraints

For a system consisting of a set of sensors S = {S₁, S₂, …, S_m} and a set of objects O = {O₁, O₂, …, O_n}, there are information constraints given by a relation R S × O such that (S_i, O_j) R if and only if S_i is capable of detecting O_j. Each (S_i, O_j) R is assigned a confidence factor (a positive real number) which is either explicitly given or can be efficiently computed. Given that a subset of sensors have detected obstacles, the detection problem is to identify a subset H O with the maximum confidence value. The computational complexity of the detection problem, which depends on the nature of the confidence factor and the information constraints, is the main focus of this paper. This problem exhibits a myriad of complexity levels ranging from a worst-case exponential (in n) lower bound in a general case to an O(m + n) time solvability. We show that the following simple versions of a detection problem are computationally intractable: (a) deterministic formulation, where confidence factors are either 0 or 1; (b) uniform formulation where (S_i, O_j) R, for all S_i S, O_j O; (c) decomposable systems under multiplication operation. We then show that the following versions are solvable in polynomial (in n) time: (a) single object detection; (b) probabilistically independent detection; (c) decomposable systems under additive and nonfractional multiplicative measures; and (d) matroid systems.     

Development of Microfabricated Cylindrical Ion Trap Mass Spectrometer Arrays

A novel approach, in which microelectromechanical systems (MEMS) technology is used for constructing miniature cylindrical ion trap (CIT) mass spectrometer (MS) arrays in silicon (Si), is described. MEMS processes were used to fabricate precise CIT geometries in a stack of Si, SiO₂, and Si₃N₄. These geometries were then selectively coated with conductive (Cr/Au) layers to obtain a functional CIT array with individual CIT radii (r₀) of 360 mum, half-thickness (z₀) of 351 mum, and aperture size (r_H) of 162 mum. Each trap of a 5 times 5 CIT array was operated in the mass selective instability mode to analyze trichloroethylene and perfluorotributylamine at a pressure of 10^-5 torr. Mass spectra from individual CITs in the array were obtained using a rasterable electron beam for internal ionization. Investigation of the operation of individual CITs in the array is a critical step toward the understanding of the overall functioning of MS arrays.     

Comparative study of spin coated and sputtered PMMA as an etch mask material for silicon micromachining

SiO₂ and Si₃N₄, are usually used to mask the selected portions during etching of silicon in anisotropic etchants like KOH but polymers are expected to be very good alternative to SiO₂ and Si₃N₄ as masking materials for MEMS applications. An adherent spin coated PMMA layer is reported to work as a mask material. It is a low temperature process, cheaper and films can be easily deposited and removed. One of the problems in its use is its adhesion to the substrate. Our previous experience in the field made us feel that sputtered PMMA will act as better mask because of its better adhesion to silicon. In the present article, a comparative study of spin coated PMMA with sputtered PMMA as an etch mask for silicon micromachining is reported. Structural and adhesive characteristics of the films are determined and compared with those available in the literature. These films deposited on silicon wafer were exposed to anisotropic etchant, KOH, to estimate the masking behavior. The maximum masking time of 32 min in 20 wt.% KOH at 80 °C was obtained for spin coated PMMA samples, which were prebaked at 90 °C. Masking time of sputter deposited PMMA films was found to be 300 min under similar conditions such as 20 wt.% KOH at 80 °C. This masking time is sufficient for fabrication of various MEMS structures, thus indicating candidature of sputtered PMMA as masking material. Various properties of the films are discussed and compared with the ones obtained through literature.     

Efficient enumeration of all minimal separators in a graph

This paper presents an efficient algorithm for enumerating all minimal a-b separators separating given non-adjacent vertices a and b in an undirected connected simple graph G = (V, E), Our algorithm requires O(n³R_ab) time, which improves the known result of O(n⁴R_ab) time for solving this problem, where ¦V¦= n and R_ab is the number of minimal a-b separators. The algorithm can be generalized for enumerating all minimal A-B separators that separate non-adjacent vertex sets A, B < V, and it requires O(n²(n − n_A − n_b)R_AB) time in this case, where n_a = ¦A¦, n_B = ¦B¦ and r_AB is the number of all minimal A−B separators. Using the algorithm above as a routine, an efficient algorithm for enumerating all minimal separators of G separating G into at least two connected components is constructed. The algorithm runs in time O(n³R⁺_Σ + n⁴R_Σ), which improves the known result of O(n⁶R_Σ) time, where R_σ is the number of all minimal separators of G and R_ΣR⁺_Σ = ∑_1i, v_j) ER_vivj n − 1)/2 − m)R_Σ. Efficient parallelization of these algorithms is also discussed. It is shown that the first algorithm requires at most O((n/log n)R_ab) time and the second one runs in time O((n/log n)R⁺_Σ+n log nR_Σ) on a CREW PRAM with O(n³) processors.     

Confluent general-factorial difference and derivative operators and polynomial-exponential interpolation

A previous application of the Newton divided difference series of the displacement function E^z = (1 + Δ)^z = e ^Dz, where the operators Δ and D are the variables, to purely exponential interpolation employing general-factorial differences and derivatives, {Pi;^m_i=0 (Δ - S_i)}f(0) and {Pi;^m_i=0 (D - t_i)}f(0), in which the s_i's and t_i's are distinct[1], is here extended to mixed polynomial-exponential interpolation where the s_i's and t_i's are no longer distinct.     

Performance of a highly sensitive optical waveguide Mach-Zehnder interferometer immunosensor

We describe a highly sensitive sensor which uses the evanescent field of a reusable planar optical waveguide as the sensing element. The waveguide used is optimized to obtain a steep dependence of the propagation velocity on the refractive-index profile near the surface. The adsorption of a layer of proteins thus results in a phase change, which is measured interferometrically using a Mach-Zehnder interferometer set-up. The stability of the interferometer is such that phase changes ≈ (1 × 10⁻²)2π per hour can be measured. Immunoreactions have been monitored down to concentrations of 5 × 10⁻¹¹ M of a 40 kDa protein.     

Ti–W–O sputtered thin film as n- or p-type gas sensors

We present some recent trends about research on gas sensors based on semiconducting thin films together with a discussion on the development of novel nanostructured materials such as TiO, TiO₂, and WO₃ in single phase or as mixed oxides. The films, deposited by RF reactive sputtering from a composite target of W and Ti at two different abundances, are investigated through scanning and transmission electron microscopy (SEM and TEM) techniques for structural characterisation and by volt-amperometric technique for electrical and gas-sensing properties. All of the layers were capable to sense NO₂, no effect of poisoning of the surface was recorded, and recovery of the resistance was complete. A concentration as low as 0.5 ppm was detected with a relative change in the resistance ΔR/R about 1400% and as short a response time as 2 min. A detection limit lower than 100 ppb of NO₂ is expected.     

Integrated optical pH sensor using replicated chirped grating coupler sensor chips

Integrated optical sensor chips suitable for high-resolution pH measurements are presented. The pH-sensitive swelling of a polymer membrane is detected by refractometry using a compact multi-channel sensor module. The signal transduction is achieved by means of chirped grating couplers which allow simple yet high functionality sensor modules to be built. The experiments have been performed with high sensitivity replicated polycarbonate TiO₂ waveguide sensor chips coated with an ultrathin photopatterned hydrogel membrane having functional groups which reversibly change from the neutral state to a charged state upon acidification. A resolution δpH <±1.1×10⁻⁴ in terms of the pH (at pH 7.5) has been obtained in a dual-channel module with size 10×10×10 cm³.