一种热温差式悬空结构气体流量传感器设计

基于热温差原理,利用MEMS技术加工制备出高灵敏度微型气体流量传感器。该流量传感器采用热敏电阻器悬空结构,其热隔离性能较好,并利用温度系数大的VO2制备热敏电阻器;同时,利用机械性能和密封性能好的SU—8胶制备气流沟道,工艺简单,稳定性好,且成本较低,适合批量生产。实验表明:当传感器处于适当偏压下时,在0～30 mL/min的流速范围内响应速度快,灵敏度高,而且具有良好的线性度,适合生化检测、医疗等领域的应用。     

一种高性能MEMS气体流量传感器设计

使用MEMS技术研制出一种高灵敏度热温差式流量传感器。器件采用热隔离性能良好的衬底挖空结构,且热敏电阻器与热源距离可调,保证了系统的灵敏度和响应速度。同时热敏电阻器、加热电阻器与电桥电阻器集成在传感器片内,提高了系统的稳定性。实验表明:合适的电阻器间距可以获得较高的灵敏度,而在0~20 mL/min的量程范围内系统线性度较好,因此,在生化检测、医疗等领域具有良好的推广前景。     

宽温范围测量时NTC热敏电阻器R/T数学模型

NTC型热敏电阻器使用寿命长,具有很高的灵敏度,进行宽温度范围测量而又要求较高的精度时,R/T的非线性数学模型难以描述。基于最小二乘法的多项式逼近原理,以LNTT502FW热敏电阻器为实例,分段拟合出传感器在(-20～80℃)使用环境下的数学模型,拟和数据相对误差较小,能满足测量要求。     

磁性旋转编码传感器的研制

本文介绍的两相输出磁性旋转编码器输出电压V_(p-p)=41mV(V_(cc)=5V),灵敏度为6.3μV/(A·m~(-1)),分辨率为400p/r.实验证明,磁鼓与磁阻传感器之间存在最佳间隙,当间距为1mm时,输出最大.     

游离胆备醇酶传感器的研制

本文初步研制了一种测定游离胆固醇的酶传感器。该传感器用于流动注射法的最佳工作条件:磷酸盐缓冲液作载液(pH=6.3,0.1mol/L),流动速度为0.5mL/min,温度为27℃,检测限为0.15mg/mL～1.14mg/mL,线性响应范围0.25～1.00mg/mL,斜率0.08μA·mL/mg,响应时间为0.5～2.0min,工作寿命15d。已将该传感器用于样品分析,取得初步满意的结果。     

高g微加速度计的研究

针对侵彻过程中传感器过载失效的问题,提出了-种四边四梁结构的高g压阻加速度传感器.该结构采用硅玻键合技术控制质量块下底面到玻璃底盖的间距为5 μm,为系统提供空气阻尼使其处于最佳阻尼状态,同时玻璃底盖起到了过载保护作用,仿真分析表明该结构可承受200 000 g.的加速度载荷.最后对加工出的加速度计进行初步的测试,其灵敏度为4.5μV/g,线性度为3.1%.     

(Ni_(1-y)~(2+)Co_y~(2+))(Co_(2-x)~(3+)Fe_x~(3+))O_4系NTC热敏半导瓷新材料的研究

本文报导一种低温NTC热敏电阻的新材料——(Ni_(1-y)~(2+)Co_y~(2+))(Co_(2-x)~(3+)Fe_x~(3+))O_4系半导体陶瓷,该材料系尖晶石结构。当Ni~(2+)和Co~(2+)、Co~(3+)和Fe~(3+)按适当摩尔比共存于尖晶石相时,NTC热敏电阻器阻温特性的线性度得到改善,而且线性测温区域可向低温方向扩展。实验发现,当x=1.25,y=0.5时,线性测温区域为-70～200℃,若再加入适量的RuO_2,则线性测温区域可扩展为-90～200℃之间。 本文对热敏半导瓷的微观结构和导电机理也进行了研究。     

基于自旋阀的GMR 线性传感器的制作

利用退火技术制作出自旋阀型GMR线性传感器,传感器矫顽力低于0.01Oe,具有良好的线性,电阻条的宽度与传感器器线性范围和灵敏度直接相关,随着条宽减小,传感器器的线性范围增加而灵敏度降低,实验和理论计算的结果一致.     

长条形阵列铁芯磁通门性能研究

为了提高微型磁通门传感器的性能,改进铁芯结构,基于MEMS工艺制作了35组不同结构的长条形阵列铁芯。利用双铁芯线圈结构磁通门对制作的35组长条形阵列铁芯进行了磁通门性能指标的测试,分析了长条形阵列铁芯排列密度以及单条铁芯宽度对磁通门最佳激励电流、线性范围、灵敏度以及噪声的影响规律。研究结果表明,当单条铁芯相邻宽度为35μm以及单条铁芯宽度为60μm时,长条形阵列铁芯的磁通门综合性能指标优于传统薄膜铁芯的磁通门性能。     

全叉指电极d33模式压电悬臂梁俘能器研究

为了克服表面叉指电极d33模式微机电系统(MEMS)悬臂梁振动俘能器中存在的压电材料极化不完全、存在弯曲电场等问题,提出了一种电极贯穿于整个压电层的全d33模式MEMS悬臂梁振动俘能器.根据机电耦合模型,分析了电极尺寸与材料厚度对压电俘能器输出功率的影响.优化结果表明:当硅基底厚度为20μm、电极宽度1μm时,电极间距最优范围为25～75 μm,PZT材料最优厚度为7μm,归一化后得到功率密度为34.5mWcm-3gn-2.通过在表面叉指电极d33模式俘能器的基础上增加电镀电极工艺,设计了不锈钢基底的全d33模式MEMS俘能器的工艺流程,完成了部分单元工艺.     

Resonantly excited AlN-based microcantilevers for immunosensing

The purpose of this work is to study the performance of resonantly driven microcantilevers excited with a piezoelectric aluminium nitride thin film as a mass sensor for the detection of interactions in the field of immunosensing. Two cantilevers with different width (i.e. 300 and 200?μm), but constant length and thickness of 300 and 20?μm were considered. The figures of merit of these structures, such as the mass sensitivity and the limit of mass detection, were determined. According to the results obtained, a cantilever being 300?×?200?μm² in size and a high frequency mode was the best combination to detect antibody/antigen interactions. The previous combination was applied to detect the affinity between rabbit immunoglobulin G (IgG) and the complementary anti-rabbit IgG produced in goat. The binding was registered as a shift of the resonance frequency of the mode under investigation and the correlation between the added mass and the measured shift is analysed.     

用于薄液膜检测的同轴环盘电导传感器优化设计

液膜厚度是研究环状流液膜演化发展的重要参数,基于环状流薄液膜厚度范围,设计了基于电导法的非侵入式同轴环盘液膜测量传感器。通过有限元分析,对同轴环盘液膜测量传感器电极结构参数进行了优化设计,确定了传感器结构参数最优选择。实验表明：传感器在50μm~200μm的液膜厚度范围内具有很高的灵敏度,液膜厚度的测量误差在±3.7％以内。     

CMOS integrated elliptic diaphragm capacitive pressure sensor in SiGe MEMS

A novel CMOS integrated Micro-Electro-Mechanical capacitive pressure sensor in SiGe MEMS (Silicon Germanium Micro-Electro-Mechanical System) process is designed and analyzed. Excellent mechanical stress–strain behavior of Polycrystalline Silicon Germanium (Poly-SiGe) is utilized effectively in this MEMS design to characterize the structure of the pressure sensor diaphragm element. The edge clamped elliptic structured diaphragm uses semi-major axis clamp springs to yield high sensitivity, wide dynamic range and good linearity. Integrated on-chip signal conditioning circuit in 0.18 μm TSMC CMOS process (forming the host substrate base for the SiGe MEMS) is also implemented to achieve a high overall gain of 102 dB for the MEMS sensor. A high sensitivity of 0.17 mV/hPa (@1.4 V supply), with a non linearity of around 1 % is achieved for the full scale range of applied pressure load. The diaphragm with a wide dynamic range of 100–1,000 hPa stacked on top of the CMOS circuitry, effectively reduces the combined sensor and conditioning implementation area of the intelligent sensor chip.     

Thermal actuators featuring large displacements for passive temperature sensing

The thermal actuator presented in this paper consists of two symmetrically V-shaped beam stacks, where each stack consists of six beams in parallel. The stacks are coupled facing each other and slightly shifted along the mirror axis. Both stacks are connected to a lever beam and fixed at four anchor regions to the substrate. Due to the difference in the coefficient of thermal expansion of the material of the beams and the one of the substrate, the tip of the lever moves perpendicular to the mirror axis. The device is fabricated from galvanic deposited nickel on a silicon substrate. Finite element simulations were carried out to optimize the design with respect to the sensitivity and the maximum mechanical stress. The stress needs to be lower than the yield strength of the material. Otherwise, plastic deformations of the beams would lead to irreversible deflections of the beam tip. This limits the overall sensitivity of the design. First results of the device with 400 μm long bent beams show a linear behavior and a sensitivity of 0.5 μm/K and forces of 66 μN/K for a temperature range of ?30 °C up to +40 °C.     

反射式光纤微位移传感器

依据光纤反射调制原理进行了反射式光纤位移传感检测系统的设计,利用计数器外径千分尺的测头镜面作为反射体和微位移测量工具,详细介绍了微位移测量装置和传感器检测电路。实验表明,在0～2mm范围内检测系统的输出与位移成线性关系,灵敏度为195μV/μm,线性度为±0.5%,适于微位移的测量。     

Object imaging with a piezoelectric robotic tactile sensor

A two-dimensional, electrically multiplexed robotic tactile sensor was realized by coupling a piezoelectric polyvinylidene fluoride (PVDF) polymer film to a monolithic silicon integrated circuit (IC). The IC incorporates 64 sensor electrodes arranged in a symmetrical 8×8 matrix. Each electrode occupies a 400×400 μm square area, and they are separated from each other by 300 μm. A 40-μm-thick piezoelectric PVDF polymer film was attached to the electrode array with an electrically nonconductive methane adhesive. The response of the tactile sensor is linear for loads spanning 0.8-135 grams-of-force (gmf) (0.00-1.35 Newtons (N)). The response bandwidth is 25 Hz, the hysteresis level is tolerable, and, for operation in the sensor's linear range, taxel crosstalk is negligible. The historically persistent stability and response reproducibility limitation associated with piezoelectric-based tactile sensors has been solved by implementing a novel pre-charge voltage bias technique to initialize the pre- and post-load sensor responses. A rudimentary tactile object image measurement procedure for applied loads has been devised to recognize the silhouette of a sharp edge, square, trapezoid, isosceles triangle, circle, toroid, slotted screw, and cross-slotted screw     

一种基片式光纤光栅应变增敏传感器

针对传统裸光栅直接粘贴式应变传感器应变灵敏度小的缺陷,提出了一种基片式光纤光栅应变增敏传感器,通过设计杠杆增敏结构的封装基片实现对光纤光栅的应变增敏.该传感器具有较大的应变放大机制,其测量精度与稳定性超过了裸光纤光栅.建立了该传感器的理论感知模型,并进行了与有限元仿真分析.由等强度悬臂梁标定实验可得该传感器实际应变灵敏度为6.122 pm/με,与理论结果和仿真结果一致,且线性度达到0.99998.通过动态激振实验对该应变增敏传感器的动态响应进行研究,实验结果表明该传感器能够在0～100 Hz范围内保持一致的增敏效果,能够良好的跟踪动态应变.该传感器在大型机械装备的健康监测与故障诊断方面具有良好的应用前景.     

A MEMS surface fence for wall shear stress measurement with high sensitivity

In this paper, an optimized micro-fabricated surface fence with high sensitivity is presented for measurement of wall shear stress. In order to improve the bending stress and thereby enhance the sensitivity of the sensor, the cantilever structure of sensor (the sensing element) is designed and optimized by optimization analysis and orthogonal experimental design. Several sensors are fabricated using the micromachining technology with the sensing element having a width of 5 mm, a thickness of 20 μm and a height of either 2,200 or 1,700 μm. Calibration against a Preston Tube over a range of approximately ±0.7 Pa demonstrates that the sensors have sensitivity extended up to 2.3 mV/(V·Pa), at least 13 % improvement in sensitivity compared to the previous MEMS surface fence with the same thickness of sensing element. The paper also introduces an acoustic excitation method to detect the resonant frequency of the MEMS surface fence, which features a very little deviation compared with the modal FE-analysis.     

Influence of hand grenade weight, shape and diameter on performance and subjective handling properties in relations to ergonomic design considerations

Three hand-grenade design factors, namely shape (ball, oval, can), diameter (55, 60, and 65 mm) and weight (300, 400, and 500 g), were assessed. The objective criteria were (1) throwing distance from the grenade stop point to throwing point, and (2) error distance from the grenade stop point to the target. The subjective criteria were (3) the overall rating of handling (to hold and control) properties and (4) the rating of perceived exertions of throwing strength. Twenty ROC Army soldiers threw a Mark II practice grenade to familiarize them with the throwing procedure, and then, while standing, threw 21 experimental, mockup grenades at a target indicated by a flagpole 40 m away from the throwing point. Grenade weight had the greatest effect on both subjective and objective criteria. The 300 g grenade had the greatest throwing distance (38.6+/-6.5 m) and had the greatest accuracy (6.9+/-3.9 m). Grenade shape was also a significant influence based on both the subjective and objective criteria; with the ball shape being the best. Grenade diameter, within the range tested, did not affect either the subjective or objective criteria.     

Analysis and experiment of transient filling flow into a rectangular microchannel on a rotating disk

In order to predict the time-dependent behaviors of the moving front in lab-on-a-CD systems or centrifugal pumping, an analytical expression and experimental methods of centrifugal-force-driven transient filling flow into a rectangular microchannel in centrifugal microfluidics are presented in this paper. Considering the effect of surface tension, and neglecting the effect of Coriolis force, the velocity profile, flow rate, the moving front displacement and the pressure distribution along the microchannel are characterized. Experiments are carried out using the image-capturing unit to measure the shift of the flow in rectangular microchannels. The flow characteristics in rectangular microchannels with different cross-sectional dimensions (200, 300 and 400 μm in width and 140, 240 and 300 μm in depth) and length (18 and 25 mm) under different rotational speed are investigated. According to the experimental data, the model can be more reasonable to predict the flow displacement with time, and the errors between theoretical and the experimental will decrease with increasing the cross-section size of the microchannel.