基于电容器的压力微传感器的研制

介绍了利用微加工技术制造的电容式压力微传感器的结构设计,主要分析了其工作原理,论证了测量电路的可行性.最后提供了实验数据并和理论值进行了比较,讨论了产生误差的原因.     

MOS型固态图象传感器

1 固态图象传感器固态图象传感器按其结构可分为两大类:MOS型和CCD型图象传感器.前者由金属氧化物半导体器件构成,后者由电荷耦合器件构成.MOS型图象传感器质量很高,可用单极低压电源驱动.外围电路不复杂是其突出的优点.CCD型图象传感器噪声低,在很暗的环境条件下性能仍旧良好.当前市面上较好的摄象机包含了MOS和CCD两种图象传感器,因而具备良好的整机性能.     

微机械梁一膜结构的压力传感器

本文提出了一种用于压阻压力传感器中的微机械梁膜结构.这种结构除有灵敏度高、线性好等优点外,还有其他优良性能,而工艺要求又较已有的各种结构为低.有限元素法的应力分析和实验结果证明了这种结构的优良性能.     

MOS型集成氨敏传感器

本文介绍了ＭＯＳ型集成氨敏传感器的基本工作原理，主要参数，测试方法，主要用途和广阔的市场前景。     

电容式压力传感器微电容测量集成电路的研制

采用开关电容技术的Boxcar(时域平均)积分原理设计,为测量电容式压力传感器的微电容的接口电路已提出。它由Boxcar积分器,锁存器,脉冲宽度调制器和控制信号电路组成。该接口电路,采用3μm P-阱CMOS双层多晶硅栅工艺研制,管芯面积为2.5mm×3.5mm.测试结果表明,接口电路具有较好的灵敏度,它能将硅集成电容式压力(加速度)传感器集成在同一芯片上,实现一体化。     

空气压力传感器的研究

本文介绍一种用热释电材料做成的空气压力传感器,揭示了这种传感器的原理,并讨论了实验结果。     

动态微压力传感器可靠性验证

对动态微压力传感器可靠性验证试验方案进行了实用设计，用寿命试验的观察结果对可靠性指标进行计算，以验证其可靠性指标ＭＴＢＦ达到的水平。     

可植入眼压微传感器

对眼压进行长期、连续和实时的监测对于提高青光眼的诊治水平具有重要的意义.可植入眼压微传感器能够实现对眼压的长期连续监测.总结了国内外的可植入眼压微传感器技术;归纳了不同种类的可植入眼压微传感器的工作原理,并对不同的可植入眼压微传感器技术进行分类和比较;讨论了可植入眼压微传感器的各技术模块.     

基于小挠度假设的电容式微型压力传感器模型

在小挠度变形假设的基础上对接触型电容式微型压力传感器进行分析。通过对压力传感器敏感元件硅膜片的弹性分析给出了传感器的模型。传感器的接口电路由ＭＯＳ电流镜和模拟开关构成,该电路具有线性度好和测量增益高的特点,并能有效地消除电路中的寄生电容对测量的影响,大大降低测量噪声。     

High temperature field effect hydrogen and hydrocarbon gas sensors based on SiC MOS devices

The growing need for reliable, efficient, high temperature hydrogen and hydrocarbon monitoring has fueled research into novel structures for gas sensing. Metal oxide semiconductor (MOS) devices employing a catalytic metal layer have emerged as one of the leading sensing platforms for such applications, owing to their high sensitivity and inherent capability for signal amplification. The limited operating temperature of such devices employing silicon as the semiconductor has led research efforts to focus on replacing them with devices based on silicon carbide (SiC). More recently, MOS devices having different oxide layers exhibiting improved sensing performance have emerged. Considering the amount of research that has been carried out in this area in recent times, it is important to elucidate the new findings and the gas interaction mechanisms that have been ascribed to such devices, and bring together several theories proposed by different research groups. In this paper we first highlight the needs which have driven research into SiC based field effect hydrogen and hydrocarbon sensors, illustrate the various structures being investigated, and describe the device evolution and current status. We provide several sensing examples of devices that make use of different oxide layers and demonstrate how their electrical properties change in the presence of the gases, as well as presenting the hydrogen gas interaction mechanisms of these sensors.     

DNA场效应晶体管的研制

研究了基于场效应晶体管的DNA传感器。分析了DNA场效应晶体管的工作原理、测试电路、芯片加工和生物膜固定化方法,并用此种传感器对寡聚合苷酸序列进行了测试,得到了可行性的实验结果。同时讨论了测试中面临的问题和解决的方法,以及有待进一步研究的问题。     

微型传感器中氮化硅薄膜的微加工技术

简要介绍了基于磁控射频溅射技术的Si3 N4 薄膜沉积技术及Si3 N4 薄膜基于剥离 (lift-off)技术的微加工技术。实验结果表明该技术适用于微型传感器及MEMS中绝缘薄膜的加工     

High responsivity silicon MOS phototransistors

We describe a metal-oxide silicon (MOS) phototransistor that relies on a novel lateral doping scheme that creates a p-i-n junction configuration for light detection. This is essentially a hybrid device with the horizontal structure of a p-i-n diode and the vertical structure of a MOS field-effect transistor. The lateral p-i-n diode detects light whereas the gate can be used to change the current flowing through the device; making it appear as a MOSFET. This feature makes it easy to integrate it with other conventional MOSFETs on a CMOS process flow. The device shows high optical responsivities that persist to wavelengths in the near-ultraviolet region. The fabrication of the device as well as its electrical and optical characteristics is described.     

离子敏场效应晶体管宏模型的建立与仿真

根据电化学表面基模型理论,提出了一种简单有效的能够描述离子敏场效应晶体管(ISFET)静态特性的仿真模型,借助此模型,对器件的电学行为进行了模拟,仿真结果与实验数据基本相符.     

氟离子敏场效应管的研制

阐述了一种氟离子敏场效应晶体管(FISFET)型传感器的结构和工作原理。它是在pH ISFET传感器的基础上用PVC方法把离子敏场效应晶体管和氟化物敏感膜相结合,制成氟离子敏场效应晶体管。该传感器具有全固态化 体积小的特点。实验表明该传感器的灵敏度为50mV/C,响应时间:小于1min,相关系数为0.9842,对氟化物的检测范围:1×10-6～1×10-1mol/L。     

Gold nanoparticle film grown on quartz fiber and its application as a microsensor of nitric oxide

A simple electroless plating method for growing a gold nanoparticle (GNP) film on a quartz fiber by chemical liquid deposition was reported. The gold film coated quartz fiber possessed good conductivity and mechanical property, and can be used as a novel gold fiber microelectrode (GFME). Being electropolymerized with niacinamide (NA) and further coated by Nafion for GFME, a disposable nitric oxide (NO) electrochemical microsensor was fabricated. This microsensor exhibited high sensitivity based on the catalytic effect of GNPs and polyniacinamide (PNA) toward the oxidation of NO. A good linear relationship between the amperometric response of the microsensor and the concentration of NO in the range of 7.2 × 10⁻⁹–1.8 × 10⁻⁵ mol L⁻¹ was achieved, along with a low detection limit of 3.6 nmol L⁻¹ (S/N = 3). In vivo detection of NO release from mice liver indicated that this microsensor had a promising application in the field of biomedical analysis.     

Evaluation of the selective detection of 4,6-dinitro-o-cresol by a molecularly imprinted polymer based microsensor electrosynthesized in a semiorganic media

A carbon fiber microelectrode (CFME) was coated with a polymeric film, in order to synthesize an MIP based voltammetric microsensor for the selective determination of DNOC. The polymeric synthesis was carried out by electrocopolymerization of aniline and o-phenylenediamine (o-PD) in a water:methanol (1:1) media. The response of the MIP-sensor synthesized to the target analyte, was linear in a range from 8 × 10⁻⁷ to 10⁻⁴ M with a sensitivity of 1.6 × 10³ nA M⁻¹ and good stability and repeatability (<14%). Different rebinding experiments were carried out in order to evaluate the binding properties of the MIP-sensor. The experimental adsorption isotherms were fitted to Langmuir, Bi-Langmuir and Freundlich–Langmuir isotherms and the Langmuir model was chosen as the best fitting model. Under the optimized experimental conditions, the voltammetric microsensor was able to differentiate between DNOC and other closely related compounds such as other dinitrophenolic pesticides like binapacryl or dinobuton.