共查询到20条相似文献,搜索用时 703 毫秒
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亚纳米量级光滑表面的超精密抛光 总被引:6,自引:0,他引:6
软X射线光学的发展,对光学元件表面提出超光滑要求,为此我们开展了使用锡磨盘的超精密抛光方法研究。本文介绍锡磨盘磨削的实验装置及主要结果。利用这种方法已加工出表面粗糙度优于0.3nm的超光滑表面 相似文献
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GaN 用衬底材料 LiGaO2 晶体超精密抛光的初步实验 总被引:2,自引:0,他引:2
主要介绍了作为发光半导体GaN衬底材料的LiGaO2单晶超精密抛光方法及初步结果。利用聚氨酯抛光盘配合SiO2悬浮液,采用机械化学抛光方法,已加工出表面粗糙度优于0.1mm,的超光滑表面。 相似文献
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非球面超精密抛光技术研究现状 总被引:13,自引:0,他引:13
非球面应用范围的拓展以及应用精度要求的不断提高对非球面元件的尺寸精度与表面质量提出了更高要求;作为终加工手段,非球面超精密抛光技术也越来越受到世界各国的重视。掌握非球面超精密抛光过程中的材料去除机理以及由此导致的亚表面损伤等特性对提高非球面抛光的精度与效率十分重要。对非球面抛光技术的发展进行回顾,并根据非球面超精密抛光技术的发展脉络,阐述当前主要非球面超精密抛光技术的加工原理及加工实例,随后从亚表面损伤、边缘效应等方面对几种非球面超精密抛光技术进行比较,并以提高抛光精度与效率为目标,对非球面超精密抛光技术的发展趋势进行预测。 相似文献
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超光滑表面加工技术研究进展 总被引:2,自引:0,他引:2
针对如何高效稳定地获得粗糙度值小、少无亚表面损伤、低成本的超光滑表面的问题,分析了原子级超光滑表面加工技术的加工原理,详细阐述了几类非接触式抛光方法的加工原理及国内外最新研究进展,并着重论述了声悬浮抛光和磨料水射流抛光的研究现状。接着,在此基础上对这几类加工方法各方面的优缺点进行了对比总结。最后,针对目前超光滑表面加工技术存在的不足,指出了超光滑表面加工技术有待进一步研究的方向。研究结果表明,采用非接触式的抛光方法,对加工过程加以合理的控制,可大大降低工件表面粗糙度,改善亚表面的损伤情况;目前非接触式抛光普遍对抛光设备精度要求较高,减少加工成本是超光滑表面加工技术进行大规模推广的迫切要求。 相似文献
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陈伟杰 《仪表技术与传感器》1983,(5)
在日本,除光学玻璃用的氧化铈抛光粉外,市场上有氧化锆抛光粉出售,随着光学零件加工技术的提高,高速抛光工艺和新型抛光模的出现,也研制了与高效工艺相适应的抛光粉。一、抛光理论关于玻璃的抛光机理,目前主要有以下三种说法:(1)微量切削说:认为通过磨料的微量切削作用,把表面凸部除去,使表面平滑;(2)流动说:认为在抛光过程中生成的流动层填平了凹部,使表面平滑;(3)化学作用说:认为抛光过程中所使用的水的化学作用抛亮了玻璃表面。在抛光实践中影响抛光质量和效率的工 相似文献
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X射线—极紫外光学中的超精密加工及其应用 总被引:1,自引:0,他引:1
短波光学技术的发展对高精密超光滑表面提出了严格要求。在X射线—极紫外光学中,光学元件表面粗糙度均方根值必须达到埃量级。制造这样表面的超精加工包括切割、研磨和抛光等工艺过程。本文介绍一种制造X射线望远镜中非球面镜的复制方法。 相似文献
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提出了结合磁流变光整加工(MRF)与在线电解修整(ELID)磨削对各种光学材料进行超精密加工的方法,即采用ELID磨削进行预抛光以获得高质量表面,然后采用MRF进行精密抛光以进一步减小表面粗糙度和形状误差.利用该组合工艺对BK7玻璃、硅晶玻璃、碳化硅等光学材料进行了超精密加工实验,可以在短时间内使光学材料工件表面得到亚纳米级的表面粗糙度和峰谷值为λ/20(λ为单位波长,λ=632.8nm)的形状精度. 相似文献
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蓝宝石基片的磁流变化学抛光试验研究 总被引:5,自引:1,他引:5
分析了磁流变化学抛光的加工机理,对蓝宝石基片的磁流变化学抛光进行了试验研究。结果表明:磁流变化学抛光可将蓝宝石基片加工到亚纳米级粗糙度的超光滑镜面,材料去除率受化学反应速率和剪切去除作用共同影响,化学反应速率越快,剪切去除作用越强,材料去除率越高;混有硅胶溶液与α-Al2O3磨料的磁流变化学抛光液去除率最高;材料去除率随工作间隙,励磁间隙以及加工时间的增大而减少,随铁粉浓度减少而减少;利用磁流变化学抛光方法加工蓝宝石基片可获得Ra 0.3 nm的超光滑表面。 相似文献
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Guilian Wang Yiqiang Wang Lei Zhang Ji Zhao Haibo Zhou 《Machining Science and Technology》2013,17(4):603-625
□ A novel self-determination polishing robot finishing large mold free-form surface is developed, and the finishing process method is researched. Contrary to traditional approaches, our premise is that a large mold surface can be polished by using a small robot. This robot system is mainly composed of a polishing robot part, a computer system and a visual positioning system. A type of robot with four uniform distribution wheels was designed, which has two driving wheels and two driven wheels. Active compliant control of the polishing tool was provided by a pneumatic servo system, and a new special compliant abrasive tool was proposed on the basis of robot characteristics. The process planning steps consisted of subdividing the free-form surface, choosing an abrasive tool, planning the polishing path and optimizing machining parameters. Based on the orthogonal experiment and the grey relational analysis method, the optimal parameter combination was obtained for polishing force, tool speed and feed rate. Aiming to polishing times, the surface roughness method and polishing efficiency method were studied in detail. The polishing experiments were carried out in the robot using process parameters obtained by the efficiency method. These research results provided significant theory foundation and experimental data for a mobile robot planning polishing to realize intelligible process parameter selection. 相似文献
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介绍了一种基于旋转磁性抛光液体的抛光技术。磁性抛光液体在磁力搅拌器的作用下产生旋转运动,利用外加强磁场作用增大磁性液体的粘度和剪切屈服应力,当加工工件放入磁性抛光液体中,磁性抛光液体与之相接触的工件表面发生磨削,从而达到对工件表面的光整加工。实验详细研究了磁性抛光液体抛光后工件的抛光区内表面粗糙度与抛光时间和位置之间的关系,实验结果表明:旋转磁性抛光液体抛光可以用于对工件进行超光滑加工,抛光时间越长,各处粗糙程度越接近,表面粗糙度越好,并且表面粗糙度比单独用研磨抛光膏的效果好。 相似文献
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As the demand for optical glasses has increased, precision requirements for specific shapes, forms, surface textures, and sizes (miniaturization) have also increased. The standards and surface finishes applied to the reference mirrors used in measuring appliances are crucial. Hence, enhancements in figuring and surface finishing are indispensable to manufacturing industries. In this article, a novel self-propelled multi-jet abrasive fluid polishing technique is proposed for an ultra-precision polishing process in which a blade-less Tesla turbine was used as a prime mover. The turbine was characterized by high swirling velocity at the outlet; therefore, high levels of kinetic energy moving away from the turbine were used as polishing energy. Computational fluid dynamics (CFD) was also used to simulate the flow on the turbine blades. With a newly designed and manufactured polishing tool, the optimal polishing parameters for improving the surface roughness of crown optical glasses (N-BK7) were investigated. Taguchi's experimental approach, an L18 orthogonal array, was employed to obtain the optimal process parameters. An analysis of variance (ANOVA) was also conducted to determine the significant factors. The surface roughness has been improved by approximately 94.44% from (Ra) 0.36 μm to (Ra) 0.02 μm. This study also presents a discussion on the influence of significant factors on improving surface roughness. 相似文献
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为解决复合材料加筋壁板上筋条与蒙皮配合间隙不均匀的问题,需在刚模表面上粘贴橡胶软模,并通过抛磨橡胶软模来消除配合间隙,然而,若打磨参数选择不当,则橡胶软模表面易起毛,致使粗糙度值过大,易吸附磨屑粉尘。针对上述问题,搭建了一套基于机器人的橡胶材料除尘端面打磨系统,探究了磨粒粒度、磨头转速、打磨压力、离边距离等打磨参数对表面粗糙度的影响规律。提出一种基于灰色关联度分析响应面法的机器人橡胶垫抛磨表面粗糙度预测方法,建立了橡胶材料打磨后粗糙度Ra值的预测模型,该模型的拟合系数R2值为0.9878,表明模型拟合效果好。使用该模型计算出的Ra预测值与观测值的均方根误差为0.014 47,验证了模型预测的有效性。基于预测模型,获得粗糙度Ra值最小(3.3 μm)的参数组合为:磨头转速4158.9 r/min、抛磨压力38.4 N、离边距离30 mm。 相似文献
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In this study, an internal polishing system using magnetic force was developed for the production of ultra-clean tubes with
average surface roughness ranging from 0.02 _m to 0.05 _m or less, and the application of magnetic abrasives composed of WC/Co powder was developed. After finding the optimal conditions,
machining characteristics using newly developed abrasives ware analysed. From the results obtained by the experimental design
method, optimal polishing conditions were analysed. 相似文献