| 类金刚石薄膜碲镉汞红外器件钝化膜的研究 |
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| 引用本文： | 居建华,夏义本,王林军,吴汶海,汤定元.类金刚石薄膜碲镉汞红外器件钝化膜的研究[J].人工晶体学报,2000,29(3):253-256. |
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| 作者姓名： | 居建华 夏义本 王林军 吴汶海 汤定元 |
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| 作者单位： | 上海大学,材料科学与工程学院,上海201800;中国科学院上海技术物理研究所,红外物理国家实验室,上海200083;上海大学,材料科学与工程学院,上海201800;中国科学院上海技术物理研究所,红外物理国家实验室,上海200083 |
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| 摘 要： | 采用等离子增强化学气相法(PECVD)在碲镉汞(MCT)衬底上沉积出纳米团聚的类金刚石薄膜(DLC).用原子力显微镜(AFM )和侧向力显微镜(LFM)对DLC和MCT表面形貌进行表征;用俄歇电子能谱(AES)对DLC/MCT界面附近各元素含量的分布进行分析研究.结果表明:当膜厚达到25nm以上,这种DLC膜就能够有效地抑制MCT中HgTe的分解和Hg与Te的外扩散.AFM 和LFM的观察结果表明,原始MCT晶片经100℃在氮气气氛中退火30min,表面区域出现了不同与MCT的微米量级的新相,而由DLC膜保护的MCT晶片表面就没有观察到这种由分解反应引起的相变.
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| 关 键 词： | 类金刚石薄膜 红外 钝化膜 界面 |
Diamond-like Carbon Film as a Passivation Coating of Hg1-xCdxTe Infrared Devices |
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| JU Jian-hua,XIA Yi-ben,WANG Lin-jun,WU Wen-hai,TANG Ding-yuan.Diamond-like Carbon Film as a Passivation Coating of Hg1-xCdxTe Infrared Devices[J].Journal of Synthetic Crystals,2000,29(3):253-256. |
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| Authors: | JU Jian-hua XIA Yi-ben WANG Lin-jun WU Wen-hai TANG Ding-yuan |
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| Abstract: | A dense and homogeneous nanograins diamond-like carbon (DLC) film has been deposited on the well-polished HgCdTe wafer by radio frequency plasma enhanced chemical vapor deposition at room temperature. The surface photographs of both DLC and MCT are studied by AFM and LFM respectively. The interface of DLC/HgCdTe is studied by AES. Result shows that DLC film can suppress the dissociation of the weak bonding HgTe, and prevent Hg escapingfrom from MCT surface to some extent, when the thickness of DLC film has reached 25nm.AFM and LFM results show that the compositions of some MCT surface regions have dissolved and formed another phase different from MCT substrate, after 30 minutes annealing at 100℃. However this change has not been observed on the surface of DLC coated MCT. This result is agreement with that given by AES. |
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| Keywords: | diamond like carbon infrared passivation coating interface |
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