| SiO2薄膜TO与LO振动模式的数值研究 |
| |
| 引用本文： | 刘华松,罗征,刘幕霄,姜玉刚,王利栓,季一勤,张锋,陈德应. SiO2薄膜TO与LO振动模式的数值研究[J]. 红外与激光工程, 2014, 43(11): 3746-3750 |
| |
| 作者姓名： | 刘华松 罗征 刘幕霄 姜玉刚 王利栓 季一勤 张锋 陈德应 |
| |
| 作者单位： | 1.中国航天科工飞航技术研究院 天津津航技术物理研究所 天津市薄膜光学重点实验室,天津 300192; |
| |
| 基金项目： | 国家自然科学基金(61235011)；国家重大科学仪器设备开发专项资金(2012YQ040164)；天津市科委项目 |
| |
| 摘 要： | 对Si-SiO2基底薄膜系统进行数值实验,将SiO2薄膜的能损函数与透过率光谱和反射椭圆偏振光谱进行对比,讨论了在红外透过率光谱和反射椭偏光谱中激发的SiO2薄膜TO和LO振动模式.在正入射的红外透过率光谱中,仅能发现SiO2薄膜的TO振动模式;在倾斜入射的s偏振透过率光谱中没有激发的LO模式;在倾斜入射的p偏振透过率光谱中,当入射角小于60时,三个TO振动模式全部被激发;当入射角大于60时,三个LO振动模式都被激发,而TO模式仅能激发两个.在反射椭偏光谱中,TO模式未被激发,仅能激发LO模式.在透过率光谱和反射椭偏谱中,振动频率分别具有向高波数和低波数方向频移的现象.
|
| 关 键 词： | SiO2薄膜 TO模式 LO模式 透过率光谱 反射椭偏谱 |
| 收稿时间： | 2014-03-05 |
Numerical experiment research on TO and LO vibrational modes of SiO2 film |
| |
| Liu Huasong,Luo Zheng,L iu Muxiao,Jiang Yugang,Wang Lishuan,Ji Yiqin,Zhang Feng,Chen Deying. Numerical experiment research on TO and LO vibrational modes of SiO2 film[J]. Infrared and Laser Engineering, 2014, 43(11): 3746-3750 |
| |
| Authors: | Liu Huasong Luo Zheng L iu Muxiao Jiang Yugang Wang Lishuan Ji Yiqin Zhang Feng Chen Deying |
| |
| Affiliation: | 1.Tianjin Key Laboratory of Optical Thin Film,Tianjin Jinhang Institute of Technical Physics,Aerodynamic Technology Academy of China Aerospace Science and Industry Corporation,Tianjin 300192,China;2.National Key Laboratory of Science and Technology on Tunable Laser,Institute of Optical-Electronics,Harbin Institute of Technology,Harbin 150080,China;3.Equipment Department of the Navy Bureau of Tianjin in Tianjin Area of Weapon Equipment Military Representative Office,Tianjin 300192,China |
| |
| Abstract: | The system of Si substrate and SiO2 film was researched by numerical experiment. Compared energy loss function of SiO2 film with transmission spectrum and reflection elliptically polarized spectrum of SiO2 film, TO and LO vibrational modes of SiO2 film were researched by infrared transmission spectrum and reflection elliptically polarized spectrum. In the infrared transmission spectrum with normal incidence, only TO vibrational mode of SiO2 film was found. In the s-polarized infrared transmission spectrum with oblique incidence, there was no excitation LO vibrational mode for SiO2 film. When the ncidence angle is less than 60 degree, three TO vibrational modes were all excited. When the incidence angle is more than 60 degree, three LO vibrational modes were all excited, but only two TO vibrational modes were excited. In the reflection elliptically polarized spectrum, TO vibrational mode could not be excited and only LO vibrational mode was excited. In the transmission spectrum and reflection elliptically polarized spectrum of SiO2 film, their vibrational frequencies individual shifted to long wavenumber and short wavenumber. |
| |
| Keywords: | SiO2 film TO mode LO mode transmission spectrum reflection spectroscopic ellipsometry |
| 本文献已被 CNKI 万方数据 等数据库收录！ |
| 点击此处可从《红外与激光工程》浏览原始摘要信息 |
|
点击此处可从《红外与激光工程》下载免费的PDF全文 |
|
