| 基于微机电系统技术的高性能集成型微富集器 |
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| 引用本文： | 孙建海,宁占武,马天军,朱小锋,崔大付,张璐璐,李辉,陈兴.基于微机电系统技术的高性能集成型微富集器[J].强激光与粒子束,2015,27(2):024124. |
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| 作者姓名： | 孙建海 宁占武 马天军 朱小锋 崔大付 张璐璐 李辉 陈兴 |
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| 作者单位： | 1.中国科学院 电子学研究所, 传感技术国家重点实验室, 北京 1 001 90; |
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| 摘 要： | 由于大部分环境样品的浓度非常低, 为了实现其直接检测, 提出将一种集成化的微型富集器应用到色谱系统中。富集器可实现色谱系统的进样与样品富集,能将色谱仪的检测限提高1~2个数量级。设计的富集器采用了高容量4平行通道结构,沟道内填充了高吸附率的Tenax-TA吸附材料,来实现对环境样品中挥发性有机化合物组分的富集。此外,为了密闭热解吸过程中所释放的组分,在微型富集器后集成了微型阀。试验结果表明,研制的微型富集器取得了15倍以上的富集因子。而且,通过微阀的控制,色谱峰的拖尾和峰展宽得到了有效的控制。因此,该微型富集器可广泛应用到环境样品的快速检测中,提高各检测器对复杂环境的适应能力。
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| 关 键 词： | 微型富集器 富集因子 微型色谱系统 检出限 |
| 收稿时间： | 2014-10-22 |
High performance integrated micro-fabricated pre-concentrator based on MEMS |
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| Affiliation: | 1.State Key Laboratory of Transducer Technology,Institute of Electronics,Chinese Academy of Sciences,Beijing 100190,China;2.Beijing Municipal Institute of Labour Protection,Beijing 100054,China |
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| Abstract: | The concentration of most environmental samples is very low. In order to directly detect these samples, an integrated micro pre-concentrator, which can significantly improve detection limit of mini gas chromatography system with 1-2 orders, is developed. The micro pre-concentrator has 4 parallel channels filled with enough Tenax-TA as adsorbent materials for concentrating volatile organic compounds. For closing the released components during thermal desorption process, a micro-valve is integrated behind the pre-concentrator. The result demonstrates the proposed pre-concentrator can effectively concentrate components with a concentration factor of 15. Moreover, the chromatography peak broadening is greatly compressed under controlling by the micro-valve. Therefore, the micro-fabricated pre-concentrator can be easy to deploy and suitable for a number of applications involving on-site monitoring of environmental samples. |
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