| 衬底温度对碲化镉薄膜结构及光学性能的影响 |
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| 引用本文： | 杨恢东,张翠媛,王菁,陈玉玲,彭炳荣,刘辉.衬底温度对碲化镉薄膜结构及光学性能的影响[J].人工晶体学报,2017,46(11):2102-2106. |
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| 作者姓名： | 杨恢东 张翠媛 王菁 陈玉玲 彭炳荣 刘辉 |
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| 作者单位： | 暨南大学信息科学技术学院,广州510632;暨南大学韶关研究院,韶关512027;暨南大学信息科学技术学院,广州,510632 |
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| 基金项目： | 广东大学生科技创新培育专项资金项目(pdjh2017b0056);广东省省级科技计划项目(2014A010106014);暨南大学韶关研究院新型研发机构初创期建设补助项目(2016B090919014) |
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| 摘 要： | 碲化镉(CdTe)因具有良好的光电性能和吸收性能经常被作为太阳电池的吸收层材料.以纯度为99.99;的CdTe陶瓷靶为靶材在玻璃衬底上采用射频磁控溅射的方法制备了一系列的CdTe薄膜,研究了衬底温度对样品薄膜的厚度、结构和光学性能的影响.结果表明:随着衬底温度的增加薄膜的厚度在逐渐地减少;制备的薄膜都是立方闪锌矿结构且具有高度的(111)面择优取向;薄膜对可见光有较好的吸收性能,随衬底温度的增加而减小.
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| 关 键 词： | 吸收层 CdTe薄膜 射频磁控溅射 衬底温度 |
Effect of Substrate Temperature on Structure and Optical Properties of CdTe Films |
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| YANG Hui-dong,ZHANG Cui-yuan,WANG Jing,CHEN Yu-ling,PENG Bing-rong,LIU Hui.Effect of Substrate Temperature on Structure and Optical Properties of CdTe Films[J].Journal of Synthetic Crystals,2017,46(11):2102-2106. |
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| Authors: | YANG Hui-dong ZHANG Cui-yuan WANG Jing CHEN Yu-ling PENG Bing-rong LIU Hui |
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| Abstract: | Cadmium telluride (CdTe) is often used as an absorbent material for solar cells because of its excellent photoelectric properties and absorption properties.The CdTe thin films were deposited with a purity of 99.99; CdTe ceramic target for target material by RF magnetron sputtering on glass substrate.The effects of substrate temperature on the thickness,structure and optical properties of the CdTe films were investigated.The results show that with the increase of the substrate temperature,the thickness of the film decreases.All CdTe thin films are cubic sphalerite structure with a preferred orientation in (111) direction.The film has better absorption properties to visible light and decreases with the increase of substrate temperature. |
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