Controlled Formation of β-Si3N4 on Native Oxidized Silicon Wafers in Ammonia Flow |
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Authors: | Mayboroda I O Kolobkova E M Grishchenko Yu V Chernykh I A Zanaveskin M L Chumakov N K |
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Affiliation: | 1.National Research Center “Kurchatov Institute”, 123182, Moscow, Russia ; |
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Abstract: | Crystallography Reports - The formation of β-Si3N4 for subsequent growth of AlGaN and GaN heterostructures of silicon wafers has been studied. It is established that the native oxide layer... |
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