六角形孔径平面微透镜阵列的制作及基本特性研究

采用光刻离子交换工艺制作了六角形孔径平面微透镜阵列.离子交换后的变折射率区域有微小重叠,填充系数可达95%以上.对制作的六角形孔径平面微透镜进行了折射率分布、数值孔径和像差等光学特性测试,得到的六角形孔径平面微透镜阵列光学性能均匀,成像质量较好的结果.该透镜阵列的研制成功为制作高质量高填充系数透镜阵列及模拟生物复眼光学系统奠定了基础.

Manufacture of Hexagon Aperture Plane Micro-lens Array and Its Basic Characteristics

A method of the photo etching ionic exchange was applied to manufacture hexagon aperture planar microlens array.Small overlaps occurred in the changing area of hexagon aperture planar microlens array,and the fill-factor is more than 95%.Moreover,it is found that the image discrepancy is small with nice imaging quality.The sample optical qualities such as refractive index distribution,intercept,and number aperture were carried on in a more accurate survey.The development of lens array laid the foundation for the production of high-quality high fill-factor lens array and the optical system of simulated biological compound eye.