| 用最小二乘法提高CCD干涉计量的精度 |
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| 引用本文： | 周恕义,关承祥,邬敏贤,金国藩.用最小二乘法提高CCD干涉计量的精度[J].仪器仪表学报,1999,20(1):100-102. |
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| 作者姓名： | 周恕义 关承祥 邬敏贤 金国藩 |
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| 作者单位： | 1. 哈尔滨师范大学物理系,哈尔滨,150080
2. 清华大学,北京,100084 |
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| 基金项目： | 黑龙江省教委科研基金,黑龙江自然科学基金 |
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| 摘 要： | 本文针对相位型光栅的面形测量，用最小二乘法做二次曲线拟合，解决了ＣＣＤ光学干涉计量中像素尺寸以及图像采集卡空间量化误差对测量精度的影响，使干涉条纹定位精度提高一数量级以上。对曲线拟合误差进行了讨论，给出了实测结果。
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| 关 键 词： | 最小二乘法 CCD 干涉条纹 |
Improve the precision of the Interference Measurement |
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| Zhou Shuyi,Guan Chengxiang,Wu Minxian,Jin Guofan.Improve the precision of the Interference Measurement[J].Chinese Journal of Scientific Instrument,1999,20(1):100-102. |
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| Authors: | Zhou Shuyi Guan Chengxiang Wu Minxian Jin Guofan |
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| Affiliation: | Zhou Shuyi Guan Chengxiang (Dep. of Physics Harbin Normal University Harbin 150080) Wu Minxian Jin Guofan (Tsinghua University Beijing 100084) |
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| Abstract: | As for as measuring the shape of the surface of phase type grating is concerned,we,using the least square method to fit quandric curves,remove the influence on the precision of measurement from the errors in quantitating the size of image element of CCD and the image gathering cards in CCD optic interference measurement and increase the location precision of interference bands to more than one order. We also discuss the error of curve fitting and give the results of observational measurement. |
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| Keywords: | The least square method CCD Interference band |
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