双成像单元原子力显微镜及其在大范围纳米计量中的应用

为了实现大范围纳米计量,研制了双成像单元原子力显微镜,采用光栅作参考样品,同时对光栅和被测样品扫描成像,得到两幅具有相同横向尺度的图像,通过计算参考光栅的周期数,就能精确测定被测样品图像的尺寸。提出了一种实现大范围扫描和纳米计量的新方法,利用步进电机交替移动XY扫描器,扫描获得一系列的光栅样品图像和被测样品图像对,通过拼接对应的序列图像,可获得两幅大范围的光栅图像和被测样品图像,计数参考图像中光栅的周期数,即可测定被测图像的尺度,实现对被测图像的大范围纳米计量。

Dual Imaging Unit Atomic Force Microscope and Its Applications in Wide-range Nano-metrology

A dual imaging unit atomic force microscope(DIU-AFM) is designed for wide-range nano-metrology.A periodic grating is employed as a reference sample.The DIU-AFM simultaneously scans the grating and a test sample using one single XY scanner.Their images thus have the same lateral size,and the length of the test sample image can be precisely measured by counting the number of periodic features of the reference grating.A new method of implementing wide-range nano-metrology is further developed.By alternatively moving the XY scanner in the X direction using a step motor,a series of pairs of images are obtained and can be spliced into two wide-range reference and test ones,respectively.Again,the two spliced images are of the same size,and the length of test image can be measured based on the reference grating features.In this way,wide-range metrology with nanometer order accuracy is successfully realized.