Development of a simple system for the simultaneous measurement of pitch, yaw and roll angular errors of a linear stage |
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| Authors: | Chien-Hung Liu Wen-Yuh Jywe Chao-Kwai Chen |
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| Affiliation: | (1) Institute of Mechtronoptic Systems, Chien Kuo University of Technology, Changhua, Taiwan, 500;(2) Department of Automation Engineering, National Huwei Institute of Technology, Huwei, Yunlin, Taiwan, 632 |
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| Abstract: | A simple measurement system has been developed and implemented for the simultaneous measurement of pitch, yaw and roll of
the moving axes of a linear stage. This developed system is based on the principle of the diffractive theorem and optical
triangulation. It is composed of a laser source, two quadrant detectors and a diffracting grating. The diffraction grating
mounted on the moving axes of a stage reflects an incident laser beam into several diffractive rays and two quadrant detectors
are set up for detecting the position of ±1st-order diffraction rays. When the diffraction grating moves, the locations where
the diffractive beams are generated change and also the positions of the spots on two quadrant detectors. According to the
relationship between the three angular motions of a moving stage and the output coordinates of two quadrant detectors, an
inverse algorithm is used to solve these pitch, yaw and roll angular errors through a kinematic analysis . |
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| Keywords: | Diffraction grating Error verification Geometric error Quadrant detector |
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