| 微束XRF系统中X射线聚焦光学元件研究 |
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| 引用本文： | 王俊杰,付明磊,乐孜纯.微束XRF系统中X射线聚焦光学元件研究[J].光学仪器,2014,36(3):239-242,252. |
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| 作者姓名： | 王俊杰 付明磊 乐孜纯 |
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| 作者单位： | 浙江工业大学理学院,浙江工业大学理学院,浙江工业大学理学院 |
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| 基金项目： | 教育部博士点基金（20133317110006），国家国际科技合作项目(2012DFR10510) |
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| 摘 要： | 高性能X射线聚焦光学元件是实现亚微米分辨率微束X射线荧光分析系统(XRF)的关键器件。给出一种新型的微束XRF系统设计结构,介绍两种典型的X射线聚焦光学元件:X射线聚焦毛细管透镜和X射线组合折射透镜的结构与光学参数。数值计算比较了X射线聚焦毛细管透镜和X射线组合折射透镜的光学聚焦性能。分析结果体现了X射线聚焦组合透镜作为聚焦光学元件在焦斑大小、透过率、强度增益和检测范围等方面的优势。
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| 关 键 词： | X射线荧光分析系统 聚焦毛细管透镜 组合折射透镜 |
| 收稿时间： | 2014/1/21 |
| 修稿时间： | 2/8/2014 12:00:00 AM |
Study on the optical components for focusing X-ray in micro XRF system |
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| WANG Junjie,FU Minglei and LE Zichun.Study on the optical components for focusing X-ray in micro XRF system[J].Optical Instruments,2014,36(3):239-242,252. |
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| Authors: | WANG Junjie FU Minglei and LE Zichun |
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| Affiliation: | College of Sciencies, Zhejiang University of Technology,,College of Science, Zhejiang University of Technology |
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| Abstract: | High performance optical components for focusing X-ray are the crucial part to realize the micro X-ray fluorescence system with the sub-microns spatial resolution. A novel structure of micro XRF is given and the optical parameters for both X-ray focusing capillary lens and X-ray compound refractive lens (CRL) are introduced. Main works of this paper focus on the numerical computing for the optical performance of capillary and CRL. Analysis results show that the X-ray CRL has the advantages in terms of focal spot size, transmittance, etc, when compared with capillary. |
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| Keywords: | X-ray fluorescence X-ray compound refractive lens capillary lens |
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