| 基于原子力显微镜的薄膜厚度检测系统 |
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| 引用本文： | 赵君臣,章海军,张冬仙.基于原子力显微镜的薄膜厚度检测系统[J].光学仪器,2005,27(5):128-131. |
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| 作者姓名： | 赵君臣 章海军 张冬仙 |
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| 作者单位： | 浙江大学现代光学仪器国家重点实验室,浙江,杭州,310027 |
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| 摘 要： | 研制了一种基于原子力显微镜的薄膜厚度检测系统。该系统首先绘制薄膜轮廓曲线,根据曲线找到薄膜边界,然后计算镀膜区与无膜区的高度差,得到薄膜厚度。跟台阶仪、光学轮廓仪相比,该系统具有操作简单、抗干扰能力强、精度高的优点。实验表明。该系统有很高的重复性,能够精确测量各种不同性质的薄膜的厚度。
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| 关 键 词： | 原子力显微镜 步进电机 薄膜厚度 纳米 |
| 文章编号： | 1005-5630(2005)05-0128-04 |
| 收稿时间： | 2005/7/30 |
| 修稿时间： | 2005年7月30日 |
A measuring system of film thickness based on atomic force microscope |
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| ZHAO Jun-chen,ZHANG Hai-jun,ZHANG Dong-xian.A measuring system of film thickness based on atomic force microscope[J].Optical Instruments,2005,27(5):128-131. |
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| Authors: | ZHAO Jun-chen ZHANG Hai-jun ZHANG Dong-xian |
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| Abstract: | A measuring system of film thickness based on atomic force microscope has been developed.At first,the border of a kind of film should be searched according to profile curves,then the height difference between the area which has the film and the area which hasn′t could be computed,and the height difference is just film thickness.Compared with step height measuring instrument and optical profiler,the system as several remarkable advantages, such as simple operation,strong anti-jamming,high precision.The experiment results show that the system is of high repeatability,and could measure the thickness of various films. |
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| Keywords: | AFM step motor film thickness nanometer |
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