| 一种波长调制干涉仪光强实时反馈控制系统 |
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| 引用本文： | 魏光宇,卢庆杰,刘薇,吴鹏,韩森,王全召.一种波长调制干涉仪光强实时反馈控制系统[J].光学仪器,2020,42(3):50-56. |
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| 作者姓名： | 魏光宇 卢庆杰 刘薇 吴鹏 韩森 王全召 |
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| 作者单位： | 上海理工大学 光电信息与计算机工程学院，上海 200093;苏州慧利仪器有限责任公司，江苏 苏州 215123;苏州维纳仪器有限责任公司，江苏 苏州 215123 |
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| 基金项目： | 国家重点研发计划仪器开发专项（2016YFF0101903） |
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| 摘 要： | 提出了一种实时反馈控制系统,保证波长调制干涉仪的激光光强在波长调谐过程中的稳定性,以减小波长调制干涉仪因激光光强的波动产生的相位误差。该控制系统由光电探测器、数据采集卡、光电调幅器和控制软件等组成。实验结果表明,该系统的响应速度超过了干涉仪获取干涉图的速度,不仅能够稳定输出理想的光强值,而且还提高了干涉仪的测量精度。
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| 关 键 词： | 波长调制干涉仪 光强控制 相位误差 闭环反馈 |
| 收稿时间： | 2019/12/10 0:00:00 |
Light intensity real-time feedback control system of wavelength modulation interferometer |
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| WEI Guangyu,LU Qingjie,LIU Wei,WU Peng,HAN Sen,WANG Quanzhao.Light intensity real-time feedback control system of wavelength modulation interferometer[J].Optical Instruments,2020,42(3):50-56. |
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| Authors: | WEI Guangyu LU Qingjie LIU Wei WU Peng HAN Sen WANG Quanzhao |
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| Affiliation: | School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China;Suzhou H&L Instruments LLC, Suzhou 215123, China; Suzhou W&N Instruments LLC, Suzhou 215123, China |
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| Abstract: | In this paper, a real-time feedback control system is proposed to ensure the stability of the laser output power in the wavelength tuning process, so as to reduce the phase error in the measurement. The control system achieves this goal through the integration of software, photoelectric detector, data acquisition card and electro-optic amplitude modulator. The experimental results show that the response speed of the system exceeds that of the interferometer for the interferogram, and it can stably output the ideal light intensity, which improves the measurement accuracy of the interferometer. |
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| Keywords: | wavelength modulation interferometer light intensity modulation phase error closed-loop feedback |
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