| 基底材料对石墨烯膜F-P声压传感器灵敏度的影响分析 |
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| 引用本文： | 李成,刘欢,宋学锋,肖习,樊尚春.基底材料对石墨烯膜F-P声压传感器灵敏度的影响分析[J].仪表技术与传感器,2021(1):123-126. |
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| 作者姓名： | 李成 刘欢 宋学锋 肖习 樊尚春 |
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| 作者单位： | 北京航空航天大学仪器科学与光电工程学院;深圳北航新兴产业技术研究院;南方科技大学创新创业学院 |
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| 基金项目： | 国防科技创新特区资助;深圳市科技计划项目(JCY20180504165721952,JCYJ20170817111857745)。 |
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| 摘 要： | 文中以多层石墨烯膜为敏感膜片,分别制备了基于PDMS、SU-8、氧化锆的石墨烯膜F-P声压传感器,应用薄膜与基底之间吸附理论,分析了石墨烯膜与基底间吸附能相对于基底材料的杨氏模量成正向变化的趋势,并实验测试了所制备的声压传感器灵敏度。实验结果表明,制备的PDMS和SU-8基底具有较大的表面粗糙度,其虽降低了与石墨烯膜的吸附能,但也造成悬浮石墨烯膜的周边固支边界条件变差,且较软的基底材料易导致F-P腔体变形,从而造成灵敏度整体上未能提升。
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| 关 键 词： | 石墨烯膜 声压传感器 基底材料 灵敏度分析 |
Influence of Substrate Material on Sensitivity of Fabry-Perot Acoustic Sensor with Graphene Diaphragm |
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| LI Cheng,LIU Huan,SONG Xue-feng,XIAO Xi,FAN Shang-chun.Influence of Substrate Material on Sensitivity of Fabry-Perot Acoustic Sensor with Graphene Diaphragm[J].Instrument Technique and Sensor,2021(1):123-126. |
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| Authors: | LI Cheng LIU Huan SONG Xue-feng XIAO Xi FAN Shang-chun |
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| Affiliation: | (School of Instrumentation Science and Opto-electronics Engineering,Beihang University,Beijing 100191,China;Research Institute of Beihang University in Shenzhen,Shenzhen 518057 China;School of Innovation and Entrepreneurship,Southern University of Science and Technology,Shenzhen 518000,China) |
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| Abstract: | In this paper,the F-P(Fabry-Perot)acoustic sensors with graphene diaphragm transferred onto the different substrates fabricated by PDMS,SU-8 and zirconia were developed,respectively.Then the adsorption theory between film and substrate was used to demonstrate the increasing adsorption energy between the graphene film and the fabricated substrate with the increase in Young s modulus of the corresponding substrates.Experiment results show that the fabricated PDMS and SU-8 substrates have higher surface roughness,although it reduces the adsorption energy of graphene membrane,the surrounding fixed boundary conditions of the suspended graphene diaphragm become worse.Furthermore,the soft substrate material is likely to cause the F-P cavity deformation,thereby resulting in no effective improvement in sensitivity. |
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| Keywords: | graphene diaphragm acoustic sensor substrate material sensitivity analysis |
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