| 厚膜集成压力传感器的研制 |
| |
| 引用本文： | 马以武,黄英.厚膜集成压力传感器的研制[J].仪表技术与传感器,1997(4):20-22. |
| |
| 作者姓名： | 马以武 黄英 |
| |
| 作者单位： | 中国科学院合肥智能机械研究所，合肥工业大学，电子工业部第４３研究所 |
| |
| 摘 要： | 通过厚膜力敏工艺技术和厚膜混合集成技术的结合，研制成功厚膜集成压力传感器，能直接和显示仪表连接。为传感器的集成化作了有益的尝试，具有广阔的研究开发前景。
|
| 关 键 词： | 集成 压力 传感器 厚膜 |
Research on Thick Film Integrated Pressure Sensor |
| |
| Ma Yiwu,Liu Gaosheng,and Chang Huimin Hefei Institute of Intelligent Machines,Academia Sinica,Hefei ..Research on Thick Film Integrated Pressure Sensor[J].Instrument Technique and Sensor,1997(4):20-22. |
| |
| Authors: | Ma Yiwu Liu Gaosheng and Chang Huimin Hefei Institute of Intelligent Machines Academia Sinica Hefei |
| |
| Affiliation: | Ma Yiwu,Liu Gaosheng,and Chang Huimin Hefei Institute of Intelligent Machines,Academia Sinica,Hefei 230031. |
| |
| Abstract: | This paper presents a new thick film integrated pressure sensor based on the combination of thick film sensor technology and thick film hybrid IC technology. The sensor can be connected directly to a display meter. This paper is a valuable inquiry into integration of sensors. |
| |
| Keywords: | Integration Pressure Sensor Thick Film |
| 本文献已被 CNKI 维普 等数据库收录！ |
